A detachable anti-sticking plate assembly for vapor deposition machines

Abstract

This utility model discloses a detachable anti-fouling plate assembly for a vapor deposition machine, including a vapor deposition chamber wall. A vapor deposition source is disposed within the vapor deposition chamber wall. A lower anti-fouling plate and an upper anti-fouling plate are installed inside the vapor deposition chamber wall via a placement and installation assembly. The upper anti-fouling plate is located above the lower anti-fouling plate. A slot is formed at the top of the lower anti-fouling plate, and a locking block is fixedly installed at the bottom of the upper anti-fouling plate. An upward lifting mechanism is provided on the locking block. This detachable anti-fouling plate assembly, with its lower and upper anti-fouling plates, effectively prevents vapor deposition material from depositing on the vapor deposition chamber wall. The placement and installation assembly facilitates quick installation of the lower and upper anti-fouling plates onto the vapor deposition chamber wall, enabling a detachable design. The upward lifting mechanism allows for the rapid removal of both anti-fouling plates at once, making removal convenient and quick, eliminating the need to remove the anti-fouling plates one by one.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition machine technology, and in particular to a detachable vapor deposition machine anti-sticking plate assembly. Background Technology

[0002] Evaporation machines are known as the lithography machines of the screen industry and are the most core equipment for producing high-end OLED screens. The production process of OLED mainly includes five steps: LTPS, evaporation, encapsulation, unit, and module. Among them, evaporation is a crucial step, which simply means "evaporating" organic light-emitting layers, including red, green, and blue colors, onto a glass substrate.

[0003] During the vapor deposition process, most of the vapor deposition material will deposit on the inner wall of the vapor deposition chamber, resulting in material waste. The anti-deposition plate can effectively block these materials and cause them to deposit on the anti-deposition plate, thereby reducing material waste. However, in the traditional vapor deposition placement plate, multiple anti-deposition plates are set on the side according to the internal area of ​​the vapor deposition chamber. When removing and cleaning multiple anti-deposition plates, the anti-deposition plate located at the bottom is not easy to remove quickly and requires reaching in to disassemble and remove it, which is quite time-consuming and inconvenient. To address this, a detachable anti-deposition plate assembly for vapor deposition machines is proposed. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides a detachable anti-sticking plate assembly for vapor deposition machines, which solves the aforementioned problems.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A detachable anti-sticking plate assembly for a vapor deposition machine includes a vapor deposition chamber wall. A vapor deposition source is disposed inside the vapor deposition chamber wall. A lower anti-sticking plate and an upper anti-sticking plate are installed inside the vapor deposition chamber wall by means of a placement and installation assembly. The upper anti-sticking plate is located above the lower anti-sticking plate. A slot is provided on the top of the lower anti-sticking plate. A locking block is fixedly installed on the bottom of the upper anti-sticking plate. An upward lifting drive assembly is provided on the locking block.

[0007] Preferably, the placement and installation assembly includes an installation block fixedly installed on the inner wall of the vapor deposition chamber. The top of the installation block has an installation groove, and L-shaped positioning blocks are fixedly installed on the sides of the lower anti-collision plate and the upper anti-collision plate. The L-shaped positioning blocks are stuck in the installation groove.

[0008] Preferably, a horizontally positioned bonding plate is fixedly installed on the side of the vapor deposition chamber wall. The horizontally positioned bonding plate is located below the mounting block, and the lower anti-collision plate and the upper anti-collision plate are in contact with the two horizontally positioned bonding plates respectively.

[0009] Preferably, the lifting drive component includes a placement groove opened on the side of the card block, a rotating lifting block is rotatably installed on the bottom inner wall of the placement groove, and an lifting drive groove is opened on the side wall of the card slot, with the rotating lifting block adapted to the lifting drive groove.

[0010] Preferably, a compression spring is fixedly installed on the side of the rotating lifting block, and one end of the compression spring is fixedly installed on the inner wall of the placement groove.

[0011] Preferably, a position blocking block is fixedly installed on the bottom inner wall of the placement groove, and the position blocking block blocks the side of the rotating lifting block.

[0012] Preferably, the slot is located on the side close to the vapor deposition source, and the card block is used to connect the upper anti-stick plate and the lower anti-stick plate.

[0013] Compared with the prior art, the beneficial effects of this utility model are: the detachable anti-sticking plate assembly of the vapor deposition machine, with its lower and upper anti-sticking plates, can effectively avoid the problem of vapor deposition material depositing on the vapor deposition chamber wall by setting two or more anti-sticking plates. The placement and installation components facilitate the quick installation of the lower and upper anti-sticking plates on the vapor deposition chamber wall, realizing the detachable setting.

[0014] The lifting mechanism allows for easy and quick removal of both protective plates at once, eliminating the need to remove them one by one. When disassembly is required, simply lift the upper protective plate, and rotating the lifting block will engage it in the lifting groove, causing the lower protective plate to move upward. This makes removal convenient and quick, eliminating the need to remove the protective plates one by one. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0016] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0017] Figure 3 This is a partial cross-sectional structural diagram of the present invention;

[0018] Figure 4 This utility model Figure 2 A schematic diagram of the structure of part A.

[0019] In the diagram: 1. Evaporation chamber wall; 2. Evaporation source; 3. Lower anti-stick plate; 4. Upper anti-stick plate; 5. Mounting block; 6. Mounting groove; 7. L-shaped positioning block; 8. Horizontal position fitting plate; 9. Slot; 10. Locking block; 11. Lifting drive groove; 12. Placement groove; 13. Rotating lifting block; 14. Compression spring; 15. Position blocking block. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Example: Refer to Figure 1-4 A detachable anti-fouling plate assembly for a vapor deposition machine includes a vapor deposition chamber wall 1, a vapor deposition source 2 disposed inside the vapor deposition chamber wall 1, and a lower anti-fouling plate 3 and an upper anti-fouling plate 4 installed inside the vapor deposition chamber wall 1 by means of a placement and installation assembly. The upper anti-fouling plate 4 is located above the lower anti-fouling plate 3. The lower anti-fouling plate 3 and the upper anti-fouling plate 4 are installed on the vapor deposition chamber wall 1 inside the vapor deposition machine. By setting two or more anti-fouling plates, the problem of vapor deposition material depositing on the vapor deposition chamber wall 1 can be effectively avoided. The top of the lower anti-fouling plate 3 is provided with a slot 9, and the bottom of the upper anti-fouling plate 4 is fixedly installed with a block 10. The block 10 is provided with an upward lifting drive assembly. The slot 9 is opened on the side close to the vapor deposition source 2, and the block 10 is used to connect the upper anti-fouling plate 4 and the lower anti-fouling plate 3.

[0022] Furthermore, the placement and installation assembly includes a mounting block 5 fixedly installed on the inner wall of the vapor deposition chamber 1. The top of the mounting block 5 has a mounting groove 6. L-shaped positioning blocks 7 are fixedly installed on the sides of the lower anti-collision plate 3 and the upper anti-collision plate 4. The L-shaped positioning blocks 7 are stuck in the mounting groove 6. A horizontal position bonding plate 8 is fixedly installed on the side of the vapor deposition chamber 1. The horizontal position bonding plate 8 is located below the mounting block 5. The lower anti-collision plate 3 and the upper anti-collision plate 4 are in contact with the two horizontal position bonding plates 8 respectively. The L-shaped positioning blocks 7 on the placement and installation assembly are directly stuck in the mounting groove 6 on the mounting block 5. After placement, with the position correction of the horizontal position bonding plates 8, the lower anti-collision plate 3 and the upper anti-collision plate 4 can be stably placed under the action of gravity. The placement process is relatively convenient and can be detached.

[0023] Furthermore, the lifting drive assembly includes a placement groove 12 formed on the side of the locking block 10. A rotating lifting block 13 is rotatably mounted on the bottom inner wall of the placement groove 12. An upward drive groove 11 is formed on the side wall of the locking groove 9. The rotating lifting block 13 is adapted to the upward drive groove 11. A compression spring 14 is fixedly mounted on the side of the rotating lifting block 13. One end of the compression spring 14 is fixedly mounted on the inner wall of the placement groove 12. A position blocking block 15 is fixedly mounted on the bottom inner wall of the placement groove 12. The position blocking block 15 blocks the side of the rotating lifting block 13. When disassembly is required, the upper anti-collision plate 4 is directly lifted. After the upper anti-collision plate 4 moves upward, it drives the locking block 10 to move. The movement of the locking block 10 drives the rotating lifting block 13 to move. Under the pushing action of the compression spring 14, the rotating lifting block 13... The upper anti-collision plate 3 will be located in the upper lifting groove 11. After the rotating lifting block 13 moves upward, it will be stuck in the upper lifting groove 11, thereby driving the lower anti-collision plate 3 to move upward. The position blocking block 15 can limit the rotation position of the rotating lifting block 13, allowing it to rotate only at a certain angle, which better matches the inclination of the upper lifting groove 11. After the upper anti-collision plate 4 moves upward, it can directly drive the lower anti-collision plate 3 to move upward, realizing the quick removal of two anti-collision plates at one time. The removal is convenient and quick, without having to remove the anti-collision plates one by one. When the rotating lifting block 13 is placed, it will be squeezed and stored in the placement groove 12. When the locking block 10 moves down to the designated position, the compression spring 14 will push the rotating lifting block 13, and the rotating lifting block 13 will move into the upper lifting groove 11.

[0024] In use: The vapor deposition chamber wall 1 inside the vapor deposition machine is equipped with a lower anti-sticking plate 3 and an upper anti-sticking plate 4, which can effectively prevent the vapor deposition material from depositing on the vapor deposition chamber wall 1. The L-shaped positioning block 7 on the anti-sticking plate is stuck in the mounting groove 6, which can ensure the stable placement of the lower anti-sticking plate 3 and the upper anti-sticking plate 4. The placement process is relatively convenient and the detachable setting can be realized. When it is necessary to separate, simply lift the upper anti-sticking plate 4. Rotating the lifting block 13 will be pushed by the compression spring 14 and will be located in the lifting drive groove 11, which will drive the lower anti-sticking plate 3 to move upward. After the upper anti-sticking plate 4 moves upward, it can directly drive the lower anti-sticking plate 3 to move upward, so that both anti-sticking plates can be quickly removed at one time. The removal is convenient and quick, and there is no need to remove the anti-sticking plates one by one. It is convenient to use.

[0025] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A detachable type evaporation mask assembly for an evaporation chamber, comprising an evaporation chamber wall (1), characterized in that A vapor deposition source (2) is provided inside the vapor deposition chamber wall (1). A lower anti-attachment plate (3) and an upper anti-attachment plate (4) are installed inside the vapor deposition chamber wall (1) by means of a mounting assembly. The upper anti-attachment plate (4) is located above the lower anti-attachment plate (3). A slot (9) is provided on the top of the lower anti-attachment plate (3). A locking block (10) is fixedly installed on the bottom of the upper anti-attachment plate (4). An upward lifting drive assembly is provided on the locking block (10).

2. The detachable evaporation mask assembly of claim 1, wherein The placement and installation assembly includes a mounting block (5) fixedly installed on the inner wall of the vapor deposition chamber (1). The top of the mounting block (5) is provided with a mounting groove (6). The sides of the lower anti-collision plate (3) and the upper anti-collision plate (4) are fixedly installed with L-shaped positioning blocks (7), which are stuck in the mounting groove (6).

3. The detachable evaporation mask assembly of claim 1, wherein, A horizontally positioned bonding plate (8) is fixedly installed on the side of the vapor deposition chamber wall (1). The horizontally positioned bonding plate (8) is located below the mounting block (5). The lower anti-stick plate (3) and the upper anti-stick plate (4) are in contact with the two horizontally positioned bonding plates (8) respectively.

4. The detachable evaporation mask assembly of claim 1, wherein, The lifting drive assembly includes a placement groove (12) opened on the side of the card block (10), a rotating lifting block (13) is rotatably installed on the bottom inner wall of the placement groove (12), and an lifting drive groove (11) is opened on the side wall of the card slot (9), and the rotating lifting block (13) is adapted to the lifting drive groove (11).

5. The detachable evaporation mask assembly of claim 4, wherein, A compression spring (14) is fixedly installed on the side of the rotating lifting block (13), and one end of the compression spring (14) is fixedly installed on the inner wall of the placement groove (12).

6. The detachable evaporation mask assembly of claim 4, wherein, A position blocking block (15) is fixedly installed on the bottom inner wall of the placement groove (12), and the position blocking block (15) blocks the side of the rotating lifting block (13).

7. The detachable evaporation mask assembly of claim 1, wherein, The slot (9) is located on one side near the vapor deposition source (2), and the block (10) is used to connect the upper anti-stick plate (4) and the lower anti-stick plate (3).

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