Self-adaptive clamping and positioning device for wafer expanding ring

Abstract

The utility model discloses a self-adaptive clamping and positioning device for a wafer expanding ring. The self-adaptive clamping and positioning device comprises a positioning and clamping seat, a bearing part and a floating pressing strip, the bearing part is fixed at the bottom of the positioning and clamping seat and is used for supporting the wafer expanding ring; the top of the positioning clamping seat is provided with a semi-annular structure matched with the wafer expanding ring. The floating pressing strip is of a semi-annular structure matched with the wafer expanding ring and is detachably installed on the positioning clamping base through a front face clamping structure and a side face clamping structure. When the floating pressing strip is installed in place, a circular cavity for placing the wafer expanding ring can be formed between the floating pressing strip and the positioning clamping seat. The wafer expanding ring positioning and clamping device conveniently and reliably solves the positioning and clamping problems of the wafer expanding ring, effectively assists production in the fields of micro electronic elements, semiconductor chips and the like, can be suitable for most of wafer expanding rings, and is wide in application range and small in limitation.

Description

Technical Field

[0001] This application relates to the field of microelectronic components and semiconductor chip manufacturing technology, specifically to an adaptive clamping and positioning device for a die expansion ring. Background Technology

[0002] In the production process of crystal expansion rings, the commonly used clamping structures and methods mainly include vacuum adsorption, mechanical clamping, magnetic clamping, and pneumatic clamping.

[0003] Vacuum adsorption clamping uses adsorption holes in the clamping device to adsorb and fix the expansion ring using the negative pressure generated by a vacuum pump. This method is simple to operate and causes less damage to the surface of the expansion ring, but its adsorption force is limited. For some heavier or larger expansion rings, the adsorption may not be firm, causing the expansion ring to shift during the production process.

[0004] Mechanical clamping relies on mechanical structures such as jaws or pressure plates to apply pressure to the expander ring to achieve clamping. It can provide a large clamping force and is suitable for expander rings of various sizes. However, mechanical clamping can easily cause scratches or deformation on the surface of the expander ring, especially for expander rings with high surface precision requirements. Such damage may seriously affect product quality.

[0005] Magnetic clamping uses magnetic materials or the magnetic field generated by electromagnets to adsorb crystal expansion rings. It provides stable clamping and is easy to operate, but its application is limited. It can only be used for crystal expansion rings made of magnetic materials, and cannot be used for non-magnetic materials.

[0006] Pneumatic clamping uses compressed air to drive cylinders or pneumatic grippers to clamp the crystal expansion ring. The clamping force is adjustable and the response speed is fast, making it suitable for automated production lines. However, it requires a stable air source and has relatively low clamping accuracy, making it difficult to meet the needs of high-precision positioning and clamping.

[0007] While these existing clamping structures and methods can accomplish the clamping task of expansion rings to a certain extent, they are not suitable for most expansion ring clamping operations due to limitations on the size, material, and quality of the expansion rings. Utility Model Content

[0008] Therefore, this application provides an adaptive clamping and positioning device for a die expansion ring to solve the problem that existing clamping devices have significant limitations in the use of die expansion rings.

[0009] To achieve the above objectives, this application provides the following technical solution:

[0010] An adaptive clamping and positioning device for a die expander ring includes a positioning clamping seat, a support portion, and a floating clamping bar. The support portion is fixed to the bottom of the positioning clamping seat to support the die expander ring. The top of the positioning clamping seat is provided with a semi-annular structure adapted to the die expander ring. The floating clamping bar is a semi-annular structure adapted to the die expander ring and is detachably mounted on the positioning clamping seat through a front clamping structure and a side clamping structure. When the floating clamping bar is installed in place, a circular cavity for the die expander ring to be inserted can be formed between the floating clamping bar and the positioning clamping seat.

[0011] Optionally, the positioning clamping seat includes a base and a fixing clamping strip; the base is a complete ring structure and is used to connect the support part; the fixing clamping strip is a semi-ring shape adapted to the expansion ring and is coaxially fixed to one side of the top of the base; the other side of the top of the base is a semi-ring clamping groove for installing the floating clamping strip.

[0012] Optionally, the front clamping structure includes a first stop and an eccentric block for restricting the floating clamping bar from moving away from the fixed clamping bar. The first stop is detachably mounted on one side of the base at a position corresponding to the clamping groove by a first screw. An eccentric shaft is provided on the eccentric block, and the eccentric shaft is rotatably connected to the first stop. When the eccentric shaft rotates, the eccentric block moves away from or closer to the base to clamp or release the floating clamping bar.

[0013] Optionally, a knob is fixedly installed on the eccentric block.

[0014] Optionally, the side clamping structure includes a second stop, which is detachably mounted on one side of the base by a second bolt and is located at the junction of the fixed clamping bar and the clamping groove, for limiting the rotation of the floating clamping bar.

[0015] Optionally, a spring is provided between the end of the floating clamping bar and the fixed clamping bar, the spring having the potential energy to move the floating clamping bar away from the fixed clamping bar.

[0016] Optionally, the top of both the first and second blocks is provided with a baffle to prevent the floating pressure bar from moving upward, and the baffle can contact the top surface of the floating pressure bar.

[0017] Optionally, the top of the eccentric block has a downward-facing groove for inserting a knob, and the knob is fixed in the groove by a third screw.

[0018] Optionally, the side of the base corresponding to the first and second stops is a plane.

[0019] Optionally, a take-out groove is provided downward at the center of the top surface of the fixing bar.

[0020] Compared with the prior art, this application has at least the following beneficial effects:

[0021] 1. The support section provides support to the bottom of the die expander ring. Simultaneously, the locating clamping seat and floating pressure bar work together to restrict the horizontal movement of the die expander ring, thus achieving positioning and clamping. This fixing method has no special requirements on the material, quality, or size of the die expander ring, and is applicable to the positioning and clamping of most die expander rings, offering wide applicability and minimal limitations.

[0022] 2. The spring is designed to cause the floating clamping bar to pop outward after the front clamping structure and the side clamping structure release the fixation of the floating clamping bar, thus helping to remove the floating clamping bar. Attached Figure Description

[0023] To more intuitively illustrate the prior art and this application, exemplary drawings are provided below. It should be understood that the specific shapes and structures shown in the drawings should not generally be regarded as limiting conditions for implementing this application; for example, based on the technical concept disclosed in this application and the exemplary drawings, those skilled in the art are able to easily make conventional adjustments or further optimizations to the addition / reduction / classification, specific shapes, positional relationships, connection methods, size ratios, etc. of certain units (components).

[0024] Figure 1 A schematic diagram of an adaptive clamping and positioning device for a die expansion ring provided in an embodiment of this application;

[0025] Figure 2 An exploded view of an adaptive clamping and positioning device for a die expansion ring provided in an embodiment of this application;

[0026] Figure 3 for Figure 2 Explosion-proof diagram of the front clamping structure;

[0027] Figure 4 for Figure 2 An exploded view of the side clamping structure.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. Positioning clamping seat; 2. Support part; 3. Floating clamping bar; 4. Base; 5. Fixed clamping bar; 6. Clamping groove; 7. Front clamping structure; 8. Side clamping structure; 9. First stop block; 10. Eccentric block; 11. First screw; 12. Groove; 13. Eccentric shaft; 14. Knob; 15. Countersunk groove; 16. Third screw; 17. Second stop block; 18. Second bolt; 19. Spring; 20. Baffle; 21. Removal groove; 22. Washer. Detailed Implementation

[0030] The present application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] In the description of this application: unless otherwise stated, "a plurality of" means two or more. The terms "first," "second," "third," etc., in this application are intended to distinguish the objects referred to and do not have any special meaning in terms of technical connotation (e.g., they should not be construed as an emphasis on importance or order). Expressions such as "comprising," "including," and "having" also mean "not limited to" (certain units, components, materials, steps, etc.).

[0032] The terms used in this application, such as "upper," "lower," "left," "right," and "middle," are generally used to indicate the general relative positional relationship for the purpose of intuitive understanding by referring to the accompanying drawings, and are not absolute limitations on the positional relationship in the actual product.

[0033] An adaptive clamping and positioning device for a die expansion ring, as shown in the reference. Figure 1 and Figure 2 It includes a positioning clamping seat 1, a supporting part 2, and a floating pressure bar 3.

[0034] The positioning clamping seat 1 includes a base 4 of equal radius and a fixing clamping strip 5. The base 4 is a complete ring structure, located below the fixing clamping strip 5, and is used to connect the support part 2. The support part 2 is fixed to the bottom of the positioning clamping seat 1 to support the expansion ring. Specifically, the support part 2 is composed of multiple support rods, one end of which is connected together, and the other end is radially and evenly distributed and connected to the base 4, forming a receiving component with a hollow bottom.

[0035] The fixing clamping strip 5 is a semi-circular shape adapted to the expansion ring (the outer diameter of the expansion ring is adapted to the inner diameter of the fixing clamping strip 5), and is coaxially fixed to one side of the top of the base 4. The other side of the top of the base 4 is a semi-circular clamping groove 6, which is used for the installation of the floating clamping strip 3.

[0036] Correspondingly, the floating clamping strip 3 is also a semi-annular structure adapted to the die expansion ring and can cooperate with the clamping groove 6. The floating clamping strip 3 can freely enter and exit the clamping groove 6 and is detachably mounted on the positioning clamping seat 1 through the front clamping structure 7 and the side clamping structure 8. When the floating clamping strip 3 is installed in place, a circular cavity for the die expansion ring to be inserted can be formed between the floating clamping strip 3 and the positioning clamping seat 1.

[0037] Reference Figure 3A set of front clamping structures 7 is provided, arranged on one side of the middle of the clamping groove 6, including a first stop block 9 and an eccentric block 10, used to restrict the floating clamping bar 3 from moving away from the fixed clamping bar 5. The first stop block 9 is detachably installed on one side of the base 4 at a position corresponding to the clamping groove 6 by two first screws 11. The top center of the first stop block 9 has a recessed groove 12, which is used to install the eccentric block 10. Specifically, the eccentric block 10 is provided with an eccentric shaft 13, which is rotatably connected to the first stop block 9 by a washer 22. When the eccentric shaft 13 rotates, one end face of the eccentric block 10 moves away from or closer to the base 4 to clamp or release the floating clamping bar 3.

[0038] To facilitate the rotation of the eccentric block 10, a knob 14 is fixedly installed on the eccentric block 10. Specifically, the top of the eccentric block 10 has a downward-facing recess 15 for inserting the knob 14. The knob 14 is fixed in the recess 15 by two third screws 16. When the knob 14 is installed in place, the bottom surface of the knob 14 is flush with the top surface of the first stop block 9, so that during the rotation of the knob 14 and the eccentric block 10, the bottom surface of the knob 14 can contact or move away from the top surface of the first stop block 9.

[0039] The operation of the front clamping structure 7 is as follows: After the expansion ring is placed in position, the floating clamping strip 3 is placed into the clamping groove 6. Then, the first stop 9 is fixed to the base 4 with the first screw 11. At this time, the knob 14 is in a position away from the first stop 9, and the eccentric block 10 has no limiting effect on the floating clamping strip 3. After the first stop 9 is installed, the knob 14 is rotated, which drives the eccentric block 10 to rotate into the groove 12 until the side end of the eccentric block 10 presses against the floating clamping strip 3, restricting the floating clamping strip 3 from moving outward, thereby completing the positioning and clamping work of the expansion ring. At this time, the knob 14 is rotated until the bottom surface contacts the top surface of the first stop 9. The friction between the two is used to fix the position of the knob 14 and the eccentric block 10 to prevent them from loosening. When it is necessary to remove the expansion ring, simply rotate the knob 14 outward first, and then remove the first stop 9.

[0040] Reference Figure 4 Two sets of side clamping structures 8 are provided, located at the two positions where the fixed clamping strip 5 and the clamping groove 6 intersect, to restrict the rotation of the floating clamping strip 3. Each side clamping structure 8 includes a second stop 17, which is detachably mounted on one side of the base 4 by a second bolt 18. After the eccentric block 10 restricts the radial movement of the floating clamping strip 3, the two second stops 17 restrict the rotation of the floating clamping strip 3, and the three together fix the floating clamping strip 3.

[0041] To facilitate the removal of the floating clamping bar 3, a spring 19 is provided between the end of the floating clamping bar 3 and the fixed clamping bar 5. The spring 19 has the potential energy to move the floating clamping bar 3 away from the fixed clamping bar 5. Therefore, when the limiting state of the front clamping structure 7 and the side clamping structure 8 is released, the spring 19 returns to its original state, pushing the floating clamping bar 3 outward, assisting in the removal of the floating clamping bar 3.

[0042] In this embodiment of the application, the top of the first block 9 and the second block 17 are both provided with baffles 20 for preventing the floating pressing strip 3 from moving upward. After the first block 9 and the second block 17 are installed in place, the baffles 20 can contact the top surface of the floating pressing strip 3.

[0043] The sides of the base 4, corresponding to the positions of the first stop 9 and the second stop 17, are all flat, making installation and processing easier.

[0044] To facilitate the removal and placement of the expansion ring, a removal groove 21 is provided downward in the middle of the top surface of the fixing and clamping strip 5.

[0045] The technical features of the above embodiments can be combined in any way (as long as there is no contradiction in the combination of these technical features). For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described; these embodiments not explicitly written should also be considered to be within the scope of this specification.

Claims

1. An adaptive clamping and positioning device for a die expansion ring, characterized in that: It includes a positioning clamping seat (1), a support part (2), and a floating clamping bar (3); the support part (2) is fixed to the bottom of the positioning clamping seat (1) to support the expansion ring; the top of the positioning clamping seat (1) is provided with a semi-annular structure adapted to the expansion ring; the floating clamping bar (3) is a semi-annular structure adapted to the expansion ring, and is detachably installed on the positioning clamping seat (1) through a front clamping structure (7) and a side clamping structure (8); when the floating clamping bar (3) is installed in place, a circular cavity for the expansion ring to be inserted can be formed between the floating clamping bar (3) and the positioning clamping seat (1).

2. The adaptive clamping and positioning device for a die expansion ring according to claim 1, characterized in that: The positioning clamping seat (1) includes a base (4) and a fixing clamping strip (5); the base (4) is a complete ring structure and is used to connect the support part (2); the fixing clamping strip (5) is a semi-ring adapted to the expansion ring and is coaxially fixed on one side of the top of the base (4); the other side of the top of the base (4) is a semi-ring clamping groove (6) for the installation of the floating clamping strip (3).

3. The adaptive clamping and positioning device for a die expansion ring according to claim 2, characterized in that: The front clamping structure (7) includes a first stop (9) and an eccentric block (10) for restricting the floating clamping bar (3) from moving away from the fixed clamping bar (5). The first stop (9) is detachably installed on one side of the base (4) at a position corresponding to the clamping groove (6) by a first screw (11). An eccentric shaft (13) is provided on the eccentric block (10). The eccentric shaft (13) is rotatably connected to the first stop (9). When the eccentric shaft (13) rotates, the eccentric block (10) moves away from or closer to the base (4) to clamp or release the floating clamping bar (3).

4. The adaptive clamping and positioning device for a die expansion ring according to claim 3, characterized in that: A knob (14) is fixedly installed on the eccentric block (10).

5. The adaptive clamping and positioning device for a die expansion ring according to claim 3, characterized in that: The side clamping structure (8) includes a second stop (17), which is detachably mounted on one side of the base (4) by a second bolt (18) and is located at the junction of the fixed clamping bar (5) and the clamping groove (6) to restrict the rotation of the floating clamping bar (3).

6. The adaptive clamping and positioning device for a die expansion ring according to claim 5, characterized in that: A spring (19) is provided between the end of the floating clamping bar (3) and the fixed clamping bar (5), and the spring (19) has the potential energy to move the floating clamping bar (3) away from the fixed clamping bar (5).

7. The adaptive clamping and positioning device for a die expansion ring according to claim 5, characterized in that: The top of the first block (9) and the second block (17) are provided with baffles (20) to prevent the floating pressing strip (3) from moving upward. The baffles (20) can contact the top surface of the floating pressing strip (3).

8. The adaptive clamping and positioning device for a die expansion ring according to claim 4, characterized in that: The top of the eccentric block (10) has a recess (15) for inserting a knob (14), and the knob (14) is fixed in the recess (15) by a third screw (16).

9. The adaptive clamping and positioning device for a die expansion ring according to claim 4, characterized in that: The side of the base (4) is a plane corresponding to the first stop (9) and the second stop (17).

10. The adaptive clamping and positioning device for a die expansion ring according to claim 2, characterized in that: The top surface of the fixing and clamping strip (5) has a downward-facing extraction groove (21).

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