Flowing atmosphere resistance furnace

Abstract

The utility model discloses a flowing atmosphere resistance furnace, which comprises a furnace body, a crucible arranged in the furnace body and a driving component used for fixing and driving the crucible to rotate, the furnace body is respectively communicated with an air inlet pipe and an exhaust pipe, and the air inlet pipe and the exhaust pipe are respectively provided with a flowmeter. The flow meter is used for controlling the air inlet pipe to slowly inlet air and the exhaust pipe to slowly exhaust air and ensuring that the air inlet amount is the same as the air exhaust amount. According to the utility model, gas in the furnace body is slowly discharged while slow trace gas is introduced into the furnace body, so that the atmosphere in the furnace begins to flow to bring out impurities generated in crystal growth, the cleanliness of the atmosphere in the furnace in the crystal growth process is ensured, factors generated by crystal defects are reduced, and the blank quality is improved.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth equipment technology, and in particular to a flowing atmosphere resistance furnace. Background Technology

[0002] In existing crystal growth equipment, crystal growth is mostly controlled manually. The size of the crystal is observed by human eyes, and the operator decides whether to raise or lower the temperature to grow the crystal based on their experience. Existing crystal growth equipment has the following shortcomings: low degree of automation and low efficiency. At present, it is basically operated based on the experience of the operator.

[0003] To address the aforementioned issues, existing technologies have proposed automated crystal growth devices based on resistance furnaces, such as the patent with publication number CN205893452U. While these devices solve the problems, they still have the following shortcomings: 1. The gas pressure for crystal growth in a resistance furnace is 0.02 MPa. The atmosphere inside the furnace remains constant throughout the crystal growth process. Various impurities are generated during crystal growth, which can affect crystal growth and lead to defects that reduce the quality of the blank. 2. In practical use, the crucible is installed by creating a groove on a rotating support that fits the bottom of the crucible. However, this method results in the crucible not being securely fixed during rotation. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art and provide a flowing atmosphere resistance furnace. By slowly introducing a small amount of gas into the furnace body while slowly releasing the gas inside the furnace body, the atmosphere inside the furnace begins to flow, which can carry out impurities generated during crystal growth, ensure the cleanliness of the atmosphere inside the furnace during crystal growth, and thus reduce the factors that cause crystal defects and improve the quality of the blank.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] A flow atmosphere resistance furnace includes a furnace body, a crucible disposed within the furnace body, and a drive assembly for fixing and rotating the crucible. An inlet pipe and an exhaust pipe are respectively connected to the furnace body. Flow meters are respectively installed on the inlet pipe and the exhaust pipe. The flow meters are used to control the slow intake of air through the inlet pipe and the slow exhaust of air through the exhaust pipe, and to ensure that the intake volume and exhaust volume are the same.

[0007] Furthermore, the drive assembly includes a base, a drive motor disposed within the base, and a support seat disposed on the drive seat, wherein the output shaft of the drive motor extends out to be rotatably connected to the support seat;

[0008] The support base is equipped with clamps for fixing the crucible.

[0009] Furthermore, the support base is provided with four sliding grooves arranged in a cross shape. The clamp includes a slider, a clamping part provided on the slider, and a locking component for locking the slider. The slider is slidably connected to the sliding groove, and the slider can be fixed at any position on the sliding groove by the locking component.

[0010] Furthermore, the groove is T-shaped or dovetail-shaped.

[0011] Furthermore, the locking assembly includes a connecting block and a clamping plate. The connecting block is fixedly disposed at the tail of the slider and slidably disposed within the narrow portion of the slide groove. The connecting block is provided with a through hole.

[0012] The clamping plate is disposed within the wide portion of the slide groove, and the clamping plate is connected to the connecting block by bolts, through holes, and nuts.

[0013] Furthermore, a rubber gasket is provided at one end of the clamping plate near the connecting block.

[0014] Furthermore, the clamping part has a stepped structure, and the clamping surface of the clamping part is provided with serrated anti-slip stripes.

[0015] The beneficial effects of this utility model are:

[0016] 1) This utility model introduces a small amount of gas into the furnace body while simultaneously releasing the gas inside the furnace body, thereby allowing the atmosphere inside the furnace to flow and carry out impurities generated during crystal growth. This ensures the cleanliness of the atmosphere inside the furnace during crystal growth, thereby reducing factors that cause crystal defects and improving the quality of the blank.

[0017] 2) The crucible is fixed to the support base by a clamp, which can ensure the stability of the crucible during rotation and prevent the crucible from shifting or tipping over. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of the flowing atmosphere resistance furnace in this embodiment of the present invention;

[0019] Figure 2 A 3D view of the driving components;

[0020] Figure 3 This is a cross-sectional view of the driving component;

[0021] Figure 4 for Figure 3 Enlarged view of a portion of point A in the middle;

[0022] In the diagram, 1. Furnace body; 2. Crucible; 3. Inlet pipe; 4. Exhaust pipe; 5. Flow meter; 6. Base; 7. Support base; 8. Fixture; 9. Slide groove; 10. Connecting block; 11. Clamping plate; 12. Nut; 13. Bolt. Detailed Implementation

[0023] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0024] See Figures 1-4 This utility model provides a technical solution: Example

[0025] like Figure 1 As shown, a flowing atmosphere resistance furnace includes a furnace body 1, a crucible 2 disposed inside the furnace body 1, and a drive assembly for fixing and rotating the crucible 2. The furnace body 1 is connected to an air inlet pipe 3 and an exhaust pipe 4, respectively. Flow meters 5 are respectively provided on the air inlet pipe 3 and the exhaust pipe 4. The flow meters 5 are used to control the air inlet pipe 3 to slowly introduce air and the exhaust pipe 4 to slowly exhaust air, and to ensure that the air inlet volume and the exhaust volume are the same.

[0026] The gas introduced can be, but is not limited to, nitrogen or pure oxygen. Slow gas intake here refers to a gas flow rate of 2L / min-6L / min. The gas flow rate can also be selected according to the actual processing, which will not be elaborated here.

[0027] Without changing the gas pressure for crystal growth in the resistance furnace, the gas filling and releasing are controlled by the flow meter 5. Since the amount of gas entering and leaving the furnace is relatively small, it will not have a significant impact on the furnace temperature. At this time, the atmosphere inside the furnace begins to flow, which can carry out impurities generated during crystal growth, ensuring the cleanliness of the furnace atmosphere during crystal growth, thereby reducing factors that cause crystal defects and improving the quality of the blank. Example

[0028] like Figures 2-4 As shown, in this embodiment, based on embodiment 1, the driving assembly includes a base 6, a driving motor disposed in the base 6, and a support 7 disposed on the driving base, with the output shaft of the driving motor extending out to be rotatably connected to the support 7;

[0029] The support base 7 is provided with a clamp 8 for fixing the crucible 2.

[0030] The support base 7 is provided with four sliding grooves 9, which are T-shaped or dovetail-shaped and arranged in a cross shape. The clamp 8 includes a slider, a clamping part provided on the slider, and a locking component for locking the slider. The slider is slidably connected to the sliding grooves 9, and the slider can be fixed at any position on the sliding grooves 9 by the locking component.

[0031] The locking assembly includes a connecting block 10 and a clamping plate 11. The connecting block 10 is fixedly disposed at the tail of the slider and slidably disposed within the narrow part of the slide groove 9. The connecting block 10 is provided with a through hole.

[0032] The clamping plate 11 is disposed within the wide portion of the slide groove 9, and the clamping plate 11 is connected to the connecting block 10 via bolts 13, through holes, and nuts 12. The narrow portion is... Figure 2 The upper part of the middle groove 9, the width is Figure 2 The lower part of the sliding groove 9; the nut 12 is set at the top of the through hole, so that rotating the nut 12 can tighten the screw, and then the slider is fixed by the clamping plate 11. The locking plate is provided with a sliding hole coaxial with the through hole. The head of the screw is located on the bottom surface of the locking plate. The screw extends into the through hole through the sliding hole and is threadedly connected to the nut 12 at the outer end of the through hole.

[0033] A rubber gasket is provided at one end of the clamping plate 11 near the connecting block 10. This increases the coefficient of friction between the clamping plate 11 and the sliding groove 9, ensuring a secure fixation effect.

[0034] The clamping part has a stepped structure, and the clamping surface of the clamping part is provided with serrated anti-slip stripes.

[0035] The drive motor can rotate the support base 7, which in turn rotates the crucible 2 on it. The crucible 2 is fixed to the support base 7 by the clamp 8, which ensures the stability of the crucible 2 during rotation and prevents the crucible 2 from shifting or tipping over.

[0036] The process of fixing crucible 2 is as follows: Loosen (tighten nut 12, the locking plate moves away from connecting block 10) the locking assembly, and the slider can slide freely along the slide groove 9. By sliding the four sliders, the size of the circumference formed by the four sliders can be adjusted, thus adapting to crucibles 2 of different sizes. After the slider is adjusted to the correct position, place crucible 2 on the clamping part of the slider, ensuring that the outer wall of crucible 2 is in contact with the clamping surface of the clamping part before fixing the slider. The slider is fixed by tightening nut 12. When nut 12 is tightened, the screw drives the locking plate to move closer to connecting block 10 until the locking plate is in close contact with the top surface of the wide part of the slide groove 9. At this time, under the frictional force between clamping plate 11 and the top surface of the wide part of the slide groove 9, the slider is locked.

[0037] The above description is merely a preferred embodiment of this utility model. It should be understood that this utility model is not limited to the forms disclosed herein and should not be construed as excluding other embodiments. It can be used in various other combinations, modifications, and environments, and can be altered within the scope of the concept described herein through the above teachings or related technologies or knowledge. Modifications and variations made by those skilled in the art that do not depart from the spirit and scope of this utility model should be protected within the scope of the appended claims.

Claims

1. A flowing atmosphere resistance furnace, comprising a furnace body, a crucible disposed within the furnace body, and a drive assembly for fixing and rotating the crucible, characterized in that: The furnace body is connected to an air inlet pipe and an exhaust pipe, and each of the air inlet pipe and the exhaust pipe is equipped with a flow meter. The flow meter is used to control the air inlet pipe to slowly introduce air and the exhaust pipe to slowly expel air, and to ensure that the air inlet volume and the air outlet volume are the same.

2. The flowing atmosphere resistance furnace according to claim 1, characterized in that: The drive assembly includes a base, a drive motor disposed within the base, and a support seat disposed on the drive seat, wherein the output shaft of the drive motor extends out to be rotatably connected to the support seat; The support base is equipped with clamps for fixing the crucible.

3. The flowing atmosphere resistance furnace according to claim 2, characterized in that: The support base is provided with four sliding grooves arranged in a cross shape. The clamp includes a slider, a clamping part provided on the slider, and a locking component for locking the slider. The slider is slidably connected to the sliding groove, and the slider can be fixed at any position on the sliding groove by the locking component.

4. The flowing atmosphere resistance furnace according to claim 3, characterized in that: The groove is T-shaped or dovetail-shaped.

5. The flowing atmosphere resistance furnace according to claim 4, characterized in that: The locking assembly includes a connecting block and a clamping plate. The connecting block is fixedly disposed at the tail of the slider and slidably disposed within the narrow part of the slide groove. The connecting block is provided with a through hole. The clamping plate is disposed within the wide portion of the slide groove, and the clamping plate is connected to the connecting block by bolts, through holes, and nuts.

6. The flowing atmosphere resistance furnace according to claim 5, characterized in that: A rubber gasket is provided at one end of the clamping plate near the connecting block.

7. The flowing atmosphere resistance furnace according to claim 5, characterized in that: The clamping part has a stepped structure, and the clamping surface of the clamping part is provided with serrated anti-slip stripes.

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