Semiconductor etching equipment with alarm function

Abstract

The utility model discloses semiconductor etching equipment with an alarm function, which comprises a machine platform used for processing a wafer; the purification device is communicated with the machine table and is used for collecting gas exhausted by the machine table; the alarm device is electrically connected to the purification device so as to give an alarm when the purification device breaks down; the control piece is electrically connected with the alarm device; when the purification device breaks down, the alarm device sends out an alarm signal, so that the control piece controls the machine table to stop working. According to the utility model, when the alarm device gives an alarm, the purification device and the machine can be stopped synchronously, so as to realize linkage alarm.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a semiconductor etching device with an alarm function. Background Technology

[0002] In the current semiconductor manufacturing industry, semiconductor etching equipment is used for wafer processing, especially etching processes. These machines generate a certain amount of harmful gases during processing, so they are usually equipped with exhaust gas treatment devices to purify these gases, in order to protect the environment and the safety of operators.

[0003] However, most existing semiconductor etching equipment has a safety hazard: when the exhaust gas treatment device malfunctions, the main unit cannot link with it to issue an alarm or trigger the main unit's shutdown protection.

[0004] Specifically, existing 8-inch wafer foundries, when the exhaust gas treatment device alarms, will only display a flashing indicator light and a buzzer on the main unit, without generating an alarm or warning on the main unit or causing it to stop. This will affect the wafer processing quality.

[0005] Therefore, it is necessary to provide a new semiconductor etching device with an alarm function to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0006] The purpose of this invention is to provide a semiconductor etching device with an alarm function, which can simultaneously stop the purification device and the machine when the alarm device issues an alarm, so as to realize the linkage alarm.

[0007] To achieve the above objectives, the technical solution of this utility model is as follows:

[0008] A semiconductor etching apparatus with an alarm function includes:

[0009] Machine tools used for processing wafers;

[0010] A purification device, connected to the machine, is used to collect the gas discharged from the machine;

[0011] An alarm device, electrically connected to the purification device, is provided to issue an alarm when the purification device malfunctions.

[0012] The control unit is electrically connected to the alarm device;

[0013] When the purification device malfunctions, the alarm device sends an alarm signal, causing the control unit to stop the machine from working.

[0014] By adopting the above technical solution, since the purification device and the machine can be linked for warnings, the machine can be stopped immediately when the purification device malfunctions, thus avoiding the impact on wafer processing quality that may be caused by improper exhaust gas treatment, and ensuring product quality and yield. At the same time, through the electrical connection between the alarm device and the machine, this utility model realizes the linkage control between the purification device and the machine. When the purification device malfunctions, it can promptly notify the machine and take shutdown measures. In addition, it can also enable the semiconductor etching equipment to automatically switch to the backup purification device or shut down when the purification device malfunctions, improving the reliability and stability of the equipment.

[0015] Optionally, the machine tool is equipped with a control circuit to control the start and stop of the machine tool;

[0016] The control component is connected in series with the control circuit. When the control component receives the alarm signal, it controls the control circuit to disconnect, and the machine stops working.

[0017] Optionally, the control element is a normally closed relay;

[0018] When the purification device malfunctions, the alarm device sends an alarm signal, and the control unit disconnects after receiving the alarm signal, thereby disconnecting the control circuit and stopping the machine from working.

[0019] When the purification device malfunctions, the control component closes, activating the control circuit and allowing the machine to operate normally.

[0020] Optional, also includes:

[0021] The first pipe has one end connected to the machine and the other end connected to the purification device;

[0022] A control valve is located in the first pipeline to control the opening and closing of the first pipeline; the control valve is electrically connected to the alarm device.

[0023] The second pipe is connected at one end to the control valve. When the purification device malfunctions, the alarm device sends an alarm signal. The control valve receives the alarm signal and closes the first pipe and opens the second pipe to discharge the gas.

[0024] Optionally, a collection device is also included, which is connected to the other end of the second pipe to collect the gas discharged from the machine when the second pipe is opened.

[0025] Optionally, the semiconductor etching apparatus may include multiple devices;

[0026] The other end of the second pipe is connected to the purification device of the adjacent semiconductor etching equipment, so that in the event of a failure of one of the purification devices, the machine is connected to the purification device in the adjacent semiconductor etching equipment.

[0027] Optionally, the control valve is a solenoid three-way valve;

[0028] When the purification device malfunctions, the alarm device issues an alarm, causing the control valve to close the first pipeline and connect the second pipeline to the machine.

[0029] When the purification device is operating normally, the control valve controls the second pipeline to close, and the first pipeline is connected to the machine.

[0030] Optionally, the purification device may also include:

[0031] A detection circuit is electrically connected to the alarm device. The detection circuit is used to detect whether the purification device is malfunctioning. When the purification device is malfunctioning, the detection circuit activates the alarm device to issue an alarm. When the purification device is working normally, the detection circuit does not activate the alarm device.

[0032] Optionally, the alarm device includes:

[0033] A fault indicator, electrically connected to the detection circuit, is used to issue an alarm signal when the purification device malfunctions.

[0034] An operation indicator, electrically connected to the detection circuit, sends a signal when the purification device is operating normally;

[0035] Both the control element and the control valve are electrically connected to the fault indicator so that the control element and the control valve are activated when the fault indicator issues an alarm signal.

[0036] Optionally, the fault indicator includes an indicator light and a buzzer, both of which are electrically connected to the detection circuit so that the indicator light and the buzzer work together when the purification device malfunctions. Attached Figure Description

[0037] Figure 1 This is a schematic diagram showing the connection position of the first and second pipes of a semiconductor etching apparatus according to an embodiment of the present invention;

[0038] Figure 2 This is a schematic diagram of the electrical connection method of the detection device, control component, and control valve of a semiconductor etching equipment according to an embodiment of the present invention.

[0039] Figure label:

[0040] 100. Machine base; 110. Control unit; 120. First pipeline; 121. Control valve; 130. Second pipeline; 200. Purification device; 300. Alarm device; 310. Fault indicator; 320. Operation indicator. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but does not exclude other elements or objects.

[0042] The following is in conjunction with the appendix Figure 1-2 The specific embodiments of this utility model will be further described in detail below.

[0043] An embodiment of this utility model provides a semiconductor etching apparatus. The semiconductor etching apparatus has an alarm function to synchronously stop the machine 100 when the purification device 200 malfunctions. Specifically, the semiconductor etching apparatus includes:

[0044] Machine 100, used for processing wafers;

[0045] Purification device 200 is connected to machine 100 and is used to collect the gas discharged from machine 100;

[0046] An alarm device 300 is electrically connected to the purification device 200 to issue an alarm when the purification device 200 malfunctions;

[0047] Control unit 110 is electrically connected to alarm device 300;

[0048] When the purification device 200 malfunctions, the alarm device 300 sends an alarm signal, causing the control unit 110 to stop the machine 100 from working.

[0049] In this embodiment, the machine 100 is a process chamber, and the purification device 200 is an exhaust gas treatment device; the wafer is processed in the machine 100, and the purification device 200 is used to collect the gas generated during the wafer processing.

[0050] In some embodiments, the alarm device 300 is fixedly mounted on the machine base 100. The fixing method can be snap-fit, bolt fixing, etc., and there is no limitation. The main point is that the alarm device 300 can be stably fixed.

[0051] In some embodiments, the alarm device 300 is electrically connected to the purification device 200. When the alarm device 300 malfunctions, the purification device 200 can issue an alarm signal; when the purification device 200 is operating normally, the alarm device 300 issues a normal operation signal or does not issue a signal.

[0052] In some embodiments, the control unit 110 is disposed on the machine tool 100, and the control unit 110 is capable of controlling the start and stop of the machine tool 100. Specifically, the control unit 110 is electrically connected to the alarm device 300, and the control unit 110 can receive electrical signals emitted by the alarm device 300. When the control unit 110 receives the electrical signals emitted by the alarm device 300, the control unit 110 controls the machine tool 100 to stop working.

[0053] The machine 100 is equipped with a control circuit to control the start and stop of the machine 100;

[0054] The control unit 110 is connected in series in the control circuit. When the control unit 110 receives an alarm signal, it disconnects the control circuit and the machine 100 stops working.

[0055] In some embodiments, a control circuit is provided within the machine tool 100 to facilitate the start and stop control of the machine tool 100. When the control circuit is disconnected, the machine tool 100 stops working; when the control circuit is connected, the machine tool 100 can work normally. The arrangement of the control circuit within the machine tool 100 and the control method of the control circuit are existing technologies and will not be described in detail here.

[0056] Specifically, the control component 110 is connected in series in the control circuit. When the control component 110 is disconnected, the control circuit is disconnected, causing the machine 100 to stop working; when the control component 110 is connected, the control circuit is connected, and the machine 100 can work normally. The control component 110 is electrically connected to the alarm device 300 via a line. When the alarm device 300 issues an alarm, the alarm signal can be transmitted to the control component 110 through the line. After receiving the alarm signal, the control component 110 activates or deactivates the control circuit, causing the machine 100 to work normally or stop. This allows the purification device 200 and the machine 100 to work together in case of a malfunction, i.e., to operate or stop simultaneously.

[0057] To facilitate the control of the control circuit by the control component 110, the control component 110 is a normally closed relay.

[0058] When the purification device 200 malfunctions, the alarm device 300 sends an alarm signal. After receiving the alarm signal, the control unit 110 disconnects, causing the control circuit to disconnect and the machine 100 to stop working.

[0059] When the purification device 200 malfunctions, the control component 110 closes, activating the control circuit and allowing the machine 100 to operate normally. The connection method of the control component 110 within the control circuit is existing technology and will not be described in detail here.

[0060] In some embodiments, the control component is fixedly mounted on the machine base, and can be fixed by snap-fit ​​or bolts, etc., without limitation.

[0061] In some embodiments, the alarm signal emitted by the alarm device 300 includes not only flashing lights and a buzzer, but also a current signal or voltage signal flowing through the line to the control unit 110. Since the control unit 110 is a normally closed relay, when the control unit 110 does not receive an alarm signal from the alarm device 300, the control unit 110 is in a closed state, at which time the control circuit is on and the machine 100 can work normally. When the control unit 110 receives an alarm signal from the alarm device 300, since the control unit 110 is energized, the control unit 110 is disconnected, causing the control circuit to disconnect, and the machine 100 stops working.

[0062] Semiconductor etching equipment also includes:

[0063] The first pipe 120 is connected at one end to the machine 100 and at the other end to the purification device 200;

[0064] Control valve 121 is located in the first pipeline 120 to control the opening and closing of the first pipeline 120; control valve 121 is electrically connected to alarm device 300;

[0065] The second pipe 130 is connected to the control valve 121 at one end. When the purification device 200 malfunctions, the alarm device 300 sends an alarm signal. The control valve 121 receives the alarm signal and closes the first pipe 120 and opens the second pipe 130 to discharge the gas.

[0066] In some embodiments, in order to facilitate the collection of gas discharged from the machine 100 by the purification device 200, a first pipe 120 is provided. One end of the first pipe 120 is connected to the machine 100, and the other end is connected to the purification device 200. The gas discharged from the machine 100 enters the first pipe 120 and is transferred to the purification device 200 through the first pipe 120, thereby facilitating the collection of gas discharged from the machine 100 by the purification device 200. The fixing method between the first pipe 120 and the machine 100, and the fixing method between the first pipe 120 and the purification device 200 are existing technologies and will not be described in detail here.

[0067] When the purification device 200 malfunctions, the gas generated by the machine 100 continues to be discharged, but the purification device 200 cannot receive the gas at this time. Therefore, a second pipe 130 is installed on the first pipe 120 to allow the gas to be discharged from the second pipe 130. Specifically, a control valve 121 is installed on the first pipe 120 to control the opening and closing of the first pipe 120. Simultaneously, one end of the second pipe 130 is connected to the control valve 121. When the control valve 121 closes the first pipe 120, the second pipe 130 opens, connecting the second pipe 130 to the machine 100. In some specific embodiments, the control valve 121 is a three-way valve. More specifically, the control valve 121 is located in the middle of the first pipe 120, dividing the first pipe 120 into two parts. One part is connected to the machine 100, and the other part is connected to the purification device 200. When the control valve 121 controls the first pipe 120 to close, the second pipe 130 is connected to the part of the first pipe 120 connected to the machine 100 through the control valve 121, so that the gas from the machine 100 can enter the second pipe 130.

[0068] Control valve 121 is a solenoid three-way valve;

[0069] When the purification device 200 malfunctions, the alarm device 300 issues an alarm, causing the control valve 121 to close the first pipe 120 and connect the second pipe 130 to the machine 100.

[0070] When the purification device 200 is operating normally, the control valve 121 controls the second pipe 130 to close, and the first pipe 120 is connected to the machine 100.

[0071] In some embodiments, to facilitate the control valve 121 receiving alarm signals, a solenoid three-way valve is selected for the control valve 121, and it is electrically connected to the alarm device 300 via a line. When the purification device 200 malfunctions, the alarm signal emitted by the alarm device 300 includes not only flashing lights and a buzzer, but also a current signal or voltage signal flowing through the line to the control valve 121. When the purification device 200 is working normally, the control valve 121 controls the first pipe 120 to be open and the second pipe 130 to be closed, at which time the gas from the machine 100 is discharged through the first pipe 120. When the purification device 200 malfunctions, the control valve 121 receives an alarm signal, causing the first pipe 120 to be closed and the second pipe 130 to be connected to the machine 100, at which time the gas discharged from the machine 100 is discharged through the second pipe 130.

[0072] In some embodiments, to facilitate the reception of gas discharged from the second pipe 130, the semiconductor etching apparatus further includes a collection device connected to the other end of the second pipe 130 to collect gas discharged from the machine 100 when the second pipe 130 is open.

[0073] In some embodiments, the semiconductor etching apparatus has multiple components;

[0074] The other end of the second pipe 130 is connected to the purification device 200 of the adjacent semiconductor etching equipment, so that when one of the purification devices 200 fails, the machine 100 is connected to the purification device 200 in the adjacent semiconductor etching equipment.

[0075] In this embodiment, two semiconductor etching devices are provided, and this example is based on the premise that two semiconductor etching devices are provided.

[0076] In order to facilitate the collection of residual gas when the purification device 200 fails, the other end of the second pipe 130 is connected to the purification device 200 of the adjacent semiconductor etching equipment. That is, when one of the purification devices 200 fails, the gas discharged from the machine 100 can enter the purification device 200 of the adjacent semiconductor etching equipment to facilitate the collection of the gas discharged from the machine 100.

[0077] To facilitate the detection of malfunctions in the purification device 200, the purification device 200 also includes:

[0078] The detection circuit is electrically connected to the alarm device 300. The detection circuit is used to detect whether the purification device 200 is malfunctioning, so as to control the alarm device 300 to work.

[0079] When the purification device 200 malfunctions, the detection circuit activates the alarm device 300 to issue an alarm; when the purification device 200 is functioning normally, the detection circuit does not activate the alarm device 300.

[0080] Alarm device 300 includes:

[0081] The fault indicator 310 is electrically connected to the detection circuit to issue an alarm signal when the purification device 200 malfunctions;

[0082] The operation indicator 320 is electrically connected to the detection circuit to send a signal when the purification device 200 is operating normally;

[0083] Both the control element 110 and the control valve 121 are electrically connected to the fault indicator 310 so that the control element 110 and the control valve 121 are activated when the fault indicator 310 issues an alarm signal.

[0084] In some embodiments, the arrangement and detection method of the detection circuit within the purification device 200 are existing technologies. For example, to facilitate the detection circuit's detection of the purification device 200 and control the alarm device 300 to issue an alarm signal, a sensor, comparator, or microcontroller can be connected in series in the detection circuit. The sensor is used to detect parameters within the purification device 200, such as pressure, temperature, or flow rate, to determine whether the purification device 200 is malfunctioning. The sensor output signal is transmitted to the comparator or microcontroller, which has a preset normal operating range. When the parameter detected by the sensor is within the normal range, the comparator or microcontroller outputs a low-level signal (0V); when the parameter exceeds the range, it outputs a high-level signal (typically 5V or 12V).

[0085] The fault indicator 310 is connected to the collector of a relay or transistor; the operation indicator 320 is connected to the collector of another relay or transistor; the control terminal (base) of the relay or transistor is connected to the output terminal of the logic circuit.

[0086] Specifically, NAND gates are used to design the output of logic circuits.

[0087] A fault signal (high level indicates a fault) can be connected to the input of the first NAND gate, and the other input is connected to the power supply (high level); at the same time, the output of the first NAND gate is connected to the control terminal of the relay or transistor of the fault indicator 310.

[0088] The normal signal (low level indicates normal) is inverted by the NOT gate and connected to the input of the second NAND gate. The other input is also connected to the power supply. At the same time, the output of the second NAND gate is connected to the control terminal of the relay or transistor of the operation indicator 320.

[0089] When the sensor detects that the purification device 200 is operating normally, the comparator or microcontroller outputs a low-level signal. This signal is inverted by a NOT gate, becoming a high-level signal, which triggers a second NAND gate to output a low-level signal. This turns on the relay or transistor of the operation indicator 320, causing the operation indicator 320 to issue a normal operation signal. Simultaneously, because one input of the first NAND gate is low, its output is high, preventing the relay or transistor of the fault indicator 310 from conducting, and thus the fault indicator 310 does not issue a signal.

[0090] When the sensor detects a fault in the purification device 200, the comparator or microcontroller outputs a high-level signal. This signal directly triggers the first NAND gate to output a low level, turning on the fault indicator 310 relay or transistor, causing the fault indicator 310 to issue an alarm signal. Simultaneously, because one input of the second NAND gate is high, it outputs a high level, deactivating the relay or transistor in the operation indicator 320, and thus preventing the operation indicator 320 from issuing a signal.

[0091] In some embodiments, in order to facilitate the control unit 110 and control valve 121 to receive alarm signals when the purification device 200 malfunctions, the control unit 110 and control valve 121 are electrically connected to the fault indicator 310 so that when the fault indicator 310 issues a signal, the control unit 110 and control valve 121 are activated to stop the machine 100.

[0092] In some embodiments, the fault indicator 310 includes an indicator light and a buzzer, both of which are electrically connected to the detection circuit so that when the purification device 200 malfunctions, the indicator light and the buzzer work together; wherein the indicator light emits a light signal and the buzzer emits a sound signal.

[0093] In some embodiments, the indicator light is red to facilitate the emission of a light signal.

[0094] In some embodiments, the operation indicator 320 is a green light to facilitate the emission of a light signal. When the purification device 200 is operating normally, the operation indicator 320 remains constantly lit with a green light. When the purification device 200 malfunctions, the green light goes out, and the red light flashes or remains lit.

[0095] The implementation principle of a semiconductor etching apparatus with an alarm function according to an embodiment of this application is as follows: When the purification device 200 is operating normally, the operation indicator 320 in the detection device sends a signal indicating that the purification device 200 is operating normally, that is, the green light is always on at this time; when the purification device 200 malfunctions, the fault indicator 310 in the detection device sends an alarm signal, that is, the green light goes out, the red light flashes or stays on, accompanied by a buzzer sounding. At the same time, the fault indicator 310 sends a current signal or a voltage signal. One of the current signal or voltage signals is transmitted to the control unit 110 through the line. After receiving the current signal or voltage signal, the control unit 110 disconnects, causing the machine 100 to stop working, realizing the alarm linkage between the purification device 200 and the machine 100; at the same time, another current signal or voltage signal is transmitted to the control valve 121 through the line, so that the gas of the machine 100 is introduced into the purification device 200 of the adjacent semiconductor etching apparatus through the second pipe 130 to collect excess gas.

[0096] Although the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as described in the claims. Moreover, the utility model described herein may have other embodiments and can be implemented or realized in various ways.

Claims

1. A semiconductor etching apparatus with an alarm function, characterized in that, include: Machine (100), used for processing wafers; A purification device (200) is connected to the machine (100) and is used to collect the gas discharged from the machine (100); An alarm device (300) is electrically connected to the purification device (200) to issue an alarm when the purification device (200) malfunctions; The control unit (110) is electrically connected to the alarm device (300); When the purification device (200) malfunctions, the alarm device (300) issues an alarm signal, causing the control unit (110) to control the machine (100) to stop working.

2. The semiconductor etching apparatus according to claim 1, characterized in that, The machine tool (100) is equipped with a control circuit to control the start and stop of the machine tool (100); The control unit (110) is connected in series with the control circuit. When the control unit (110) receives the alarm signal, it controls the control circuit to disconnect, and the machine (100) stops working.

3. The semiconductor etching apparatus according to claim 2, characterized in that, The control component (110) is a normally closed relay; When the purification device (200) malfunctions, the alarm device (300) issues an alarm signal, and the control unit (110) disconnects after receiving the alarm signal, thereby disconnecting the control circuit and stopping the machine (100) from working. When the purification device (200) malfunctions, the control unit (110) closes, making the control circuit conduct, and the machine (100) works normally.

4. The semiconductor etching apparatus according to claim 1, characterized in that, Also includes: The first pipe (120) is connected at one end to the machine (100) and at the other end to the purification device (200); A control valve (121) is provided in the first pipeline (120) to control the opening and closing of the first pipeline (120); the control valve (121) is electrically connected to the alarm device (300); The second pipe (130) is connected at one end to the control valve (121). When the purification device (200) malfunctions, the alarm device (300) issues an alarm signal. The control valve (121) receives the alarm signal and closes the first pipe (120) and opens the second pipe (130) to discharge gas.

5. The semiconductor etching apparatus according to claim 4, characterized in that, It also includes a collection device connected to the other end of the second pipe (130) to collect the gas discharged from the machine (100) when the second pipe (130) is opened.

6. The semiconductor etching apparatus according to claim 4, characterized in that, The semiconductor etching equipment is provided with multiple components; The other end of the second conduit (130) is connected to the purification device (200) of the adjacent semiconductor etching equipment so that, in the event of a failure of one of the purification devices (200), the machine (100) is connected to the purification device (200) in the adjacent semiconductor etching equipment.

7. The semiconductor etching apparatus according to claim 4, characterized in that, The control valve (121) is a solenoid three-way valve; When the purification device (200) malfunctions, the alarm device (300) issues an alarm, causing the control valve (121) to control the first pipeline (120) to close, and the second pipeline (130) to connect with the machine (100); When the purification device (200) is operating normally, the control valve (121) controls the second pipe (130) to close, and the first pipe (120) is connected to the machine (100).

8. The semiconductor etching apparatus according to claim 7, characterized in that, The purification device (200) also includes: The detection circuit is electrically connected to the alarm device (300). The detection circuit is used to detect whether the purification device (200) is faulty. When the purification device (200) is faulty, the detection circuit activates the alarm device (300) to issue an alarm. When the purification device (200) is working normally, the detection circuit does not activate the alarm device (300).

9. The semiconductor etching apparatus according to claim 8, characterized in that, The alarm device (300) includes: A fault indicator (310) is electrically connected to the detection circuit to issue an alarm signal when the purification device (200) malfunctions; An operation indicator (320) is electrically connected to the detection circuit to send a signal when the purification device (200) is operating normally; The control element (110) and the control valve (121) are both electrically connected to the fault indicator (310) so that the control element (110) and the control valve (121) are activated when the fault indicator (310) issues an alarm signal.

10. The semiconductor etching apparatus according to claim 9, characterized in that, The fault indicator (310) includes an indicator light and a buzzer, both of which are electrically connected to the detection circuit so that when the purification device (200) malfunctions, the indicator light and the buzzer work together.

Images