Vacuum signal connection structure and vacuum processing equipment

Abstract

The utility model provides a vacuum signal connection structure and vacuum processing equipment, comprising a sealing plate which is provided with a plurality of first through holes and is used for being installed on a vacuum cavity so as to seal the vacuum cavity; each first connector comprises a fixed seat and a plurality of first contact pins, the fixed seat is provided with second through holes corresponding to the first contact pins respectively, the first contact pins are installed in the second through holes in a sealed mode, and the first contact pins are connected with the fixed seat; the two ends of the first contact pin extend in the length direction of the second through hole, and the fixing base is installed in one first through hole in a sealed mode. That is to say, the vacuum signal connection structure can not only ensure the sealing performance of the vacuum cavity, but also facilitate the connection with the internal and external signals of the vacuum cavity.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum signal transmission technology, and more specifically, it relates to a vacuum signal connection structure and a vacuum processing equipment. Background Technology

[0002] With continuous technological advancements, the precision and efficiency of vacuum processing equipment are constantly improving. However, transmitting signals from inside a vacuum environment to the outside presents a technical challenge. Therefore, a vacuum signal connection structure is needed to facilitate the transmission of signals from within the vacuum environment to the outside. Utility Model Content

[0003] The present invention provides a vacuum signal connection structure that can conveniently transmit signals from a vacuum environment to the outside of the vacuum environment.

[0004] The technical solution adopted in this utility model is a vacuum signal connection structure, including:

[0005] A sealing plate having a plurality of first through holes is used to be installed on a vacuum chamber to seal the vacuum chamber.

[0006] A plurality of first connectors, each first connector including a fixing seat and a plurality of first pins, wherein the fixing seat is provided with a second through hole corresponding to each first pin, the first pin is sealed and installed in the second through hole, and the two ends of the first pin extend along the length direction of the second through hole, and each fixing seat is sealed and installed in one first through hole.

[0007] In other words, in this application, by providing a first through hole on the sealing plate installed with the vacuum cavity, the first connector can be sealed and installed in the first through hole through the fixing seat. Furthermore, by providing a second through hole on the fixing seat in the first connector, the first pin used to connect the inside and outside of the vacuum cavity can be sealed and installed in the second through hole. This method can ensure the sealing of the vacuum cavity after the sealing plate is installed with the vacuum cavity, and at the same time, it can facilitate the connection of signals inside and outside the vacuum cavity through the two ends of the first pin.

[0008] Optionally, the fixing seat and the first through hole are sealed together by welding, and the sealing plate and the fixing seat are both made of metal.

[0009] The first pin and the second through hole are sealed together by welding, and the first pin is made of metal.

[0010] Optionally, both openings of the first through hole are welded to the fixing base respectively;

[0011] The two openings of the second through hole are respectively welded to the first pin.

[0012] Optionally, the two opposite sides of the fixing base are respectively provided with a first limiting groove and a second limiting groove, and the first limiting groove and the second limiting groove are connected through the second through hole.

[0013] Optionally, a first mounting hole is provided on the fixing seat on the periphery of the first limiting groove, and a second mounting hole is provided on the fixing seat on the periphery of the second limiting groove.

[0014] Optionally, each of the first connectors includes three, five, nine, or twenty-five first pins.

[0015] Optionally, the device may also include a plurality of second connectors, each of which is sealed and installed in one of the first through holes, and both ends of the second connectors extend along the length of the first through hole, wherein the second connectors are electrodes.

[0016] Optionally, the second connector includes a housing, an inner housing, and second pins. The second pins are respectively disposed at both ends inside the housing through the inner housing, and the two second pins are electrically connected. The housing and the first through hole are sealed and installed by welding. The housing is made of metal, and the inner housing is made of ceramic.

[0017] Optionally, a sealing ring is provided on one side of the sealing plate, and the first through hole is located inside the sealing ring; and

[0018] The sealing plate on the outer side of the sealing ring is provided with a plurality of third mounting holes. The sealing plate is fixed to the side wall of the vacuum cavity through the cooperation of the third mounting holes and bolts, and the sealing ring is pressed against the side wall of the vacuum cavity.

[0019] A vacuum processing device includes a vacuum chamber and a vacuum signal connection structure, wherein the vacuum signal connection structure is disposed on the side wall of the vacuum chamber via a sealing plate. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1A schematic diagram of the vacuum signal connection structure provided for the implementation of this utility model;

[0022] Figure 2 A schematic diagram of the structure of the first connector in the vacuum signal connection structure provided for this utility model;

[0023] Figure 3 A schematic diagram of the fixed base in the vacuum signal connection structure provided for the present invention;

[0024] Figure 4 A schematic diagram of the structure of the second connector in the vacuum signal connection structure provided by this utility model.

[0025] Figure label:

[0026] 100. Sealing plate; 110. First through hole; 120. Sealing ring; 130. Third assembly hole;

[0027] 200, First connector; 210, Fixing base; 220, First pin; 230, Second through hole; 240, First limiting groove; 250, Second limiting groove; 260, First mounting hole; 270, Second mounting hole;

[0028] 300, Second connector; 310, Housing; 320, Inner housing; 330, Second pin. Specific Implementation

[0029] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0030] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on or indirectly on that other component. When a component is referred to as being "connected to" another component, it can be directly connected to or indirectly connected to that other component.

[0031] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the vacuum signal connection structure and vacuum processing equipment or components referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In some descriptions of utility models, "a plurality of" means two or more, unless otherwise explicitly specified.

[0033] This application provides a vacuum signal connection structure that can be applied to vacuum processing equipment to facilitate the transmission of signals from inside the vacuum processing equipment to the outside, thereby facilitating communication between the vacuum processing equipment and the outside world.

[0034] See Figures 1 to 3 A vacuum signal connection structure includes a sealing plate 100 and a plurality of first connectors 200. The sealing plate 100 has a plurality of first through holes 110 and is used to install itself on a vacuum chamber to seal the vacuum chamber. Each first connector 200 includes a fixing base 210 and a plurality of first pins 220. The fixing base 210 has a second through hole 230 corresponding to each first pin 220. The first pins 220 are sealed and installed within the second through holes 230, and both ends of the first pins 220 extend along the length of the second through holes 230. Each fixing base 210 is sealed and installed within one first through hole 110.

[0035] It is understood that the two ends of the first pin 220 extend along the length direction of the second through hole 230 respectively. When the sealing plate 100 is installed on the vacuum cavity, one end of the first pin 220 can be used to connect with the device inside the vacuum cavity, and the other end of the first pin 220 can be used to connect with the device outside the vacuum cavity, so as to facilitate the connection of signal transmission inside and outside the vacuum cavity.

[0036] In addition, since the sealing plate 100 is provided with a plurality of first through holes 110 and includes a plurality of first connectors 200, the vacuum signal connection structure may include one or more first connectors 200 for vacuum signal transmission connection. When the vacuum signal connection structure includes multiple first connectors 200, such as two or more, the sealing plate 100 may also be provided with a plurality of first through holes 110, and each first connector 200 is sealed and installed in the first through hole 110 by a fixing seat 210.

[0037] In other words, in this application, by providing a first through hole 110 on the sealing plate 100 installed with the vacuum chamber, the first connector 200 can be sealed and installed in the first through hole 110 through the fixing seat 210. Furthermore, by providing a second through hole 230 on the fixing seat 210 in the first connector 200, the first pin 220 used for connecting the inside and outside of the vacuum chamber can be sealed and installed in the second through hole 230. This method can ensure the sealing of the vacuum chamber after the sealing plate 100 is installed with the vacuum chamber, and at the same time, it can facilitate the connection of signals inside and outside the vacuum chamber through the two ends of the first pin 220.

[0038] Specifically, in one embodiment, one end of the first pin 220 can be used to connect to a signal transmission line inside the vacuum chamber, and the other end of the first pin 220 can be used to connect to a signal transmission line outside the vacuum chamber.

[0039] Furthermore, in order to ensure the sealing performance and sealing stability of the fixing seat 210 installed in the first through hole 110, the fixing seat 210 and the first through hole 110 are sealed by welding.

[0040] Preferably, in one embodiment, in order to improve the welding effect, the sealing plate 100 may be made of metal material, and the fixing seat 210 may also be made of metal material.

[0041] To ensure the sealing performance and stability of the first pin 220 installed in the second through hole 230, the first pin 220 and the second through hole 230 can be sealed by welding.

[0042] Preferably, in one embodiment, in order to improve the welding effect, the first pin 220 may be made of metal and the fixing seat 210 may be made of metal.

[0043] Furthermore, both openings of the first through hole 110 are welded to the fixing seat 210. It can be understood that since the first through hole 110 has openings at both ends, when the fixing seat 210 is installed inside the first through hole 110, the two openings of the first through hole 110 can be welded to the fixing seat 210, thereby improving the stability of the welding between the fixing seat 210 and the first through hole 110, and also improving the sealing performance.

[0044] Both openings of the second through hole 230 are welded to the first pin 220. It can be understood that since the second through hole 230 has openings at both ends, when the first pin 220 is installed inside the second through hole 230, the two openings of the second through hole 230 can be welded to the first pin 220, improving the stability of the weld between the first pin 220 and the second through hole 230, and also improving the sealing performance.

[0045] See Figure 2 and Figure 3 In one embodiment, in order to facilitate the accurate insertion of the first pin 220 into the signal transmission line in the vacuum cavity, a first limiting groove 240 and a second limiting groove 250 are respectively provided on the opposite sides of the fixing base 210, and the first limiting groove 240 and the second limiting groove 250 are connected through the second through hole 230.

[0046] It is understandable that, since the second through hole 230 connects the first limiting groove 240 and the second limiting groove 250, when the first connector 200 is installed in the second through hole 230 through the fixing seat 210, the two ends of the first pin 220 of the first connector 200 can be located in the first limiting groove 240 and the second limiting groove 250 respectively. The first limiting groove 240 and the second limiting groove 250 are positioned when the signal transmission line is plugged into the first pin 220 to ensure that the first pin 220 can be accurately plugged into the signal transmission line.

[0047] Specifically, the number of first pins 220 included in each first connector 200 can be three, five, nine, or twenty-five. For example, in some embodiments, when the vacuum signal connection structure includes multiple first connectors 200, some first connectors 200 may include three first pins 220, some first connectors 200 may include five first pins 220, some first connectors 200 may include nine first pins 220, and some first connectors 200 may include twenty-five first pins 220.

[0048] In one embodiment, a first mounting hole 260 is provided on the fixing seat 210 on the periphery of the first limiting groove 240, and a second mounting hole 270 is provided on the fixing seat 210 on the periphery of the second limiting groove 250. The first mounting hole 260 and the second mounting hole 270 can facilitate the connection of the signal cable to the first pin 220 for fixing.

[0049] See Figure 1 In one embodiment, the vacuum signal connection structure may further include a plurality of second connectors 300, each second connector 300 being sealed and installed within a first through hole 110, and both ends of the second connector 300 extending along the length direction of the first through hole 110, so as to facilitate the connection between the two ends of the second connector 300 inside and outside the vacuum cavity. The second connector 300 may be an electrode.

[0050] For details, please refer to Figure 4In one embodiment, when the second connector 300 is an electrode, in order to enable the second connector 300 to be connected to high voltage while ensuring the sealing between the second connector 300 and the first through hole 110, the second connector 300 includes a housing 310, an inner housing 320, and a second pin 330. The second pins 330 are respectively disposed at both ends inside the housing 310 through the inner housing 320, and the two second pins 330 are electrically connected. The housing 310 and the first through hole 110 are sealed and installed by welding. The housing 310 is made of metal material, and the inner housing 320 is made of ceramic material.

[0051] Understandably, the metal casing 310 facilitates welding with the sealing plate 100, ensuring the welding effect and sealing performance.

[0052] See Figure 1 To improve the sealing performance of the connection between the vacuum signal connection structure and the vacuum cavity, a sealing ring 120 can be provided on one side of the sealing plate 100. The first through hole 110 is located inside the sealing ring 120. Multiple third mounting holes 130 are provided on the sealing plate 100 outside the sealing ring 120. The sealing plate 100 is fixed to the side wall of the vacuum cavity through the engagement of bolts with the third mounting holes 130, and the sealing ring 120 is pressed tightly against the side wall of the vacuum cavity. It can be understood that the sealing ring 120 plays a sealing role after the sealing plate 100 is installed on the vacuum cavity, ensuring the sealing performance of the connection between the sealing plate 100 and the vacuum cavity.

[0053] In addition, this application also provides a vacuum processing device, including a vacuum chamber and a vacuum signal connection structure in the embodiments of this application. The vacuum signal connection structure is disposed on the side wall of the vacuum chamber through a sealing plate 100.

[0054] Specifically, in one embodiment, the sealing plate 100 is fixed to the side wall of the vacuum chamber through the cooperation of the third mounting hole 130 and bolts, and the sealing ring 120 on the sealing plate 100 is pressed against the side wall of the vacuum chamber to achieve a seal between the sealing plate 100 and the vacuum chamber.

[0055] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of some utility models should be included within the protection scope of some utility models.

Claims

1. A vacuum signal connection structure, characterized in that, include: A sealing plate having a plurality of first through holes is used to be installed on a vacuum chamber to seal the vacuum chamber. A plurality of first connectors, each first connector including a fixed base and a plurality of first pins, wherein the fixed base is provided with a second through hole corresponding to each first pin, the first pin is sealed and installed in the second through hole, and the two ends of the first pin extend along the length direction of the second through hole, and each fixed base is sealed and installed in one of the first through holes.

2. The vacuum signal connection structure as described in claim 1, characterized in that, The fixing base and the first through hole are sealed together by welding. The sealing plate and the fixing base are both made of metal. The first pin and the second through hole are sealed together by welding, and the first pin is made of metal.

3. The vacuum signal connection structure as described in claim 2, characterized in that, Both openings of the first through hole are welded to the fixing base respectively; The two openings of the second through hole are respectively welded to the first pin.

4. The vacuum signal connection structure as described in claim 1, characterized in that, The fixed base is also provided with a first limiting groove and a second limiting groove on its opposite sides, and the first limiting groove and the second limiting groove are connected through the second through hole.

5. The vacuum signal connection structure as described in claim 4, characterized in that, A first mounting hole is provided on the fixing seat on the periphery of the first limiting groove, and a second mounting hole is provided on the fixing seat on the periphery of the second limiting groove.

6. The vacuum signal connection structure as described in any one of claims 1 to 5, characterized in that, Each of the first connectors includes three, five, nine, or twenty-five first pins.

7. The vacuum signal connection structure as described in any one of claims 1 to 5, characterized in that, It also includes a plurality of second connectors, each of which is sealed and installed in one of the first through holes, and the two ends of the second connectors extend along the length direction of the first through hole, and the second connectors are electrodes.

8. The vacuum signal connection structure as described in claim 7, characterized in that, The second connector includes a housing, an inner housing, and second pins. The second pins are respectively disposed at both ends inside the housing through the inner housing, and the two second pins are electrically connected. The housing and the first through hole are sealed and installed by welding. The housing is made of metal, and the inner housing is made of ceramic.

9. The vacuum signal connection structure as described in any one of claims 1 to 5, characterized in that, A sealing ring is provided on one side of the sealing plate, and the first through hole is located inside the sealing ring; and The sealing plate on the outer side of the sealing ring is provided with a plurality of third mounting holes. The sealing plate is fixed to the side wall of the vacuum cavity through the cooperation of the third mounting holes and bolts, and the sealing ring is pressed against the side wall of the vacuum cavity.

10. A vacuum processing device, characterized in that, It includes a vacuum chamber and a vacuum signal connection structure as described in any one of claims 1 to 9, wherein the vacuum signal connection structure is disposed on the side wall of the vacuum chamber via the sealing plate.

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