Heating ring capable of being rapidly cooled

Abstract

The utility model relates to the technical field of semiconductor equipment, in particular to a heating ring capable of being cooled quickly, which comprises a heating ring body, the heating ring body is of an annular hollow structure, and a spiral cooling channel is arranged inside the heating ring body. The two ends of the spiral cooling channel are connected to a medium inlet formed in the bottom of the heating ring body and a medium outlet formed in the top of the heating ring body correspondingly, the heating layer comprises resistance heating wires arranged in a snakelike mode, and the multiple heat dissipation fins are evenly distributed on the outer side wall of the heating ring body in the circumferential direction. Through the synergistic effect of the spiral cooling channel and the heat dissipation fins, rapid heating and cooling and uniform temperature control are achieved, the aluminum nitride ceramic heat insulation layer reduces heat loss and improves the heating efficiency, the integrated structure enhances the heat dissipation performance, the service life is prolonged, multiple cooling media are adapted, the modular design is convenient to maintain, and the energy consumption and the operation cost are reduced; and the etching process stability and the production efficiency are obviously improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and specifically discloses a heating ring that can be cooled quickly. Background Technology

[0002] In semiconductor etching processes, the heating ring is a core component for maintaining cavity temperature uniformity, using resistance heating elements to precisely control the cavity temperature. Traditional etching machine heating rings typically use a ring-shaped metal substrate (such as stainless steel or nickel-based alloy) as a carrier, with a resistance wire heating layer on the surface and an integrated temperature sensor for closed-loop control. This type of structure transfers energy to the cavity walls via heat conduction, requiring rapid heating and cooling operations before and after etching. Its performance directly affects the wafer etching accuracy and efficiency.

[0003] However, existing heating rings have significant technical defects: firstly, they are limited by passive heat dissipation design (such as natural convection or low-speed air cooling), resulting in low cooling efficiency; secondly, the single heat conduction path causes the temperature gradient to exceed the standard, especially in the joint area of ​​the ring structure, which is prone to local overheating. Utility Model Content

[0004] This invention proposes a rapidly cooling heating ring that achieves rapid heating and cooling as well as uniform temperature control through the synergistic effect of spiral cooling channels and heat dissipation fins, significantly improving the stability of the etching process and production efficiency.

[0005] This invention is achieved by providing a rapidly cooling heating ring, comprising:

[0006] The heating ring body has a hollow annular structure.

[0007] A spiral cooling channel is provided inside the heating ring body, and the two ends of the spiral cooling channel are respectively connected to the medium inlet at the bottom of the heating ring body and the medium outlet at the top.

[0008] A heating layer, the heating layer comprising a serpentine arrangement of resistance heating wires, the resistance heating wires being disposed on the upper surface of the heating ring body;

[0009] Heat dissipation fins, wherein multiple heat dissipation fins are provided and are evenly distributed along the circumferential direction on the outer side wall of the heating ring body.

[0010] As a preferred embodiment of the rapidly cooling heating ring of this invention, the stirring mechanism further includes:

[0011] A drive motor is mounted on the upper end face of the bracket, and the output end of the drive motor extends into the interior of the bracket and is fixedly connected to a first bevel gear.

[0012] The second bevel gear is fixedly connected to the upper end of the outer wall of the first shaft;

[0013] The third bevel gear is fixedly connected to the outer wall of the second shaft, and the first and second bevel gears are both meshed with the third bevel gear.

[0014] As a preferred embodiment of the rapidly cooling heating ring of this invention, the outer diameter of the heating ring body is 280-320mm, the inner diameter is 260-300mm, the height is 40-60mm, and the wall thickness is 8-12mm.

[0015] As a preferred embodiment of the rapidly cooling heating ring of this invention, the heat dissipation fins have a trapezoidal structure and are coated with an anodized aluminum film.

[0016] As a preferred embodiment of the rapidly cooling heating ring of this invention, multiple temperature sensors are provided on the inner side of the heating ring body.

[0017] As a preferred embodiment of the rapidly cooling heating ring of this invention, the back of the heating ring body is provided with a plurality of evenly distributed bolt mounting holes.

[0018] As a preferred embodiment of the rapidly cooling heating ring of this invention, the upper surface of the heating ring body is provided with an aluminum nitride ceramic heat insulation layer.

[0019] As a preferred embodiment of the rapidly cooling heating ring of this invention, the medium inlet is connected to an external cooling medium supply device, the cooling medium being argon, nitrogen, or deionized water, and the medium outlet is connected to an external heat exchanger.

[0020] The beneficial effects of this utility model are:

[0021] Through the synergistic effect of spiral cooling channels and heat dissipation fins, rapid heating and cooling and uniform temperature control are achieved. The aluminum nitride ceramic insulation layer reduces heat loss and improves heating efficiency. The integrated structure enhances heat dissipation performance and extends service life. It is compatible with a variety of cooling media. The modular design facilitates maintenance, reduces energy consumption and operating costs, and significantly improves the stability and production efficiency of the etching process. Attached Figure Description

[0022] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.

[0023] Figure 1 This is a top view of the overall structure of this utility model;

[0024] Figure 2 This is a side sectional view of the heating ring body of this utility model;

[0025] Figure 3 This is a three-dimensional structural diagram of the heat dissipation fins of this utility model;

[0026] Figure 4 This is a top view of the back of the heating ring body of this utility model.

[0027] The markings in the diagram are: 1. Heating ring body; 2. Spiral cooling channel; 3. Medium inlet; 4. Medium outlet; 5. Resistance heating wire; 6. Heat dissipation fins; 7. Temperature sensor; 8. Anodized aluminum film layer; 9. Bolt mounting hole. Detailed Implementation

[0028] The present invention will be further described below with reference to the accompanying drawings and specific embodiments to aid in understanding its content. Unless otherwise specified, the methods used in this invention are conventional methods; the raw materials and apparatus used, unless otherwise specified, are conventional commercially available products.

[0029] Please see Figure 1-4 A rapidly cooling heating ring, comprising:

[0030] Heating ring body 1, heating ring body 1 has a circular hollow structure;

[0031] Spiral cooling channel 2 is located inside the heating ring body 1. The two ends of the spiral cooling channel 2 are respectively connected to the medium inlet 3 at the bottom and the medium outlet 4 at the top of the heating ring body 1.

[0032] The heating layer includes a serpentine arrangement of resistance heating wires 5, which are disposed on the upper surface of the heating ring body 1.

[0033] Heat dissipation fins 6 are provided in multiple form and are evenly distributed along the circumferential direction on the outer wall of the heating ring body 1.

[0034] In this embodiment: the resistance heating wire 5 generates Joule heat after being energized. The heat is transferred to the heating ring body 1 through the aluminum nitride ceramic insulation layer, achieving uniform heating of the etching machine cavity. The temperature sensor 7 monitors the ring body temperature in real time and feeds it back to the control system to dynamically adjust the heating power. The external cooling medium is injected into the spiral cooling channel 2 from the medium inlet 3 and flows at high speed along the spiral path inside the heating ring body 1. The heat of the heating ring body 1 is carried away by forced convection and finally enters the heat exchanger through the medium outlet 4 to complete the cooling cycle. Through the synergistic effect of the spiral cooling channel 2 and the heat dissipation fins 6, rapid heating and cooling and uniform temperature control are achieved. The aluminum nitride ceramic insulation layer reduces heat loss and improves heating efficiency. The integrated structure enhances heat dissipation performance and extends service life. It is compatible with a variety of cooling media. The modular design facilitates maintenance, reduces energy consumption and operating costs, and significantly improves the stability and production efficiency of the etching process.

[0035] As a technical optimization of this utility model, the outer diameter of the heating ring body 1 is 280-320mm, the inner diameter is 260-300mm, the height is 40-60mm, and the wall thickness is 8-12mm.

[0036] In this embodiment, the outer diameter of the heating ring body 1 is 280-320mm, the inner diameter is 260-300mm, the height is 40-60mm, and the wall thickness is 8-12mm, which is compatible with the mainstream etching machine cavity size and ensures the contact area between the heating ring body 1 and the cavity flange.

[0037] As a technical optimization of this utility model, the heat dissipation fins 6 have a trapezoidal structure and are coated with an anodized aluminum film layer 8 on their surface.

[0038] In this embodiment: the heat dissipation fins 6 have a trapezoidal structure to increase the contact area with air, and together with the anodized aluminum film layer 8, the radiative heat dissipation efficiency is improved.

[0039] As a technical optimization of this utility model, multiple temperature sensors 7 are provided on the inner side of the heating ring body 1.

[0040] In this embodiment: Temperature sensor 7 monitors the temperature of the ring body in real time and feeds it back to the control system to dynamically adjust the heating power.

[0041] As a technical optimization of this utility model, the back of the heating ring body 1 is provided with a plurality of evenly distributed bolt mounting holes 9.

[0042] In this embodiment, the bolt mounting hole 9 enables the heating ring to be rigidly fixed to the etching machine cavity, avoiding displacement deviation caused by thermal deformation.

[0043] As a technical optimization of this utility model, an aluminum nitride ceramic heat insulation layer is provided on the upper surface of the heating ring body 1.

[0044] In this embodiment, the aluminum nitride ceramic insulation layer blocks thermal interference between the heating layer and the cooling channel, reducing thermal stress.

[0045] As a technical optimization of this utility model, the medium inlet 3 is connected to an external cooling medium supply device, and the cooling medium is argon, nitrogen or deionized water, and the medium outlet 4 is connected to an external heat exchanger.

[0046] In this embodiment: the external cooling medium is injected into the spiral cooling channel 2 from the medium inlet 3 and flows at high speed along the spiral path inside the heating ring body 1. The heat of the heating ring body 1 is carried away by forced convection and finally enters the heat exchanger through the medium outlet 4 to complete the cooling cycle.

[0047] The working principle and usage process of this utility model: After the resistance heating wire 5 is energized, it generates Joule heat. The heat is transferred to the heating ring body 1 through the aluminum nitride ceramic heat insulation layer, so as to achieve uniform heating of the etching machine cavity. The temperature sensor 7 monitors the temperature of the ring body in real time and feeds it back to the control system to dynamically adjust the heating power. The external cooling medium is injected into the spiral cooling channel 2 from the medium inlet 3 and flows at high speed along the spiral path inside the heating ring body 1. The heat of the heating ring body 1 is carried away by forced convection and finally enters the heat exchanger through the medium outlet 4 to complete the cooling cycle.

[0048] In the description of this utility model, it should be understood that the terms "left", "right", "up", "down", "top", "bottom", "front", "back", "inner", "outer", "back", "middle", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0049] However, the above description is only a specific embodiment of this utility model and should not be construed as limiting the scope of implementation of this utility model. Therefore, any substitution of equivalent components or equivalent changes and modifications made in accordance with the scope of protection of this utility model should still fall within the scope of the claims of this utility model.

Claims

1. A heating ring capable of rapid cooling, characterized in that: include: Heating ring body (1), wherein the heating ring body (1) has a circular hollow structure; Spiral cooling channel (2) is located inside the heating ring body (1). The two ends of the spiral cooling channel (2) are respectively connected to the medium inlet (3) at the bottom of the heating ring body (1) and the medium outlet (4) at the top. A heating layer, the heating layer comprising a serpentine arrangement of resistance heating wires (5), the resistance heating wires (5) being disposed on the upper surface of the heating ring body (1); Heat dissipation fins (6) are provided in multiple form and are evenly distributed along the circumferential direction on the outer side wall of the heating ring body (1).

2. The rapidly cooling heating ring according to claim 1, characterized in that: The outer diameter of the heating ring body (1) is 280-320mm, the inner diameter is 260-300mm, the height is 40-60mm, and the wall thickness is 8-12mm.

3. The rapidly cooling heating ring according to claim 1, characterized in that: The heat dissipation fins (6) have a trapezoidal structure and are coated with an anodized aluminum film (8).

4. The rapidly cooling heating ring according to claim 1, characterized in that: Multiple temperature sensors (7) are provided on the inner side of the heating ring body (1).

5. A rapidly cooling heating ring according to claim 1, characterized in that: The back of the heating ring body (1) is provided with a plurality of evenly distributed bolt mounting holes (9).

6. A rapidly cooling heating ring according to claim 1, characterized in that: The upper surface of the heating ring body (1) is provided with an aluminum nitride ceramic heat insulation layer.

7. A rapidly cooling heating ring according to claim 1, characterized in that: The medium inlet (3) is connected to an external cooling medium supply device, wherein the cooling medium is argon, nitrogen or deionized water, and the medium outlet (4) is connected to an external heat exchanger.

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