Mechanism for improving air tightness of furnace tube of diffusion oxidation annealing furnace

Abstract

The utility model belongs to the related technical field of annealing furnaces, and particularly relates to a mechanism for improving the air tightness of a furnace tube of a diffusion oxidation annealing furnace, which comprises a first wrapping sleeve and a second wrapping sleeve which are rotationally connected through a rotary connecting device, the inner wall of the first wrapping sleeve and the inner wall of the second wrapping sleeve are fixedly connected with two sealing gaskets which are symmetrically arranged and are of arc-shaped structures. According to the mechanism for improving the air tightness of the furnace tubes of the diffusion oxidation annealing furnace, when the air tightness of the flange connecting part of the two furnace tubes is detected, the first wrapping sleeve and the second wrapping sleeve are sleeved at the flange connecting part of the two furnace tubes, and then the piston rod is pulled by the handle to drive the piston column to compress the spring; and air above a piston column in the fixed cylinder is extruded and discharged from a plurality of air outlet holes, and then an arc-shaped extrusion plate is pushed by a push rod to move from a first arc-shaped guide seat to a second guide groove in a second arc-shaped guide seat.

Description

Technical Field

[0001] This utility model belongs to the technical field of annealing furnaces, specifically relating to a mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace. Background Technology

[0002] Diffusion oxidation annealing furnaces are critical equipment in semiconductor and photovoltaic manufacturing. Their furnace tubes must maintain strict airtightness under high-temperature conditions to prevent process gas leakage from affecting process stability or causing safety hazards. The furnace tubes are typically composed of multiple sections of quartz or silicon carbide tubes connected by flanges or clamps. The sealing performance of these connections directly affects the overall airtightness of the furnace tubes. Therefore, airtightness testing of the furnace tube connections is essential.

[0003] Currently, the commonly used method for airtightness testing in the industry involves installing a protective cover structure on the outside of the furnace tube connection. This typically consists of two semi-annular sealing covers, which are usually connected by a rotating joint and secured to the connection point with bolts or clips, forming a sealed testing chamber. During testing, operators need to use a manual air pump to fill the cover with testing gas (such as nitrogen or compressed air) and observe pressure changes or signs of leakage using a pressure gauge or bubble leak detector. However, this method has the following drawbacks:

[0004] Manual inflation is inefficient: Each test requires manual operation of the air pump, which is slow and affects the accuracy and efficiency of the test.

[0005] Separation of sealing and inflation: The existing structure does not integrate the sealing mechanism and inflation function of the sealing, which is cumbersome to operate and cannot automatically complete the inflation during the sealing process, resulting in a lengthy testing process. Therefore, it is urgent to design a mechanism to improve the airtightness of the furnace tube of the diffusion oxidation annealing furnace, which can optimize the synergy between the sealing and inflation detection of the sealing and the inflation detection, and improve the testing efficiency and reliability.

[0006] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0007] The purpose of this invention is to provide a mechanism for improving the airtightness of the furnace tubes in a diffusion oxidation annealing furnace, so as to solve the problems of low efficiency of manual gas filling and separation of the sealing cover locking and gas filling in the prior art.

[0008] To achieve the above objectives, this utility model provides the following technical solution:

[0009] A mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace includes a first sleeve and a second sleeve, which are rotatably connected by a rotating connection device. Two symmetrically arranged arc-shaped sealing gaskets are fixed to the inner walls of both sleeves. A fixed cylinder is fixed to the top center of the first sleeve. The bottom outlet of the fixed cylinder is connected to the interior of the first sleeve via a vent pipe. A piston rod slides along the inner side of the fixed cylinder, and a piston rod is fixed to the top of the piston rod. The top of the piston rod extends movably to the top of the fixed cylinder and is fixedly attached to a handle. Multiple vent holes are provided around the handle at the top of the fixed cylinder. A spring is sleeved on the outside of the piston rod between the inner top wall of the fixed cylinder and the top of the piston rod. A linkage-type inflation positioning assembly is connected between the air inlet of the fixed cylinder and the first and second sleeves.

[0010] Preferably, the linkage inflatable positioning assembly includes a first arc-shaped guide seat fixed to the outer wall of the second package, a second arc-shaped guide seat fixed to the outer wall of the first package, a first guide groove with a convex cross-section opened on the outer arc wall of the first arc-shaped guide seat, the first guide groove having an arc shape, an arc-shaped extrusion plate with a convex cross-section slidably connected in the first guide groove, the arc-shaped extrusion plate having an arc shape, and a push rod fixed to the outer arc wall of the arc-shaped extrusion plate.

[0011] Preferably, a second guide groove is provided on the outer arc wall of the second arc-shaped guide seat to cooperate with the arc-shaped extrusion plate. The second guide groove has an arc-shaped structure and a convex cross-section.

[0012] Preferably, an arc-shaped airbag is fixedly connected to the inner arc wall of the second guide groove, and the air outlet of the arc-shaped airbag is connected to the interior of the fixed cylinder through an exhaust pipe, and a one-way exhaust valve is installed on the exhaust pipe.

[0013] Preferably, the air inlet of the arc-shaped airbag is connected to an air inlet pipe, the outer end of the air inlet pipe is connected to an air inflator, and a one-way air inlet valve is installed on the air inlet pipe.

[0014] Preferably, the arc-shaped extrusion plate has an inclined surface at one end near the arc-shaped airbag, and the inclined surface is used to extrude the arc-shaped airbag.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] (1) The gas tightness mechanism for improving the gas tightness of the furnace tubes in the diffusion oxidation annealing furnace of this utility model, when testing the gas tightness of the flange connection between two furnace tubes, firstly, the first and second wrapping sleeves are fitted onto the flange connection between the two furnace tubes, and then the piston rod is pulled by the handle to drive the piston column to compress the spring, so that the air above the piston column in the fixed cylinder is squeezed out from multiple air outlets. Then, the arc-shaped extrusion plate is pushed by the push rod to move from the first arc-shaped guide seat to the second guide groove in the second arc-shaped guide seat. During the movement, The inclined plane will first touch the bottom of the arc-shaped airbag and squeeze it until the arc-shaped airbag is completely collapsed. At this time, the air inside the arc-shaped airbag is squeezed and transported into the fixed cylinder. If there is a leak at the flange connection, the air in the fixed cylinder will be squeezed into the leak under the reverse action of the spring. This can be determined by the movement trend of the piston column. In this way, the air can be added to the fixed cylinder by locking the first and second sleeves without manual air injection, which greatly improves the efficiency of air tightness testing. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall three-dimensional first-view structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the overall three-dimensional second-view structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the overall three-dimensional third-view structure of this utility model;

[0020] Explanation of key figure labels:

[0021] 1. First wrapping sleeve; 11. Second wrapping sleeve; 111. Rotating connecting device; 12. Sealing gasket; 13. Fixed cylinder; 131. Vent pipe; 132. Piston column; 133. Piston rod; 134. Spring; 135. Air outlet; 136. Handle; 14. Exhaust pipe; 141. One-way exhaust valve; 15. Arc-shaped airbag; 151. Air inlet pipe; 152. Air inflator; 153. One-way air inlet valve; 16. Deflator pipe; 2. Linkage inflation positioning assembly; 21. First arc-shaped guide seat; 22. Arc-shaped extrusion plate; 23. Push rod; 24. Inclined surface; 25. Second arc-shaped guide seat. Detailed Implementation

[0022] The technical solution of this utility model patent will be clearly and completely described below. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0023] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the utility model.

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] Manual inflation is inefficient: Each test requires manual operation of the air pump, which is slow and affects the accuracy and efficiency of the test.

[0026] Separation of cover locking and inflation: The existing structure does not integrate the cover locking mechanism with the inflation function, which is cumbersome to operate and cannot automatically complete inflation during the locking process, resulting in a lengthy testing process.

[0027] See attached document Figure 1-3 A mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace includes a first sleeve 1 and a second sleeve 11, which are rotatably connected by a rotating connecting device 111. Two symmetrically arranged arc-shaped sealing gaskets 12 are fixed to the inner walls of the first and second sleeves 11. A fixed cylinder 13 is fixed to the top center of the first sleeve 1, and the bottom outlet of the fixed cylinder 13 is connected to the interior of the first sleeve 1 via a vent pipe 131. The inner side of the fixed cylinder 13 slides... There is a piston column 132, and a piston rod 133 is fixedly connected to the top of the piston column 132. The top of the piston rod 133 extends movably to the top of the fixed cylinder 13 and is fixedly connected to a handle 136. The handle 136 has multiple air outlets 135 on the top of the fixed cylinder 13. A spring 134 is sleeved on the outside of the piston column 132 between the inner top wall of the fixed cylinder 13 and the top of the piston column 132. A linkage inflation positioning assembly 2 is connected between the air inlet of the fixed cylinder 13 and the first wrapping sleeve 1 and the second wrapping sleeve 11.

[0028] The fixed cylinder 13 is made of transparent high-strength glass, and scale lines are provided on the outside of the fixed cylinder 13 to facilitate accurate reading of the moving position of the piston rod 132.

[0029] Spring 134 is made of carbon steel, which has a long service life and stable elasticity;

[0030] An air vent pipe 16 is also fixedly connected to the outer exhaust port of the first package 1. The top opening of the air vent pipe 16 is also threaded with a sealing cap. The air inside the first package 1 and the second package 11 is discharged through the sealing cap to avoid affecting the disassembly of the first package 1 and the second package 11.

[0031] Furthermore, such as Figure 1-3 As shown, the linkage-type inflatable positioning assembly 2 includes a first arc-shaped guide seat 21 fixed to the outer wall of the second sleeve 11, a second arc-shaped guide seat 25 fixed to the outer wall of the first sleeve 1, a first guide groove with a convex cross-section on the outer arc wall of the first arc-shaped guide seat 21, the first guide groove having an arc shape, an arc-shaped extrusion plate 22 with a convex cross-section slidably connected in the first guide groove, the arc-shaped extrusion plate 22 having an arc shape, a push rod 23 fixed to the outer arc wall of the arc-shaped extrusion plate 22, and a second guide rod 23 cooperating with the arc-shaped extrusion plate 22 on the outer arc wall of the second arc-shaped guide seat 25. The second guide groove has an arc-shaped structure and a convex cross-section. An arc-shaped airbag 15 is fixed to the inner arc wall of the second guide groove. The air outlet of the arc-shaped airbag 15 is connected to the inside of the fixed cylinder 13 through the exhaust pipe 14. A one-way exhaust valve 141 is installed on the exhaust pipe 14. An air inlet pipe 151 is connected to the air inlet of the arc-shaped airbag 15. An air nozzle 152 is connected to the outer end of the air inlet pipe 151. A one-way air inlet valve 153 is installed on the air inlet pipe 151. An inclined surface 24 is opened on the arc-shaped extrusion plate 22 near the arc-shaped airbag 15. The inclined surface 24 is used to extrude the arc-shaped airbag 15.

[0032] The air inflator 152 adopts the structure of the air inflator 152 on a bicycle tire, which is existing technology and will not be described in detail. It can replenish air into the subsequent arc-shaped airbag 15.

[0033] The arc length of the first arc-shaped guide seat 21 is equal to the arc length of the arc-shaped extrusion plate 22, and both are greater than the length of the second arc-shaped guide seat 25. The arc length of the first arc-shaped guide seat 21 is equal to half the outer arc length of the second cover.

[0034] An arc-shaped rubber pad is fixed to the inner arc wall of the arc-shaped extrusion plate 22, and an arc-shaped rubber pad is also provided on the outer surface of the arc-shaped airbag 15. The frictional resistance between the two arc-shaped rubber pads can be increased, so that after the arc-shaped extrusion plate 22 enters the second guide groove, it can remain stable and achieve the locking and fixing of the second wrapping sleeve 11 and the first wrapping sleeve 1.

[0035] In actual use, when testing the airtightness of the flange connection between the two furnace tubes, the first sleeve 1 and the second sleeve 11 are first fitted onto the flange connection between the two furnace tubes. Then, the piston rod 133 is pulled by the handle 136, which drives the piston column 132 to compress the spring 134. This causes the air above the piston column 132 in the fixed cylinder 13 to be squeezed out through multiple air outlets 135. After that, the arc-shaped extrusion plate 22 is pushed by the push rod 23 to move from the first arc-shaped guide seat 21 to the second guide groove in the second arc-shaped guide seat 25. During the movement, the inclined surface 24 will first... Touch the bottom of the arc-shaped airbag 15 and squeeze it until it is completely collapsed. At this time, the air inside the arc-shaped airbag 15 is squeezed and transported into the fixed cylinder 13. If there is a leak at the flange connection, the air inside the fixed cylinder 13 will be squeezed into the leak under the reverse action of the spring 134. This can be determined by the movement trend of the piston column 132. In this way, the air can be added to the fixed cylinder 13 by locking the first wrapping sleeve 1 and the second wrapping sleeve 11. No manual air injection is required, which greatly improves the efficiency of air tightness testing.

[0036] The foregoing description of specific exemplary embodiments of the present invention is for illustrative and explanatory purposes. These descriptions are not intended to limit the present invention to the precise forms disclosed, and it will be apparent that many changes and variations can be made in accordance with the foregoing teachings. The exemplary embodiments were chosen and described in order to explain the specific principles of the present invention and its practical application, thereby enabling those skilled in the art to implement and utilize various different exemplary embodiments of the present invention, as well as various different choices and variations. The scope of the present invention is intended to be defined by the claims and their equivalents.

Claims

1. A mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace, comprising a first sleeve (1) and a second sleeve (11), wherein the first sleeve (1) and the second sleeve (11) are rotatably connected by a rotating connecting device (111), and two symmetrically arranged arc-shaped sealing gaskets (12) are fixedly attached to the inner walls of the first sleeve (1) and the second sleeve (11), characterized in that, A fixed cylinder (13) is fixedly connected to the top center of the first package (1). The air outlet at the bottom end of the fixed cylinder (13) is connected to the inside of the first package (1) through a vent pipe (131). A piston column (132) slides on the inner side of the fixed cylinder (13). A piston rod (133) is fixedly connected to the top end of the piston column (132). The top end of the piston rod (133) extends to the top of the fixed cylinder (13) and is fixedly connected to a handle (136). The handle (136) is provided with multiple air outlets (135) on the top of the fixed cylinder (13). A spring (134) is sleeved on the outside of the piston column (132) between the inner top wall of the fixed cylinder (13) and the top end of the piston column (132). The air inlet of the fixed cylinder (13) is connected to the first wrapping sleeve (1) and the second wrapping sleeve (11) by a linkage inflation positioning component (2).

2. The mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace according to claim 1, characterized in that, The linkage inflatable positioning component (2) includes a first arc-shaped guide seat (21) fixed to the outer wall of the second package (11), a second arc-shaped guide seat (25) fixed to the outer wall of the first package (1), a first guide groove with a convex cross-section is opened on the outer arc wall of the first arc-shaped guide seat (21), the first guide groove has an arc shape, an arc-shaped extrusion plate (22) with a convex cross-section is slidably connected in the first guide groove, the arc-shaped extrusion plate (22) has an arc shape, and a push rod (23) is fixed to the outer arc wall of the arc-shaped extrusion plate (22).

3. The mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace according to claim 2, characterized in that, The outer arc wall of the second arc-shaped guide seat (25) is provided with a second guide groove that cooperates with the arc-shaped extrusion plate (22). The second guide groove has an arc-shaped structure and a convex cross-section.

4. The mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace according to claim 3, characterized in that, An arc-shaped airbag (15) is fixedly attached to the inner arc wall of the second guide groove. The air outlet of the arc-shaped airbag (15) is connected to the interior of the fixed cylinder (13) through the exhaust pipe (14). A one-way exhaust valve (141) is installed on the exhaust pipe (14).

5. The mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace according to claim 4, characterized in that, An air inlet pipe (151) is connected to the air inlet of the arc-shaped airbag (15), and an air inlet nozzle (152) is connected to the outer end of the air inlet pipe (151). A one-way air inlet valve (153) is installed on the air inlet pipe (151).

6. The mechanism for improving the airtightness of furnace tubes in a diffusion oxidation annealing furnace according to claim 4, characterized in that, The arc-shaped extrusion plate (22) has a sloping surface (24) at one end near the arc-shaped airbag (15), and the sloping surface (24) is used to extrude the arc-shaped airbag (15).

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