Non-contact full-automatic radio frequency HEMT structure carrier Hall mobility test system
By designing a non-contact, fully automated radio frequency HEMT structure carrier Hall mobility testing system, the problems of high equipment price, long cycle time, poor consistency and fixed parameters in the existing technology are solved. It realizes efficient and accurate carrier Hall mobility measurement, avoids sample damage and improves the automation level of the testing system.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 九域半导体科技(苏州)有限公司
- Filing Date
- 2023-11-10
- Publication Date
- 2026-05-15
AI Technical Summary
In the existing technology, the carrier Hall mobility testing equipment for HEMT structure epitaxial wafers is expensive, has a long cycle time, poor consistency, fixed parameters that cannot be further improved, and contact measurement has problems such as sample surface damage and excessive human intervention.
A non-contact, fully automated radio frequency HEMT structure carrier Hall mobility testing system was designed, including an electromagnetic control component, a sample stage motion component, a microwave component, a signal detection component, a signal conditioning component, a circuit control component, and data analysis software. It adopts a high-precision servo motor and a microwave source to achieve non-contact measurement of the sample.
It improves test resolution and accuracy, shortens test cycle, reduces equipment cost, enhances measurement consistency and flexibility, avoids sample surface damage, and enables automated operation.
Smart Images
Figure CN224247859U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of Hall mobility testing technology, specifically to a non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system. Background Technology
[0002] Hall mobility is measured based on the Hall effect. The sheet resistance of the sample is measured in the absence of a magnetic field, and the carrier concentration and Hall mobility can be determined by measuring the sample in a magnetic field. The measurement of related signals using this method is mainly achieved through a probe. Although the testing range is wide, contact measurement has disadvantages such as sample surface damage, significant human intervention in manual testing, and susceptibility to problems.
[0003] Epitaxial wafers for radio frequency HEMT structures exhibit distinct characteristics in resistivity, mobility, and carrier concentration, such as sheet resistance between 50-3000 Ω / sq, mobility between 100-20000 (cm² / V·sec), and carrier concentration between 1E¹¹-1E¹⁴ (cm² / V·sec). -2 The fabrication process for this structure is extremely demanding, allowing no surface damage. Therefore, non-contact measurement methods have been developed for this structure. Currently, equipment used for measuring HEMT structure epitaxial wafers suffers from drawbacks such as high cost, long lead times, poor consistency, fixed parameters, and limitations in further improvement.
[0004] Therefore, it is of great significance to provide a non-contact, fully automated radio frequency HEMT structure carrier Hall mobility testing system to solve the problems existing in the current technology. Utility Model Content
[0005] In view of this, the purpose of this application is to provide a non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system to solve the problems of high price, long cycle, poor consistency, fixed parameters, and inability to further improve.
[0006] To achieve the above objectives, this utility model provides the following technical solution:
[0007] The non-contact, fully automated radio frequency HEMT structure carrier Hall mobility testing system includes an electromagnetic control component, a sample stage motion component, a microwave component, a signal detection component, a signal conditioning component, a circuit control component, an industrial computer, and data analysis software.
[0008] Preferably, the electromagnetic control component comprises the following parts: an electromagnet, an electromagnet controller, and a teslameter.
[0009] Preferably, the sample platform motion assembly comprises three parts: a lifting mechanism, a rotating mechanism, and a translating mechanism.
[0010] Preferably, the microwave component includes a microwave source, a waveguide, and a back copper block lifting mechanism.
[0011] Preferably, the signal detection component mainly consists of three parts: a forward signal acquisition card, a reverse signal acquisition card, and a KeySight power meter.
[0012] Preferably, the adjustment control of the signal conditioning component is controlled by the signal acquisition board, mainly to remove interference and obtain an effective signal.
[0013] Preferably, the circuit control components mainly include the main control board, motor board, and signal acquisition board mentioned above, and the circuit systems are connected via a CAN bus.
[0014] Preferably, the industrial control computer and data analysis software are used to control the operation of the equipment via an RJ45 network port.
[0015] Compared with the prior art, the beneficial effects of this utility model are:
[0016] 1. The magnet strength can reach ±1.2T. The greater the magnetic field strength, the stronger the Hall effect, and the test resolution and accuracy can be effectively improved.
[0017] 2. The copper block lifting mechanism adopts a high-precision servo motor with higher resolution, and can achieve precise positioning of measurement signal points through software algorithms;
[0018] 3. Microwave forward and reverse signals are directly read by the acquisition board through AD, which not only has higher accuracy but also faster acquisition speed, reaching 500KSps, thus improving the overall operating speed of the machine.
[0019] 4. The sample stage motion component is independently designed and controlled by a servo motor. It can achieve a single step of 0.025mm, making the coordinate positioning more accurate. At the same time, the stage is equipped with a reflective sensor, which can detect whether there is a sample on the stage. During the operation of the servo motor, the reflective sensor can detect information such as the sample placement position and sample size.
[0020] The waveguide probe port adopts an elliptical design, and the loss is minimized through calculation and simulation.
[0021] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, the preferred embodiments of this application are described in detail below with reference to the accompanying drawings.
[0022] The above and other objects, advantages and features of this application will become more apparent to those skilled in the art from the following detailed description of specific embodiments in conjunction with the accompanying drawings. Attached Figure Description
[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In all drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.
[0024] Figure 1 This is a system block diagram of the present invention;
[0025] Figure 2 This is a system block diagram of the electromagnetic control component in this utility model;
[0026] Figure 3 This is a system block diagram of the sample stage motion assembly in this utility model;
[0027] Figure 4 This is a system block diagram of the microwave component in this utility model;
[0028] Figure 5 This is a system block diagram of the signal detection component in this utility model.
[0029] In the diagram: 001, Electromagnetic control component; 002, Sample stage motion component; 003, Microwave component; 004, Signal detection component; 005, Signal conditioning component; 006, Circuit control component; 007, Industrial computer; 008, Data analysis software; 101, Electromagnet; 102, Electromagnet controller; 103, Tesla meter; 201, Lifting mechanism; 202, Rotation mechanism; 203, Translation mechanism; 301, Microwave source; 302, Waveguide; 303, Back copper block lifting mechanism; 401, Forward signal acquisition board; 402, Reverse signal acquisition board; 403, KeySight power meter. Detailed Implementation
[0030] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. In the following description, specific details such as specific configurations and components are provided merely to help fully understand the embodiments of this application. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of this application. In addition, for clarity and brevity, descriptions of known functions and structures are omitted in the embodiments.
[0031] Furthermore, reference numerals and / or letters may be repeated in different examples within this application. Such repetition is for the purpose of simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or settings discussed.
[0032] In this article, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists alone, B exists alone, and A and B exist simultaneously. The term " / and" in this article describes another type of relationship between related objects, indicating that two relationships can exist. For example, A / and B can mean: A exists alone, and A and B exist alone. In addition, the character " / " in this article generally indicates that the related objects before and after it are in an "or" relationship.
[0033] It should also be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion.
[0034] Please see Figure 1-5 This invention provides a technical solution for a non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system: The non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system includes an electromagnetic control component 001, a sample stage motion component 002, a microwave component 003, a signal detection component 004, a signal conditioning component 005, a circuit control component 006, an industrial control computer 007, and data analysis software 008;
[0035] The industrial control computer 007 includes a main control board, a display screen, and a host.
[0036] The electromagnetic control component 001 consists of three parts: an electromagnet 101, an electromagnet controller 102, and a teslameter 103. The voltage output terminal of the electromagnet controller 102 is connected to the coil of the electromagnet 101. The control interface RS485 is connected to the control motherboard. The output of 0-±1.2T can be achieved by setting the power through the motherboard. The data reading of the teslameter 103 is connected to the main control board through RS485.
[0037] The sample stage motion assembly 002 consists of three parts: a lifting mechanism 201, a rotating mechanism 202, and a translation mechanism 203. The sample can be measured by setting points along a line under the drive of the translation mechanism 203. The lifting mechanism 201 and the rotating mechanism 202 can rotate the sample by a certain angle. The three parts work together to achieve the measurement of the entire surface of the wafer. Its electrical control is achieved through the circuit control assembly 006.
[0038] The microwave component 003 includes a microwave source 301, a waveguide 302, and a back copper block lifting mechanism 303. The microwave source adopts a 10GHz microwave source module, and its control is realized through the circuit control component 006.
[0039] Waveguide 302 is used for effective signal transmission under magnetic field conditions. Its characteristic resistance is 700Ω. When the sample resistance is less than 700Ω, the reflected power decreases as the resistance increases. When the sample resistance is greater than 700Ω, the reflected power increases as the resistance increases due to the loss of waveguide 302.
[0040] The copper block lifting mechanism 303 consists of a copper block, a motor, and a transmission mechanism. The copper block has a running range of 5mm. The lifting is controlled by the forward and reverse rotation of a high-precision servo motor. The copper block moves 1.5mm in 15,000 steps of motor operation, resulting in higher control precision.
[0041] The signal detection component 004 mainly consists of three parts: a forward signal acquisition card 401, a reverse signal acquisition card 402, and a KeySight power meter 403. The detection of the forward and reverse signals is directly acquired by the acquisition board via AD, with an acquisition frequency of up to 500KSPS. The ratio of these signals is related to the sheet resistance of the sample, and the sheet resistance of the sample can be calculated from these two signals. The Hall power is detected by the KeySight power meter, and the test data is transmitted to the acquisition board system in real time via a network interface. The acquisition board calculates the carrier concentration and mobility based on the Hall power.
[0042] The signal conditioning component is controlled by the signal acquisition board, mainly to remove interference and obtain an effective signal.
[0043] The circuit control component 006 mainly includes the main control board, motor, and signal acquisition board mentioned above, and the various circuit systems are connected via a CAN bus.
[0044] The industrial computer 007 and data analysis software 008 are used to control the operation of the equipment via an RJ45 network port.
[0045] In practical use:
[0046] 1. When the instrument is powered on, it displays that all components are connected normally, including the main board, data acquisition board, motor control board, power meter, tesla meter, magnet power controller, etc.
[0047] 2. Place the wafer to be tested on the sample stage and set the sample size, measurement points, and other information;
[0048] 3. Click the Start Measurement button. The system will first automatically reset and then automatically check whether the sample size and placement are normal.
[0049] 4. The sample stage motion assembly delivers the wafer to the probe according to the set coordinates;
[0050] 5. The sheet resistance of the sample under test is obtained by automatically adjusting the back copper block and calculating the ratio of the reflected signal to the forward signal;
[0051] 6. Open the magnetic field;
[0052] 7. After the magnetic field stabilizes, measure the Hall signal under the magnetic field using the signal conditioning component;
[0053] 8. Turn off the magnetic field;
[0054] 9. Calculate the carrier concentration and carrier mobility values using Hall signals;
[0055] 10. Reset and accurately measure the coordinates of the second point, following the same measurement sequence as 4-11 above;
[0056] After all coordinate points have been tested, the data can be analyzed and a mapping plot can be drawn.
[0057] The above description is merely a preferred embodiment of this utility model and does not limit the scope of protection of this utility model. For those skilled in the art, this utility model can have various modifications and variations. Any changes, modifications, substitutions, integrations, and parameter alterations made to these embodiments within the spirit and principles of this utility model, through conventional substitutions or methods that achieve the same function without departing from the principles and spirit of this utility model, fall within the scope of protection of this utility model.
Claims
1. A non-contact, fully automated radio frequency HEMT structure carrier Hall mobility testing system, characterized in that: It includes an electromagnetic control component (001), a sample stage motion component (002), a microwave component (003), a signal detection component (004), a signal conditioning component (005), a circuit control component (006), an industrial computer (007), and data analysis software (008).
2. The non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system as described in claim 1, characterized in that: The electromagnetic control component (001) consists of three parts, including: an electromagnet (101), an electromagnet controller (102), and a teslameter (103).
3. The non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system as described in claim 2, characterized in that: The sample stage motion assembly (002) includes three parts: a lifting mechanism (201), a rotating mechanism (202), and a translation mechanism (203).
4. The non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system as described in claim 3, characterized in that: The microwave component (003) includes a microwave source (301), a waveguide (302), and a copper block lifting mechanism (303); wherein the copper block lifting mechanism (303) includes a motor, a transmission mechanism, and a copper block, and the motor is connected to the copper block through the transmission mechanism.
5. The non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system as described in claim 4, characterized in that: The signal detection component (004) mainly consists of three parts: a forward signal acquisition card (401), a reverse signal acquisition card (402), and a KeySight power meter (403).
6. The non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system as described in claim 5, characterized in that: The adjustment control of the signal conditioning component (005) is controlled by the signal acquisition board, and is mainly used to remove interference to obtain an effective signal.
7. The non-contact fully automated radio frequency HEMT structure carrier Hall mobility testing system as described in claim 1, characterized in that: The industrial control computer (007) and data analysis software (008) are used to control the operation of the equipment and are connected via an RJ45 network port.