Electrical control device of plasma torch testing device

Abstract

The utility model discloses an electrical control device of a plasma torch testing device. The electrical control device comprises a control module and a power supply module. The control module is connected with the first testing mechanism and the second testing mechanism. The power supply module comprises a first control switch and a second control switch, one end of the second control switch is connected in series with the other end of the first control switch; the input end of the direct-current power supply is connected with the other end of the second control switch; the control module power supply circuit is electrically connected with the output end of the direct-current power supply; the first to-be-tested plasma torch power supply circuit is electrically connected with the other end of the first control switch; the second to-be-tested plasma torch power supply circuit is electrically connected with the other end of the first control switch; the first test mechanism power supply circuit is electrically connected with the output end of the direct-current power supply; and the second test mechanism power supply circuit is electrically connected with the output end of the direct-current power supply. The control module and the power supply module are arranged to realize the electrical control of the plasma torch testing device, and the safety is improved through the hierarchical control switch.

Description

Technical Field

[0001] This application relates to the technical field of plasma torch testing, and more specifically, to an electrical control device for a plasma torch testing apparatus. Background Technology

[0002] In semiconductor manufacturing processes, there is a process for treating solid waste from semiconductor process equipment. This is typically achieved using a plasma-water washing process. A plasma torch is used to treat this solid waste, and the quality and stability of the plasma torch affect the normal operation of the waste gas treatment equipment.

[0003] The inventors of this application have discovered that current testing equipment for plasma torches cannot test multiple plasma torches simultaneously. Furthermore, the electrical control process of plasma torch testing devices is simplistic and lacks effective circuit isolation and power-off protection.

[0004] The content in the background section is merely technology known to the public and does not necessarily represent existing technology in this field. Utility Model Content

[0005] This application provides an electrical control device for a plasma torch testing apparatus to solve at least one of the above-mentioned technical problems.

[0006] According to one aspect of this application, an electrical control device for a plasma torch testing apparatus is provided. The plasma torch testing apparatus includes at least a first testing mechanism and a second testing mechanism. The first testing mechanism is used to test a first plasma torch under test, and the second testing mechanism is used to test a second plasma torch under test. The electrical control device includes a control module and a power supply module. The control module is connected to the first and second testing mechanisms and is used to control the operation of the first and second testing mechanisms. The power supply module includes a first control switch, a second control switch, a DC power supply, a control module power supply circuit, a power supply circuit for the first and second plasma torches under test, a power supply circuit for the first and second testing mechanisms, and a power supply circuit for the first and second testing mechanisms. One end of the first control switch is connected to a power distribution line. One end of the second control switch is connected in series with the other end of the first control switch. The DC power supply has its input end connected to the other end of the second control switch. The DC power supply obtains a first voltage from the power distribution line through its input end and converts the first voltage into a second voltage. The output end of the DC power supply outputs the second voltage. The control module power supply circuit is electrically connected to the output end of the DC power supply to obtain the second voltage and provide the second voltage to the control module. The power supply circuit for the first plasma torch under test is electrically connected to the other end of the first control switch to obtain a first voltage and supply the first voltage to the first plasma torch under test. The power supply circuit for the second plasma torch under test is electrically connected to the other end of the first control switch to obtain the first voltage and supply the first voltage to the second plasma torch under test. The power supply circuit for the first testing mechanism is electrically connected to the output terminal of the DC power supply to obtain a second voltage and supply the second voltage to the first testing mechanism. The power supply circuit for the second testing mechanism is electrically connected to the output terminal of the DC power supply to obtain the second voltage and supply the second voltage to the second testing mechanism.

[0007] According to some embodiments of this application, the power supply circuit for the first plasma torch under test includes a third control switch. One end of the third control switch is connected in series with the other end of the first control switch to obtain a first voltage. The other end of the third control switch is electrically connected to the first plasma torch under test to provide the first voltage.

[0008] According to some embodiments of this application, the power supply circuit for the second plasma torch under test includes a fourth control switch. One end of the fourth control switch is connected in series with the other end of the first control switch to obtain a first voltage. The other end of the fourth control switch is electrically connected to the second plasma torch under test to provide the first voltage.

[0009] According to some embodiments of this application, the power supply module further includes a fifth control switch. The power supply circuits of the first and second test mechanisms are electrically connected to the output terminal of the DC power supply via the fifth control switch.

[0010] According to some embodiments of this application, the power supply circuit of the first testing mechanism includes a sixth control switch, a first relay, and a second relay. One end of the sixth control switch is connected in series with a fifth control switch. The normally open contact of the first relay is connected in series with the other end of the sixth control switch. The normally closed contact of the second relay is connected in series with the normally open contact of the first relay and is electrically connected to the first testing mechanism.

[0011] According to some embodiments of this application, the power supply circuit of the second testing mechanism includes a seventh control switch, a third relay, and a fourth relay. One end of the seventh control switch is connected in series with a fifth control switch. The normally open contact of the third relay is connected in series with the other end of the seventh control switch. The normally closed contact of the fourth relay is connected in series with the normally open contact of the third relay and is electrically connected to the second testing mechanism.

[0012] According to some embodiments of this application, the first testing mechanism includes a first movable component, which is equipped with a first micro switch. The first micro switch is connected in series with the power supply line of a second relay. The second relay is an electromagnetic relay. When the first movable component is open, the first micro switch is open, the power supply line of the second relay is disconnected, and the second relay is disconnected.

[0013] According to some embodiments of this application, the second testing mechanism includes a second movable component, which is equipped with a second micro switch connected in series with the power supply line of a fourth relay. The fourth relay is an electromagnetic relay. When the second movable component is open, the second micro switch is disconnected, the power supply line to the fourth relay is disconnected, and the fourth relay is deactivated.

[0014] According to some embodiments of this application, the plasma torch testing device further includes a switching mechanism, and the electrical control device further includes a safety management module, a human-machine interface module, and a switching circuit. The safety management module is connected to the first and second testing mechanisms and is used to detect the operating status of the first and second testing mechanisms, and to cut off the power supply to the first and second testing mechanisms if the operating status is abnormal. The human-machine interface module is communicatively connected to the control module and is used to display the operating status parameters of the first and second testing mechanisms and receive user-inputted operation commands. The switching circuit is connected to the safety management module and controls the power supply to the electrical control device through the switching mechanism.

[0015] According to some embodiments of this application, the electrical control device further includes a leakage detection sensor. The leakage detection sensor is disposed within the cavities of the first and second testing mechanisms, connected to a safety management module, and is used to detect leakage within the cavities and, upon detection of leakage, trigger the safety management module to cut off the power supply to the first and second testing mechanisms.

[0016] Beneficial effects

[0017] The technical solution of this application realizes the electrical control of the plasma torch testing device by setting up a control module and a power supply module, and improves safety through graded control switches. The technical solution of this application reduces the problem of mutual interference during parallel testing by different testing mechanisms by independently powering different components of the plasma torch testing device. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A schematic diagram of the structure of an electrical control device according to an embodiment of this application is shown;

[0020] Figure 2 A schematic diagram of the structure of the plasma torch testing device according to an embodiment of this application is shown;

[0021] Figure 3 A schematic diagram of the power module according to an embodiment of this application is shown;

[0022] Figure 4 A schematic diagram of the control circuit according to an embodiment of this application is shown;

[0023] Figure 5 Another schematic diagram of the control circuit according to an embodiment of this application is shown;

[0024] Figure 6 Another schematic diagram of the control circuit according to an embodiment of this application is shown;

[0025] Figure 7 A schematic diagram of the operating status parameter display interface of the human-computer interaction module according to an embodiment of this application is shown;

[0026] Figure 8 A schematic diagram of the operation curve display interface of the human-computer interaction module according to an embodiment of this application is shown.

[0027] Explanation of reference numerals in the attached figures:

[0028] Electrical control device 1; plasma torch testing device 2; first testing mechanism 21; second testing mechanism 22; first plasma torch under test 23; second plasma torch under test 24; control module 11; power supply module 12; safety management module 13; human-machine interaction module 14; first control switch 121; second control switch 122; DC power supply 123; power supply circuit for the first plasma torch under test 124; power supply circuit for the second plasma torch under test 125; third control switch 1241; fourth control switch 1251; power supply circuit for the first testing mechanism 126; power supply circuit for the second testing mechanism 127; fifth control switch 128; sixth control switch 1261; first relay 1262; second relay 1263; seventh control switch 1271; third relay 1272; fourth relay 1273. Detailed Implementation

[0029] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, they are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar parts, and therefore repeated descriptions of them will be omitted.

[0030] The described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a full understanding of embodiments of this disclosure. However, those skilled in the art will recognize that the technical solutions of this disclosure can be practiced without one or more of these specific details, or other methods, components, materials, devices, etc. In these cases, well-known structures, methods, devices, implementations, materials, or operations will not be shown or described in detail.

[0031] Furthermore, the terms “comprising” and “having,” and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or means is not limited to the steps or means listed, but may optionally include steps or means not listed, or may optionally include other steps or means inherent to such process, method, product, or apparatus.

[0032] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order.

[0033] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings of the embodiments. The described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without creative effort are within the scope of protection of this application.

[0034] According to one aspect of this application, an electrical control device for a plasma torch testing apparatus is provided. See also... Figure 1 The electrical control device 1 includes a control module 11 and a power supply module 12. (See also...) Figure 2 The plasma torch testing device 2 includes at least a first testing mechanism 21 and a second testing mechanism 22. The first testing mechanism is used to test a first plasma torch 23 to be tested, and the second testing mechanism is used to test a second plasma torch 24 to be tested.

[0035] See Figure 3 The control module 11 is connected to the first test mechanism 21 and the second test mechanism 22, and is used to control the operation of the first test mechanism 21 and the second test mechanism 22. For example, the control module 11 may include a PLC controller. The PLC controller can control the operation of the first test mechanism 21 and the second test mechanism 22. For example, the power supply module 12 can provide different voltages through graded power supply.

[0036] See Figure 3 The power supply module 12 includes a first control switch 121, a second control switch 122, a DC power supply 123, a control module power supply circuit (not shown in the figure), a first test plasma torch power supply circuit 124, a second test plasma torch power supply circuit 125, a first test mechanism power supply circuit 126, and a second test mechanism power supply circuit 127.

[0037] like Figure 3 As shown, one end of the first control switch 121 is connected to the power distribution line. One end of the second control switch 122 is connected in series with the other end of the first control switch 121. The input terminal of the DC power supply 123 is connected to the other end of the second control switch 122. The DC power supply 123 obtains the first voltage of the power distribution line through the input terminal and converts the first voltage into a second voltage. The output terminal of the DC power supply 123 outputs the second voltage.

[0038] For example, DC power supply 123 is a power source that can convert a first voltage into a second voltage. The first voltage can be alternating current (AC). For example, the voltage value of the first voltage can be 208V or 380V. The voltage value of the first voltage can be customized according to user needs. For example, the second voltage can be 24V DC.

[0039] For example, the first control switch 121 can be a circuit breaker or a fuse. Exemplarily, the first control switch 121 can be a molded case circuit breaker. For example, the second control switch 122 can be a circuit breaker or a fuse. Exemplarily, the second control switch 122 can be a miniature circuit breaker.

[0040] The control module power supply circuit is electrically connected to the output terminal of the DC power supply 123 to obtain a second voltage and provide the second voltage to the control module 11. The first test plasma torch power supply circuit 124 is electrically connected to the other end of the first control switch 121 to obtain a first voltage and provide the first test plasma torch 23. The second test plasma torch power supply circuit 125 is electrically connected to the other end of the first control switch 121 to obtain a first voltage and provide the first voltage to the second test plasma torch 24. The first test mechanism power supply circuit 126 is electrically connected to the output terminal of the DC power supply 123 to obtain a second voltage and provide the second voltage to the first test mechanism 21. The second test mechanism power supply circuit 127 is electrically connected to the output terminal of the DC power supply 123 to obtain a second voltage and provide the second voltage to the second test mechanism 22.

[0041] Through the above embodiments, this application achieves electrical control of the plasma torch testing device by setting up a control module and a power supply module, and improves safety through graded control switches. The technical solution of this application reduces the problem of mutual interference during parallel testing by different testing mechanisms by independently powering different components of the plasma torch testing device.

[0042] Optionally, see Figure 3 The power supply circuit 124 for the first plasma torch under test includes a third control switch 1241. One end of the third control switch 1241 is connected in series with the other end of the first control switch 121 to obtain a first voltage. The other end of the third control switch 1241 is electrically connected to the first plasma torch under test to provide the first voltage.

[0043] For example, the third control switch 1241 can be a circuit breaker or a fuse. Exemplarily, the third control switch 1241 can be a molded case circuit breaker.

[0044] Through the above embodiments, this application improves the safety of the first plasma torch under test by adding a separate control switch to the power supply circuit of the first plasma torch under test, thereby improving the system reliability of the plasma torch testing device.

[0045] Optionally, see Figure 3The power supply circuit 125 for the second plasma torch under test includes a fourth control switch 1251. One end of the fourth control switch 1251 is connected in series with the other end of the first control switch 121 to obtain a first voltage. The other end of the fourth control switch 1251 is electrically connected to the second plasma torch under test to provide the first voltage.

[0046] For example, the fourth control switch 1251 can be a circuit breaker or a fuse. Exemplarily, the fourth control switch 1251 can be a molded case circuit breaker.

[0047] Through the above embodiments, this application improves the safety of the second plasma torch under test by adding a separate control switch to the power supply circuit of the second plasma torch under test, thereby improving the system reliability of the plasma torch testing device.

[0048] Optionally, see Figure 3 The power supply module 12 also includes a fifth control switch 128. The power supply circuit 126 of the first test mechanism and the power supply circuit 127 of the second test mechanism are electrically connected to the output terminal of the DC power supply 123 through the fifth control switch 128.

[0049] For example, the fifth control switch 128 can be a circuit breaker or a fuse. Exemplarily, the third control switch can be a miniature circuit breaker.

[0050] Through the above embodiments, this application achieves power supply control for the first and second testing mechanisms by adding a control switch at the output terminal of the DC power supply, further enhancing the safety of the plasma torch testing device through tiered reinforcement. Maintenance of the first and second testing mechanisms does not require disconnecting the entire power supply module, improving maintenance flexibility.

[0051] Optionally, see Figure 3 The power supply circuit 126 of the first testing mechanism includes a fifth control switch 1261, a first relay 1262, and a second relay 1263. One end of the fifth control switch 1261 is connected in series with a fifth control switch 128. The normally open contact of the first relay 1262 is connected in series with the other end of the fifth control switch 1261. The normally closed contact of the second relay 1263 is connected in series with the normally open contact of the first relay 1262 and is electrically connected to the first testing mechanism 21.

[0052] For example, the fifth control switch 1261 can be a circuit breaker or a fuse. Exemplarily, the fifth control switch 1261 can be a miniature circuit breaker. For example, the first relay 1262 can be an electromagnetic relay, and the second relay 1263 can be an electromagnetic relay.

[0053] Through the above embodiments, this application achieves independent power outage protection for the first testing mechanism by setting control switches and relays and other power outage protection devices in the power supply circuit of the first testing mechanism, which is beneficial for separate maintenance of the first testing mechanism and troubleshooting of the first testing mechanism.

[0054] Optionally, see Figure 3 The power supply circuit 127 of the second testing mechanism includes a seventh control switch 1271, a third relay 1272, and a fourth relay 1273. One end of the seventh control switch 1271 is connected in series with the fifth control switch 128. The normally open contact of the third relay 1272 is connected in series with the other end of the seventh control switch 1271. The normally closed contact of the fourth relay 1273 is connected in series with the normally open contact of the third relay 1272 and is electrically connected to the second testing mechanism 22.

[0055] For example, the seventh control switch 1271 can be a circuit breaker or a fuse. Exemplarily, the seventh control switch 1271 can be a miniature circuit breaker. For example, the third relay 1272 can be an electromagnetic relay, and the fourth relay 1273 can be an electromagnetic relay.

[0056] Through the above embodiments, this application achieves independent power outage protection for the second testing mechanism by setting control switches and relays and other power outage protection devices in the power supply circuit of the second testing mechanism, which is beneficial for separately maintaining the first testing mechanism and troubleshooting the first testing mechanism.

[0057] Optionally, see Figure 2 and Figure 3 The first testing mechanism 21 includes a first movable component (not shown in the figure), which is equipped with a first micro switch (not shown in the figure). The first micro switch is connected in series with the power supply line of the second relay 1263. The second relay 1263 is an electromagnetic relay. When the first movable component is open, the first micro switch is open, the power supply line of the second relay 1263 is disconnected, and the second relay 1263 is disconnected.

[0058] For example, the first moving part can be a gravity door. The first micro switch can be a mechanical micro switch.

[0059] Through the above embodiments, this application achieves mechanical power-off protection for the first testing mechanism by linking the first micro switch with the second relay. This further improves the operational safety of the first testing mechanism.

[0060] Optionally, see Figure 2 and Figure 3The second testing machine 22 includes a second movable component (not shown in the figure). The second movable component is equipped with a second micro switch, which is connected in series with the power supply line of the fourth relay 1273. The fourth relay 1273 is an electromagnetic relay. When the second movable component is open, the second micro switch is open, the power supply line of the fourth relay 1273 is disconnected, and the fourth relay 1273 is disconnected.

[0061] For example, the second moving part can be a gravity door. The second micro switch can be a mechanical micro switch.

[0062] Through the above embodiments, this application achieves mechanical power-off protection for the second testing mechanism by linking the second micro switch with the fourth relay. This further improves the operational safety of the second testing mechanism.

[0063] Figure 4 A schematic diagram of a control circuit according to an embodiment of this application is shown. Figure 5 Another schematic diagram of the control circuit according to an embodiment of this application is shown. Figure 6 Another schematic diagram of the control circuit according to an embodiment of this application is shown.

[0064] like Figure 4 As shown, the control circuit receives a DC power input (input voltage, for example, 3.6V or 4.6V), which, via a circuit breaker (identified as QF9), provides overcurrent protection. Relays (identified as KA01 or KA02) are controlled to switch on and off via coils, managing the power circuit. Sensors detect external signals (such as leak signals or temperature signals), triggering the relays.

[0065] like Figure 5 As shown, the positive input of the DC power supply for the control circuit is 24V (marked as P24S). The negative input is marked as N24A. -SO is the control signal input terminal, used to control the on / off operation of the control circuit. For example, -S0 can be an emergency stop button. KA01 is a relay, controlled by the -SO signal. When -SO is low, the KA01 coil is energized, and the KA01 contacts actuate. KA00 is a relay, controlled by the KA01 contacts. When the KA01 contacts are closed, the KA00 coil is energized, and the KA00 contacts actuate. KM1L and KM1R are contactors used to control the on / off operation of high-current load devices. For example, KM1L is connected in series in the first plasma torch power supply circuit 124 under test, and KM1R is connected in series in the second plasma torch power supply circuit 125 under test.

[0066] like Figure 6As shown, the three-phase power input terminals of the control power supply (identified by L) provide three-phase voltage. KM1L and KM1R are two contactors. When KM1L and KM1R are energized, the contacts close, and the load is energized. When KM1L and KM1R are de-energized, the contacts open, and the load is de-energized.

[0067] Optional, participate Figure 1 and Figure 2 The plasma torch testing device 2 also includes a switching mechanism (not shown in the figure), and the electrical control device 1 also includes a safety management module 13, a human-machine interaction module 14, and a switching circuit. The safety management module 13 is connected to the first testing mechanism 21 and the second testing mechanism 22, and is used to detect the operating status of the first testing mechanism 21 and the second testing mechanism 22, and cut off the power supply to the first testing mechanism 21 and the second testing mechanism 22 when the operating status is abnormal.

[0068] Figure 6 A schematic diagram of the operating status parameter display interface of the human-computer interaction module according to an embodiment of this application is shown. Figure 7 A schematic diagram of the operation curve display interface of the human-computer interaction module according to an embodiment of this application is shown.

[0069] The human-machine interface module 14 is communicatively connected to the control module 11, and is used to display the operating status parameters and operating curves of the first test mechanism 21 and the second test mechanism 22, and to receive operation commands input by the user. The switching circuit is connected to the safety management module 13, and controls the power supply of the electrical control device 1 through the switching mechanism.

[0070] Through the above embodiments, this application achieves real-time display of the operating status parameters and operating curves of the first and second testing mechanisms by setting up a human-machine interaction module, which facilitates operators in diagnosing faults in the plasma torch testing device. The safety management module monitors the operating status of the first and second testing mechanisms and cuts off the power supply when the operating status is abnormal, further improving the operational safety of the plasma torch testing device.

[0071] Optionally, see Figure 1 and Figure 2 The electrical control device 1 also includes a leakage detection sensor (not shown in the figure). The leakage detection sensor is disposed in the cavity (not shown in the figure) of the first test machine 21 and the second test mechanism 22, and is connected to the safety management module 13. It is used to detect leakage in the cavity and trigger the safety management module 13 to cut off the power supply to the first test mechanism 21 and the second test mechanism 22 when leakage is detected.

[0072] Through the above embodiments, this application realizes leakage detection of the first and second testing mechanisms by setting a leakage detection sensor, and improves safety and reduces the risk of damage to the plasma torch testing device by linking the leakage detection sensor and the safety management module to cut off the power supply of the first and second testing mechanisms in the event of leakage.

[0073] Finally, it should be noted that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions of the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An electrical control device for a plasma torch testing apparatus, characterized in that, The plasma torch testing device includes at least a first testing mechanism and a second testing mechanism. The first testing mechanism is used to test a first plasma torch to be tested, and the second testing mechanism is used to test a second plasma torch to be tested. The electrical control device includes: A control module, connected to the first testing mechanism and the second testing mechanism, is used to control the operation of the first testing mechanism and the second testing mechanism; The power supply module includes: The first control switch is connected to the power distribution line at one end; The second control switch has one end connected in series with the other end of the first control switch; A DC power supply, with its input terminal connected to the other end of the second control switch, obtains a first voltage from the power distribution line through the input terminal and converts the first voltage into a second voltage. The output terminal of the DC power supply outputs the second voltage. The control module power supply circuit is electrically connected to the output terminal of the DC power supply to obtain the second voltage and provide the second voltage to the control module; The power supply circuit of the first plasma torch under test is electrically connected to the other end of the first control switch to obtain the first voltage and provide the first voltage to the first plasma torch under test. The power supply circuit for the second plasma torch under test is electrically connected to the other end of the first control switch to obtain the first voltage and to supply the first voltage to the second plasma torch under test. The power supply circuit of the first test unit is electrically connected to the output terminal of the DC power supply to obtain the second voltage and provide the second voltage to the first test unit. The power supply circuit of the second testing mechanism is electrically connected to the output terminal of the DC power supply to obtain the second voltage and provide the second voltage to the second testing mechanism.

2. The electrical control device according to claim 1, characterized in that, The power supply circuit for the first plasma torch under test includes: The third control switch is connected in series with the other end of the first control switch to obtain the first voltage; The other end of the third control switch is electrically connected to the first plasma torch to be tested in order to provide the first voltage.

3. The electrical control device according to claim 1, characterized in that, The power supply circuit for the second plasma torch under test includes: The fourth control switch has one end connected in series with the other end of the first control switch to obtain the first voltage; The other end of the fourth control switch is electrically connected to the second plasma torch to be tested in order to provide the first voltage.

4. The electrical control device according to claim 1, characterized in that, The power supply module also includes: The fifth control switch connects the power supply circuits of the first and second test mechanisms to the output terminal of the DC power supply.

5. The electrical control device according to claim 4, characterized in that, The power supply circuit of the first test mechanism includes: The sixth control switch has one end connected in series with the fifth control switch; The first relay, wherein the normally open contact of the first relay is connected in series with the other end of the sixth control switch; The second relay has its normally closed contact connected in series with the normally open contact of the first relay and is electrically connected to the first testing mechanism.

6. The electrical control device according to claim 4, characterized in that, The power supply circuit for the second testing mechanism includes: The seventh control switch has one end connected in series with the fifth control switch; The third relay, wherein the normally open contact of the third relay is connected in series with the other end of the seventh control switch; The fourth relay has its normally closed contact connected in series with the normally open contact of the third relay and is electrically connected to the second test mechanism.

7. The electrical control device according to claim 5, characterized in that, The first testing mechanism includes a first movable component, which is equipped with a first micro switch. The first micro switch is connected in series with the power supply line of the second relay. The second relay is an electromagnetic relay. When the first movable part is open, the first micro switch is disconnected, the power supply line of the second relay is disconnected, and the second relay is disconnected.

8. The electrical control device according to claim 6, characterized in that, The second testing mechanism includes a second movable component, which is equipped with a second micro switch, and the second micro switch is connected in series with the power supply line of the fourth relay; The fourth relay is an electromagnetic relay. When the second movable part is open, the second micro switch is turned off, the power supply line of the fourth relay is disconnected, and the fourth relay is disconnected.

9. The electrical control device according to any one of claims 1-8, characterized in that, The plasma torch testing device also includes a switching mechanism, and the electrical control device also includes: The safety management module connects the first testing unit and the second testing unit, and is used to detect the operating status of the first testing unit and the second testing unit, and cut off the power supply to the first testing unit and the second testing unit when the operating status is abnormal. The human-computer interaction module is communicatively connected to the control module and is used to display the operating status parameters of the first testing mechanism and the second testing mechanism, and to receive operation commands input by the user. The switch circuit is connected to the safety management module, and the power supply of the electrical control device is controlled through the switch mechanism.

10. The electrical control device according to claim 9, characterized in that, The electrical control device further includes: A leakage detection sensor is installed inside the cavities of the first and second testing mechanisms and connected to the safety management module. It is used to detect leakage inside the cavities and, upon detecting leakage, trigger the safety management module to cut off the power supply to the first and second testing mechanisms.

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