Microwave pit furnace

Abstract

The utility model relates to the technical field of microwave equipment, in particular to a microwave pit furnace which comprises a supporting frame, a furnace body is arranged in the supporting frame, the upper end of the furnace body is connected with a furnace cover in a sealing mode, and the lower end of the furnace body is connected with a bottom sealing plate in a sealing mode. A resonant cavity is formed by the furnace body, the furnace cover and the inner space of the sealing plate, and a magnetron for emitting microwaves into the resonant cavity is arranged on the furnace body; a quartz tube is arranged in the furnace body, the quartz tube is hermetically connected with the bottom sealing plate and the furnace cover, and a sealed heating area is formed by the quartz tube, the bottom sealing plate and the inner space of the furnace cover; the bottom sealing plate is connected with an air inlet pipe and a vacuumizing pipe, the air inlet pipe is connected with an air inlet valve, and the vacuumizing pipe is connected with an extraction valve; an exhaust pipe is arranged on the furnace cover and is connected with an exhaust valve; according to the utility model, heat treatment in a vacuum or low-pressure environment is realized, and the problem of poor vacuum compatibility of a traditional microwave oven is solved; in addition, inert gas or special reaction gas can be introduced, and the limitation that traditional equipment only supports normal-pressure heating is broken through.

Description

Technical Field

[0001] This utility model relates to the field of microwave equipment technology, specifically a microwave well furnace. Background Technology

[0002] Microwave heating technology is widely used in materials synthesis, ceramic sintering, chemical reactions and other fields due to its high efficiency, speed and selective heating. Traditional microwave heating equipment usually adopts a box or tube structure and heats materials through microwave radiation.

[0003] In certain specialized processes, in addition to simple microwave heating, heat treatment under specific atmosphere control or vacuum conditions is also involved. Existing microwave heating equipment has the following shortcomings for such heat treatment: 1. Poor vacuum compatibility: Some materials need to be heated in a vacuum or low-pressure environment to avoid oxidation or promote the release of volatiles, but most existing microwave ovens do not involve vacuuming pipelines, and therefore cannot support thermal reactions in a vacuum or low-pressure environment; 2. Insufficient atmosphere control: Conventional microwave heating equipment usually only supports heating under normal pressure, making it difficult to achieve simple atmospheres (such as inert gases) or introduce special reaction gases (such as H2, NH3, CH4, etc.), which limits its application in specific chemical reactions (such as carbonization, nitriding, and reduction reactions). Utility Model Content

[0004] In view of the shortcomings of the prior art, the purpose of this utility model is to provide a microwave well furnace that can support heat treatment in vacuum or low-pressure environments, support heat treatment in simple atmospheres, and can introduce special reaction gases to carry out specific chemical reactions.

[0005] The technical solution adopted by this utility model to solve its technical problem is:

[0006] A microwave well-type oven includes a support frame, within which an oven body is housed. An oven cover is sealed to the upper end of the oven body, and a bottom sealing plate is sealed to the lower end. The internal space of the oven body, oven cover, and sealing plate forms a resonant cavity. A magnetron emitting microwaves into the resonant cavity is mounted on the oven body. A quartz tube is housed within the oven body, and the quartz tube is sealed to the bottom sealing plate and oven cover. The internal space of the quartz tube, bottom sealing plate, and oven cover forms a sealed heating area. An air inlet pipe and a vacuum pipe are connected to the bottom sealing plate. The air inlet pipe is connected to an air inlet valve, and the vacuum pipe is connected to an air extraction valve. An exhaust pipe is mounted on the oven cover, and an exhaust valve is connected to the exhaust pipe.

[0007] Compared with the prior art, the outstanding features of this utility model, which adopts the above technical solution, are:

[0008] This invention achieves heat treatment under vacuum or low pressure by setting up a vacuum tube, an air extraction valve, and a sealed heating area (composed of a quartz tube, a bottom sealing plate, and a furnace cover), effectively preventing material oxidation or promoting the discharge of volatiles, and solving the problem of poor vacuum compatibility in traditional microwave ovens. Furthermore, through the cooperation of the air inlet pipe, air inlet valve, and air outlet pipe and air outlet valve, inert gases (such as N2, Ar) or special reaction gases (such as H2, NH3, CH4) can be introduced to meet the needs of specific chemical reactions such as carbonization, nitriding, and reduction, breaking through the limitation of traditional equipment that only supports atmospheric pressure heating.

[0009] As a preferred embodiment, a further technical solution of this utility model is:

[0010] Preferably, a first flange connecting plate is provided at the upper end of the furnace body, and a second flange connecting plate is provided at the lower end. The bottom sealing plate is bolted to the furnace body through the second flange connecting plate. A third flange connecting plate is provided at the lower edge of the furnace cover. The side cross-section of the third flange connecting plate is an inverted L-shaped structure. The horizontal connecting plate of the third flange connecting plate is bolted to the first flange connecting plate. An upper connecting ring groove is provided on the inner side of the first flange connecting plate, and a first sealing ring is provided in the upper connecting ring groove. The outer wall of the quartz tube and the lower end of the vertical connecting plate of the third flange connecting plate abut against the first sealing ring. A lower connecting ring groove is provided on the inner side of the second flange connecting plate, and a second sealing ring is provided in the lower connecting ring groove. An annular flange is provided on the bottom sealing plate, and the outer wall of the quartz tube and the upper end of the annular flange abut against the second sealing ring. The multi-stage sealing design of flange connecting plates (first, second, and third flanges) and sealing rings (first and second sealing rings) ensures the airtightness of the resonant cavity and the sealed heating area. At the same time, the bolting and fixing improves the overall structural strength and avoids the risk of leakage.

[0011] Preferably, the furnace cover includes a lower connecting cylinder and a top cover. The lower end of the lower connecting cylinder is sealed to the upper end of the furnace body, and the exhaust pipe is installed on the lower connecting cylinder. A lower hinge seat is provided on one side of the lower connecting cylinder, and an upper hinge seat is provided on the top cover corresponding to the lower hinge seat. A rotating connecting shaft passes through the upper hinge seat and the lower hinge seat and is limited by a limiting nut to rotatably connect the top cover and the lower connecting cylinder. The hinged design of the top cover facilitates the loading and unloading of materials.

[0012] Preferably, the furnace cover is also provided with a quick-locking mechanism. The quick-locking mechanism includes several connecting seats arranged circumferentially on the outer wall of the lower connecting cylinder. Each connecting seat is hinged with a guide rod. A handwheel is threaded onto the guide rod. The lower end of the handwheel is rotatably connected to a pressing sleeve through a bearing. The pressing sleeve is provided with a locking tooth on the side near the top cover. The furnace cover is provided with a locking groove that mates with the locking tooth.

[0013] Preferably, a handle is provided on one side of the top cover. The top cover has a double-layer structure, including an upper cover and a lower cover. A water-cooling cavity is located between the upper cover and the lower cover. The upper cover is provided with an inlet pipe and an outlet pipe, and also includes a chiller unit. The inlet pipe is connected to the outlet end of the chiller unit, and the outlet pipe is connected to the return end of the chiller unit. The circulating chilled water in the double-layer structure (upper cover and lower cover) can reduce the temperature of the top cover. It is easy to manually rotate and open the top cover.

[0014] Preferably, a thermocouple for detecting the temperature inside the resonant cavity is installed on the top cover, and the thermocouple is connected to the main controller; the thermocouple can monitor the temperature of the resonant cavity in real time; the pressure gauge directly measures the pressure in the sealed heating area, so as to achieve precise control of process parameters and improve the quality of heat treatment.

[0015] Preferably, a pressure gauge for measuring the gas pressure in the sealed heating area is connected to the lower connecting cylinder, and a flow meter is connected to the inlet pipe; this enables precise control of the reaction gas flow rate and improves the controllability of the reaction.

[0016] Preferably, a first cooling fan is provided on the support frame, and a first heat dissipation pipe is connected to the outer sleeve of the first cooling fan, with the first heat dissipation pipe connected to the resonant cavity.

[0017] Preferably, an excitation chamber is connected to the furnace body, and a magnetron is connected to the end of the excitation chamber away from the furnace body; each magnetron is provided with a second heat dissipation pipe, and a second heat dissipation fan is connected to the second heat dissipation pipe, with the second heat dissipation pipe facing the heat dissipation fins of the magnetron.

[0018] The first cooling fan works in conjunction with the first heat pipe to reduce the temperature of the resonant cavity; the second cooling fan and the second heat pipe directionally cool the magnetron heat sink assembly, extending the magnetron's lifespan and ensuring microwave transmission stability.

[0019] Preferably, a support is provided on the bottom sealing plate, and an insulated box is provided on the support. The insulated box is located in the sealed heating area and is composed of a bottom plate, a surrounding plate and a top cover. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the microwave well furnace in this embodiment of the present invention;

[0021] Figure 2 yes Figure 1 Enlarged structural diagram at point A;

[0022] Figure 3 This is a cross-sectional view of the furnace body in an embodiment of this utility model;

[0023] Figure 4 yes Figure 3 Enlarged structural diagram at point B;

[0024] Figure 5 yes Figure 3 Enlarged structural diagram at point C;

[0025] Figure 6 This is a side view of the microwave well furnace in an embodiment of this utility model.

[0026] Figure 7 This is a right-side structural schematic diagram of the microwave well furnace in this embodiment of the present invention.

[0027] Explanation of reference numerals in the attached drawings: 1. Support frame; 2. Furnace body; 3. Furnace cover; 301. Lower connecting cylinder; 302. Top cover; 3021. Upper cover; 3022. Lower seal; 303. Slot; 4. Bottom sealing plate; 401. Annular flange; 5. Magnetron; 6. Quartz tube; 7. Inlet pipe; 8. Vacuum pipe; 9. Exhaust pipe; 10. First flange connecting plate; 11. Second flange connecting plate; 12. Third flange connecting plate; 13. First sealing ring; 14. Second sealing ring ; 15. Upper hinge seat; 16. Lower hinge seat; 17. Rotating connecting shaft; 18. Connecting seat; 19. Guide rod; 20. Handwheel; 21. Press sleeve; 2101. Clamping tooth; 22. Water inlet pipe; 23. Water outlet pipe; 24. Socket; 25. First cooling fan; 26. Second cooling fan; 27. First heat dissipation pipe; 28. Second heat dissipation pipe; 29. ​​Handle; 30. Caster; 31. Thermocouple; 32. Air inlet valve; 33. Air outlet valve; 34. Insulation box. Detailed Implementation

[0028] The present invention will be further described below with reference to specific embodiments. The purpose of this description is only to better understand the content of the present invention. Therefore, the examples given do not limit the scope of protection of the present invention.

[0029] like Figures 1 to 7 As shown, this embodiment provides a microwave well-type oven, including a support frame 1, an oven body 2 disposed within the support frame 1, an oven cover 3 sealed to the upper end of the oven body 2, and a bottom sealing plate 4 sealed to the lower end; the internal space of the oven body 2, the oven cover 3, and the sealing plate constitutes a resonant cavity, and a magnetron 5 emitting microwaves into the resonant cavity is disposed on the oven body 2; a quartz tube 6 is disposed inside the oven body 2, and the quartz tube 6 is sealed to the bottom sealing plate 4 and the oven cover 3, forming a sealed heating area; an air inlet pipe 7 and a vacuum pipe 8 are connected to the bottom sealing plate 4, the air inlet pipe 7 is connected to an air inlet valve 32, and the vacuum pipe 8 is connected to an air extraction valve; an exhaust pipe 9 is disposed on the oven cover 3, and the exhaust pipe 9 is connected to an exhaust valve 33. The magnetron 5 is a Panasonic 2M244-M1.

[0030] This invention achieves heat treatment under vacuum or low pressure by setting up a vacuum tube 8, an air extraction valve, and a sealed heating area (composed of a quartz tube 6, a bottom sealing plate 4, and a furnace cover 3), effectively preventing material oxidation or promoting the discharge of volatiles, and solving the problem of poor vacuum compatibility in traditional microwave ovens. Furthermore, through the cooperation of the air inlet pipe 7, the air inlet valve 32, the exhaust pipe 9, and the exhaust valve 33, inert gases (such as N2, Ar) or special reaction gases (such as H2, NH3, CH4) can be introduced to meet the needs of specific chemical reactions such as carbonization, nitriding, and reduction, breaking through the limitation of traditional equipment that only supports atmospheric pressure heating.

[0031] like Figures 2 to 4 As shown, the furnace body 2 has a first flange connecting plate 10 at the upper end and a second flange connecting plate 11 at the lower end. The bottom sealing plate 4 is bolted to the furnace body 2 via the second flange connecting plate 11. The furnace cover 3 has a third flange connecting plate 12 at the lower edge. The side cross-section of the third flange connecting plate 12 is an inverted L-shaped structure. The horizontal connecting plate of the third flange connecting plate 12 is bolted to the first flange connecting plate 10. The inner side of the first flange connecting plate 10 has an upper connecting ring groove, and a first sealing ring 13 is installed in the upper connecting ring groove. The outer wall of the quartz tube 6 and the vertical of the third flange connecting plate 12 are also connected. The lower ends of the connecting plates all abut against the first sealing ring 13; the inner side of the second flange connecting plate 11 is provided with a lower connecting ring groove, and the second sealing ring 14 is provided in the lower connecting ring groove; the bottom sealing plate 4 is provided with an annular flange 401; the outer wall of the quartz tube 6 and the upper end of the annular flange 401 abut against the second sealing ring 14; the multi-stage sealing design of flange connecting plates (first, second, and third flanges) and sealing rings (first and second sealing rings 14) is adopted to ensure the airtightness of the resonant cavity and the sealed heating area, while the overall structural strength is improved by bolting and fixing to avoid leakage risk.

[0032] like Figure 2 The furnace cover 3 includes a lower connecting cylinder 301 and a top cover 302. The lower end of the lower connecting cylinder 301 is sealed to the upper end of the furnace body 2. The exhaust pipe 9 is installed on the lower connecting cylinder 301. A lower hinge seat 16 is provided on one side of the lower connecting cylinder 301. An upper hinge seat 15 is provided on the top cover 302 corresponding to the lower hinge seat 16. The rotating connecting shaft 17 passes through the upper hinge seat 15 and the lower hinge seat 16 and is limited by the limiting nut to rotatably connect the top cover 302 and the lower connecting cylinder 301. The hinge design of the top cover 302 facilitates the loading and unloading of materials. To ensure that the top cover 302 is properly fastened to the lower connecting cylinder 301, a proximity switch is also provided on the upper hinge seat 15. After the top cover is properly fastened, the proximity switch will send a signal to the main controller.

[0033] like Figure 1 , 25, 6, The furnace cover 3 is also equipped with a quick-locking mechanism. The quick-locking mechanism includes several connecting seats 18 arranged circumferentially on the outer wall of the lower connecting cylinder 301. Each connecting seat 18 is hinged with a guide rod 19. A handwheel 20 is threadedly connected to the guide rod 19. The lower end of the handwheel 20 is rotatably connected to a pressing sleeve 21 through a bearing. The pressing sleeve 21 is provided with a locking tooth 2101 on the side near the top cover 302. The furnace cover 3 is provided with a locking groove 303 that mates with the locking tooth 2101.

[0034] like Figure 1 A handle 29 is provided on one side of the top cover 302. To open the cover, hold the handwheel 20 and rotate it counterclockwise to disengage the locking teeth 2101 from the slot 303. Then, pull the guide rod 19 downward to open the quick-lock mechanism. Finally, hold the handle 29 of the top cover 302 and rotate it to move the top cover 302 away. To close the cover, hold the handle 29 of the top cover 302 and rotate the top cover 302 above the connecting cylinder. Pull the guide rod 19 upward, then hold the handwheel 20 and rotate it clockwise to engage the locking teeth 2101 in the slot 303, locking the quick-lock mechanism.

[0035] Because some heating requirements necessitate heating the material to a high temperature, this not only raises the temperature of the resonant cavity but also the temperature of the top cover 302, making it inconvenient to open the top cover 302 by hand using the handle 29. Therefore, in this embodiment, the top cover 302 is designed as a double-layer structure, including an upper cover 3021 and a lower cover 3022, with a water-cooled cavity between them. The upper cover 3021 is equipped with an inlet pipe 22 and an outlet pipe 23, and also includes a chiller unit. The inlet pipe 22 is connected to the outlet end of the chiller unit, and the outlet pipe 23 is connected to the return end of the chiller unit. By circulating cold water in the water-cooled cavity, the temperature of the top cover 302 is reduced. The unit is based on existing technology. For example, it could be a water-cooled chiller unit, including a compressor, condenser, cooling tower, expansion valve, evaporator, water tank, and water pump. Initially, the compressor draws in low-temperature, low-pressure refrigerant gas after evaporation and cooling, then compresses it into high-temperature, high-pressure gas, which is then sent to the condenser. The high-pressure, high-temperature gas is cooled by the condenser, causing it to condense into a room-temperature, high-pressure liquid. When this room-temperature, high-pressure liquid flows into the thermostatic expansion valve, it is throttled into low-temperature, low-pressure wet vapor, which flows into the shell-and-tube evaporator, absorbing heat from the chilled water and lowering its temperature. The evaporated refrigerant is then drawn back into the compressor, repeating the next refrigeration cycle. The refrigeration principles of other chiller units are not detailed here. Trane CGAM series chillers can be used.

[0036] like Figure 2A socket 24 is installed on the top cover 302, into which a thermocouple 31 for detecting the temperature inside the resonant cavity is inserted. The thermocouple 31 is sealed to the socket 24 and connected to the main controller. The thermocouple 31 can monitor the temperature of the resonant cavity in real time. A pressure gauge is connected to the lower connecting cylinder 301 to measure the air pressure in the sealed heating area. The pressure gauge directly measures the air pressure in the sealed heating area, realizing precise control of process parameters and improving the quality of heat treatment. The thermocouple 31 plays a role in temperature monitoring. The target temperature is set by the main controller, and the thermocouple 31 provides real-time feedback of the resonant cavity temperature data. When the temperature exceeds the limit, the power of the magnetron 5 is automatically adjusted.

[0037] like Figure 1 , Figure 2 As shown, a first cooling fan 25 is mounted on the support frame 1, and a first heat dissipation pipe 27 is connected to the outer sleeve of the first cooling fan 25. The first heat dissipation pipe 27 is connected to the resonant cavity. The cooperation between the first cooling fan 25 and the first heat dissipation pipe 27 reduces the temperature of the resonant cavity. Figure 6 An excitation chamber is connected to the furnace body 2, and a magnetron 5 is connected to the end of the excitation chamber away from the furnace body 2. Each magnetron 5 is equipped with a second heat dissipation pipe 28, and a second cooling fan 26 is connected to the second heat dissipation pipe 28. The second heat dissipation pipe 28 is positioned directly opposite the heat sink assembly of the magnetron 5. By directionally cooling the heat sink assembly of the magnetron 5 through the second cooling fan 26 and the second heat dissipation pipe 28, the lifespan of the magnetron 5 can be extended and the stability of microwave emission can be ensured. In this embodiment, a shut-off valve is provided on the first heat dissipation pipe 27. When a vacuum heating environment, an inert atmosphere heating environment, or the participation of a special reactive gas in the heating reaction is required, the shut-off valve is closed.

[0038] A flow meter is connected to the inlet pipe 7; this enables precise control of the reaction gas flow rate and improves the controllability of the reaction.

[0039] Furthermore, such as Figure 3 A support frame is provided on the bottom sealing plate 4, and an insulation box 34 is mounted on the support frame. The insulation box 34 is located in the sealed heating area and is composed of a bottom plate, a surrounding plate, and a top cover. The insulation box 34 can be made of alumina-based ceramic fiber composite material.

[0040] This embodiment significantly expands the application range of microwave well furnaces by setting up a modular insulation box 34 structure, especially solving the technical bottleneck of directly heating low dielectric loss materials (such as Al2O3, SiO2, and some polymer materials) in a microwave field. Its core beneficial effects are reflected in the following aspects: 1. Overcoming the selectivity limitations of microwave heating: For some inert materials (such as ceramic catalyst carriers and quartz sand), traditional microwave heating efficiency is extremely low. In this design, the inner wall of the insulation box 34 can be coated with silicon carbide or ferrite microwave absorbing coatings, efficiently converting microwave energy into heat energy. Samples are indirectly heated through thermal radiation and convection, enabling materials that are originally microwave-transparent to achieve rapid heating, such as Al2O3 particles rising from room temperature to 800℃ within 5 minutes. 2. Compatibility with complex reaction atmospheres: The modular design of the microwave absorbing coating and the insulation box 34 allows for flexible replacement of coating types according to different material characteristics (e.g., SiC is suitable for oxidizing atmospheres, while MoSi2 is suitable for reducing atmospheres), avoiding operational conflicts caused by the material limitations of heating elements in traditional resistance furnaces. For example, in the metal oxide reduction reaction under H2 atmosphere, the MoSi2 coated heat preservation box 11 can operate stably at 1000℃ without oxidation.

[0041] In use, first open the top cover 302 to place the material, then close the top cover 302 and lock the quick-lock mechanism. For a vacuum heating environment, close the inlet valve 32 and exhaust valve 33, open the extraction valve, connect the vacuum pipe 8 to the vacuum pump, and use the vacuum pump to evacuate the sealed heating area using a pressure gauge. For an inert atmosphere heating environment, first evacuate the sealed heating area to a basic vacuum (recommended ≤10) using the vacuum pump. 0 First, evacuate the gas to atmospheric pressure (101 kPa). Then, perform the first displacement by slowly opening the inlet valve 32 and controlling the gas flow rate (e.g., 200 sccm) using a flow meter. Introduce inert gas to atmospheric pressure (pressure gauge shows 101 kPa), then fully open the exhaust valve 33 to expel the gas. Repeat the above vacuuming → inflation → deflation operation at least three times, finally filling the gas to the target pressure (atmospheric pressure or slightly positive pressure). If a special reaction gas is required to participate in the heating reaction, first evacuate the gas to 10 kPa using a vacuum pump. 0 At the Pa level (vacuuming followed by gas filling yields higher displacement efficiency), high-purity nitrogen is introduced to a slightly positive pressure (50 kPa). This vacuum-nitrogen filling cycle is repeated at least three times. Finally, the reaction gas is introduced, with the flow rate precisely controlled by a mass flow meter (MFC). For processes requiring continuous introduction of reaction gas and removal of reaction products (such as CVD deposition and gas reduction), a dynamic gas flow system must be established. This means that when introducing a special reaction gas, the exhaust valve 33 must remain open. After the heating reaction is complete, the quick-lock mechanism is released according to the opening procedure, the top cover 302 is opened, and the material is removed using a special tool. A Pfeiffer HiCube-80-Eco vacuum pump can be used.

[0042] This well-type microwave heating furnace achieves high vacuum (≤10) through a multi-stage sealing design (flange + metal / ceramic sealing ring). 0 With a controlled atmosphere (inert / reactive gas) and dynamic airflow control, the concentration and pressure of reactive gases can be precisely adjusted to effectively prevent material oxidation or promote the discharge of volatiles. Its modular structure (hinged water-cooled top cover 302) facilitates maintenance and material handling, while the directional cooling system (air cooling and water cooling) ensures stable operation of the equipment for a long time. Compared with traditional resistance furnaces, this design also supports special processes such as carbonization, nitriding, and reduction, and has significant application value in fields such as semiconductor materials and new energy batteries.

[0043] In particular, to facilitate the overall movement of this microwave well furnace, casters 30 are installed at the four corners of the bottom of the support frame 1. In this embodiment, the casters 30 can be Foma wheels.

[0044] The above description is merely a preferred embodiment of the present utility model and does not limit the scope of the present utility model. All equivalent changes made based on the content of the present utility model specification and its drawings are included within the scope of the present utility model.

Claims

1. A microwave well-type oven, characterized in that: It includes a support frame (1), a furnace body (2) is provided in the support frame (1), a furnace cover (3) is sealed at the upper end of the furnace body (2), and a bottom sealing plate (4) is sealed at the lower end; the internal space of the furnace body (2), the furnace cover (3), and the sealing plate constitutes a resonant cavity, and a magnetron (5) is provided on the furnace body (2) to emit microwaves into the resonant cavity; A quartz tube (6) is installed inside the furnace body (2). The quartz tube (6) is sealed to the bottom sealing plate (4) and the furnace cover (3). The internal space of the quartz tube (6), the bottom sealing plate (4), and the furnace cover (3) constitutes a sealed heating area. The bottom sealing plate (4) is connected to an air inlet pipe (7) and a vacuum pipe (8). The air inlet pipe (7) is connected to an air inlet valve (32), and the vacuum pipe (8) is connected to an air extraction valve. An exhaust pipe (9) is provided on the furnace cover (3), and an exhaust valve (33) is connected to the exhaust pipe (9).

2. The microwave well furnace according to claim 1, characterized in that: The furnace body (2) is provided with a first flange connecting plate (10) at the upper end and a second flange connecting plate (11) at the lower end. The bottom sealing plate (4) is bolted to the furnace body (2) through the second flange connecting plate (11). The furnace cover (3) is provided with a third flange connecting plate (12) at the lower edge. The side section of the third flange connecting plate (12) is an inverted L-shaped structure. The horizontal connecting plate of the third flange connecting plate (12) is bolted to the first flange connecting plate (10). The inner side of the first flange connecting plate (10) is provided with an upper connecting ring groove, and a first sealing ring (13) is provided in the upper connecting ring groove. The outer wall of the quartz tube (6) and the lower end of the vertical connecting plate of the third flange connecting plate (12) abut against the first sealing ring (13). The inner side of the second flange connecting plate (11) is provided with a lower connecting ring groove, and a second sealing ring (14) is provided in the lower connecting ring groove. An annular flange (401) is provided on the bottom sealing plate (4). The outer wall of the quartz tube (6) and the upper end of the annular flange (401) abut against the second sealing ring (14).

3. The microwave well furnace according to claim 1, characterized in that: The furnace cover (3) includes a lower connecting cylinder (301) and a top cover (302). The lower end of the lower connecting cylinder (301) is sealed to the upper end of the furnace body (2). The exhaust pipe (9) is set on the lower connecting cylinder (301). A lower hinge seat (16) is provided on one side of the lower connecting cylinder (301). An upper hinge seat (15) is provided on the top cover (302) corresponding to the lower hinge seat (16). The rotating connecting shaft (17) passes through the upper hinge seat (15) and the lower hinge seat (16) and is limited by the limiting nut to rotate the top cover (302) and the lower connecting cylinder (301).

4. The microwave well furnace according to claim 3, characterized in that: The furnace cover (3) is also provided with a quick-lock mechanism. The quick-lock mechanism includes several connecting seats (18) arranged circumferentially on the outer wall of the lower connecting cylinder (301). Each connecting seat (18) is hinged with a guide rod (19). A handwheel (20) is threaded onto the guide rod (19). The lower end of the handwheel (20) is rotatably connected to a pressing sleeve (21) through a bearing. A locking tooth (2101) is provided on the side of the pressing sleeve (21) near the top cover (302). A slot (303) that mates with the locking tooth (2101) is provided on the furnace cover (3).

5. The microwave well furnace according to claim 3, characterized in that: A handle (29) is provided on one side of the top cover (302). The top cover (302) has a double-layer structure, including an upper cover (3021) and a lower cover (3022). The upper cover (3021) and the lower cover (3022) are connected to a water-cooled cavity. The upper cover (3021) is provided with an inlet pipe (22) and an outlet pipe (23). It also includes a chiller unit. The inlet pipe (22) is connected to the outlet end of the chiller unit, and the outlet pipe (23) is connected to the return end of the chiller unit.

6. The microwave well furnace according to claim 3, characterized in that: A thermocouple (31) for detecting the temperature inside the resonant cavity is provided on the top cover (302), and the thermocouple (31) is connected to the main controller.

7. The microwave well furnace according to claim 3, characterized in that: A pressure gauge for measuring the air pressure in the sealed heating area is connected to the lower connecting cylinder (301), and a flow meter is connected to the air inlet pipe (7).

8. The microwave well furnace according to claim 1, characterized in that: A first cooling fan (25) is provided on the support frame (1), and a first heat dissipation pipe (27) is connected to the first cooling fan (25). The first heat dissipation pipe (27) is connected to the resonant cavity.

9. The microwave well furnace according to claim 1, characterized in that: An excitation chamber is connected to the furnace body (2), and a magnetron (5) is connected to the end of the excitation chamber away from the furnace body (2). Each magnetron (5) is provided with a second heat dissipation pipe (28), and a second heat dissipation fan (26) is connected to the second heat dissipation pipe (28). The second heat dissipation pipe (28) is set directly opposite the heat dissipation fin group of the magnetron (5).

10. The microwave well furnace according to claim 1, characterized in that: A bracket is provided on the bottom sealing plate (4), and an insulation box (34) is provided on the bracket. The insulation box (34) is located in the sealed heating area. The insulation box (34) is spliced ​​together from the bottom plate, the surrounding plate and the top cover.

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