Automatic leveling mechanism and precise leveling device thereof

Abstract

The utility model discloses an automatic leveling mechanism and a precise leveling device thereof. The automatic leveling mechanism comprises a base, the ball bowl assembly is arranged on the upper portion of the base, and the ball bowl assembly is used for keeping the leveled posture; the driving adjusting module is provided with a vertical driving unit and a horizontal driving unit, the vertical driving unit is installed on the first side of the ball bowl assembly, the horizontal driving unit is installed on the second side of the ball bowl assembly, and the driving adjusting module is used for adjusting the flatness of the ball bowl assembly; and the working plate is arranged at the upper part of the ball bowl assembly. According to the technical scheme of the embodiment, high-precision driving in the leveling process can be achieved, and the mounting precision and the mounting effect are improved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor chip mounting equipment technology, and in particular to an automatic leveling mechanism and its precision leveling device. Background Technology

[0002] In the flip chip mounting process, the metal bumps on the substrate and the bumps on the chip need to be aligned and pressed together to complete the bonding between the metal points on the substrate and the chip. To ensure effective bonding, the parallelism between the chip and the substrate during bonding is critical. Existing leveling devices typically level the substrate placement tray using an adjustment mechanism, and simultaneously level the nozzle on the placement head using an adjustment mechanism. Their adjustment function is relatively simple, only ensuring the parallelism between the workpieces within the device itself is within a certain range. This parallelism cannot exceed the overall flatness of the workpieces and cannot handle parallelism errors between the substrate and chip materials being mounted. Furthermore, because the mounting process requires heating, the flatness of the workpieces will change at different temperatures, and existing adjustment methods cannot handle this situation, thus failing to achieve a high level of bonding performance. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes an automatic leveling mechanism and its precision leveling device, which can achieve high-precision driving in the leveling process and improve mounting accuracy and mounting effect.

[0004] On one hand, the automatic leveling mechanism according to an embodiment of the present utility model includes:

[0005] Base;

[0006] A ball bowl assembly is disposed on the upper part of the base and is used to maintain the leveled posture.

[0007] A drive adjustment module is provided, which includes a vertical drive unit and a horizontal drive unit. The vertical drive unit is installed on the first side of the ball cup assembly, and the horizontal drive unit is installed on the second side of the ball cup assembly. The drive adjustment module is used to adjust the flatness of the ball cup assembly.

[0008] A working plate is disposed on the upper part of the ball bowl assembly.

[0009] According to some embodiments of the present invention, a plurality of first posture adjustment mechanisms are evenly arranged between the base and the working plate. Each first posture adjustment mechanism is provided with a first protrusion, a second protrusion, and a first elastic connector. The first protrusion is located at the edge of the base, the second protrusion is located at the edge of the working plate, one end of the first elastic connector is connected to the first protrusion, and the other end of the first elastic connector is connected to the second protrusion. The positions of the first protrusion and the second protrusion are adapted to each other.

[0010] According to some embodiments of the present invention, the base is provided with a plurality of first through holes and a plurality of distance detection sensors, the distance detection sensors passing through the first through holes so that the contacts of the distance detection sensors abut against the working plate, wherein the plurality of first through holes are evenly arranged around the base.

[0011] According to some embodiments of the present invention, both the vertical drive unit and the horizontal drive unit are provided with a drive motor, a precision slide table and a precision inclined block. The drive motor is connected to the precision slide table, and the precision inclined block is disposed on the outside of the precision slide table.

[0012] According to some embodiments of this utility model, a second attitude adjustment mechanism is further provided between the vertical drive unit and the horizontal drive unit and the work plate. The second attitude adjustment mechanism is provided with a third protrusion, a fourth protrusion, a second elastic connector and a first limiting member. The third protrusion is provided on the upper part of the work plate, the fourth protrusion is provided on the upper part of the precision slide, one end of the second elastic connector is connected to the third protrusion, the other end of the second elastic connector is connected to the fourth protrusion, and the first limiting member is provided on the lower part of the precision slide.

[0013] According to some embodiments of the present invention, the working plate is further provided with a first connector, a second connector, a first precision steel ball, and a second precision steel ball. The first connector is disposed on a first side of the working plate, the first precision steel ball is embedded in the first connector and connected to the vertical drive unit, the first connector is disposed on a second side of the working plate, and the second precision steel ball is embedded in the second connector and connected to the horizontal drive unit.

[0014] According to some embodiments of the present invention, the precision inclined block of the horizontal drive unit is provided with a first inclined plane, and the precision inclined block of the vertical drive unit is provided with a second inclined plane. The precision inclined block of the horizontal drive unit is connected to the outer surface of the first precision steel ball through the first inclined plane, and the precision inclined block of the vertical drive unit is connected to the outer surface of the second precision steel ball through the second inclined plane.

[0015] According to some embodiments of the present invention, the ball bowl assembly includes an arc-shaped body, a floating working end, a first retaining workpiece, and a second retaining workpiece. The arc-shaped body is provided with a first recess and a first flat surface. The floating working end is provided with a fifth protrusion. The first recess is connected to the fifth protrusion. The first flat surface is connected to the base. The first retaining workpiece is connected to one side of the floating working end, and the second retaining workpiece is connected to the other side of the floating working end.

[0016] According to some embodiments of the present invention, the ball cup assembly is further provided with a positive pressure air passage and a negative pressure air passage.

[0017] Secondly, this utility model also provides a precision leveling device, comprising:

[0018] The automatic leveling mechanism as described in the first aspect embodiment above.

[0019] The automatic leveling mechanism according to the embodiments of the present utility model has at least the following beneficial effects:

[0020] The system includes: a base; a ball-and-socket assembly disposed on the upper part of the base, used to maintain the leveled posture; a drive adjustment module, comprising a vertical drive unit and a horizontal drive unit, the vertical drive unit mounted on the first side of the ball-and-socket assembly and the horizontal drive unit mounted on the second side of the ball-and-socket assembly, used to adjust the flatness of the ball-and-socket assembly; and a work plate disposed on the upper part of the ball-and-socket assembly. According to the technical solution of this embodiment, high-precision drive can be achieved during the leveling process, improving mounting accuracy and mounting effect.

[0021] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0022] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0023] Figure 1 This is a schematic diagram of the overall structure of the automatic leveling mechanism according to an embodiment of the present utility model;

[0024] Figure 2 This is a schematic diagram of the structure of the first attitude adjustment mechanism according to an embodiment of the present utility model;

[0025] Figure 3 This is a schematic diagram of the structure of the first through hole in an embodiment of the present utility model;

[0026] Figure 4 This is a schematic diagram of the structure of the vertical drive unit and the horizontal drive unit according to an embodiment of the present utility model;

[0027] Figure 5 This is a schematic diagram of the second attitude adjustment structure according to an embodiment of the present invention;

[0028] Figure 6 This is a schematic diagram of the structure of the first connector, the second connector, the first precision steel ball, and the second precision steel ball in an embodiment of the present utility model.

[0029] Figure 7 This is a schematic diagram of the structure of the first inclined plane and the second inclined plane in an embodiment of the present utility model;

[0030] Figure 8 This is a schematic diagram of the structure of the ball bowl assembly according to an embodiment of the present utility model.

[0031] Figure label:

[0032] Base 100, first posture adjustment mechanism 110, first protrusion 111, second protrusion 112, first elastic connector 113, first through hole 120, distance detection sensor 130, ball cup assembly 200, arc-shaped body 210, first recess 211, first flat part 212, floating working end 220, fifth protrusion 221, first holding workpiece 230, second holding workpiece 240, drive adjustment module 300, vertical drive unit 310, drive motor 311, precision slide 312, precision inclined block 313, first inclined plane 3131, second inclined plane 3132, horizontal drive unit 320, work plate 400, second posture adjustment mechanism 410, third protrusion 411, fourth protrusion 412, second elastic connector 413, first limiting member 414, first connector 420, second connector 430, first precision steel ball 440, second precision steel ball 450. Detailed Implementation

[0033] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.

[0034] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. If "first" or "second" is used in the description, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0035] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0036] Reference Figure 1 This utility model embodiment provides an automatic leveling mechanism, including a base 100; a ball bowl assembly 200, which is disposed on the upper part of the base 100 and is used to maintain the leveled posture; a drive adjustment module 300, which is provided with a vertical drive unit 310 and a horizontal drive unit 320, the vertical drive unit 310 being installed on the first side of the ball bowl assembly 200 and the horizontal drive unit 320 being installed on the second side of the ball bowl assembly 200, and the drive adjustment module 300 being used to adjust the flatness of the ball bowl assembly 200; and a work plate 400, which is disposed on the upper part of the ball bowl assembly 200.

[0037] It should be noted that the automatic leveling mechanism in this embodiment effectively avoids the functional defects of existing devices by adding a high-precision ball bearing device, automatically switching between the floating and locking states during flatness adjustment and placement operations. Furthermore, by adding drive adjustment modules 300 in the X and Y axes, high-precision drive is achieved during the adjustment process, and the parallelism between the chip and the substrate is adjusted before chip placement, improving placement accuracy and placement effect.

[0038] Reference Figure 2 A plurality of first posture adjustment mechanisms 110 are evenly arranged between the base 100 and the working plate 400. Each first posture adjustment mechanism 110 is provided with a first protrusion 111, a second protrusion 112 and a first elastic connector 113. The first protrusion 111 is located at the edge of the base 100, the second protrusion 112 is located at the edge of the working plate 400, one end of the first elastic connector 113 is connected to the first protrusion 111, and the other end of the first elastic connector 113 is connected to the second protrusion 112. The positions of the first protrusion 111 and the second protrusion 112 are adapted to each other.

[0039] It should be noted that the postures of the first protrusion 111 and the second protrusion 112 are adapted to each other, and the precise leveling of the working board 400 is achieved through the elastic connection of the first elastic connector 113. By setting multiple first elastic connectors 113 between the base 100 and the working board 400, the parallelism of the chip during the mounting process is ensured. Under the action of the first elastic connectors 113, the base 100 and the working board 400 can be finely adjusted and reset, thereby ensuring the accurate position of the chip.

[0040] Reference Figure 2 and Figure 3 The base 100 is provided with a plurality of first through holes 120 and a plurality of distance detection sensors 130. The distance detection sensors 130 pass through the first through holes 120 so that the contacts of the distance detection sensors 130 abut against the working plate 400. The plurality of first through holes 120 are evenly arranged around the base.

[0041] It should be noted that four distance detection sensors 130 are also provided at the four opposite corners of the base 100. The distance detection sensors 130 are used to detect the position changes at the four opposite corners of the work plate 400, thereby calculating the current flatness of the work plate 400. In this embodiment, by adding a flatness detection device for the work plate 400, the flatness status of the work plate 400 is detected in real time during the adjustment process, further improving the functionality of the automatic leveling mechanism and increasing the degree of automation.

[0042] Reference Figure 4 Both the vertical drive unit 310 and the horizontal drive unit 320 are equipped with a drive motor 311, a precision slide 312 and a precision wedge 313. The drive motor 311 is connected to the precision slide 312, and the precision wedge 313 is covered on the outside of the precision slide 312.

[0043] It should be noted that both the vertical drive unit 310 and the horizontal drive unit 320 are composed of a drive motor 311, a precision slide 312 and a precision wedge block 313 mounted on the base 100. The vertical drive unit 310 and the horizontal drive unit 320 are driven by the lead screw driven by the drive motor 311 and guided by the precision slide 312 to drive the precision wedge block 313 to move.

[0044] Those skilled in the art will understand that the automatic leveling mechanism in this embodiment is mainly used by equipment manufacturers to improve parallelism during mounting. Therefore, the total adjustment stroke is low, only requiring fine posture adjustments. Thus, a lead screw drives the precision wedge block 313 to move, thereby achieving fine adjustments during flatness adjustment.

[0045] Reference Figure 5A second attitude adjustment mechanism 410 is also provided between the vertical drive unit 310 and the horizontal drive unit 320 and the work plate 400. The second attitude adjustment mechanism 410 is provided with a third protrusion 411, a fourth protrusion 412, a second elastic connector 413 and a first limiting member 414. The third protrusion 411 is provided on the upper part of the work plate 400, the fourth protrusion 412 is provided on the upper part of the precision slide 312, one end of the second elastic connector 413 is connected to the third protrusion 411, the other end of the second elastic connector 413 is connected to the fourth protrusion 412, and the first limiting member 414 is provided on the lower part of the precision slide 312.

[0046] It should be noted that a second attitude adjustment mechanism 410 is installed between the precision tilting block 313 and the work plate 400, and is closed by the second elastic connector 413 in the second attitude adjustment mechanism 410 with a stroke force. Furthermore, the third protrusion 411 and the fourth protrusion 412 are positioned to match each other, and through the elastic connection of the second elastic connector 413, precise adjustment of the parallelism of the work plate 400 (i.e., the chip carrier) in the vertical and horizontal directions can be achieved. In addition, by adjusting the relative positions of the third protrusion 411 and the fourth protrusion 412 and the stiffness of the second elastic connector 413, the automatic leveling mechanism can adapt to the chip mounting requirements of different sizes.

[0047] Furthermore, by providing a first limiting member 414 at the lower part of the precision slide 312, the first limiting member 414 limits the range of movement of the precision slide 312 in the vertical or horizontal direction, preventing the work board 400 from damaging the chip or equipment due to excessive movement during the mounting process.

[0048] Reference Figure 6 The work plate 400 is also provided with a first connector 420, a second connector 430, a first precision steel ball 440 and a second precision steel ball 450. The first connector 420 is disposed on the first side of the work plate 400. The first precision steel ball 440 is embedded in the first connector 420 and connected to the vertical drive unit 310. The first connector 420 is disposed on the second side of the work plate 400. The second precision steel ball 450 is embedded in the second connector 430 and connected to the horizontal drive unit 320.

[0049] It should be noted that the use of precision steel balls makes the connection tighter, reducing errors caused by loose connections. The rolling characteristics of the steel balls help reduce friction, further improving the stability and accuracy of leveling. The rolling characteristics of the precision steel balls allow the work plate 400 to adapt more flexibly to the movement requirements of different directions. Due to the tight fit between the precision steel balls and the connecting parts, the connection between them is more robust.

[0050] Reference Figure 7Furthermore, the precision wedge block 313 of the horizontal drive unit 320 is provided with a first inclined plane 3131, and the precision wedge block 313 of the vertical drive unit 310 is provided with a second inclined plane 3132. The precision wedge block 313 of the horizontal drive unit 320 is connected to the outer surface of the first precision steel ball 440 through the first inclined plane 3131, and the precision wedge block 313 of the vertical drive unit 310 is connected to the outer surface of the second precision steel ball 450 through the second inclined plane 3132.

[0051] It should be noted that by setting an inclined plane between the precision wedge block 313 and the precision steel ball, the contact area between the first precision wedge block 313 and the second precision wedge block 313 and the first precision steel ball 440 and the second precision steel ball 450 is more accurate and stable, thereby reducing the horizontal error in the flip chip process and further improving the leveling accuracy.

[0052] Reference Figure 8 The ball bowl assembly 200 includes an arc-shaped body 210, a floating working end 220, a first retaining workpiece 230, and a second retaining workpiece 240. The arc-shaped body 210 is provided with a first recessed portion 211 and a first flat portion 212. The floating working end 220 is provided with a fifth protrusion 221. The first recessed portion 211 is connected to the fifth protrusion 221. The first flat portion 212 is connected to the base 100. The first retaining workpiece 230 is connected to one side of the floating working end 220, and the second retaining workpiece 240 is connected to the other side of the floating working end 220.

[0053] It should be noted that the precise fit between the arc-shaped body 210 and the floating working end 220, as well as the fixing effect of the first retaining workpiece 230 and the second retaining workpiece 240, jointly improve the accuracy and stability of the ball-and-socket assembly 200. The design of the floating working end 220 allows it to float and adjust within a certain range, enabling the ball-and-socket assembly 200 to adapt to different working requirements and chip sizes. Simultaneously, the precise fit between the various components reduces errors and malfunctions caused by wear, improving the reliability of the assembly.

[0054] The ball-and-socket assembly 200 is also equipped with a positive pressure air path and a negative pressure air path (not shown in the figure). It should be noted that the arc-shaped body 210 and the floating working end 220 are fitted with a high-precision spherical surface. A positive pressure air path and a negative pressure air path are designed between the spherical surfaces. When the adjustment device needs to perform adjustment operations, the positive pressure air path is opened, and an air film is formed between the spherical surfaces of the floating working end 220 and the arc-shaped body 210. This greatly reduces the friction between the floating working end 220 and the arc-shaped body 210, so as to perform flatness adjustment operations. After the adjustment is completed, the positive pressure air path is closed and the negative pressure air path is opened. The body will hold the floating working end 220 in place to maintain the adjusted posture.

[0055] Secondly, this utility model embodiment also proposes a precision leveling device, including the automatic leveling mechanism as described in the first aspect embodiment above.

[0056] In the description of this specification, references to terms such as "one embodiment," "further embodiment," "some specific embodiments," or "some examples," etc., indicate that a specific feature, structure, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0057] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. An automatic leveling mechanism, characterized in that, include: Base; A ball bowl assembly is disposed on the upper part of the base and is used to maintain the leveled posture. A drive adjustment module is provided, which includes a vertical drive unit and a horizontal drive unit. The vertical drive unit is installed on the first side of the ball cup assembly, and the horizontal drive unit is installed on the second side of the ball cup assembly. The drive adjustment module is used to adjust the flatness of the ball cup assembly. A working plate is disposed on the upper part of the ball bowl assembly.

2. The automatic leveling mechanism according to claim 1, characterized in that, A plurality of first posture adjustment mechanisms are evenly arranged between the base and the working plate. Each first posture adjustment mechanism is provided with a first protrusion, a second protrusion, and a first elastic connector. The first protrusion is located at the edge of the base, the second protrusion is located at the edge of the working plate, one end of the first elastic connector is connected to the first protrusion, and the other end of the first elastic connector is connected to the second protrusion. The positions of the first protrusion and the second protrusion are adapted to each other.

3. The automatic leveling mechanism according to claim 1, characterized in that, The base is provided with multiple first through holes and multiple distance detection sensors. The distance detection sensors pass through the first through holes so that the contacts of the distance detection sensors abut against the working plate. The multiple first through holes are evenly arranged around the base.

4. The automatic leveling mechanism according to claim 1, characterized in that, Both the vertical drive unit and the horizontal drive unit are equipped with a drive motor, a precision slide, and a precision inclined block. The drive motor is connected to the precision slide, and the precision inclined block is mounted on the outside of the precision slide.

5. The automatic leveling mechanism according to claim 4, characterized in that, A second attitude adjustment mechanism is also provided between the vertical drive unit and the horizontal drive unit and the work plate. The second attitude adjustment mechanism is provided with a third protrusion, a fourth protrusion, a second elastic connector and a first limiting member. The third protrusion is provided on the upper part of the work plate, the fourth protrusion is provided on the upper part of the precision slide, one end of the second elastic connector is connected to the third protrusion, the other end of the second elastic connector is connected to the fourth protrusion, and the first limiting member is provided on the lower part of the precision slide.

6. The automatic leveling mechanism according to claim 5, characterized in that, The work plate is also provided with a first connector, a second connector, a first precision steel ball, and a second precision steel ball. The first connector is disposed on a first side of the work plate, the first precision steel ball is embedded in the first connector and connected to the vertical drive unit, the first connector is disposed on a second side of the work plate, and the second precision steel ball is embedded in the second connector and connected to the horizontal drive unit.

7. The automatic leveling mechanism according to claim 6, characterized in that, The precision slant block of the horizontal drive unit is provided with a first inclined plane, and the precision slant block of the vertical drive unit is provided with a second inclined plane. The precision slant block of the horizontal drive unit is connected to the outer surface of the first precision steel ball through the first inclined plane, and the precision slant block of the vertical drive unit is connected to the outer surface of the second precision steel ball through the second inclined plane.

8. The automatic leveling mechanism according to claim 1, characterized in that, The ball bowl assembly includes an arc-shaped body, a floating working end, a first retaining workpiece, and a second retaining workpiece. The arc-shaped body is provided with a first recess and a first flat part. The floating working end is provided with a fifth protrusion. The first recess is connected to the fifth protrusion. The first flat part is connected to the base. The first retaining workpiece is connected to one side of the floating working end, and the second retaining workpiece is connected to the other side of the floating working end.

9. The automatic leveling mechanism according to claim 7, characterized in that, The ball-and-socket assembly is also provided with a positive pressure air passage and a negative pressure air passage.

10. A precision leveling device, characterized in that, include: The automatic leveling mechanism as described in any one of claims 1 to 9.

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