Carrier alignment system
By combining magnetic levitation transport and alignment modules, the problems of robotic arm damage and chamber deformation during large-area glass transport are solved, achieving stable alignment and fit of the carrier and improving transport accuracy and stability.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- VAD GMBH
- Filing Date
- 2023-11-03
- Publication Date
- 2026-05-15
AI Technical Summary
Traditional robotic arms are prone to damage when transferring large areas of glass, and deformation of the outer wall of the cavity can cause deformation of the carrier transfer device, affecting the fitting accuracy and stability.
The glass carrier is transported by magnetic levitation, and the distance change is detected by the alignment module. The alignment module and control unit compensate for the deformation to achieve stable alignment and bonding between the glass carrier and the mask carrier.
During the large-area glass transfer process, the alignment module compensates for the distance between the transfer module and the glass carrier, ensuring transfer accuracy and stability and avoiding transfer problems caused by chamber deformation.
Smart Images
Figure CN224250140U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to a carrier alignment system, which is equipped with an alignment module capable of moving the conveying module, thereby keeping the distance between the conveying module and the glass carrier constant. Background Technology
[0002] Generally speaking, among display devices, organic light-emitting diodes (OLEDs) have attracted attention as the next generation of display devices due to their advantages such as wide viewing angle, excellent contrast and fast response speed.
[0003] In an organic light-emitting display device, a light-emitting layer and an intermediate layer including the light-emitting layer are included between a first electrode and a second electrode that are opposite to each other. The electrodes and the intermediate layer can be formed by various methods; in the case of a deposition method, the substrate is placed on a carrier and transported.
[0004] Traditionally, there are cluster and inline deposition apparatuses. In a cluster deposition apparatus, deposition chambers for forming films on glass substrates are arranged in a cluster shape. The glass substrates are sequentially fed into each deposition chamber and deposited, thereby depositing multilayer films. On the other hand, in an inline deposition apparatus, the glass substrates for film formation are fed in a straight line and deposited in the deposition chambers. In the inline configuration, multiple deposition chambers are formed in a straight direction.
[0005] However, the traditional method of bonding glass to a mask uses a robotic arm to transfer the glass. But as the area and weight of the glass increase, it becomes difficult to transfer by robotic arm and is prone to damage.
[0006] Therefore, a solution is needed that can achieve stable bonding when using magnetic levitation to transport and bond large areas of glass.
[0007] In addition, the chambers in the vehicle conveying system are usually kept in a vacuum state, which creates a pressure difference between the inside and outside of the chamber. This causes deformation of the outer wall of the chamber, and the vehicle conveying device connected to the outer wall of the chamber also deforms due to the deformation, thus causing problems with the conveying process.
[0008] Therefore, a method is needed to align a vehicle transport device that has deformed due to deformation of the outer wall of the chamber back to its original position. Utility Model Content
[0009] Technical problem to be solved by the utility model
[0010] The purpose of this invention is to provide a method for detecting the deformation of a carrier conveying device caused by the deformation of the outer wall of the chamber due to air pressure difference, and to compensate for the deformation of the carrier conveying device by setting an alignment module. Furthermore, it provides a carrier alignment system that facilitates the alignment and bonding of each carrier by setting an alignment module for separating the magnetic levitation module and the glass carrier before performing the bonding process of glass carriers and mask carriers transported by magnetic levitation.
[0011] Technical solution
[0012] This utility model may include: a glass carrier for placing glass; a conveying module for controlling the conveying of the glass carrier; an alignment module that is combined with the conveying module and moves the conveying module; and a control unit that controls the alignment module based on distance data collected by a distance sensor installed on the conveying module.
[0013] The control unit may further include an alignment module control unit, which controls the alignment module to control the distance between the conveying module and the carrier when the distance data is different from the preset reference distance.
[0014] The distance data may include at least one of the following: a first distance data, the distance between the glass carrier and the transport module combined with the transport module; a second distance data, the distance between the distance measuring block protruding from the upper part of the glass carrier and the transport module; and a third distance data, the distance between the transport module and the chamber wall.
[0015] The control unit may further include an anomaly detection unit, which determines the distance change caused by the deformation of the chamber, the distance change caused by the deformation of the glass carrier, and the distance change caused by the anomaly of the conveying module by analyzing the changes in the distance data.
[0016] The alignment module may include: a plate-shaped alignment frame; an alignment coupling module disposed on the alignment frame for horizontal movement; and an alignment actuator module for causing the alignment coupling module to move horizontally.
[0017] The alignment module may further include a guide rail portion, one side of which is attached to the alignment frame, and the guide rail portion protrudes toward the glass carrier. The guide rail portion can guide the movement of the alignment module.
[0018] The guide rails can be formed at the upper and lower ends of the alignment and bonding module and are used to support the load of the glass carrier transmitted to the alignment and bonding module.
[0019] The conveying module may include: a fixed frame, which is combined with the alignment module; a linear motion system, which extends in a direction horizontal to the ground and is formed at one end of the fixed frame; multiple electromagnets, which are formed on one side of the fixed frame and arranged at constant intervals; and a roller device, which is formed on one side of the fixed frame and arranged between the electromagnets.
[0020] The glass carrier may include: a body for supporting the glass; an electrostatic chuck for holding and supporting the glass on the body by generating static electricity; and a movable frame formed on both sides of the body and receiving the force of the conveying module.
[0021] Utility Model Effect
[0022] This invention has the following advantages: In the deposition process of transporting large-area glass by magnetic levitation, when the distance between the transport module and the glass carrier changes due to the deformation of the outer wall of the chamber, the alignment module can be used to realign the transport module, thereby enabling stable transport of the glass carrier. Attached Figure Description
[0023] Figure 1 This is a cross-sectional view of the vehicle alignment system according to an embodiment of the present invention.
[0024] Figure 2 This is a perspective view of the vehicle alignment system according to an embodiment of the present invention.
[0025] Figure 3 This is a diagram illustrating a glass carrier and a conveying module according to an embodiment of the present invention.
[0026] Figure 4 This is a block diagram illustrating the structure of the control unit according to an embodiment of the present invention.
[0027] Figure 5 This is a top view of a carrier alignment system showing the state in which the alignment module of an embodiment of the present invention moves toward the glass carrier.
[0028] Figure 6 This is a top view of a vehicle alignment system showing the alignment module of an embodiment of the present invention in a state away from the glass carrier.
[0029] Figure 7 This diagram illustrates the combined state of the glass carrier and the conveying module according to an embodiment of the present invention.
[0030] Figure 8 This diagram illustrates the state in which the glass carrier and the conveying module of an embodiment of the present invention are separated by the alignment module.
[0031] Figure 9This is a diagram illustrating a mask carrier and a transport module according to an embodiment of the present invention. Detailed Implementation
[0032] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
[0033] The advantages and features of this invention, as well as the methods for implementing them, will become clear from the accompanying drawings and the embodiments described in detail below.
[0034] However, the present invention is not limited to the embodiments disclosed below, but is implemented in various ways that are different from each other. The embodiments are provided only to make the disclosure of the present invention more complete and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is defined only by the scope of the claims.
[0035] In addition, when describing this utility model, if it is determined that the main idea of this utility model is unclear due to relevant prior art, its detailed description will be omitted.
[0036] Although the present invention has been described above with reference to the embodiments shown in the accompanying drawings, these are merely examples. Those skilled in the art should understand that various modifications can be made, and all or part of the described embodiments can be selectively combined. Therefore, the true scope of protection of the present invention should be determined by the technical concept of the appended claims.
[0037] Figure 1 This is a cross-sectional view of the vehicle alignment system according to an embodiment of the present invention. Figure 2 This is a perspective view of the vehicle alignment system according to an embodiment of the present invention. Figure 3 This is a diagram illustrating a glass carrier and conveying module according to an embodiment of the present invention. Figure 4 This is a block diagram illustrating the structure of the control unit according to an embodiment of the present invention.
[0038] like Figure 1 and Figure 2 As shown, the carrier alignment system may include a chamber 10, a glass carrier 100, a transport module 200, and an alignment module 300.
[0039] The chamber 10 is kept in a vacuum state and may be equipped with the glass carrier 100, the transport module 200 and the alignment module 300.
[0040] Due to the pressure difference between the inside and outside of the chamber 10, the outer wall of the chamber 10 may deform.
[0041] The glass of the glass carrier 100 can be adsorbed and supported by the electrostatic chuck 102 in the attach chamber.
[0042] The glass carrier 100 may include a distance measurement block 110 protruding from the upper part for measuring the distance between the transfer module 200 and the glass carrier 100.
[0043] The transfer module 200 may be arranged on both sides of the glass carrier 100 along the carrier transfer direction.
[0044] The transfer module 200 is in a "C" shape so that the glass carrier 100 can be inserted into and combined with the inside of the transfer module 200.
[0045] The alignment module 300 may be combined with the transfer module 200 and move the transfer module 200, so that the transfer module 200 is separated from and combined with the glass carrier 100.
[0046] As Figure 4 shown, the carrier transfer system using the alignment module 300 may include a control unit 500.
[0047] The control unit 500 may include a distance sensor 510, an abnormality detection unit 520, and an alignment module control unit 530.
[0048] The distance sensor 510 is arranged on the transfer module 200 and can collect the distance data between the transfer module 200 and the glass carrier 100.
[0049] The distance sensor 510 is arranged inside the transfer module 200 and can collect the first distance data A, which is the distance between the glass carrier 100 inserted and combined with the transfer module 200 and the transfer module 200.
[0050] The distance sensor 510 is arranged on the side of the transfer module 200 and can collect the second distance data B, which is the distance between the distance measurement block 110 protruding from the upper part of the glass carrier 100 and the transfer module 200.
[0051] The distance sensor 510 is arranged on the upper or lower part of the transfer module 200 and can collect the third distance data C, which is the distance between the outer wall of the chamber and the transfer module 200.
[0052] The system compares the preset reference distance between the conveying module 200 and the glass carrier 100 with the distance data. When the distance data is different from the preset reference distance, the anomaly detection unit 520 can determine that the conveying module 200 has an anomaly.
[0053] The anomaly detection unit 520 can determine the distance change caused by the deformation of the chamber, the distance change caused by the deformation of the glass carrier 100, and the distance change caused by the anomaly of the conveying module 200 by analyzing the changes in the distance data.
[0054] Specifically, when the first distance data A, the second distance data B, and the third distance data C differ from a preset reference distance, the anomaly detection unit 520 can determine that the distance between the conveying module 200 and the glass carrier 100 has changed due to deformation of the outer wall of the cavity. Furthermore, when the third distance data C remains constant while the first distance data A and the second distance data B change, it can be determined that deformation of the glass carrier 100 has caused a change in the distance between the conveying module 200 and the glass carrier 100. Additionally, when the second distance data B and the third distance data C remain constant while only the first distance data A changes, it can be determined that deformation and an anomaly in the conveying module 200 have caused a change in the distance between the conveying module 200 and the glass carrier.
[0055] Therefore, the abnormality detection unit 520 can determine the deformed and abnormal parts in the chamber, the conveying module 200, and the glass carrier 100 and transmit the information to the user.
[0056] When the anomaly detection unit 520 detects an anomaly, the alignment module control unit 530 can control the alignment module 300 to control the distance data to have the same value as the preset reference distance.
[0057] Specifically, when the distance data is above a preset reference distance, the alignment module control unit 530 can move the conveying module 200 towards the glass carrier 100 via the alignment module 300, thereby controlling the distance data to be the same as the preset reference distance.
[0058] In addition, when the distance data is below a preset reference distance, the alignment module 300 can be used to move the conveying module 200 away from the glass carrier 100, thereby controlling the distance data to be the same as the preset reference distance.
[0059] like Figure 3As shown, the conveying module 200 may include a fixed frame 201, an electromagnet 202, a linear motion system 204, and a roller device 203.
[0060] The fixed frame 201 can be disposed in the cavity and has a protrusion that protrudes toward the glass carrier 100.
[0061] The electromagnets 202 are spaced apart at constant intervals and are arranged in multiples, which can levitate the glass carrier 100 by generating electromagnetic force.
[0062] One side of the electromagnet 202 can be fixed to the fixed frame 201 and protrude toward the glass carrier 100.
[0063] The roller device 203 is disposed between the electromagnets 202 and connected to the glass carrier 100, and can guide the movement of the glass carrier 100.
[0064] The roller device 203 may include a roller that contacts the vehicle, a suspension for absorbing the impact caused by the contact between the roller and the vehicle, and a pressure sensor connected to one side of the suspension to measure the pressure applied by the vehicle.
[0065] The roller can limit the levitation height of the glass carrier 100 levitated by magnetic force, preventing it from leviting above a specified distance, and guide the position of the glass carrier 100.
[0066] The pressure sensor generates pressure data by measuring the pressure acting on the contact surface between the roller and the glass carrier 100.
[0067] The linear motion system 204 can be configured on the fixed frame 201 along the conveying direction of the glass carrier 100 and is used to convey the glass carrier 100.
[0068] The glass carrier 100 may include: a main body 101 for supporting the glass; an electrostatic suction cup 102 for attaching the glass to the lower surface of the main body 101 by generating static electricity; and a movable frame 103 formed on both sides of the main body 101 and in a shape corresponding to the fixed frame 201.
[0069] The main body 101 is plate-shaped and can be held and supported by adsorbing the glass from the bottom.
[0070] The electrostatic chuck 102 can attract the glass to the lower part of the body 101 and transport it by generating static electricity on the body 101.
[0071] The movable frame 103 can be formed on both sides of the main body and has a shape corresponding to the shape of the conveying module.
[0072] Specifically, the movable frame 103 is in the shape of a "C" and can be configured such that the electromagnet 202 is inserted in the opening direction.
[0073] By arranging the propulsion magnet 104 and the suspension magnet 105 at positions corresponding to the linear motion system 204, the movable frame 103 can receive the force of the linear motion system 204.
[0074] The propulsion magnet 104 can be arranged on the upper part of the movable frame 103 opposite to the linear motion system 204 described later.
[0075] The propulsion magnet 104 can transmit the vehicle by receiving the electromagnetic force generated by the linear motion system 204.
[0076] The suspension magnet 105 can be arranged inside the movable frame 103 opposite to the electromagnet 202 and the roller device 203 described later.
[0077] The suspension magnet 105 can levitate the glass vehicle 100 by receiving the electromagnetic force generated by the electromagnet 202.
[0078] The alignment module 300 can be combined with the conveying module 200 and move the conveying module 200, so as to separate and combine the conveying module 200 with the glass vehicle 100.
[0079] As Figure 5 shown, the alignment module 300 can include a plate-shaped alignment frame 301, an alignment combination module 302 arranged on the alignment frame 301, and an alignment actuator module 303.
[0080] The alignment frame 301 can include a guide rail part 304. Rails are formed at both ends of the guide rail part 304, and the rails protrude towards the glass vehicle 100 and can guide the alignment combination module 302 to move horizontally.
[0081] The guide rail part 304 supports the alignment combination module 302, thereby preventing the alignment actuator module 303 or the conveying module 200 from sagging due to the weight of the glass vehicle 100.
[0082] Specifically, the guide rail part 304 and the alignment frame 301 are formed with a relatively thick joint part, so that the alignment combination module 302 can be supported even under high loads.
[0083] The alignment combination module 302 can move horizontally and combine with one side of the conveying module 200, thereby moving the conveying module 200.
[0084] The alignment actuator module 303 can be combined with the alignment coupling module 302, thereby enabling the alignment coupling module 302 to move horizontally.
[0085] The alignment actuator module 303 can move the conveying module 200 to a distance from the glass carrier 100 without causing interference by moving the alignment coupling module 302.
[0086] Therefore, the conveying module 200 and the glass carrier 100 are completely separated, thereby enabling the vertical movement of the glass carrier 100.
[0087] Figure 7 This diagram illustrates the combined state of the glass carrier and the conveying module according to an embodiment of the present invention. Figure 8 This diagram illustrates the state in which the glass carrier and the conveying module of an embodiment of the present invention are separated by the alignment module.
[0088] Reference Figure 5 When the glass carrier 100 is being transported, the alignment module 300 of this embodiment of the present invention can move the alignment coupling module 302 toward the glass carrier 100 through the alignment actuator module 303, thereby the transport module 200 coupled with the alignment coupling module 302 controls the transport of the glass carrier 100.
[0089] At this time, the alignment coupling module 302 is separated from the alignment frame 301, and due to the weight of the glass carrier 100, the alignment actuator module 303 part coupled with the alignment coupling module 302 is subjected to a strong load, which may cause the alignment actuator to bend.
[0090] Therefore, by providing the guide rails 304 at the upper and lower ends of the alignment and coupling module 302, the alignment actuator can be prevented from bending even under strong loads.
[0091] When the glass carrier 100 reaches the predetermined position, such as Figure 7 As shown, the alignment module 300 moves the alignment coupling module 302 toward the alignment module 300 via the alignment actuator module 303, thereby separating the conveying module 200 and the glass carrier 100.
[0092] The alignment and coupling module 302 can move to a position where it does not interfere with the conveying module 200 when the glass carrier 100 moves up and down.
[0093] Figure 9 This is a diagram illustrating a mask carrier and a transport module according to an embodiment of the present invention.
[0094] As Figure 9 shown, the magnetic levitation module of the mask carrier may be composed of a fixed frame, an electromagnet, a linear motion system, a roller device, and a permanent magnet.
[0095] The magnetic levitation module may be formed in multiple chambers and form a moving path for the movement of the mask carrier.
[0096] The fixed frame 211 may be formed in a chamber along the moving path of the carrier 110 and have a plurality of protrusions 216 protruding horizontally on the ground.
[0097] The protrusions 216 may be formed on one side of the fixed frame 211 and protrude toward the carrier 110.
[0098] In an embodiment of the present utility model, the protrusions 216 may be formed at the upper, middle, and lower ends of the fixed frame 211, and a "C" - shaped space is formed between the protrusions 216 formed at each end.
[0099] A plurality of the electromagnets 212 may be arranged at a constant interval on the protrusions 216 and adjust the magnetic levitation height and inclination of the carrier 110 by generating electromagnetic force.
[0100] The electromagnet 212 may control the direction of the electromagnetic force to provide an attractive force and a repulsive force to the carrier 110.
[0101] In an embodiment of the present utility model, the electromagnet 212 is arranged on the protrusions 216 formed at the lower end of the protrusions 216 and generates electromagnetic force, but is not limited thereto. The electromagnet 212 may be arranged on the protrusions 216 formed at the upper and middle ends of the protrusions 216, or may be arranged on the upper part of the protrusions 216.
[0102] The roller device 213 may be arranged between the electromagnets 212 and contact the carrier 110.
[0103] The roller device 213 may limit the levitation height of the carrier 110 so that the carrier 110 does not levitate more than a specified distance due to magnetic force and guide the movement of the carrier 110.
[0104] In an embodiment of the present utility model, the roller device 213 is arranged on the protrusions 216 formed at the lower end of the protrusions 216 and contacts the carrier 110, but is not limited thereto. The roller device 213 may be arranged on the protrusions 216 formed at the upper and middle ends of the protrusions 216 and arranged on the upper part of the protrusions 216.
[0105] Specifically, the permanent magnet 215 can generate an electromagnetic force to create an attractive force between the permanent magnet 215 and the vehicle 110, thereby enabling the vehicle 110 to levitate.
[0106] In this embodiment of the invention, the permanent magnet 215 is disposed in the protrusion 216 formed at the middle end of the protrusion 216, enabling the carrier 110 to be magnetically levitated. However, this is not a limitation; the permanent magnet 215 may be disposed in the protrusions 216 formed at the upper and lower ends, or in the upper part of the protrusion 216. The linear motion system 214 is disposed in the protrusion 216 and generates electromagnetic force, thereby enabling the carrier 110 to be transported.
[0107] The linear motion system 214 of this utility model embodiment is disposed on the protrusion 216 formed at the upper end of the protrusion 216 and conveys the carrier 110, but it is not limited thereto. The linear motion system 214 may be disposed on the protrusion 216 formed at the middle and lower ends of the protrusion 216, or it may be disposed on the upper part of the protrusion 216.
[0108] The movable frame 113 is formed on both sides of the mask carrier body 110, and can be formed into a shape corresponding to the shape of the magnetic levitation module.
[0109] The propulsion magnet 114 can be disposed on the upper part of the movable frame 113 opposite to the linear motion system 214.
[0110] The propulsion magnet 114 can receive the electromagnetic force generated by the linear motion system 214 to transport the vehicle 110.
[0111] The levitation magnet 115 can be disposed on the upper part of the central movable frame 113 opposite to the permanent magnet 215.
[0112] The levitation magnet 115 can receive the electromagnetic force generated by the permanent magnet 215 to levitate the vehicle 110.
[0113] The adjusting magnet 116 can be located at the lower part opposite to the electromagnet 212 or the roller device 213 and at the upper part of the movable frame 113.
[0114] The adjusting magnet 116 can receive the electromagnetic force generated by the electromagnet 212 to adjust the height and tilt of the vehicle 110.
[0115] Even after the glass carrier 100 and the mask carrier 110 are bonded together, distance data can still be collected by the distance sensor 510 installed in the conveying module 200.
[0116] After the glass carrier 100 and the mask carrier 110 are attached, the distance sensor 510 can be set inside the conveying module 200 and collect the first distance data A, which is the distance between the mask carrier 110 and the conveying module 200 inserted into and attached to the conveying module 200.
[0117] The distance sensor 510 can be disposed on the side of the conveying module 200 and collect second distance data B, which is the distance between the distance measuring block 110 protruding on the upper part of the glass carrier 100 and the conveying module 200.
[0118] The distance sensor 510 can be installed on the upper or lower part of the conveying module 200 and collect third distance data C, which is the distance between the outer wall of the cavity and the conveying module 200.
[0119] When the distance data changes, the alignment module control unit 530 can control the alignment module 300 to align the distance between the conveying module 200 and the carrier 100.
[0120] That is, the alignment module control unit 530 can control the distance data to have the same value as the preset reference distance.
[0121] 100: Glass carrier; 101: Main body
[0122] 102: Electrostatic chuck 103: Movable frame
[0123] 200: Conveying module; 201: Fixed frame
[0124] 202: Electromagnet 203: Roller device
[0125] 204: Linear motion system; 300: Alignment module
[0126] 301: Alignment frame; 302: Alignment assembly module
[0127] 303: Alignment Actuator Module
[0128] 400: Control unit; 410: Distance sensor
[0129] 420: Anomaly detection unit; 430: Alignment module control unit.
Claims
1. A vehicle alignment system, characterized in that, include: Glass carrier, for placing glass; A conveying module is used to control the conveying of the glass carrier; The alignment module is combined with the conveying module and the conveying module is moved. as well as The control unit controls the alignment module based on distance data collected by a distance sensor installed on the conveying module.
2. The vehicle alignment system according to claim 1, characterized in that, The control unit also includes: The alignment module control unit controls the alignment module to control the distance between the conveying module and the carrier when the distance data differs from the preset reference distance.
3. The vehicle alignment system according to claim 2, characterized in that, The distance data includes at least one of the following: The first distance data is the distance between the glass carrier and the conveying module, which are combined with the conveying module; The second distance data highlights the distance between the distance measuring block formed on the upper part of the glass carrier and the conveying module; and The third distance data is the distance between the delivery module and the chamber wall.
4. The vehicle alignment system according to claim 3, characterized in that, The control unit also includes: The anomaly detection unit analyzes the changes in the distance data to determine the distance changes caused by the deformation of the chamber, the deformation of the glass carrier, and the anomalies of the conveying module.
5. The vehicle alignment system according to claim 1, characterized in that, The alignment module includes: Plate-shaped alignment frame; Alignment and coupling module, disposed on the alignment frame for horizontal movement; and Align the actuator module to move the alignment coupling module horizontally.
6. The vehicle alignment system according to claim 5, characterized in that, The alignment module also includes: The guide rail is attached to the alignment frame on one side, and the guide rail protrudes toward the glass carrier. The guide rail guides the movement of the alignment and coupling module.
7. The vehicle alignment system according to claim 6, characterized in that, The guide rails are formed at the upper and lower ends of the alignment and bonding module and are used to support the load of the glass carrier transmitted to the alignment and bonding module.
8. The vehicle alignment system according to claim 1, characterized in that, The conveying module includes: A fixed frame is attached to the alignment module; A linear motion system extends horizontally to one end of the fixed frame; Electromagnets, formed on one side of the fixed frame, are arranged in plurality at predetermined intervals; and A roller assembly is formed on one side of the fixed frame and disposed between the electromagnets.
9. The vehicle alignment system according to claim 1, characterized in that, The glass carrier includes: The main body is used to support the glass; An electrostatic chuck, which uses static electricity to hold and support the glass in the body; and A movable frame is formed on both sides of the main body and receives the force of the conveying module.