Combined granite plate supporting steel frame precise instrument equipment high-rigidity vibration isolation module

Abstract

The utility model discloses a combined granite plate supporting steel frame precise instrument equipment high-rigidity vibration isolation module which comprises a top plate, an upper supporting frame and a lower supporting frame. The upper supporting frame is composed of steel columns, steel beams, inclined struts, upper connecting components, lower connecting components and auxiliary supporting pieces. The lower supporting frame is composed of steel columns, steel beams, inclined struts and column feet. Three independent modules including the top plate, the upper supporting frame and the lower supporting frame are prefabricated in a factory, and the combined granite plate supporting steel frame precise instrument equipment high-rigidity vibration isolation module is formed through field installation. According to the utility model, a combined assembly mode is adopted, the weight of a single module is reduced, and the characteristics of convenience in installation, high strength and high rigidity are met.

Description

Technical Field

[0001] This utility model relates to the field of high-rigidity vibration isolation modules, specifically a high-rigidity vibration isolation module for precision instruments and equipment with a combined granite slab supporting a steel frame. Background Technology

[0002] In semiconductor manufacturing processes, lithography machines have extremely stringent requirements for their operating environment. To meet the high-level clean airflow circulation requirements of lithography machines and to rationally arrange the large and complex pipeline system, the industry generally uses raised floors as the equipment installation structure. However, there is a certain height difference between the raised floor and the building floor, which necessitates the installation of a vibration-damping base between the two to support the weight of the equipment, improve the foundation rigidity, and ensure the stable operation of the lithography machine's optical system and precision moving parts.

[0003] Traditional monolithic vibration damping bases are large and heavy. In some special laboratory environments, limited installation height and handling space make them difficult to transport to the installation location smoothly. Furthermore, the installation process is difficult, consuming significant manpower and resources, and prone to performance issues due to unevenness, failing to meet the installation and usage requirements of special laboratory environments. Simultaneously, lithography machines place extremely high demands on the dynamic performance of the support structure, requiring vibration damping bases to effectively suppress the transmission of external vibrations. However, traditional vibration damping bases lack sufficient rigidity to provide adequate support, leading to vibration amplification. This causes displacement or deformation of the lithography machine's optical system and precision moving parts, severely impacting lithography accuracy and product yield. Moreover, lithography machine installation requires high flatness; without optimization in the selection of the platform material, traditional vibration damping bases cannot meet these requirements. Utility Model Content

[0004] To address the shortcomings of traditional anti-vibration bases, such as installation difficulties and insufficient rigidity, this invention provides a high-rigidity vibration isolation module for precision instruments and equipment, featuring a combined granite slab support and steel frame. This invention utilizes a design combining a top granite slab with upper and lower segmented supporting steel frames. By leveraging the high rigidity and high-precision flatness of granite, along with the ease of installation and high strength and rigidity of the segmented granite slab and steel frame, it effectively solves the aforementioned problems of traditional anti-vibration bases, providing a stable and reliable support environment for lithography machines and improving the precision of lithography processing.

[0005] The technical solution of this utility model is implemented as follows: A high-rigidity vibration isolation module for precision instruments and equipment with a combined granite slab supporting a steel frame includes a top plate, an upper support frame, and a lower support frame. The top plate is an integral granite slab with pre-drilled bolt holes for connection with the upper support steel frame. The upper and lower support frames are both frame structures composed of steel beams, steel columns, diagonal braces, and connecting components. The steel beams and steel columns are frame load-bearing components welded from shaped steel and filled with high-damping grout. The diagonal braces are oblique load-bearing components welded from shaped steel. The connecting components between the granite slab and the upper support frame, as well as between the upper and lower support frames, are rectangular steel plates with bolt holes around the perimeter and grouting holes in the center. The connecting component between the lower support frame and the ground is a column base using chemical anchors. The auxiliary support component is an auxiliary support component whose upper surface of the steel beam of the upper support frame contacts the granite slab.

[0006] The specific contents of this application are described below; A high-rigidity vibration isolation module for precision instruments and equipment with a combined granite slab-supported steel frame is characterized by: including a top plate (1), an upper support frame (2) and a lower support frame (3); the top plate (1) is composed of a granite slab, the upper support frame (2) is composed of steel columns (4), steel beams (5), diagonal braces (6), upper connecting components (7), lower connecting components (8), and auxiliary support components (10); the lower support frame (3) is composed of steel columns (4), steel beams (5), diagonal braces (6), and column feet (9); the top plate (1), upper support frame (2) and lower support frame (3) are three independent modules, the upper connecting component (7) is used to connect the granite slab and the upper support frame (2), and the lower connecting component (8) is used to connect the upper support frame (2) and the lower support frame (3); the steel columns (4) and steel beams (5) are filled with high-damping grout, and the column feet (9) are connected to the ground with chemical anchors.

[0007] Furthermore, the top plate (1) is processed from a granite slab. The granite slab is processed from a single piece of granite.

[0008] Furthermore, the steel columns (4), steel beams (5) and diagonal braces (6) are all frame structures made of rectangular steel pipes, and high-damping grout is injected into the interior of the steel columns (4) and steel beams (5).

[0009] Furthermore, the sides of the steel columns (4), steel beams (5) and diagonal braces (6) are coated with epoxy resin paint, and the coating is uniform and without color difference.

[0010] Furthermore, the steel beam (5) is orthogonally arranged between the steel columns (4), with one layer on top of the upper support frame (2) and one layer on top and bottom of the lower support frame (3).

[0011] Furthermore, the upper connecting member (7) and the lower connecting member (8) have bolt holes around their perimeter for connecting the members, and a grouting hole (13) in the middle for injecting high-damping grout. An auxiliary support member (10) is provided in the middle of the steel beam (5) at the top of the upper support frame (2) for connecting the granite slab and the upper support frame.

[0012] Furthermore, the column feet (9) corresponding to the lower support frame (3) have bolt holes around their perimeter and are connected to the ground with chemical anchors (11), and the surrounding gaps are sealed with structural adhesive. The chemical anchor is an anchoring component that fixes the screw to the ground using a chemical adhesive.

[0013] Furthermore, the steel profiles include transversely arranged steel profiles, longitudinally arranged steel profiles, and diagonally arranged steel profiles.

[0014] Furthermore, the bottom of the granite slab is provided with threaded holes for connection to the upper support frame;

[0015] Furthermore, the high-damping grout is a grout that provides high-damping characteristics for the structure.

[0016] Beneficial effects: This utility model mainly adopts a combined structural approach of a top granite platform and upper and lower segmented supporting steel frames. This allows for more precise small-size modular prefabrication in the factory, making the overall quality of the vibration isolation module easier to control, and facilitating installation and transportation. It is suitable for use in special laboratory environments, offering flexibility in installation and use. Simultaneously, the rigidity of the base is increased by relying on the top granite platform and internally grouted steel sections, thereby increasing the structure's natural frequency and effectively avoiding the resonance frequencies of power equipment and pipelines in the lithography machine installation environment. High-damping grout is injected into the steel beams and columns to improve the overall structural damping of the vibration isolation module, thus reducing vibration at the resonance frequency. Bolt connections are used between the granite platform and the upper supporting frame, and between the upper and lower supporting frames. Chemical anchors are used between the lower supporting frame and the ground to ensure the overall rigidity of the vibration isolation module. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural schematic diagram of the present invention;

[0018] Figure 2 This is a top plan view of this utility model;

[0019] Figure 3 This is a plan view of the middle section of this utility model;

[0020] Figure 4 This is an elevation view of the present invention;

[0021] Figure 5 This is a detailed drawing and plan view of the column base of this utility model;

[0022] Figure 6 This is a detailed drawing of the connecting component between the upper support frame and the lower support frame of this utility model;

[0023] Figure 7 This is a detailed drawing of the granite slab and the connecting component of the upper support frame of this utility model;

[0024] In the diagram: 1. Top slab; 2. Upper support frame; 3. Lower support frame; 4. Steel column; 5. Steel beam; 6. Diagonal brace; 7. Upper connecting component; 8. Lower connecting component; 9. Column base; 10. Auxiliary support component; 11. Chemical anchor; 12. Bolt hole; 13. Grouting hole. Detailed Implementation

[0025] The following will be combined with the appendix Figures 1-7 This utility model will be described in detail, and the technical solutions in the embodiments of this utility model will be clearly and completely described. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0026] like Figures 1-7 As shown, a high-rigidity vibration isolation module for precision instruments and equipment with a combined granite slab-supported steel frame includes a top plate 1, an upper support frame 2, and a lower support frame 3. The top plate 1 is composed of a granite slab. The upper support frame 2 includes steel columns 4, steel beams 5, diagonal braces 6, an upper connecting member 7 for connecting the granite slab and the upper support frame, a lower connecting member 8 for connecting the upper support frame and the lower support frame, and auxiliary support components 10. The lower support frame 3 includes steel columns 4, steel beams 5, diagonal braces 6, and column bases 9.

[0027] In this utility model, the top plate 1 is obtained from a single piece of granite through processes of material cutting, rough processing, fine grinding, and drilling.

[0028] In this utility model, the upper support frame 2 and the lower support frame 3 are obtained by the processes of cutting, welding, machining, sandblasting, rust removal, grouting and powder coating of steel profiles.

[0029] In this utility model, the steel column 4, the steel beam 5 and the diagonal brace 6 are all made of steel frame structure, and the steel column 4 and the steel beam 5 are filled with high damping grout.

[0030] In this utility model, the steel column 4 is preferably a 300mm*300mm*10mm rectangular steel pipe, the steel beam 5 is preferably a 250mm*250mm*8mm rectangular steel pipe, and the diagonal brace 6 is preferably a 200mm*200mm*6mm rectangular steel pipe, all made of Q235B.

[0031] In this invention, the sides of the steel column 4, the steel beam 5, and the diagonal brace 6 are coated with epoxy resin paint, and the coating is uniform and without color difference.

[0032] In this invention, the number of steel columns 4 can be freely set according to the actual situation. In this embodiment, a total of 9 evenly distributed steel columns 4 are provided.

[0033] In this utility model, the steel beam 5 is formed by orthogonally arranging the steel columns 4, with one layer on top of the upper support frame 2 and one layer on top and bottom of the lower support frame 3.

[0034] In this invention, the diagonal brace 6 is arranged between the steel column 4 and the steel beam 5.

[0035] In this utility model, the granite platform and the upper support frame connecting component 7 are provided on the top of the steel column 4 of the upper support frame 2. Bolt holes are provided around the perimeter for connecting the granite platform and the upper support frame, and grouting holes 13 are provided in the middle for injecting high-damping grout.

[0036] In this utility model, the bottom of the steel column 4 of the upper support frame 2 is provided with the upper support frame and the lower support frame connecting member 8, and there are bolt holes around the perimeter for connecting the upper support frame and the lower support frame, and there is a grouting hole 13 in the middle for injecting high damping grout.

[0037] In this utility model, the auxiliary support member 10 is provided in the middle of the steel beam 5 at the top of the upper support frame 2 for connecting the granite slab and the upper support frame, thereby reducing the support length of the granite slab.

[0038] In this utility model, the upper support frame and the lower support frame connecting member 8 of the lower support frame 3 correspond to the upper support frame 2, and the two are connected by bolts.

[0039] In this utility model, the column base 9 of the lower support frame 3 has bolt holes around its perimeter and is connected to the ground by the chemical anchor bolts 11, and the surrounding gaps are bonded with structural adhesive.

[0040] Preferably, the bolts used in this utility model are all high-strength bolts of grade 10.9 M20.

[0041] Preferably, the chemical anchors used in this invention are all M20 chemical anchors.

[0042] Preferably, the thickness of the connecting components of this utility model is 30mm.

[0043] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-rigidity vibration isolation module for precision instruments and equipment supported by a combined granite slab and steel frame, characterized in that: The structure includes a top plate (1), an upper support frame (2), and a lower support frame (3). The top plate (1) is composed of a granite platform. The upper support frame (2) consists of steel columns (4), steel beams (5), diagonal braces (6), upper connecting components (7), lower connecting components (8), and auxiliary support components (10). The lower support frame (3) consists of steel columns (4), steel beams (5), diagonal braces (6), and column bases (9). The top plate (1), upper support frame (2), and lower support frame (3) are three independent modules. The upper connecting component (7) is used to connect the granite platform and the upper support frame (2), and the lower connecting component (8) is used to connect the upper support frame (2) and the lower support frame (3). The steel columns (4) and steel beams (5) are filled with high-damping grout, and the column bases (9) are connected to the ground with chemical anchors.

2. The high-rigidity vibration isolation module for precision instruments and equipment supported by a combined granite slab and steel frame as described in claim 1, characterized in that, The top plate (1) is made from a granite slab.

3. The high-rigidity vibration isolation module for precision instruments and equipment supported by a combined granite slab and steel frame as described in claim 1, characterized in that, The steel columns (4), steel beams (5) and diagonal braces (6) are all frame structures made of rectangular steel pipes, and high-damping grout is poured into the interior of the steel columns (4) and steel beams (5).

4. The high-rigidity vibration isolation module for precision instruments and equipment supported by a combined granite slab and steel frame as described in claim 1, characterized in that, The sides of the steel columns (4), steel beams (5) and diagonal braces (6) are coated with epoxy resin paint, and the coating is uniform and without color difference.

5. The high-rigidity vibration isolation module for precision instruments and equipment supported by a combined granite slab and steel frame as described in claim 1, characterized in that, The steel beam (5) is orthogonally arranged between the steel columns (4), with one layer on top of the upper support frame (2) and one layer on top and bottom of the lower support frame (3).

6. The high-rigidity vibration isolation module for precision instruments and equipment supported by a combined granite slab and steel frame as described in claim 1, characterized in that, The upper connecting member (7) and the lower connecting member (8) have bolt holes around their perimeter for connecting the members, and a grouting hole (13) in the middle for injecting high-damping grout. An auxiliary support member (10) is provided in the middle of the steel beam (5) at the top of the upper support frame (2) for connecting the granite slab and the upper support frame.

7. The high-rigidity vibration isolation module for precision instruments and equipment supported by a combined granite slab and steel frame as described in claim 1, characterized in that, The lower support frame (3) has bolt holes around the column base (9) and is connected to the ground with chemical anchors (11), and the surrounding gaps are bonded with structural adhesive.

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