Limiting mechanism and wafer transportation box

Abstract

The utility model discloses a limiting mechanism and a wafer transport box, which are characterized in that a fixing frame is provided with an abutting block and a rotating hole, a deflection body is rotatably arranged on the fixing frame, one side of the deflection body is provided with a rebound piece which abuts against the abutting block, and the other side of the deflection body is provided with a plurality of limiting pieces. One end of the rotating piece penetrates through the rotating hole to be connected with the deflection body so as to drive the deflection body to deflect relative to the fixing frame; wherein under the deflection of the deflection body driven by the rotating piece, each limiting piece is deflected to a first position in contact with the wafer or a second position far away from the wafer, so that the wafer in the wafer transportation box is quickly limited and fixed, the condition that the wafer shakes in the transportation process is avoided, and the wafer is effectively protected.

Description

Technical Field

[0001] This utility model relates to the field of wafer transport equipment, and in particular to a limiting mechanism and a wafer transport box. Background Technology

[0002] Wafers are an important material for manufacturing semiconductor devices. When multiple wafers are stacked and transported, it is necessary to avoid damage or scratches to the wafers. In response to this situation, technicians in the field have proposed a variety of packaging boxes for packaging and transporting wafers. However, these packaging boxes are difficult to prevent the wafers from being damaged due to shaking inside the packaging box during transportation. Utility Model Content

[0003] The purpose of this utility model is to address the technical problems existing in the background art by proposing a limiting mechanism.

[0004] To achieve the above-mentioned technical objectives, the technical solution adopted by this utility model in the first aspect is as follows:

[0005] A limiting mechanism is provided for contacting and restricting the movement of a wafer. The limiting mechanism includes a fixed frame, a deflector, and a rotating member. The fixed frame is provided with an abutment block and a rotating hole. The deflector is rotatably placed on the fixed frame. One side of the deflector is provided with a spring-loaded member that abuts against the abutment block. The other side of the deflector is provided with multiple limiting members. One end of the rotating member passes through the rotating hole and is connected to the deflector to drive the deflector to deflect relative to the fixed frame. Under the deflection driven by the rotating member, each limiting member is deflected to a first position contacting the wafer or a second position away from the wafer.

[0006] Preferably, the limiting element includes a spring and a toothed piece attached to the end of the spring.

[0007] Preferably, the dental chip includes a chip body and two blocks. The chip body is obliquely connected to the end of the spring piece, and the two blocks are symmetrically arranged on the end of the chip body away from the spring piece. The opposing surfaces of the two blocks are provided with inclined surfaces, and a confining space is formed between the two inclined surfaces.

[0008] Preferably, the deflection shaft of the deflector is provided with a through mounting hole, and the first end of the rotating component is connected to the mounting hole to drive the deflector to deflect relative to the fixed frame.

[0009] Preferably, the mounting hole includes a cross-shaped hole, and the rotating component includes a cross-shaped guide post adapted to the cross-shaped hole.

[0010] Preferably, the rotating component further includes an adjusting crossbar connected to the cross-shaped guide post, and the fixed frame is provided with an adjusting groove. The end of the adjusting crossbar extends into the adjusting groove, wherein the end of the adjusting crossbar moves within the adjusting groove to limit the deflection angle of the rotating component.

[0011] Preferably, the bottom surface of the adjustment groove is inclined, and the end of the adjustment bar moves along the inclined bottom surface inside the adjustment groove, so that the cross-shaped guide post and the deflector spiral up or spiral down together.

[0012] Preferably, the rotating component further includes a protrusion connected to the adjusting crossbar and extending away from the cross guide post.

[0013] Preferably, the limiting mechanism further includes a sleeve fitted over the portion of the cross-shaped guide post that extends through the mounting hole.

[0014] In a second aspect, this utility model employs a wafer transport box, which includes a limiting mechanism according to any of the above-described solutions.

[0015] Compared with the prior art, the utility model has the following beneficial technical effects: it adopts a fixed frame with an abutment block and a rotating hole, the deflector is rotatably placed on the fixed frame, one side of the deflector is provided with a spring-loaded component that abuts against the abutment block, and the other side of the deflector is provided with multiple limiting components. One end of the rotating component passes through the rotating hole and is connected to the deflector to drive the deflector to deflect relative to the fixed frame; wherein, under the deflection driven by the rotating component, each limiting component is deflected to a first position contacting the wafer or a second position away from the wafer, thereby realizing rapid positioning and fixing of the wafer in the wafer transport box, avoiding the wafer from shaking during transportation, and effectively protecting the wafer. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model. Figure 1 ;

[0017] Figure 2 This is a schematic diagram of the structure of an embodiment of the present utility model. Figure 2 ;

[0018] Figure 3 This is an exploded view of an embodiment of the present invention;

[0019] Figure 4 This is a schematic diagram of the structure of the limiting member in an embodiment of the present utility model;

[0020] Figure 5 This is an exploded view of an embodiment of the present invention applied to a wafer transport box.

[0021] Icon labels:

[0022] 100 Fixing frame, 101 Abutting block, 102 Rotating hole, 103 Adjusting groove, 200 Deflecting body, 201 Springback component, 202 Restricting component, 2021 Spring piece, 2022 Tooth piece, 20221 Plate body, 20222 Block body, 20223 Restricting space, 203 Mounting hole, 300 Rotating component, 301 Cross-shaped guide post, 302 Adjusting crossbar, 303 Protrusion, 400 Sleeve. Detailed Implementation

[0023] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0024] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or assembly referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more features. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0025] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a link, or a specific connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the connection within two groups. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0027] like Figures 1-5As shown, the present invention provides a limiting mechanism in the first aspect, which includes a fixed frame 100, a deflector 200, and a rotating member 300. The fixed frame 100 is provided with an abutment block 101 and a rotating hole 102. The deflector 200 is rotatably placed on the fixed frame 100. A spring-loaded member 201 is provided on one side of the deflector 200, and the spring-loaded member 201 abuts against the abutment block 101. A plurality of limiting members 202 are provided on the other side of the deflector 200. One end of the rotating member 300 passes through the rotating hole 102 and is connected to the deflector 200 to drive the deflector 200 to deflect relative to the fixed frame 100. Under the deflection driven by the rotating member 300, each limiting member 202 is deflected to a first position contacting the wafer or a second position away from the wafer.

[0028] Specifically, the limiting mechanism is assembled inside the wafer transport box and is used to fix multiple wafers inside the wafer transport box, limiting the shaking and other behaviors of each wafer in the wafer transport box, and ensuring that the wafers can be better protected during transportation. The fixing frame 100 is fixed inside the wafer transport box, and the deflector 200 is placed on the fixing frame 100 and can deflect relative to the fixing frame 100. During the deflection of the deflector 200, the spring member 201 can abut against the abutment block 101. It should be noted that the degree of abutment between the spring member 201 and the abutment block 101 depends on the deflection amplitude of the deflector 200.

[0029] In this embodiment, the spring-loaded component 201 has an inverted L-shaped sheet structure. Its short side is connected to the deflector 200, and its long side extends toward the abutment block 101. The inverted L-shaped sheet structure has elastic deformation capability. When the deflector 200 deflects to the first position where each limiting component 202 contacts the corresponding wafer, the long side of the spring-loaded component 201 abuts against the abutment block 101 and is in a state of bending deformation and elastic energy storage. In this state, the rotation state of the rotating component 300 is restricted. Here, an additional locking component can be used to restrict the deflection of the rotating component 300. Of course, the structure of the wafer transport box can also be used on-site. In this embodiment, the rotating component 300 is a long strip structure, and its size is exactly matched with the depth dimension of the wafer transport box. Therefore, during assembly, the bottom and the cover of the wafer transport box abut against the two ends of the rotating component 300 to restrict the deflection of the rotating component 300.

[0030] As can be understood from the above, when each limiting component 202 is in the first position, the spring-loaded component 201 is in an elastic energy storage state. Therefore, when the corresponding lock is unlocked or the cover of the wafer transport box is opened to remove the rotation restriction on the rotating component 300, the restriction deflection of the spring-loaded component 201 also disappears accordingly, and the stored elastic potential energy is released, causing the entire deflecting body 200 to deflect, so that each limiting component 202 deflects in the opposite direction to the wafer (first position), that is, it moves closer to and is placed in the second position. At this time, each wafer in the wafer transport box loses its movement restriction, and the staff can directly take out the wafer.

[0031] Furthermore, the limiting member 202 includes a spring piece 2021 and a toothed piece 2022 connected to the end of the spring piece 2021.

[0032] Specifically, since a wafer is a silicon wafer with a very thin structure, it is difficult to withstand excessive external force. Therefore, in this embodiment, a spring 2021 and a tooth 2022 are used as limiting structures that contact the wafer. When the deflector 200 is deflected to the first position, the end of the tooth 2022 abuts against the edge of the wafer. Since the spring 2021 and the tooth 2022 have a certain degree of elasticity, they can abut against the wafer to limit the movement of the wafer in the wafer transport box, while reducing the force on the edge of the wafer, effectively protecting the wafer, and can also be adapted to wafers of different sizes.

[0033] Furthermore, the dental plate 2022 includes a plate body 20221 and two blocks 20222. The plate body 20221 is obliquely connected to the end of the spring piece 2021. The two blocks 20222 are symmetrically arranged on the end of the plate body 20221 away from the spring piece 2021. The opposing surfaces of the two blocks 20222 are provided with inclined surfaces, and a confinement space 20223 is formed between the two inclined surfaces.

[0034] Specifically, the wafer body 20221 and the spring piece 2021 are an integral structure. The wafer body 20221 is inclined relative to the spring piece 2021. The inclination angle is determined according to the bending degree of the spring piece 2021 and the size of the wafer. In this embodiment, the inclination angle range is selected as 15°-25°. Since there is a certain error between the position of the limiting member 202 and the corresponding wafer position when the limiting structure is assembled into the wafer transport box, two blocks 20222 with inclined surfaces are combined to form a limiting space 20223 between them. When the limiting member 202 is in the first position, the wafer will approach the two blocks 20222 of the wafer body 20222 and enter the limiting space 20223. Here, the wafer may be in one of the following two situations: contact with the inclined surface of one of the blocks 20222, or exactly in the center position between the two blocks 20222. In both states, the movement of the wafer can be well restricted, effectively protecting the wafer.

[0035] Furthermore, the deflection body 200 has a through mounting hole 203 on its deflection central shaft, and the first end of the rotating component 300 is connected to the mounting hole 203 to drive the deflection body 200 to deflect relative to the fixed frame 100.

[0036] Mounting hole 203 includes a cross-shaped hole, and rotating member 300 includes a cross-shaped guide post 301 adapted to the cross-shaped hole.

[0037] The rotating component 300 also includes an adjusting crossbar 302 connected to the cross-shaped guide post 301. The fixed frame 100 is provided with an adjusting groove 103. The end of the adjusting crossbar 302 extends into the adjusting groove 103. The end of the adjusting crossbar 302 moves within the adjusting groove 103 to limit the deflection angle of the rotating component 300.

[0038] The bottom surface of the adjustment groove 103 is inclined. The end of the adjustment bar 302 moves along the inclined bottom surface within the adjustment groove 103, causing the cross-shaped guide post 301 and the deflector 200 to spiral up or spiral down together.

[0039] Specifically, by deflecting the adjusting crossbar 302, the cross-shaped guide post 301 is rotated, thereby causing the deflecting body 200 to deflect on the fixed frame 100. It should be noted that the end of the adjusting crossbar 302 extends into the adjusting groove 103. Therefore, the deflection angle of the adjusting crossbar 302 is limited by the adjusting groove 103. That is, the width of the groove opening of the adjusting groove 103 is the deflection amplitude of the adjusting crossbar 302. In this embodiment, the bottom surface of the adjusting groove 103 is designed to be inclined, and its inclined direction is towards the deflecting body 200. That is, the highest slope of the bottom surface of the adjusting groove 103 is close to the deflecting body 200. On one side, when the adjusting bar 302 moves along the bottom surface of the adjusting groove 103 and deflects towards the highest point, the cross-shaped guide post 301 and the deflecting body 200 move in a spiral upward motion posture, and vice versa. It should be noted that in this embodiment, when the cross-shaped guide post 301 and the deflecting body 200 are in a spiral upward motion posture, each limiting member 202 deflects to the first position that contacts the wafer. Conversely, when the cross-shaped guide post 301 and the deflecting body 200 are in a spiral downward motion posture, each limiting member 202 disengages from the wafer and deflects to the second position.

[0040] Furthermore, the rotating component 300 also includes a protrusion 303, which is connected to the adjusting crossbar 302 and extends away from the cross guide post.

[0041] The limiting mechanism also includes a sleeve 400, which is fitted onto the portion of the cross-shaped guide post 301 that protrudes from the mounting hole 203.

[0042] The mounting bracket 100 is fixed inside the wafer transport box and is relatively close to the opening of the wafer transport box. That is, a deflector 200 and a sleeve 400 are provided between the mounting bracket 100 and the bottom surface of the wafer transport box. A hole is provided on the bottom surface of the wafer transport box. The end of the rotating member 300 passes through the mounting hole 203 of the deflector 200 and the sleeve 400 and extends into the hole. The hole is used to restrict the non-axial movement of the rotating member 300, so that the rotating member 300 can move upward and downward along its own axis and deflect axially. The sleeve 400 serves as an extension of the deflector 200 and restricts the vertical displacement of the deflector 200.

[0043] In this embodiment, the limiting mechanism of the rotating component 300 utilizes the cooperation between the cover of the wafer transport box and the abutment block 101 on the fixing frame 100. When the cover closes the wafer transport box, its surface contacts the protrusion 303. During the process of the cover fully closing the wafer transport box, the rotating component 300 is continuously squeezed and moves along its own axis and toward the sleeve 400. Moreover, under the limiting mechanism of the adjusting crossbar 302 and the adjusting groove 103, the rotating component 300 moves in a spiral motion with a certain deflection amplitude. This motion state is the spiral upward motion of the rotating component 300 mentioned above. At this time, each limiting component 202 moves... The device moves to the first position and contacts the corresponding wafer edge to restrict the movement of the wafer in the wafer transport box. Since the cover is now completely closed on the wafer transport box, the adjusting bar 302 cannot move along the bottom surface of the adjusting groove 103 toward the lowest point. Therefore, the movement of the rotating part 300 is restricted and fixed. To release this state, simply open the cover. The movement restriction of the adjusting bar 302 on the adjusting groove 103 is released, and it moves toward the lowest point. The entire rotating part 300 spirals down along its own axis, and each restricting part 202 deflects away from the corresponding wafer, allowing the operator to remove the wafer.

[0044] In a second aspect, this utility model provides a wafer transport box, which includes a limiting mechanism according to any of the above-described solutions.

[0045] The above description provides one or more embodiments in conjunction with specific content, but it is not intended that the specific implementation of this utility model is limited to these descriptions. Any methods or structures that are similar to or identical to those of this utility model, or any technical deductions or substitutions made based on the concept of this utility model, should be considered within the scope of protection of this utility model.

Claims

1. A limiting mechanism for contacting and limiting the movement of a wafer, characterized in that, include: A fixing frame (100) is provided with an abutment block (101) and a rotating hole (102); A deflector (200) is rotatably mounted on the fixed frame (100). One side of the deflector (200) is provided with a spring-loaded member (201) for abutting against the abutting block (101). The other side of the deflector (200) is provided with a plurality of limiting members (202). A rotating component (300) has one end passing through the rotating hole (102) and connected to the deflecting body (200) to drive the deflecting body (200) to deflect relative to the fixed frame (100); Wherein, under the deflection driven by the rotating member (300), each of the limiting members (202) is deflected to a first position contacting the wafer or a second position away from the wafer.

2. The limiting mechanism according to claim 1, characterized in that, The limiting member (202) includes a spring (2021) and a toothed piece (2022) connected to the end of the spring (2021).

3. The limiting mechanism according to claim 2, characterized in that, The dental plate (2022) includes a plate body (20221) and two blocks (20222). The plate body (20221) is obliquely connected to the end of the spring piece (2021). The two blocks (20222) are symmetrically arranged on the end of the plate body (20221) away from the spring piece (2021). The opposing surfaces of the two blocks (20222) are provided with inclined surfaces, and a confinement space (20223) is formed between the two inclined surfaces.

4. The limiting mechanism according to claim 1, characterized in that, The deflecting body (200) has a through mounting hole (203) on its deflection axis. The first end of the rotating component (300) is connected to the mounting hole (203) to drive the deflecting body (200) to deflect relative to the fixed frame (100).

5. A limiting mechanism according to claim 4, characterized in that, The mounting hole (203) includes a cross-shaped hole, and the rotating member (300) includes a cross-shaped guide post (301) adapted to the cross-shaped hole.

6. A limiting mechanism according to claim 5, characterized in that, The rotating component (300) also includes an adjusting crossbar (302) connected to the cross-shaped guide post (301). The fixing frame (100) is provided with an adjusting groove (103). The end of the adjusting crossbar (302) extends into the adjusting groove (103). The end of the adjusting crossbar (302) moves within the adjusting groove (103) to limit the deflection angle of the rotating component (300).

7. A limiting mechanism according to claim 6, characterized in that, The bottom surface of the adjustment groove (103) is inclined. The end of the adjustment bar (302) moves along the inclined bottom surface within the adjustment groove (103), so that the cross-shaped guide post (301) and the deflector (200) spiral up or spiral down together.

8. A limiting mechanism according to claim 7, characterized in that, The rotating component (300) also includes a protrusion (303) connected to the adjusting crossbar (302) and extending away from the cross-shaped guide post (301).

9. A limiting mechanism according to claim 5, characterized in that, It also includes a sleeve (400), which is fitted onto the portion of the cross-shaped guide post (301) that extends through the mounting hole (203).

10. A wafer transport box, characterized in that, Includes a restriction mechanism as described in any one of claims 1-9.

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