High-voltage electron gun adopting water cooling to drive oil cooling composite insulator

Abstract

The utility model discloses a high-voltage electron gun adopting water cooling to drive an oil cooling composite insulator. The high-voltage electron gun comprises a high-voltage lead-in and electron excitation regulation and control unit and an electron beam electromagnetic regulation and control unit. The device is sequentially provided with a high-voltage cable connection assembly, a first insulation assembly, a second insulation assembly and an electronic excitation assembly. A silicon rubber sleeve is arranged in the first insulation assembly, and interface discharge is inhibited through air-gap-free sealing connection; the second insulating assembly is filled with insulating oil and is wound with a snakelike water-cooling pipe so as to improve the insulation and heat dissipation performance. The electron excitation assembly is composed of an anode, a grid electrode and a cathode and used for electron beam emission. And the electron beam electromagnetic regulation and control unit is provided with a beam channel, an axis combining coil, a focusing coil and a scanning coil and is used for realizing beam quality regulation and control. The structure integrates the oil cooling channel and the water cooling channel, not only can the connection mode between the high-voltage cable and the insulator of the electron gun be simplified and the reaction between the insulating material of the high-voltage cable and the insulating oil be avoided, but also the working stability of the electron gun can be improved by utilizing the mode of driving the oil cooling by the water cooling.

Description

Technical Field

[0001] This utility model relates to the technical field of electron guns, and in particular to a high-voltage electron gun that uses water cooling to drive an oil-cooled composite insulator. Background Technology

[0002] Electron beam technology, as a high-energy-density beam processing method, has been widely used in industrial and scientific research fields such as welding, smelting, surface treatment, irradiation modification, and additive manufacturing, covering multiple industries including aerospace, weaponry, shipbuilding, automobiles, and semiconductor manufacturing. The core unit of an electron beam system is the electron gun, whose performance directly determines the energy stability of the electron beam, the beam spot quality, and the reliability of system operation.

[0003] The electron gun contains an electron excitation unit (such as a thermionic cathode) and an electron beam control unit (such as a grid and electromagnetic focusing coil), generating a large amount of heat during operation. Especially under high voltage and high power continuous operation conditions, the cathode temperature can exceed 2000℃, and the heat in the vacuum cavity is extremely difficult to conduct away quickly, leading to local overheating. This not only causes cathode deformation and beam instability, but also easily leads to overheating and decomposition of the surface material of the high voltage insulator, sudden vacuum changes, and fatigue failure of the sealing structure due to thermal expansion of metal parts, which in turn can cause discharge, system runaway, or even shutdown.

[0004] To improve the operational stability of the electron gun, some devices employ "dry" insulators combined with high thermal conductivity materials, or increase their volume to improve specific heat capacity; however, such structures are complex to manufacture and costly, making them difficult to widely adopt in high-power systems. In contrast, electron gun insulation units using a combination of water-cooling and oil-cooling have advantages in design simplification, heat dissipation efficiency, and cost control, and are gradually becoming the mainstream solution.

[0005] While traditional water-cooled oil-cooled insulation structures enhance thermal control, they still present challenges in high-voltage cable connection methods. Because the insulation materials of high-voltage cables (such as polyethylene) are not oil-resistant and cannot be directly immersed in insulating oil, additional oil-resistant sheaths and sealing structures are often required for isolation. However, weak adhesion exists between the cable and the oil-resistant material, leading to partial discharge phenomena caused by oil molecule penetration or gas accumulation in tiny gaps during long-term operation. This reduces the system stability and lifespan of the electron gun, thus requiring improvement. Utility Model Content

[0006] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0007] Therefore, to solve the above-mentioned technical problems, this utility model provides the following technical solution: a high-voltage electron gun using a water-cooled driven oil-cooled composite insulator, comprising:

[0008] The high-voltage introduction and electron excitation control unit includes:

[0009] A high-voltage cable connection assembly, comprising a high-voltage cable and a high-voltage cable fixing nut, is used to enable the connection of an external high-voltage power source;

[0010] The first insulation component includes a first insulator and a silicone rubber sleeve disposed therein. The inner and outer walls of the silicone rubber sleeve are coated with vacuum grease. The silicone rubber sleeve is fitted onto the end of the high-voltage cable to ensure a gapless, sealed connection between the high-voltage cable and the first insulator.

[0011] The second insulation component includes a second insulator and a serpentine water-cooling pipe disposed therein. The second insulator is filled with insulating oil, and the serpentine water-cooling pipe is provided with an inlet and an outlet for connection to an external water chiller.

[0012] An electron excitation assembly includes an anode, a gate, and a cathode arranged coaxially, and is electrically connected to the first insulating assembly and the second insulating assembly via conductive terminals;

[0013] Electron beam electromagnetic control unit, comprising:

[0014] The beam channel is sealed to the high-voltage introduction and electronic excitation control unit via a sealing ring.

[0015] The electromagnetic control assembly includes a coaxial coil, a focusing coil, and a scanning coil arranged along the beam channel, used to control the quality of the electron beam and its spatial energy distribution.

[0016] As a preferred embodiment of the high-voltage electron gun using water-cooled oil-cooled composite insulators described in this utility model, the high-voltage cable connection assembly further includes high-voltage cable conductive terminals, which are sequentially connected to the first insulator conductive terminals and the second insulator conductive terminals in a cascaded conductive connection.

[0017] As a preferred embodiment of the high-voltage electron gun using water-cooled oil-cooled composite insulators described in this utility model, the silicone rubber sleeve in the first insulating component is tightly pressed against the high-voltage cable through a high-voltage cable fixing nut.

[0018] As a preferred embodiment of the high-voltage electron gun using water-cooled oil-cooled composite insulators described in this utility model, the serpentine water-cooling pipe in the second insulation component is made of metal.

[0019] As a preferred embodiment of the high-voltage electron gun using a water-cooled oil-cooled composite insulator described in this utility model, the serpentine water-cooling pipe is spirally arranged around the inner wall of the top of the second insulator, and its inlet and outlet extend to the outside of the second insulator.

[0020] As a preferred embodiment of the high-voltage electron gun using a water-cooled oil-cooled composite insulator described in this utility model, the anode in the electron excitation assembly is a metal structure with a central through hole, and is arranged coaxially with the first insulator, the second insulator, and the gate.

[0021] As a preferred embodiment of the high-voltage electron gun using water-cooled oil-cooled composite insulators described in this utility model, the high-voltage introduction and electron excitation control unit further includes a molecular pump interface disposed on its outer shell for connecting a vacuum molecular pump.

[0022] As a preferred embodiment of the high-voltage electron gun using water-cooled oil-cooled composite insulators described in this utility model, the beam channel is fixed to the bottom of the electron beam electromagnetic control unit by screws.

[0023] As a preferred embodiment of the high-voltage electron gun using water-cooled oil-cooled composite insulators described in this utility model, the coaxial coil, focusing coil, and scanning coil in the electromagnetic control component are respectively connected to an external driving circuit to form an electron beam control system.

[0024] The beneficial effects of this utility model are:

[0025] This invention provides a high-voltage electron gun employing a water-cooled, oil-cooled composite insulator. By immersing the exterior of the first insulator into the oil-cooled cavity of the second insulator, localized cooling and insulation isolation of the power supply structure are achieved. Simultaneously, the second insulator, equipped with an oil-immersed serpentine water-cooling pipe, provides deep cooling of the first, second, and grid insulators. The high-voltage cable end is connected to the first insulator via a dry-connection structure, eliminating contact with the oil medium and fundamentally avoiding the chemical compatibility issues between the oil and cable insulation materials. This significantly improves the withstand voltage performance of the insulator system and the long-term stable operation capability of the electron gun. Attached Figure Description

[0026] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0027] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0028] In the diagram: 100, High-voltage introduction and electron excitation control unit; 101, High-voltage cable connection assembly; 101a, High-voltage cable; 101a-1, High-voltage cable fixing nut; 101b, High-voltage cable conductive terminal; 102, First insulation assembly; 102a, First insulator; 102a-1, Silicone rubber sleeve; 102b, First insulator conductive terminal; 103, Second insulation assembly; 103a, Second insulator; 103a-1, Serpentine water-cooling pipe; 103b, Insulating oil; 103c, Second insulator conductive terminal; 104, Electron excitation assembly; 104a, Anode; 104b, Grid; 104c, Cathode; 105, Molecular pump interface;

[0029] 200, Electron beam electromagnetic control unit; 201, Beam channel; 201a, Sealing ring; 202, Electromagnetic control assembly; 202a, Coaxial coil; 202b, Focusing coil; 202c, Scanning coil. Detailed Implementation

[0030] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0031] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0032] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0033] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0034] Reference Figure 1This embodiment of the present invention provides a high-voltage electron gun using a water-cooled oil-cooled composite insulator, mainly comprising: a high-voltage introduction and electron excitation control unit 100 and an electron beam electromagnetic control unit 200; this implementation scheme is used to meet the dual requirements of insulation stability and electron beam quality control of the high-voltage electron beam emission system under high voltage and high heat load.

[0035] like Figure 1 As shown, the high-voltage introduction and electron excitation control unit 100 includes a high-voltage cable connection assembly 101, a first insulation assembly 102, a second insulation assembly 103, and an electron excitation assembly 104. The high-voltage cable connection assembly 101 includes a high-voltage cable 101a and a high-voltage cable fixing nut 101a-1, used to introduce an external high-voltage power supply into the system. The high-voltage cable 101a integrates a high-voltage cable conductive terminal 101b, which is a rod-shaped metal piece. One end of the terminal is inserted into the inner conductor of the high-voltage cable 101a, and the other end is inserted into the first insulator conductive terminal 102b. It is further cascaded with the second insulator conductive terminal 103c to form a continuous electrical path, thereby ensuring that the high voltage is reliably transmitted from the cable to the electron excitation assembly 104.

[0036] The first insulation component 102 is composed of a first insulator 102a made of ceramic, and a silicone rubber sleeve 102a-1 is disposed inside it. The inner and outer walls of the silicone rubber sleeve 102a-1 are coated with vacuum grease. The silicone rubber sleeve 102a-1 is fitted onto the end of the high-voltage cable 101a, which can effectively remove air from the contact surface and ensure that the high-voltage cable 101a and the first insulator 102a achieve a gapless sealed connection, thereby suppressing the discharge phenomenon along the interface. The silicone rubber sleeve 102a-1 is pressed against the outer wall of the high-voltage cable 101a by the high-voltage cable fixing nut 101a-1 to achieve a reliable mechanical crimp connection, thereby enhancing the sealing performance of the insulation interface and improving the overall structural tightness, and suppressing the generation of high-voltage breakdown channels.

[0037] The second insulation component 103 is composed of a second insulator 103a, which is filled with insulating oil 103b to improve insulation strength and heat dissipation efficiency. A serpentine water-cooling pipe 103a-1 is arranged inside the second insulator 103a. The water-cooling pipe is made of metal material and is spirally wound around the inner wall of the top of the insulator. The serpentine water-cooling pipe 103a-1 is provided with an inlet and an outlet, extends to the outside of the second insulator 103a and is connected to an external water chiller to form a closed circulating water circuit to dissipate heat from the system.

[0038] Furthermore, the serpentine water-cooling tube 103a-1 is preferably made of stainless steel or copper alloy to ensure thermal conductivity and structural strength.

[0039] An electron excitation assembly 104 is installed at the end of the second insulating assembly 103. This assembly includes an anode 104a, a grid 104b, and a cathode 104c arranged along a coaxial direction. The anode 104a is a metal structure with a central through-hole to allow the electron beam to pass through and ensure stable electron beam penetration. The cathode 104c can be made of tungsten wire or LaB6 emitting material. After being heated by a power supply, it emits electrons, which are accelerated by the grid and then enter the beam channel 201 axially. The electron excitation assembly 104 is electrically connected to the first insulating assembly 102 and the second insulating assembly 103 through corresponding conductive terminals, thus completing the construction of the high-voltage excitation circuit.

[0040] To ensure a vacuum environment during the operation of the entire system, a molecular pump interface 105 is provided on the outer shell of the high-pressure introduction and electronic excitation control unit 100, which can be connected to an external molecular pump to extract gas from the inside of the component and make its internal vacuum reach the design requirements.

[0041] The electron beam electromagnetic control unit 200 is located at the lower part of the above-mentioned unit. It has a beam channel 201 inside. The beam channel 201 is sealed to the high voltage inlet and electron excitation control unit 100 through a sealing ring 201a. At the same time, it is fixed to the bottom of the control unit by a screw structure to prevent vacuum system leakage.

[0042] Inside the beam channel 201, a coaxial coil 202a, a focusing coil 202b, and a scanning coil 202c are arranged sequentially along the axial direction. The three are connected to an external driving circuit and together form an electron beam control system.

[0043] The electron gun structure of "water-cooled driving oil-cooled composite insulator" proposed in this embodiment takes into account heat dissipation efficiency, electric field uniformity and insulation system safety, significantly improving the reliability and stability of the electron gun under high voltage and high power conditions. It is suitable for high voltage and medium voltage electron beam welding, meets the requirements of long-term and stable welding, and can also be applied to other electron beam processing and manufacturing fields.

[0044] It is worth noting that the entire device is controlled by a controller. Since the controller is a common device and belongs to existing mature technology, its electrical connection relationship and specific circuit structure will not be described in detail here.

[0045] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A high-voltage electron gun employing water-cooled operation to drive oil-cooled composite insulators, characterized in that: include: A high-voltage introduction and electron excitation control unit (100) includes: A high-voltage cable connection assembly (101) includes a high-voltage cable (101a) and a high-voltage cable fixing nut (101a-1) for connecting an external high-voltage power source; The first insulating component (102) includes a first insulator (102a) and a silicone rubber sleeve (102a-1) disposed inside it. The inner and outer walls of the silicone rubber sleeve (102a-1) are coated with vacuum grease. The silicone rubber sleeve (102a-1) is fitted onto the end of the high-voltage cable (101a) to ensure a gapless sealed connection between the high-voltage cable (101a) and the first insulator (102a). The second insulation component (103) includes a second insulator (103a) and a serpentine water-cooling pipe (103a-1) disposed therein. The second insulator (103a) is filled with insulating oil (103b). The serpentine water-cooling pipe (103a-1) is provided with an inlet and an outlet for connection to an external water chiller. The electron excitation assembly (104) includes an anode (104a), a gate (104b), and a cathode (104c) arranged coaxially, and is electrically connected to the first insulating assembly (102) and the second insulating assembly (103) through conductive terminals; An electron beam electromagnetic control unit (200) comprising: The beam channel (201) is sealed to the high-voltage introduction and electron excitation control unit (100) through a sealing ring (201a); The electromagnetic control component (202) includes a coaxial coil (202a), a focusing coil (202b), and a scanning coil (202c) arranged along the beam channel (201) for controlling the quality of the electron beam and its spatial energy distribution.

2. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The high-voltage cable connection assembly (101) further includes a high-voltage cable conductive terminal (101b), which forms a cascade conductive connection with the first insulator conductive terminal (102b) and the second insulator conductive terminal (103c) in sequence.

3. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The silicone rubber sleeve (102a-1) in the first insulating component (102) is tightly crimped with the high voltage cable (101a) through the high voltage cable fixing nut (101a-1).

4. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The serpentine water-cooled pipe (103a-1) in the second insulating assembly (103) is made of metal.

5. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The serpentine water-cooling pipe (103a-1) is spirally arranged around the top inner wall of the second insulator (103a), and its inlet and outlet extend to the outside of the second insulator (103a).

6. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The anode (104a) in the electron excitation assembly (104) is a metal structure with a central through hole, and is arranged coaxially with the first insulator (102a), the second insulator (103a) and the gate (104b).

7. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The high-pressure introduction and electronic excitation control unit (100) also includes a molecular pump interface (105) disposed on its outer shell for connecting a vacuum molecular pump.

8. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The beam channel (201) is fixed to the bottom of the electron beam electromagnetic control unit (200) by screws.

9. The high-voltage electron gun using a water-cooled, oil-cooled composite insulator as described in claim 1, characterized in that: The coaxial coil (202a), focusing coil (202b), and scanning coil (202c) in the electromagnetic control component (202) are respectively connected to an external driving circuit to form an electron beam control system.

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