Fixing structure of double-sided polishing machine for large-size polished section

Abstract

The utility model relates to the technical field of polishing equipment, in particular to a fixing structure of a double-sided polishing machine for a large-size polished section, which comprises a main body, an adjusting component is fixedly connected to the side surface of the main body, and a clamping component is fixedly connected to the side surface of the adjusting component; the height of the supporting mechanism is changed through stretching and retracting of the telescopic supporting rod, due to the design of the height-adjustable supporting mechanism, the same device can be compatible with polishing wafers of various thicknesses, the universality of the device is greatly improved, and due to the fact that the height-adjustable supporting mechanism can be suitable for the polishing wafers of various thicknesses, the machining efficiency is greatly improved. The height of the supporting mechanism is rapidly adjusted, the first clamping plate and the second clamping plate can be controlled by the electric push rod to clamp the polishing piece, and the design can ensure that clamping force is evenly distributed on the whole surface of the polishing piece, so that the polishing piece is firmly fixed, and transverse or longitudinal displacement of the polishing piece in the machining process is prevented.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, specifically to a fixing structure for a double-sided polishing machine for large-size polishing discs. Background Technology

[0002] In industrial production such as semiconductors and optical glass, the processing of large-size polished wafers is one of the key processes.

[0003] Traditional fixing structures are typically only suitable for polishing discs of a specific thickness. If polishing discs of different thicknesses need to be processed, the entire fixing device may need to be replaced or complex adjustments may need to be made. Moreover, the clamping force of traditional fixtures may be concentrated in a local area, resulting in uneven force on the polishing disc during processing and easy displacement. When the polishing head is polishing the polishing disc on both sides, if the pressure distribution is uneven, it may push the polishing disc to move. For non-circular or non-square polishing discs, traditional fixtures may not be able to effectively fix their shape, resulting in displacement during processing. Therefore, a fixing structure for a double-sided polishing machine for large-size polishing discs is needed to improve the above problems. Utility Model Content

[0004] To address the problems mentioned above, traditional fixing structures are typically only suitable for polishing discs of a specific thickness. If polishing discs of different thicknesses need to be processed, the entire fixing device may need to be replaced or complex adjustments may need to be made. Furthermore, the clamping force of traditional fixtures may be concentrated in localized areas, resulting in uneven force on the polishing disc during processing and easy displacement. When the polishing head is polishing both sides of the polishing disc, uneven pressure distribution may push the polishing disc to move. For non-circular or non-square polishing discs, traditional fixtures may not be able to effectively fix their shape, leading to displacement during processing. The purpose of this utility model is to provide a fixing structure for a double-sided polishing machine for large-size polishing discs to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A fixing structure for a double-sided polishing machine for large-size polishing discs includes a main body, an adjustment component fixedly connected to the side of the main body, and a clamping component fixedly connected to the side of the adjustment component.

[0007] The main body includes a base, and a telescopic support rod is installed on the top of the base;

[0008] The clamping assembly includes a base, an electric push rod is installed inside the base, a first clamping plate is fixedly connected to the output end of the electric push rod, and a second clamping plate is fixedly connected to the side of the base.

[0009] As a preferred embodiment of this utility model, the output end of the telescopic support rod is fixedly connected to a top block, and the side of the top block is fixedly connected to a connecting block, and the first clamping plate slides on the side of the base.

[0010] As a preferred embodiment of this utility model, the adjustment component includes a first mounting plate, a first motor mounted on the side of the first mounting plate, a first lead screw fixedly connected to the output end of the first motor, a first threaded block threadedly connected to the side of the first lead screw, and a second mounting plate fixedly connected to the side of the first threaded block.

[0011] As a preferred embodiment of this utility model, a first slide rail is fixedly connected to the side of the first mounting plate, a first slider is slidably connected to the side of the first slide rail, and the first slider is fixedly connected to the second mounting plate.

[0012] As a preferred embodiment of this utility model, a first bearing seat is fixedly connected to the side of the first mounting plate, and the first lead screw extends into the interior of the first bearing seat.

[0013] As a preferred embodiment of this utility model, a second motor is installed on the top of the second mounting plate, a second lead screw is fixedly connected to the output end of the second motor, a second threaded block is threadedly connected to the side of the second lead screw, and a bearing plate is fixedly connected to the side of the second threaded block.

[0014] As a preferred embodiment of this utility model, a second slide rail is fixedly connected to the side of the second mounting plate, a second slider is slidably connected to the side of the second slide rail, and the second slider is fixedly connected to the bearing plate.

[0015] As a preferred embodiment of this utility model, a second bearing seat is fixedly connected to the side of the second mounting plate, and the second lead screw extends into the interior of the second bearing seat.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] 1. In this utility model, the height of the support mechanism is changed by utilizing the extension and retraction of the telescopic support rod. The adjustable height support mechanism design allows the same equipment to be compatible with polishing discs of various thicknesses, greatly improving the equipment's versatility. Since the adjustable height support mechanism can adapt to polishing discs of various thicknesses, the equipment can quickly adapt to new polishing disc thicknesses by rapidly adjusting the height of the support mechanism, reducing downtime caused by equipment adjustments. Because the equipment can accurately adapt to the thickness of the polishing disc, the polishing process is more stable, further improving processing efficiency.

[0018] 2. In this utility model, the first and second clamping plates can be controlled by an electric push rod to clamp the polishing sheet. This design can ensure that the clamping force is evenly distributed on the entire surface of the polishing sheet, thereby firmly fixing the polishing sheet and preventing it from shifting laterally or longitudinally during processing. This clamping method can be adjusted according to the shape and size of the polishing sheet. Whether the polishing sheet is round, square or other irregularly shaped, it can be stably fixed by appropriately adjusting the position of the clamping plates. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the support component structure of this utility model;

[0021] Figure 3 This is a schematic diagram of the adjustment component structure of this utility model;

[0022] Figure 4 This is a schematic diagram of the clamping component structure of this utility model.

[0023] In the diagram: 1. Main body; 101. Base; 102. Telescopic support rod; 103. Top block; 104. Connecting block; 2. Clamping assembly; 201. Base; 202. Electric push rod; 203. First clamping plate; 204. Second clamping plate; 3. Adjustment assembly; 301. First mounting plate; 302. First motor; 303. First lead screw; 304. First threaded block; 305. First slide rail; 306. First slider; 307. First bearing seat; 308. Second mounting plate; 309. Second motor; 310. Second lead screw; 311. Second threaded block; 312. Bearing plate; 313. Second slide rail; 314. Second slider; 315. Second bearing seat. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0025] For examples, please refer to Figures 1-4 This utility model provides a technical solution:

[0026] A fixing structure for a double-sided polishing machine for large-size polishing discs includes a main body 1, an adjustment component 3 fixedly connected to the side of the main body 1, and a clamping component 2 fixedly connected to the side of the adjustment component 3.

[0027] In this embodiment, as Figure 1 , Figure 2 and Figure 4 As shown, the main body 1 includes a base 101, and a telescopic support rod 102 is installed on the top of the base 101. The clamping assembly 2 includes a base 201, and an electric push rod 202 is installed inside the base 201. The output end of the electric push rod 202 is fixedly connected to a first clamping plate 203, and a second clamping plate 204 is fixedly connected to the side of the base 201. The height of the support mechanism is changed by telescopically extending and retracting the telescopic support rod 102. The adjustable height support mechanism design allows the same equipment to be compatible with polishing discs of various thicknesses, greatly improving the versatility of the equipment. Since the adjustable height support mechanism can adapt to polishing discs of various thicknesses, the height of the support mechanism can be quickly adjusted.

[0028] The output end of the telescopic support rod 102 is fixedly connected to a top block 103, and a connecting block 104 is fixedly connected to the side of the top block 103. The first clamping plate 203 slides on the side of the base 201. The first clamping plate 203 and the second clamping plate 204 can be controlled by the electric push rod 202 to clamp the polishing sheet. This design can ensure that the clamping force is evenly distributed on the entire surface of the polishing sheet, thereby firmly fixing the polishing sheet and preventing it from shifting laterally or longitudinally during processing.

[0029] In this embodiment, as Figure 1 and Figure 3As shown, the adjustment assembly 3 includes a first mounting plate 301, a first motor 302 mounted on the side of the first mounting plate 301, a first lead screw 303 fixedly connected to the output end of the first motor 302, a first threaded block 304 threadedly connected to the side of the first lead screw 303, a second mounting plate 308 fixedly connected to the side of the first threaded block 304, a first slide rail 305 fixedly connected to the side of the first mounting plate 301, a first slider 306 slidably connected to the side of the first slide rail 305, the first slider 306 fixedly connected to the second mounting plate 308, a first bearing seat 307 fixedly connected to the side of the first mounting plate 301, the first lead screw 303 extending into the interior of the first bearing seat 307, and a first lead screw 303 mounted on the top of the second mounting plate 308. The second motor 309 has a second lead screw 310 fixedly connected to its output end. A second threaded block 311 is threadedly connected to the side of the second lead screw 310. A bearing plate 312 is fixedly connected to the side of the second threaded block 311. A second slide rail 313 is fixedly connected to the side of the second mounting plate 308. A second slider 314 is slidably connected to the side of the second slide rail 313. The second slider 314 is fixedly connected to the bearing plate 312. A second bearing seat 315 is fixedly connected to the side of the second mounting plate 308. The second lead screw 310 extends into the interior of the second bearing seat 315. An adjusting component 3 is used to adjust the position of the fixing fixture. The adjusting component 3 includes horizontal and vertical adjustments to ensure that the center of the polishing disc is aligned with the polishing head of the polishing machine.

[0030] The working process of this utility model is as follows: When using the fixing structure of the double-sided polishing machine for large-size polishing discs designed in this solution, the base 101 is fixed on the worktable of the polishing machine to ensure its horizontal stability. The telescopic support rod 102 is vertically installed on the base 101 and its height is adjusted to accommodate the thickness of the current polishing disc. The fixing clamp is installed on the adjusting component 3. The polishing disc is placed between the first clamping plate 203 and the second clamping plate 204. The first clamping plate 203 and the second clamping plate 204 can be controlled by the electric push rod 202 to clamp the polishing disc. The position of the fixing clamp is adjusted by the adjusting component 3 to align the center of the polishing disc with the polishing head of the polishing machine. Then, the polishing machine is started to perform double-sided polishing.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A fixing structure for a double-sided polishing machine for large-size polishing discs, comprising a main body (1), characterized in that: An adjustment component (3) is fixedly connected to the side of the main body (1), and a clamping component (2) is fixedly connected to the side of the adjustment component (3). The main body (1) includes a base (101), and a telescopic support rod (102) is installed on the top of the base (101). The clamping assembly (2) includes a base (201), an electric push rod (202) is installed inside the base (201), a first clamping plate (203) is fixedly connected to the output end of the electric push rod (202), and a second clamping plate (204) is fixedly connected to the side of the base (201).

2. The fixing structure of a double-sided polishing machine for large-size polishing discs according to claim 1, characterized in that, The output end of the telescopic support rod (102) is fixedly connected to a top block (103), and the side of the top block (103) is fixedly connected to a connecting block (104). The first clamping plate (203) slides on the side of the base (201).

3. The fixing structure of a double-sided polishing machine for large-size polishing discs according to claim 1, characterized in that, The adjustment component (3) includes a first mounting plate (301), a first motor (302) is mounted on the side of the first mounting plate (301), a first lead screw (303) is fixedly connected to the output end of the first motor (302), a first threaded block (304) is threadedly connected to the side of the first lead screw (303), and a second mounting plate (308) is fixedly connected to the side of the first threaded block (304).

4. The fixing structure of a double-sided polishing machine for large-size polishing discs according to claim 3, characterized in that, The first mounting plate (301) is fixedly connected to the side of a first slide rail (305), and the first slide rail (305) is slidably connected to the side of a first slider (306). The first slider (306) is fixedly connected to the second mounting plate (308).

5. The fixing structure of a double-sided polishing machine for large-size polishing discs according to claim 3, characterized in that, The first mounting plate (301) is fixedly connected to the side of the first bearing seat (307), and the first lead screw (303) extends into the interior of the first bearing seat (307).

6. The fixing structure of a double-sided polishing machine for large-size polishing discs according to claim 3, characterized in that, A second motor (309) is mounted on the top of the second mounting plate (308). A second lead screw (310) is fixedly connected to the output end of the second motor (309). A second threaded block (311) is threadedly connected to the side of the second lead screw (310). A bearing plate (312) is fixedly connected to the side of the second threaded block (311).

7. The fixing structure of a double-sided polishing machine for large-size polishing discs according to claim 6, characterized in that, The second mounting plate (308) is fixedly connected to the side of the second slide rail (313), and the second slide rail (313) is slidably connected to the side of the second slider (314), and the second slider (314) is fixedly connected to the support plate (312).

8. The fixing structure of a double-sided polishing machine for large-size polishing discs according to claim 6, characterized in that, The second mounting plate (308) is fixedly connected to the side of the second bearing seat (315), and the second lead screw (310) extends into the interior of the second bearing seat (315).

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