Electric appliance cabinet for vacuum coating device

Abstract

The utility model provides an electric appliance cabinet for a vacuum coating device, which comprises a first cabinet body and a second cabinet body, the two cabinet bodies are separably spliced together, the first cabinet body comprises a control chamber, a tool chamber, a main lock chamber and an electric appliance chamber, the control chamber is positioned above the tool chamber, and the main lock chamber is positioned on the right side of the control chamber and the tool chamber; an instrument panel and a display screen are arranged on the front face of the first cabinet body, an operation table is arranged below the display screen, a first tool chamber door is arranged below the operation table, a controller is arranged in the control chamber, two electric appliance plates fixed through sliding rails are arranged in the electric appliance chamber, and the surfaces of the electric appliance plates are perpendicular to the front face of the first cabinet body. The electric appliance plate can be drawn out from the back of the first cabinet body through the slide rail, and the first cabinet body is provided with openable electric appliance doors at two sides of the electric appliance chamber. And a plurality of power supply modules are arranged in the second cabinet body. The device is reasonable in space layout and convenient to maintain.

Description

Technical Field

[0001] This utility model relates to the field of electrical cabinet technology, specifically to an electrical cabinet for a vacuum coating device. Background Technology

[0002] Vacuum coating technologies (such as magnetron sputtering and electron beam evaporation) are widely used in semiconductors, optics, and new energy fields. Their core equipment requires electrical cabinets for power distribution, signal control, and status monitoring. However, existing electrical cabinets for vacuum coating devices have some shortcomings in practical applications. Traditional cabinets often use an integrated sealed structure, with internal electrical components densely fixed to the back or bottom plate of the cabinet. When the equipment needs parameter adjustments or component replacement, the limited space makes operation extremely inconvenient. Furthermore, the lack of modular design results in poor expandability and adaptability. The diverse nature of vacuum coating processes (such as single-layer films, multi-layer films, and combinations of different target materials) requires electrical cabinets with flexible modular expansion capabilities. However, traditional cabinets use a fixed layout, with power modules and control modules rigidly connected to the cabinet structure. Adding or replacing modules requires redesigning the cabinet space and wiring scheme, which is time-consuming, especially in scientific research scenarios where frequent changes in coating processes are necessary.

[0003] Therefore, this utility model proposes an electrical cabinet for a vacuum coating device with high debugging convenience and operational reliability. Utility Model Content

[0004] This invention provides an electrical cabinet for a vacuum coating device, which can effectively solve the above-mentioned problems.

[0005] This utility model is implemented as follows:

[0006] An electrical cabinet for a vacuum coating apparatus includes:

[0007] The first cabinet and the second cabinet are detachable and can be assembled together. The first cabinet includes a control room, a tool room, a main switch room and an electrical room. The control room is located above the tool room and the main switch room is located to the right of the control room and the tool room.

[0008] The first cabinet has an instrument panel and a display screen on the front, and an operating table below the display screen. The operating table is located below the first tool room door. A controller is located in the control room. The electrical room has two electrical panels fixed by slide rails. The surface of the electrical panels is perpendicular to the front of the first cabinet, and the electrical panels can be pulled out from the back of the first cabinet via the slide rails. The first cabinet also has openable electrical doors on both sides of the electrical room.

[0009] The second cabinet contains several power modules.

[0010] As a further improvement, the first cabinet has a partition on the side where it is spliced ​​with the second cabinet. The partition is detachable and can be installed. The upper and lower rails are fixed with an electrical panel. The rail has a "U" shaped cross section. The electrical panel is fixed to the rail with bolts.

[0011] As a further improvement, the second cabinet is provided with openable cabinet side doors on both sides, one of which is provided with glass for viewing the status of the power module.

[0012] As a further improvement, the instrument panel is equipped with a set of status indicator lights, an electric meter, a furnace temperature gauge, a pump temperature gauge, a start button, a stop button, a main switch, and an emergency stop button.

[0013] As a further improvement, a second tool room door is also provided on the side of the first cabinet.

[0014] As a further improvement, the second cabinet is provided with several vertical guide rails, and the power module is fixed on the guide rails.

[0015] As a further improvement, the first cabinet is provided with a bus hole at the top of the main control room, and the second cabinet is also provided with a cable outlet hole at the top.

[0016] As a further improvement, the inside of the electrical door is provided with a slot for placing the instruction manual.

[0017] As a further improvement, cooling fans are provided on both sides of the first and second cabinets near the top.

[0018] As a further improvement, both the control room and the main switch room are provided with wiring holes on their side walls, so that both the control room and the main switch room are connected to the electrical room.

[0019] The beneficial effects of this utility model are:

[0020] Facilitating transportation and installation, the first and second cabinets can be separated and assembled. For large devices like vacuum coating equipment, disassembly reduces transportation difficulties and makes on-site assembly more flexible. The spatial layout is reasonable, with physical isolation between the control room, tool room, main switch room, and electrical room to avoid mutual interference and improve the stability of the control system. The tool room is located next to the operating table and is divided into upper and lower levels, facilitating the categorization and storage of commonly used tools for quick access during maintenance, reducing travel time. This greatly improves convenience when the vacuum coating equipment needs to be adjusted for different materials. The electrical board is easy to maintain. The electrical board in the electrical room is fixed by a sliding rail, with its surface perpendicular to the front of the first cabinet. When the two cabinets are separated and the baffle is removed, the electrical board can be pulled out from the back of the first cabinet. This design greatly simplifies the replacement and debugging process of electrical components, making it particularly suitable for high-frequency maintenance scenarios. The bolt fixing method also ensures both stability and ease of disassembly. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0022] Figure 1 This is a structural schematic diagram provided by an embodiment of the present utility model.

[0023] Figure 2 This is a schematic diagram of the internal structure provided in an embodiment of the present utility model.

[0024] Figure 3 This is a schematic diagram of the internal structure provided in an embodiment of the present utility model.

[0025] Figure 4 This is a diagram showing the state of the electrical board being pulled out according to an embodiment of this utility model.

[0026] Figure label:

[0027] 1. First cabinet; 11. Control room; 12. Tool room; 121. First tool room door; 122. Second tool room door; 13. Electrical room; 131. Slide rail; 132. Electrical panel; 14. Instrument panel; 15. Display screen; 16. Control panel; 17. Bus port; 18. Electrical door; 181. Storage slot; 19. Main switch room; 110. Partition;

[0028] 2. Second cabinet; 21. Power module; 22. Guide rail;

[0029] 3. Cooling fan. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model. Therefore, the following detailed description of the embodiments of this utility model provided in the accompanying drawings is not intended to limit the scope of the claimed utility model, but merely to represent selected embodiments of this utility model.

[0031] In the description of this utility model, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0032] Reference Figure 1-4 As shown, an electrical cabinet for a vacuum coating apparatus includes:

[0033] The first cabinet 1 and the second cabinet 2 are detachable and can be assembled together, facilitating transportation, installation, and future expansion. This is especially suitable for large devices such as vacuum coating equipment. Disassembly reduces transportation difficulty and allows for flexible on-site assembly. The first cabinet 1 includes a control room 11, a tool room 12, a main switch room 19, and an electrical room 13. The control room 11 is located above the tool room 12, and the main switch room 19 is located to the right of the control room 11 and the tool room 12. The control room 11, tool room 12, main switch room 19, and electrical room 13 are physically isolated to avoid direct interference and improve the stability of the control system. At the same time, the tool room 12 is located next to the operating table 16, which facilitates quick access to tools during maintenance, reduces travel time, and greatly improves convenience, especially when adjusting experiments are required for different materials during the production and manufacturing of vacuum coating equipment. Furthermore, the tool room 12 is divided into upper and lower layers for storing commonly used tools in categories.

[0034] The front of the first cabinet 1 is equipped with an instrument panel 14 and a display screen 15. Below the display screen 15 is an operating platform 16, and below the operating platform 16 is a first tool room door 121. A controller is located in the control room 11. The electrical room 13 contains two electrical panels 132 fixed by slide rails 131. The surfaces of the electrical panels 132 are perpendicular to the front of the first cabinet 1. When the first cabinet 1 and the second cabinet 2 are separated, the baffle on the first cabinet 1 can be removed, and the electrical panels 132 can slide from the first cabinet 1 via the slide rails 131. 1. The back can be pulled out. Preferably, the first cabinet 1 has a partition 110 on the side where it is spliced ​​with the second cabinet 2. After the cabinet is separated, the partition 110 is removed and the fixing bolts of the electrical board 132 and the slide rail 131 are loosened. The electrical board 132 can be pushed out. The slide rail 131 is a set of one electrical board 132 fixed on the upper and lower sides. The cross section of the slide rail 131 is "U". This greatly simplifies the replacement and debugging process of electrical components (such as power controllers and solenoid valves). It is especially suitable for high-frequency maintenance scenarios. The electrical board 132 can be made of galvanized sheet.

[0035] The bolt fixing method balances stability and ease of disassembly, avoiding the cumbersome traditional fixed installation. The first cabinet 1 is also equipped with openable electrical doors 18 on both sides of the electrical room 13.

[0036] The second cabinet 2 contains at least 16 power modules 21, the specific number of which is set according to actual needs.

[0037] Specifically, the second cabinet 2 has openable side doors on both sides. One of the side doors has glass for viewing the status of the power module 21. The status of the power module 21 (such as indicator lights and operating temperature) can be monitored in real time without opening the door, reducing the risk of misoperation and improving the convenience of inspection. In addition, the side door is also equipped with heat dissipation holes near the bottom to facilitate air circulation and heat dissipation inside the unit.

[0038] Specifically, the instrument panel 14 is equipped with a set of status indicator lights, an electric meter, a furnace temperature gauge, a pump temperature gauge, a start button, a stop button, a main switch, and an emergency stop button. Operators can grasp the system parameters without frequently switching perspectives, and the layout of the start / stop / emergency buttons is convenient for operation.

[0039] Specifically, the first cabinet 1 is also provided with a second tool room door 122 on the side, which makes it easy to take out some longer tools and to clean and organize the tool room 12.

[0040] Specifically, the second cabinet 2 is equipped with eight vertical guide rails 22, four rails as a group, and the power module 21 is fixed on the guide rails 22.

[0041] Specifically, the first cabinet 1 has a bus hole 17 on the top of the main switch chamber 19, and the second cabinet 2 has a cable outlet hole on the top.

[0042] Specifically, the inside of the electrical door 18 is provided with a slot 181 for placing the instruction manual, which facilitates quick reference to drawings or operating guidelines during maintenance.

[0043] Specifically, cooling fans 3 are also installed on the sides of the first cabinet 1 and the second cabinet 2 near the top to enhance the heat dissipation effect of the cabinets.

[0044] Specifically, both the control room 11 and the main switch room 19 have wiring holes on their side walls, so that both the control room 11 and the main switch room 19 are connected to the electrical room 13.

[0045] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An electrical cabinet for a vacuum coating apparatus, characterized in that, include: The first cabinet (1) and the second cabinet (2) are detachable and can be spliced ​​together. The first cabinet (1) includes a control room (11), a tool room (12), a main switch room (19) and an electrical room (13). The control room (11) is located above the tool room (12), and the main switch room (19) is located to the right of the control room (11) and the tool room (12). The first cabinet (1) has an instrument panel (14) and a display screen (15) on the front, and an operating table (16) is provided below the display screen (15). The first tool room door (121) is provided below the operating table (16). A controller is provided in the control room (11). Two electrical panels (132) are fixed by slide rails (131) in the electrical room (13). The surface of the electrical panels (132) is perpendicular to the front of the first cabinet (1). The first cabinet (1) is also provided with openable electrical doors (18) on both sides of the electrical room (13). The second cabinet (2) is equipped with several power modules (21).

2. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, The first cabinet (1) has a partition (110) on the side where it is spliced ​​with the second cabinet (2). The partition (110) is detachable and can be installed. The slide rail (131) is fixed with an electrical board (132) on the upper and lower sides. The slide rail (131) has a cross-section in the shape of a "U". The electrical board (132) is fixed to the slide rail (131) with bolts.

3. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, The second cabinet (2) has openable cabinet side doors on both sides, one of which has glass for viewing the status of the power module (21).

4. An electrical cabinet for a vacuum coating apparatus according to claim 2, characterized in that, The instrument panel (14) is equipped with a set of status indicator lights, an electric meter, a furnace temperature gauge, a pump temperature gauge, a start button, a stop button, a main switch, and an emergency stop button.

5. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, The first cabinet (1) is also provided with a second tool room door (122) on its side.

6. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, The two cabinets are provided with several vertical guide rails (22), and the power module (21) is fixed on the guide rails (22).

7. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, The first cabinet (1) has a bus hole (17) on the top of the main switch chamber (19), and the second cabinet (2) also has a cable outlet hole on the top.

8. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, The inside of the electrical door (18) is provided with a slot (181) for placing the instruction manual.

9. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, Cooling fans (3) are provided on both sides of the first cabinet (1) and the second cabinet (2) near the top.

10. An electrical cabinet for a vacuum coating apparatus according to claim 1, characterized in that, Both the control room (11) and the main switch room (19) have wiring holes on their side walls, so that both the control room (11) and the main switch room (19) are connected to the electrical room (13).

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