Rotary washing and spin-drying machine for semiconductor manufacturing

Abstract

The utility model provides a semiconductor manufacturing rotary washing spin dryer which comprises a machine shell, a fixing ring, a driving motor, a power switch, a machine cover, an E-shaped spin dryer tube, a pluggable fixing spin dryer frame structure, a contactable anti-shaking fixing frame structure and a supportable reinforcing driving frame structure, and the fixing ring is fixed to the upper portion of the inner wall of the machine shell through bolts. Due to the fact that the machine shell, the fixing ring, the E-shaped spin-drying barrel, the anti-shaking frame, the separating plate and the contact roller are arranged in a matched mode, the contact roller can make contact with the inner wall of the machine shell in the using process, and the E-shaped spin-drying barrel is prevented from shaking in the spin-drying process; according to the semiconductor spin-drying device, the E-shaped spin-drying barrel, the inserting frames, the rubber pads, the inserting grooves and the lifting rods are arranged in a matched mode, so that the semiconductors are inserted into the inserting grooves in the spin-drying process, the semiconductors can be conveniently fixed in the spin-drying process, and collision between the semiconductors is prevented.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor processing equipment technology, and in particular relates to a semiconductor manufacturing rotary washing and drying machine. Background Technology

[0002] Semiconductors are materials whose conductivity at room temperature is between that of conductors and insulators. Semiconductors have wide applications in radios, televisions, and temperature measurement. The semiconductor manufacturing process requires the use of rotary washing and drying machines. Existing washing and drying machines are prone to shaking during the drying process, making it inconvenient to fix the semiconductors during use, and it is also inconvenient to reinforce them during use. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a semiconductor manufacturing rotary washing and spin-drying machine. By setting an anti-swaying mechanism to prevent shaking during spin-drying, setting a semiconductor fixing mechanism to prevent collisions between semiconductors, and setting a reinforcement mechanism, the machine facilitates the purpose of spin-drying semiconductors.

[0004] A semiconductor manufacturing rotary washing and spin-drying machine includes a housing, with a retaining ring bolted to the upper part of the inner wall of the housing; a drive motor bolted to the middle position of the right side of the bottom of the housing; a power switch bolted to the upper right side of the housing; a hinged cover connected to the upper end of the housing; and an E-shaped spin-drying drum located in the middle position of the upper interior of the housing. The E-shaped spin-drying drum contains a pluggable spin-drying rack structure; the outer wall of the E-shaped spin-drying drum is connected to an accessible anti-sway fixing rack structure; the bottom of the housing contains a support and reinforcement drive frame structure; the pluggable spin-drying rack structure includes a plug-in frame with a rubber pad glued to its bottom; plug-in slots are formed on the inner walls of the left and right ends of the pluggable frame; and a lifting rod is bolted to the upper right side of the pluggable frame.

[0005] Preferably, the accessible anti-sway fixing frame structure includes an anti-sway frame, and a separation plate is bolted to the middle position of the inner wall of the anti-sway frame; the upper left end and the lower left end of the anti-sway frame are respectively pin-connected to contact rollers.

[0006] Preferably, the supportable and reinforced drive frame structure includes a fixed frame, wherein a rotating shaft passes through the middle of the upper end of the fixed frame and a bearing is provided at the connection point; a driven wheel is bolted to the middle of the outer wall of the rotating shaft; connecting rods are bolted to the four corners of the upper end of the fixed frame; and the upper ends of the connecting rods are bolted to the four corners of the bottom end of the reinforcing plate.

[0007] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0008] 1. In this utility model, the machine casing, fixing ring, E-type spin dryer, anti-sway frame, separation plate and contact roller are arranged in a cooperative manner, which is beneficial to prevent the E-type spin dryer from shaking during the spin drying process by having the contact roller contact the inner wall of the machine casing.

[0009] 2. In this utility model, the E-type spin dryer, the plug-in bracket, the rubber pad, the plug-in slot, and the lifting rod are arranged in a mutually compatible manner, which facilitates the fixing of the semiconductor by inserting it into the plug-in slot during the spin drying process and prevents collisions between the semiconductors.

[0010] 3. In this utility model, the casing, E-type spin dryer, fixing frame, rotating shaft, driven wheel, connecting rod and reinforcing plate are arranged in a cooperative manner, which is beneficial to reinforce the rotating shaft through the fixing frame and reinforcing plate during use and prevent the rotating shaft from shaking during the driving process. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of this utility model.

[0012] Figure 2 This is a structural diagram of the pluggable and fixed spin dryer structure of this utility model.

[0013] Figure 3 This is a schematic diagram of the accessible anti-sway fixing frame structure of this utility model.

[0014] Figure 4 This is a structural schematic diagram of the supportable and reinforced drive frame structure of this utility model.

[0015] In the picture:

[0016] 1. Machine casing; 2. Fixing ring; 3. Drive motor; 4. Power switch; 5. Machine cover; 6. Type E spin dryer; 7. Plug-in fixed spin dryer structure; 71. Plug-in bracket; 72. Rubber pad; 73. Plug-in slot; 74. Lifting rod; 8. Contactable anti-sway fixing frame structure; 81. Anti-sway bracket; 82. Separation plate; 83. Contact roller; 9. Support and reinforcement drive frame structure; 91. Fixing frame; 92. Rotating shaft; 93. Driven wheel; 94. Connecting rod; 95. Reinforcing plate. Detailed Implementation

[0017] The present invention will now be described in detail with reference to the accompanying drawings, as shown below. Figure 1 and attached Figure 2As shown, a semiconductor manufacturing rotary washing and spin-drying machine includes a housing 1, a retaining ring 2, a drive motor 3, a power switch 4, a cover 5, an E-type spin-drying drum 6, a pluggable spin-drying rack structure 7, an accessible anti-sway fixing frame structure 8, and a support and reinforcement drive frame structure 9. The retaining ring 2 is bolted to the upper inner wall of the housing 1; the drive motor 3 is bolted to the middle right side of the bottom of the housing 1; the power switch 4 is bolted to the upper right side of the housing 1; the cover 5 is hinged to the upper end of the housing 1; the E-type spin-drying drum 6 is located in the middle of the upper inner part of the housing 1; the spin-drying rack structure 7 is installed inside the E-type spin-drying drum 6; and the middle of the outer wall of the E-type spin-drying drum 6 is respectively... The machine casing 1 is connected to an accessible anti-sway fixing frame structure 8; the bottom of the casing 1 is provided with a support and reinforcement drive frame structure 9; the pluggable spin dryer structure 7 includes a plug-in frame 71, a rubber pad 72, a plug-in slot 73, and a lifting rod 74. The bottom of the plug-in frame 71 is glued with a rubber pad 72; the inner walls of the left and right ends of the plug-in frame 71 are respectively provided with plug-in slots 73; the upper right side of the plug-in frame 71 is bolted to the lifting rod 74; when in use, place the casing 1 in a suitable position, connect the external power supply using an external wire, then insert the semiconductors to be spun into the inside of the plug-in frame 71 in sequence, and after grasping the lifting rod 74, insert the plug-in frame 71 into the slots opened in the inner wall of the E-type spin dryer 6 in sequence.

[0018] In this implementation plan, in conjunction with the appendix Figure 3 As shown, the accessible anti-sway fixing frame structure 8 includes an anti-sway frame 81, a separation plate 82, and a contact roller 83. The separation plate 82 is bolted to the middle position of the inner wall of the anti-sway frame 81. The upper left end and the lower left end of the anti-sway frame 81 are respectively pin-connected to the contact roller 83. During the spin-drying process, the contact roller 83 contacts the inner wall of the machine housing 1. During the rotation of the E-type spin-drying drum 6, the contact roller 83 contacts the machine housing 1, so as to prevent the E-type spin-drying drum 6 from shaking and affecting the spin-drying effect and to prevent damage to the semiconductor.

[0019] In this implementation plan, in conjunction with the appendix Figure 4As shown, the supportable and reinforced drive frame structure 9 includes a fixed frame 91, a rotating shaft 92, a driven wheel 93, a connecting rod 94, and a reinforcing plate 95. The rotating shaft 92 passes through the middle of the upper end of the fixed frame 91 and a bearing is provided at the connection point. The driven wheel 93 is bolted to the middle of the outer wall of the rotating shaft 92. The connecting rod 94 is bolted to the four corners of the upper end of the fixed frame 91. The upper ends of the connecting rods 94 are bolted to the four corners of the bottom end of the reinforcing plate 95. After the semiconductor is placed, the drive motor 3 is started to work by controlling the drive motor 3 to start working. The driven wheel 93 is driven to rotate through the V-belt, and the E-type spin dryer 6 is driven to rotate through the rotating shaft 92 to achieve the purpose of spin drying the semiconductor.

[0020] In this embodiment, specifically, the E-type spin dryer 6 is a PVC tub with an E-shaped cross-section and through holes on its outer wall; corresponding slots are provided in the middle of the inner part and on the inner walls around the perimeter of the E-type spin dryer 6; a partition plate is bolted to the lower middle of the inner wall of the housing 1; a drive wheel is bolted to the outer wall of the output shaft of the drive motor 3; and the drive motor 3 and the power switch 4 are electrically connected.

[0021] In this embodiment, specifically, the plug-in bracket 71 is a U-shaped PVC frame; the lifting rod 74 is a U-shaped PVC rod.

[0022] In this embodiment, specifically, the plug-in brackets 71 are sequentially plugged into the interior of the E-type spin dryer 6 in a circular arrangement.

[0023] In this embodiment, specifically, the anti-sway frame 81 is a U-shaped stainless steel frame and the anti-sway frame 81 and the separation plate 82 are configured in an E-shape; the contact roller 83 is a stainless steel roller with a silicone sleeve on its outer wall.

[0024] In this embodiment, specifically, the anti-sway frame 81 is bolted to the outer wall of the E-type spin dryer 6 and multiple such frames are provided; the contact rollers 83 are respectively arranged to contact the inner wall of the casing 1.

[0025] In this embodiment, specifically, the rotating shaft 92 is an inverted T-shaped stainless steel shaft; the rotating shaft 92 passes through the middle of the interior of the reinforcing plate 95 and a bearing is provided at the connection point.

[0026] In this embodiment, specifically, the bottom bolt of the fixing frame 91 is fixed to the middle position of the bottom of the inner part of the housing 1; the upper end of the rotating shaft 92 passes through the middle position of the partition plate fixed to the lower part of the inner wall of the housing 1 and a bearing is provided at the connection; the driven wheel 93 is connected to the driving wheel fixed to the outer wall of the output shaft of the drive motor 3 through V-belt transmission.

[0027] Working principle

[0028] In this invention, when in use, the housing 1 is placed in a suitable position, and an external power supply is connected using an external wire. Then, the semiconductors to be spun dry are sequentially inserted into the inside of the insertion bracket 71. After grasping the lifting rod 74, the insertion bracket 71 is sequentially inserted into the slots opened on the inner wall of the E-type spin dryer 6. During the spin-drying process, the contact roller 83 contacts the inner wall of the housing 1. During the rotation of the E-type spin dryer 6, the contact roller 83 contacts the housing 1, preventing the E-type spin dryer 6 from shaking and affecting the spin-drying effect and preventing damage to the semiconductors. After the semiconductors are placed, the drive motor 3 is started to work, driving the driven wheel 93 to rotate via the V-belt. At the same time, the E-type spin dryer 6 is driven to rotate via the rotating shaft 92, thus achieving the purpose of spin-drying the semiconductors.

[0029] Any technical solution that achieves the above-mentioned technical effects by utilizing the technical solution described in this utility model, or by designing a similar technical solution inspired by the technical solution of this utility model, falls within the protection scope of this utility model.

Claims

1. A semiconductor manufacturing rotary washing and drying machine, comprising a housing (1), wherein a fixing ring (2) is bolted to the upper part of the inner wall of the housing (1); a drive motor (3) is bolted to the middle position of the right side of the bottom end of the housing (1); a power switch (4) is bolted to the upper right side of the housing (1); a cover (5) is hinged to the upper end of the housing (1); and an E-type spin-drying drum (6) is provided in the middle position of the upper end of the housing (1); characterized in that, The E-type spin dryer (6) in the semiconductor manufacturing rotary washing and spin dryer has an internally installed pluggable and fixed spin dryer frame structure (7); the outer wall of the E-type spin dryer (6) is connected to an accessible anti-sway fixed frame structure (8); the bottom of the machine housing (1) is provided with a support and reinforcement drive frame structure (9); the pluggable and fixed spin dryer frame structure (7) includes a plug-in frame (71), and a rubber pad (72) is glued to the bottom of the plug-in frame (71); the inner walls of the left and right ends of the plug-in frame (71) are respectively provided with plug-in slots (73); a lifting rod (74) is bolted to the upper right side of the plug-in frame (71).

2. The semiconductor manufacturing rotary washing and drying machine as described in claim 1, characterized in that, The accessible anti-sway fixing frame structure (8) includes an anti-sway frame (81), and a separation plate (82) is bolted to the middle position of the inner wall of the anti-sway frame (81); the upper left end and the lower left end of the anti-sway frame (81) are respectively pin-connected to contact rollers (83).

3. The semiconductor manufacturing rotary washing and drying machine as described in claim 1, characterized in that, The supportable and reinforced drive frame structure (9) includes a fixed frame (91), a rotating shaft (92) passes through the middle of the upper end of the fixed frame (91) and a bearing is provided at the connection; a driven wheel (93) is bolted to the middle of the outer wall of the rotating shaft (92); connecting rods (94) are bolted to the four corners of the upper end of the fixed frame (91); the upper ends of the connecting rods (94) are bolted to the four corners of the bottom end of the reinforcing plate (95).

4. The semiconductor manufacturing rotary washing and drying machine as described in claim 1, characterized in that, The E-type spin dryer (6) is a PVC drum with an E-shaped cross-section and through holes are provided on the outer wall; corresponding slots are provided in the middle of the inner part and on the inner walls around the E-type spin dryer (6); a partition plate is bolted to the middle of the lower part of the inner wall of the casing (1).

5. The semiconductor manufacturing rotary washing and drying machine as described in claim 2, characterized in that, The plug-in brackets (71) are sequentially inserted into the interior of the E-type spin dryer (6) in a circular arrangement.

6. The semiconductor manufacturing rotary washing and drying machine as described in claim 2, characterized in that, The anti-sway frame (81) is bolted to the outer wall of the E-type spin dryer (6) and multiple of them are provided; the contact rollers (83) are respectively set to contact the inner wall of the machine casing (1).

7. The semiconductor manufacturing rotary washing and drying machine as described in claim 3, characterized in that, The bottom bolt of the fixed frame (91) is fixed to the middle position of the bottom of the inner part of the housing (1); the upper end of the rotating shaft (92) passes through the middle position of the partition plate fixed to the lower part of the inner wall of the housing (1) and a bearing is provided at the connection; the driven wheel (93) is connected to the driving wheel fixed to the outer wall of the output shaft of the drive motor (3) through V-belt transmission.

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