A high-efficiency integrated semiconductor processing device with multi-station collaborative operation

Abstract

This utility model discloses a high-efficiency integrated processing device for semiconductor equipment with multi-station collaboration, specifically relating to the field of semiconductor manufacturing technology. It includes an operating table, with a rounding processing component and an edge grinding processing component arranged sequentially from left to right on the upper end of the operating table. A fixing component is provided at the front end of the rounding processing component. By setting a moving structure, after the rounding processing of the ingot is completed and the clamping is released, the ingot can be quickly moved to the edge grinding processing area with the aid of an auxiliary moving function. During this process, there is no need to move the fixing component, and another ingot can be simultaneously fixed to the fixing component. This operation effectively reduces the transition time between the completion of the rounding processing and the edge grinding processing of the ingot, avoiding equipment idle waiting caused by removing and installing ingots. It achieves seamless connection between the rounding and edge grinding mechanisms, greatly improving the overall operating efficiency of the equipment, effectively reducing equipment idle time, and increasing equipment utilization.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a high-efficiency integrated processing device for multi-station collaborative semiconductor equipment. Background Technology

[0002] In the semiconductor manufacturing field, electronic products continue to move towards miniaturization and high performance, which prompts semiconductor devices to face extremely stringent standards in terms of processing precision, production efficiency and processing quality. After the growth of semiconductor single crystals, a series of complex processes such as rounding, crystal orientation, edge grinding, cutting, grinding and polishing are required to finally process the crystal rod into a single crystal substrate. In the traditional processing mode, each process is often carried out independently, which not only consumes a lot of time, but also makes it difficult to ensure the connection precision between processes, which seriously restricts the improvement of production efficiency and product quality. Therefore, there is a need for an integrated processing device that can simultaneously round and grind the crystal rod to achieve multi-station collaborative operation and meet the growing demand for high-efficiency and high-precision processing in the semiconductor manufacturing field.

[0003] Application No. 202322326057.8 discloses a horizontal-axis semiconductor ingot processing apparatus, which includes a "machine bed, on which a first moving mechanism, a rounding mechanism, an orientation instrument, and an edge grinding mechanism are mounted." The "first moving mechanism includes a first guide rail, a first servo motor mounted on the machine bed, a first lead screw connected to the power output end of the first servo motor, a first moving pair threadedly connected to the first lead screw, and a clamping mechanism slidably connected to the first guide rail, the clamping mechanism being used to clamp the centered ingot. Although the clamping mechanism is driven by the moving mechanism, the above description does not explicitly state that the moving mechanism drives the clamping mechanism. The structure moves the round bar to the processing mechanism to achieve the purpose of rounding and edge grinding of the crystal bar. However, in the actual processing, when the crystal bar completes the rounding process and then enters the edge grinding stage, its rounding processing component is idle and not fully utilized. Moreover, after the crystal bar completes all processing steps, the finished product needs to be removed manually and a new crystal bar to be processed needs to be installed. During this period, both the rounding processing mechanism and the edge grinding processing mechanism are in a stopped and waiting state, causing the equipment to idle for a long time, making it impossible to achieve continuous and efficient production, greatly reducing the equipment utilization rate, and thus affecting the overall processing efficiency. Utility Model Content

[0004] The purpose of this invention is to provide a high-efficiency integrated processing device for semiconductor equipment with multi-station collaboration, so as to solve the above-mentioned shortcomings in the technology.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a multi-station collaborative semiconductor equipment high-efficiency integrated processing device, including an operating table. From left to right, the upper end of the operating table is provided with a rounding processing component and an edge grinding processing component. The rounding processing component includes a base connected to the upper surface of the operating table. A protective cover is connected to the upper surface of the base. A grinding wheel is rotatably connected inside the protective cover, and a mounting cover is fixedly connected to one side of the outer wall of the protective cover. A first drive motor is mounted on the inner surface of the mounting cover. The output end of the first drive motor is connected to a connecting shaft. The end of the connecting shaft away from the first drive motor passes through and extends into the protective cover. The internal components are connected to a grinding wheel. The front end of the rounding machining component is equipped with a fixing component. The fixing component includes two fixed side plates symmetrically connected to the upper surface of the operating table. A hydraulic cylinder is installed on one of the fixed side plates, and a movable center is connected to the output end of the hydraulic cylinder. A rotating center is rotatably connected to the other fixed side plate. A pulley is connected to the outer wall of the rotating center. A belt is sleeved on the outside of the pulley. The end of the belt away from the pulley is sleeved on a roller on a connecting shaft. A support column is fixedly connected to the corner of the upper surface of the operating table. A top plate is fixedly connected to the upper surface of the support column. A support base is fixedly connected to the lower surface of the operating table.

[0006] Preferably, the edge grinding assembly consists of a support base, a second drive motor, a drive shaft, and a grinding wheel. The second drive motor is mounted on the support base, the drive shaft is connected to the output end of the second drive motor, and the grinding wheel is connected to the end of the drive shaft away from the second drive motor.

[0007] Preferably, a block groove is formed on the upper end surface of the operating table and at the lower end of the support seat. A slider is embedded inside the block groove. The slider is fixedly connected to the support seat, and one end of the slider is connected to an electric telescopic rod, which is installed on one side inside the block groove.

[0008] Specifically, in use, the crystal rod is first placed between the rotating tip and the movable tip for centering and clamping to ensure accurate and stable positioning of the crystal rod during processing, reducing processing errors. The first drive motor is started and operated by the CNC panel, driving the grinding wheel to rotate. At the same time, the rotating tip is driven to rotate by the pulley and the belt, thereby causing the crystal rod to rotate as well. This allows the grinding wheel to grind the surface of the crystal rod, achieving rounding. After rounding is completed, the first drive motor is turned off, stopping the grinding wheel from rotating. Then, the rounded rod is moved to the next processing area, where the edge grinding component performs edge grinding. In addition, the slider is moved within the slot by the electric telescopic rod, allowing the edge grinding component to be moved to ensure that the grinding wheel is in close contact with the round rod.

[0009] Preferably, a movable structure is provided on one side of the upper end of the operating table. The movable structure includes a connecting plate slidably connected to the upper surface of the operating table. A receiving seat is fixedly connected to the upper surface of the connecting plate. A placement groove is opened on the upper surface of the receiving seat. A driving component is provided at the connection between the connecting plate and the operating table.

[0010] Preferably, the drive assembly includes a movable slot formed on the upper surface of the operating table, a movable plate is embedded inside the movable slot, the movable plate is fixedly connected to a connecting plate, and two connecting seats are symmetrically connected to the lower end of the movable plate. A movable wheel is rotatably connected inside each of the connecting seats, and a connecting rod is connected between the two movable wheels. A forward and reverse motor is connected to the side of one of the movable wheels away from the connecting rod.

[0011] Preferably, the positive and negative motors are fitted with a sleeve block, and the inner wall of the operating table, located outside the moving groove, is provided with a limiting groove that cooperates with the sleeve block.

[0012] Through the above technical solution:

[0013] After the round bar is rolled and released from clamping, it falls into the placement slot of the receiving seat. Then, the moving wheels are driven to rotate by the forward and reverse motors, which in turn drive the moving plate to slide within the moving slot. With the aid of the auxiliary movement function, the round bar is quickly moved to the edge grinding area without moving the fixing components. Another round bar can also be fixed simultaneously. This operation greatly reduces the transition time from rounding to edge grinding, avoids idle running, achieves seamless connection of the processing mechanism, and significantly improves equipment operating efficiency and utilization. At the same time, the fixing components maintain their initial positioning, ensuring consistent positional accuracy between the crystal bar edge grinding and rounding, reducing positioning errors, ensuring high precision in crystal bar processing, and facilitating the production of high-quality products. Note: When the moving structure moves to the edge grinding area, the moving wheels are driven in reverse by the forward and reverse motors to return the receiving seat to its initial position. A photoelectric sensor (not shown in the figure) monitors whether the round bar has reached the edge grinding area to ensure edge grinding quality.

[0014] Preferably, a pad is connected to a pre-drilled slot at the bottom of the inner wall of the placement groove.

[0015] Specifically, when the round bar falls into the placement groove, the pad acts as a buffer and protector, effectively reducing the impact force when the round bar falls, preventing the round bar from colliding hard with the receiving seat, and preventing scratches, dents and other defects on the surface of the round bar, thereby ensuring the high quality of the crystal bar.

[0016] Preferably, the receiving seat is provided with a pushing component, the pushing component includes an embedded groove opened on one side of the placement groove on the receiving seat, a first roller and a second roller are rotatably connected from bottom to top inside the embedded groove, the ends of the first roller and the second roller are respectively connected to connecting end blocks, and the inner wall of the receiving seat is provided with a connecting groove that cooperates with the connecting end blocks.

[0017] Preferably, an electromagnetic coil is wound on one of the connecting end blocks of the first roller, and a fixing block is fixedly connected to the upper end face of the operating table, and a permanent magnet that works in conjunction with the electromagnetic coil is fixedly connected to the fixing block.

[0018] Through the above technical solution:

[0019] After the receiving seat moves to the predetermined position, the magnetic field generated by the energized electromagnetic coil interacts with the permanent magnet connected to the fixed block, instantly generating a driving force. This driving force causes the first roller to rotate, while simultaneously driving the second roller to work in coordination, thereby quickly pushing the round bar to roll in the placement groove. This operation does not require additional drive equipment to drive the round bar to rotate, allowing the grinding wheel of the edge grinding component to quickly perform edge grinding operations on the outer wall of the round bar, greatly shortening the edge grinding preparation time, reducing the waiting time between processes, speeding up the processing rhythm, and significantly improving production efficiency. This allows the equipment to process more crystal bars per unit time. At the same time, operators do not need to debug or operate additional drive equipment, reducing operational steps and errors, reducing labor intensity, improving operational accuracy and stability, and making the processing process smoother and more efficient.

[0020] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0021] 1. By setting up a moving structure, after the round bar is unclamped after the rounding process is completed, the round bar can be quickly moved to the edge grinding area with the help of the auxiliary moving function. During this process, there is no need to move the fixed component, and another round bar can be fixed to the fixed component at the same time. This operation can effectively reduce the transition time between the completion of the rounding process and the edge grinding process, avoid the equipment idling and waiting caused by removing and installing the round bar, realize the seamless connection between the rounding and edge grinding mechanisms, greatly improve the overall operating efficiency of the equipment, effectively reduce the idle time of the equipment, and improve the utilization rate of the equipment. In addition, it also avoids the situation where the positioning accuracy of the fixed component changes due to frequent movement, which affects the processing accuracy of the round bar. The fixed component always maintains the initial positioning state, ensuring that the positional accuracy of the round bar during edge grinding is consistent with that during rounding, reducing the positioning error caused by the movement of the fixed component, thereby ensuring the high precision of the round bar processing, which is conducive to the production of high-quality semiconductor round bar products.

[0022] 2. By setting up a pushing component, the moving structure is equipped with an electromagnetic drive function for the round bar. After the receiving seat moves to the predetermined position, the energized electromagnetic coil and the permanent magnet interact rapidly, instantly generating a driving force. This driving force causes the first roller to rotate and drives the second roller to work in coordination, thereby quickly pushing the round bar to roll in the placement groove. This operation does not require additional drive equipment to drive the round bar to rotate, allowing the grinding wheel of the edge grinding component to quickly perform edge grinding operations on the outer wall of the round bar. This greatly shortens the preparation time before edge grinding, effectively reduces the waiting time in the process connection, significantly speeds up the pace of the entire processing flow, and greatly improves production efficiency, enabling the equipment to process more crystal bars per unit time. Furthermore, operators do not need to debug and operate additional drive equipment, reducing operational steps and potential errors, reducing labor intensity, improving the accuracy and stability of operation, and making the entire processing process smoother and more efficient. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2 This is a top view of the operating console of this utility model;

[0026] Figure 3 This is an enlarged schematic diagram of the rounding processing component of this utility model;

[0027] Figure 4 This is a schematic diagram showing the connection between the edge grinding component and the operating table of this utility model;

[0028] Figure 5 This is a schematic diagram showing the connection between the movable structure and the operating table of this utility model;

[0029] Figure 6 This is a cross-sectional schematic diagram of the receiving seat of this utility model;

[0030] Figure 7 This is a schematic diagram showing the connection between the pushing component and the receiving seat of this utility model;

[0031] Figure 8 This is an enlarged schematic diagram of the driving component of this utility model.

[0032] Explanation of reference numerals in the attached figures:

[0033] 1. Operating table; 2. Rounding processing assembly; 21. Base; 22. Protective cover; 23. Grinding wheel; 24. Connecting shaft; 25. First drive motor; 3. Edge grinding processing assembly; 4. Fixing assembly; 41. Fixed side plate; 42. Hydraulic cylinder; 43. Movable center; 44. Rotating center; 45. Pulley; 46. Belt; 5. Moving structure; 51. Connecting plate; 52. Receiving seat; 53. Placement slot; 54. Pad; 55. Moving slot; 56. 57. Moving plate; 58. Connecting seat; 59. Moving wheel; 50. Forward and reverse motor; 512. Connecting rod; 513. Sleeve block; 514. Limiting groove; 6. Support column; 7. Top plate; 80. Pushing assembly; 81. Embedded groove; 82. First roller; 83. Second roller; 84. Connecting end block; 85. Connecting groove; 86. Electromagnetic coil; 87. Fixing block; 88. Permanent magnet; 9. Block groove; 10. Slider; 11. Electric telescopic rod; 12. Support base frame. Detailed Implementation

[0034] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0035] This utility model provides, for example Figures 1-4 The illustrated high-efficiency integrated semiconductor processing apparatus includes:

[0036] The operating table 1 has a rounding processing component 2 and an edge grinding processing component 3 arranged sequentially from left to right on its upper end. The rounding processing component 2 includes a base 21 connected to the upper surface of the operating table 1. A protective cover 22 is connected to the upper surface of the base 21. A grinding wheel 23 is rotatably connected inside the protective cover 22. A mounting cover is fixedly connected to one side of the outer wall of the protective cover 22. A first drive motor 25 is mounted on the inner wall of the mounting cover. A connecting shaft 24 is connected to the output end of the first drive motor 25. The end of the connecting shaft 24 away from the first drive motor 25 passes through and extends into the interior of the protective cover 22 and connects to the grinding wheel 23. A fixing assembly is provided at the front end of the rounding processing component 2. Component 4, the fixing assembly 4 includes two fixed side plates 41 symmetrically connected to the upper end face of the operating table 1. A hydraulic cylinder 42 is installed on one of the fixed side plates 41, and a movable center 43 is connected to the output end of the hydraulic cylinder 42. A rotating center 44 is rotatably connected to the other fixed side plate 41. A pulley 45 is connected to the outer wall of the rotating center 44. A belt 46 is sleeved on the outside of the pulley 45. The end of the belt 46 away from the pulley 45 is sleeved on a roller on the connecting shaft 24. A support column 6 is fixedly connected to the corner of the upper end face of the operating table 1. A top plate 7 is fixedly connected to the upper end face of the support column 6. A support base frame 12 is fixedly connected to the lower end face of the operating table 1.

[0037] Further, see Figure 4As shown, the edge grinding assembly 3 consists of a support base, a second drive motor, a drive shaft, and a grinding wheel. The second drive motor is mounted on the support base, the drive shaft is connected to the output end of the second drive motor, and the grinding wheel is connected to the end of the drive shaft away from the second drive motor.

[0038] A block groove 9 is provided on the upper end surface of the operating table 1 and at the lower end of the support seat. A slider 10 is embedded inside the block groove 9. The slider 10 is fixedly connected to the support seat, and one end of the slider 10 is connected to an electric telescopic rod 11. The electric telescopic rod 11 is installed on one side inside the block groove 9.

[0039] Specifically, in use, the crystal rod is first placed between the rotating tip 44 and the movable tip 43 for centering and clamping to ensure that the crystal rod is accurately and stably positioned during processing, reducing processing errors. The first drive motor 25 is started and started by the CNC panel, which drives the grinding wheel 23 to rotate. At the same time, the rotating tip 44 is driven to rotate by the pulley 45 and the belt 46, thereby causing the crystal rod to rotate as well. This allows the grinding wheel 23 to grind the surface of the crystal rod, achieving rounding. After the rounding is completed, the first drive motor 25 is turned off, and the grinding wheel 23 stops rotating. Then, the rounded rod is moved to the next processing area, where the edge grinding component 3 performs edge grinding. In addition, the slider 10 is moved within the slot 9 by the electric telescopic rod 11, which allows the edge grinding component 3 to be moved to keep the grinding wheel close to the round rod.

[0040] This utility model provides, for example Figure 2 , Figure 5 and Figure 6 The diagram shows a multi-station collaborative semiconductor equipment high-efficiency integrated processing device. The upper side of the operating table 1 is provided with a movable structure 5. The movable structure 5 includes a connecting plate 51 slidably connected to the upper surface of the operating table 1. A receiving seat 52 is fixedly connected to the upper surface of the connecting plate 51. A placement groove 53 is opened on the upper surface of the receiving seat 52. A driving component is provided at the connection between the connecting plate 51 and the operating table 1.

[0041] The drive assembly includes a moving slot 55 on the upper surface of the operating table 1. A moving plate 56 is embedded inside the moving slot 55. The moving plate 56 is fixedly connected to the connecting plate 51. Two connecting seats 57 are symmetrically connected to the lower end of the moving plate 56. A moving wheel 58 is rotatably connected inside each connecting seat 57. A connecting rod 512 is connected between the two moving wheels 58. A forward and reverse motor 511 is connected to the side of one of the moving wheels 58 away from the connecting rod 512.

[0042] The positive and negative motor 511 is fitted with a sleeve block 513, and the inner wall of the operating table 1 and the outer side of the moving groove 55 are provided with a limiting groove 514 that cooperates with the sleeve block 513.

[0043] Through the above technical solution:

[0044] After the round bar is rolled and released from clamping, it falls into the placement slot 53 of the receiving seat 52. Then, the moving wheel 58 is driven to rotate by the forward and reverse motors 511, which in turn drives the moving plate 56 to slide in the moving slot 55. With the help of the auxiliary movement function, the round bar is quickly moved to the edge grinding area. During this process, there is no need to move the fixing component 4, and another round bar can be fixed at the same time. This operation greatly reduces the transition time from rounding to edge grinding, avoids the equipment running idle, achieves seamless connection of the processing mechanism, and greatly improves the operating efficiency and utilization of the equipment. At the same time, the fixing component 4 maintains its initial positioning to ensure that the positional accuracy of the crystal bar is consistent during edge grinding and rounding, reduces positioning errors, ensures high precision in crystal bar processing, and facilitates the production of high-quality products. After edge grinding, the round bar is taken out, and the moving wheel 58 is driven in reverse by the forward and reverse motors 511 to return the receiving seat 52 to its initial position. Note: When the moving structure 5 moves to the edge grinding area, a photoelectric sensor (not shown in the figure) is used to monitor whether the round bar has moved to the edge grinding area to ensure the edge grinding quality.

[0045] Further, see Figure 6 As shown, a pad 54 is connected to a pre-drilled slot at the bottom of the inner wall of the placement slot 53.

[0046] Specifically, when the round bar falls into the placement groove 53, the pad 54 plays a buffering and protective role, which can effectively reduce the impact force when the round bar falls, prevent the round bar from having a hard collision with the receiving seat 52, and prevent scratches, dents and other defects on the surface of the round bar, thereby ensuring the high quality of the crystal bar.

[0047] This utility model provides, for example Figure 7 and Figure 8 The diagram shows a multi-station collaborative semiconductor equipment high-efficiency integrated processing device. The receiving base 52 is provided with a pushing component 8. The pushing component 8 includes an insert groove 81 opened on the receiving base 52 and located on one side of the placement groove 53. The insert groove 81 is rotatably connected from bottom to top to the inside of the insert groove 81. The ends of the first roller 82 and the second roller 83 are respectively connected to the connecting end blocks 84. The inner wall of the receiving base 52 is provided with a connecting groove 85 that cooperates with the connecting end blocks 84.

[0048] An electromagnetic coil 86 is wound on one of the connecting end blocks 84 of the first roller 82. A fixing block 87 is fixedly connected to the upper end face of the operating table 1. A permanent magnet 88 that works in conjunction with the electromagnetic coil 86 is fixedly connected to the fixing block 87.

[0049] Through the above technical solution:

[0050] After the receiving seat 52 moves to the predetermined position, the magnetic field generated by the energized electromagnetic coil 86 interacts with the permanent magnet 88 connected to the fixed block 87, instantly generating a driving force. This driving force causes the first roller 82 to rotate, while simultaneously driving the second roller 83 to work in coordination, thereby quickly pushing the round bar to roll in the placement groove 53. This operation does not require additional drive equipment to drive the round bar to rotate, allowing the grinding wheel of the edge grinding component 3 to quickly perform edge grinding operations on the outer wall of the round bar, greatly shortening the edge grinding preparation time, reducing the waiting time between processes, speeding up the processing rhythm, and significantly improving production efficiency. This allows the equipment to process more crystal bars per unit time. At the same time, operators do not need to debug or operate additional drive equipment, reducing operational steps and errors, reducing labor intensity, improving operational accuracy and stability, and making the processing process smoother and more efficient.

[0051] The above description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A high-efficiency integrated semiconductor processing device with multi-station collaborative operation, characterized in that, include: The operating table (1) has a rolling processing component (2) and an edge grinding processing component (3) arranged sequentially from left to right on the upper end of the operating table (1). The front end of the rolling processing component (2) is provided with a fixing component (4). The upper side of the operating table (1) is provided with a moving structure (5). A support column (6) is fixedly connected to the corner of the upper end face of the operating table (1). A top plate (7) is fixedly connected to the upper end face of the support column (6). A support base frame (12) is fixedly connected to the lower end face of the operating table (1). The movable structure (5) includes a connecting plate (51) slidably connected to the upper surface of the operating table (1). A receiving seat (52) is fixedly connected to the upper surface of the connecting plate (51). A placement groove (53) is opened on the upper surface of the receiving seat (52). A driving component is provided at the connection between the connecting plate (51) and the operating table (1).

2. The high-efficiency integrated semiconductor processing device with multi-station collaborative operation according to claim 1, characterized in that: The drive assembly includes a moving slot (55) formed on the upper surface of the operating table (1). A moving plate (56) is embedded inside the moving slot (55). The moving plate (56) is fixedly connected to the connecting plate (51). Two connecting seats (57) are symmetrically connected to the lower end of the moving plate (56). A moving wheel (58) is rotatably connected inside each connecting seat (57). A connecting rod (512) is connected between the two moving wheels (58). A forward and reverse motor (511) is connected to the side of one of the moving wheels (58) away from the connecting rod (512).

3. The high-efficiency integrated semiconductor processing device with multi-station collaborative operation according to claim 2, characterized in that: The positive and negative motor (511) is fitted with a sleeve block (513), and the inner wall of the operating table (1) and the outer side of the moving groove (55) are provided with a limiting groove (514) that cooperates with the sleeve block (513). A pad block (54) is connected in the empty groove reserved at the bottom of the inner surface wall of the placement groove (53).

4. The high-efficiency integrated semiconductor processing device with multi-station collaborative operation according to claim 1, characterized in that: The receiving seat (52) is provided with a pushing component (8). The pushing component (8) includes a groove (81) opened on the receiving seat (52) and located on one side of the placement groove (53). The groove (81) is rotatably connected from bottom to top to the inside of the first roller (82) and the second roller (83). The ends of the first roller (82) and the second roller (83) are respectively connected to connecting end blocks (84). The inner wall of the receiving seat (52) is provided with a connecting groove (85) that cooperates with the connecting end blocks (84).

5. The high-efficiency integrated semiconductor processing apparatus for multi-station collaborative operation according to claim 4, characterized in that: An electromagnetic coil (86) is wound on one of the connecting end blocks (84) of the first roller (82), and a fixing block (87) is fixedly connected to the upper end face of the operating table (1), and a permanent magnet (88) that works in conjunction with the electromagnetic coil (86) is fixedly connected to the fixing block (87).

6. The high-efficiency integrated semiconductor processing apparatus for multi-station collaborative operation according to claim 1, characterized in that: The rounding processing assembly (2) includes a base (21) connected to the upper surface of the operating table (1). A protective cover (22) is connected to the upper surface of the base (21). A grinding wheel (23) is rotatably connected inside the protective cover (22). A mounting cover is fixedly connected to one side of the outer wall of the protective cover (22). A first drive motor (25) is installed on the inner wall of the mounting cover. A connecting shaft (24) is connected to the output end of the first drive motor (25). The end of the connecting shaft (24) away from the first drive motor (25) passes through and extends into the interior of the protective cover (22) and connects to the grinding wheel (23).

7. The high-efficiency integrated semiconductor processing device with multi-station collaborative operation according to claim 1, characterized in that: The fixing component (4) includes two fixed side plates (41) symmetrically connected to the upper surface of the operating table (1). A hydraulic cylinder (42) is installed on one of the fixed side plates (41), and a movable center (43) is connected to the output end of the hydraulic cylinder (42). A rotating center (44) is rotatably connected to the other fixed side plate (41). A pulley (45) is connected to the outer wall of the rotating center (44). A belt (46) is sleeved on the outside of the pulley (45). The end of the belt (46) away from the pulley (45) is sleeved on a roller on the connecting shaft (24).

8. The high-efficiency integrated semiconductor processing apparatus for multi-station collaborative operation according to claim 1, characterized in that: The edge grinding assembly (3) consists of a support base, a second drive motor, a drive shaft, and a grinding wheel. The second drive motor is mounted on the support base, the drive shaft is connected to the output end of the second drive motor, and the grinding wheel is connected to the end of the drive shaft away from the second drive motor.

9. The high-efficiency integrated semiconductor processing apparatus for multi-station collaborative operation according to claim 8, characterized in that: The upper end of the operating table (1) and the lower end of the support seat are provided with a block groove (9). A slider (10) is embedded in the block groove (9). The slider (10) is fixedly connected to the support seat, and one end of the slider (10) is connected to an electric telescopic rod (11). The electric telescopic rod (11) is installed on one side inside the block groove (9).

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