Vacuum coating equipment for coating experiment

Abstract

The utility model relates to the technical field of vacuum coating equipment, in particular to vacuum coating equipment for a coating experiment, which comprises a vacuum coating equipment body, the vacuum coating equipment body is of a hollow structure, grooves for radiating heat inside the vacuum coating equipment body are arranged on two sides of the vacuum coating equipment body, and a vacuum chamber is arranged at the top of the vacuum coating equipment body. The bottom of the inner wall of the vacuum cavity is rotationally connected with a rotating plate of a hexagonal structure, the interior of the rotating plate is rotationally connected with a base, the two sides of the top of the base are each fixedly connected with two connecting rods, the tops of the two corresponding connecting rods are each fixedly connected with a fixing plate, and the exteriors of the two corresponding connecting rods are each slidably connected with an upper base. And the top of the base and the bottom of the upper seat are fixedly connected with limiting pins. The device has the advantages that the device can adapt to workpieces of different sizes without replacing the clamp, continuous production is achieved, the device can be in seamless butt joint with an intelligent production line, flexible manufacturing, small batch and multiple varieties are supported, and compared with a traditional device, the operation quality and the use efficiency are greatly improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a vacuum coating equipment for coating experiments. Background Technology

[0002] In coating experiments, it is necessary to precisely control various parameters of the coating process in order to obtain high-quality thin film samples that meet the experimental requirements.

[0003] Most existing vacuum coating equipment is designed for industrial production. The equipment is large, complex, difficult to operate, and expensive. It is not suitable for the flexible and diverse coating experiments required in a laboratory environment. At the same time, existing vacuum coating equipment can only hang products and cannot clamp products of different sizes. Products that are too large or too small may be improperly hung and blocked by the clamps, resulting in uncoated areas or film peeling (such as edge areas).

[0004] To address the above issues, we have developed a vacuum coating equipment for coating experiments. Utility Model Content

[0005] This utility model discloses a vacuum coating equipment for coating experiments, which aims to solve the technical problems in the background art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A vacuum coating apparatus for coating experiments includes a vacuum coating apparatus body. The vacuum coating apparatus body has a hollow structure with grooves on both sides for internal heat dissipation. A vacuum chamber is formed at the top of the vacuum coating apparatus body. A hexagonal rotating plate is rotatably connected to the bottom of the inner wall of the vacuum chamber. A base is rotatably connected to the inside of each rotating plate. Two connecting rods are fixedly connected to the top of each of the two bases on both sides. A fixing plate is fixedly connected to the top of each of the two connecting rods. An upper seat is slidably connected to the outside of each of the two connecting rods. Limiting pins are fixedly connected to the top of the base and the bottom of the upper seat, and the two corresponding limiting pins cooperate with each other. A compression spring is fixedly connected between the top of the upper seat and the bottom of the fixing plate, and outside the connecting rods.

[0008] Researchers first place the sample to be coated on the upper seat. Due to the action of the compression spring, the upper seat can automatically adjust its height according to the thickness of the sample to ensure that the sample is in the right position. For example, when placing semiconductor wafers of different thicknesses for coating experiments, the upper seat can keep the wafer in the optimal coating position under the elastic action of the compression spring. The limiting pin ensures the stability of the upper seat during the adjustment process. Before the experiment begins, the rotating plate is in the initial position, which makes it convenient for researchers to place the sample. During the operation of the equipment, the heat dissipation grooves on both sides of the vacuum coating equipment body can effectively dissipate the heat generated inside the equipment to ensure stable operation of the equipment.

[0009] In a preferred embodiment, the bottom of the rotating plate extends into the interior of the vacuum coating equipment body and is fixedly connected to a second gear. A motor is fixedly connected inside the vacuum coating equipment body, and a third gear is fixedly connected to the output shaft of the motor. The third gear meshes with the second gear.

[0010] The motor drives the third gear to rotate. Since the third gear meshes with the second gear, the rotating plate starts to rotate. When conducting comparative experiments on various coating processes, the rotation of the rotating plate can move the samples placed on different bases to the magnetron sputtering coating source in sequence, without the need for researchers to manually change the sample positions.

[0011] In a preferred embodiment, the central axis of the base passes through the rotating plate and is fixedly connected to a first gear, and a gear ring is fixedly connected to the bottom of the inner wall of the vacuum chamber, with the first gear meshing with the gear ring.

[0012] During the rotation of the rotating plate, the base moves with the rotating plate. Since the first gear on the base meshes with the gear ring, the base will rotate around its own central axis while following the rotation of the rotating plate. When conducting experiments on some complex shaped samples that require uniform coating, the rotation of the base can ensure that all surfaces of the sample can receive the deposition of coating material uniformly.

[0013] In a preferred embodiment, a top cover is hinged to one side of the top of the vacuum coating equipment body, a sealing plug for use with the vacuum chamber is fixedly connected to the bottom of the top cover, and a lifting handle is fixedly connected to the top of the top cover.

[0014] Before placing the sample to be coated, the researchers hold the lifting handle and open the top cover. At this time, the sealing plug separates from the vacuum chamber, making it easier for the researchers to place the sample on the upper seat of the base. After placing the sample, the researchers close the top cover, and the sealing plug is tightly embedded in the vacuum chamber to ensure the airtightness of the vacuum chamber.

[0015] In a preferred embodiment, a vacuum pump assembly is fixedly connected to one side of the vacuum coating equipment body, a filter is fixedly connected to the input end of the vacuum pump assembly, a connecting pipe is fixedly connected to the end of the filter away from the vacuum pump assembly, and the end of the connecting pipe away from the filter passes through the top cover and the sealing plug.

[0016] After the top cover is closed, the vacuum pump unit draws air from the vacuum chamber through the connecting pipe. The filter removes impurities from the drawn gas to prevent impurities from entering the vacuum pump unit and affecting its performance and service life.

[0017] In a preferred embodiment, the inner wall of the vacuum chamber is symmetrically and equidistantly provided with multiple magnetron sputtering coating sources, and the input ends of the multiple magnetron sputtering coating sources are fixedly connected by connecting lines, one end of which is connected to an external magnetron sputterer.

[0018] Once the vacuum chamber reaches the required vacuum level for the experiment, an external magnetron sputtering device provides energy to multiple magnetron sputtering coating sources via connecting lines. The multiple magnetron sputtering coating sources work simultaneously, spraying coating material onto the rotating sample surface.

[0019] In a preferred embodiment, a control panel is fixedly connected to one side of the top of the vacuum coating equipment body, and the motor, vacuum pump group and magnetron sputtering coating source are all electrically connected to the control panel.

[0020] Researchers mainly control the operation of the equipment through the control panel. During the experimental preparation stage, researchers set the rotation speed of the motor on the control panel to adjust the rotation rate of the rotating plate and the base to meet the coating requirements of different samples.

[0021] The vacuum coating equipment for coating experiments provided by this utility model has the following advantages:

[0022] In this invention, due to the action of the compression spring, the upper seat can automatically adjust its height according to the thickness of the sample, ensuring that the sample is in the appropriate position. For example, when placing semiconductor wafers of different thicknesses for coating experiments, the upper seat can keep the wafer in the optimal coating position under the elastic action of the compression spring. The limiting pin ensures the stability of the upper seat during the adjustment process. It can adapt to workpieces of different sizes without changing the fixture, reduce downtime, realize continuous production, and can also be seamlessly connected with intelligent production lines, supporting flexible manufacturing, small batches, and multiple varieties. Compared with traditional devices, it greatly improves the quality of operation and efficiency of use. Attached Figure Description

[0023] Figure 1 This is a first-view perspective three-dimensional schematic diagram of a vacuum coating equipment for coating experiments proposed in this utility model.

[0024] Figure 2This is a second-view perspective three-dimensional schematic diagram of a vacuum coating equipment for coating experiments proposed in this utility model.

[0025] Figure 3 This is a cross-sectional schematic diagram of the vacuum coating equipment body for a coating experiment proposed in this utility model.

[0026] Figure 4 This is a schematic diagram of the rotating plate structure of a vacuum coating equipment for coating experiments proposed in this utility model.

[0027] Figure 5 This is a schematic diagram showing the meshing connection between the second and third gears of a vacuum coating apparatus for coating experiments proposed in this utility model.

[0028] Figure 6 This is a schematic diagram of the magnetron sputtering coating source structure of a vacuum coating equipment for coating experiments proposed in this utility model.

[0029] In the attached diagram: 1. Vacuum coating equipment body; 2. Vacuum chamber; 3. Rotating plate; 4. Base; 5. Connecting rod; 6. Upper seat; 7. Limiting pin; 8. Fixing plate; 9. Compression spring; 10. First gear; 11. Gear ring; 12. Second gear; 13. Motor; 14. Third gear; 15. Top cover; 16. Sealing plug; 17. Lifting handle; 18. Vacuum pump assembly; 19. Filter; 20. Connecting pipe; 21. Magnetron sputtering coating source; 22. Connecting wire; 23. Control panel. Detailed Implementation

[0030] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and marked in the accompanying drawings can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0031] The vacuum coating equipment disclosed in this utility model is mainly used in vacuum coating equipment scenarios.

[0032] Reference Figures 1-6A vacuum coating apparatus for coating experiments includes a vacuum coating apparatus body 1, which is a hollow structure with grooves on both sides for internal heat dissipation. A vacuum chamber 2 is provided on the top of the vacuum coating apparatus body 1. A hexagonal rotating plate 3 is rotatably connected to the bottom of the inner wall of the vacuum chamber 2. A base 4 is rotatably connected inside the rotating plate 3. Two connecting rods 5 are fixedly connected to both sides of the top of the base 4. A fixing plate 8 is fixedly connected to the top of each of the two connecting rods 5. An upper seat 6 is slidably connected to the outside of each of the two connecting rods 5. Limiting pins 7 are fixedly connected to the top of the base 4 and the bottom of the upper seat 6. The two limiting pins 7 cooperate with each other. A compression spring 9 is fixedly connected between the top of the upper seat 6 and the bottom of the fixing plate 8, and located outside the connecting rods 5.

[0033] In this embodiment: Researchers first place the sample to be coated on the upper seat 6. Due to the action of the compression spring 9, the upper seat 6 can automatically adjust its height according to the thickness of the sample to ensure that the sample is in a suitable position. For example, when placing semiconductor wafers of different thicknesses for coating experiments, the upper seat 6 can keep the wafer in the optimal coating position under the elastic action of the compression spring 9. The limiting pin 7 ensures the stability of the upper seat 6 during the adjustment process. Before the experiment starts, the rotating plate 3 is in the initial position, which makes it convenient for researchers to place the sample. During the operation of the equipment, the heat dissipation grooves on both sides of the vacuum coating equipment body 1 can effectively dissipate the heat generated inside the equipment to ensure stable operation of the equipment.

[0034] In a preferred embodiment, the bottom of the rotating plate 3 extends into the interior of the vacuum coating equipment body 1 and is fixedly connected to a second gear 12. A motor 13 is fixedly connected inside the vacuum coating equipment body 1, and a third gear 14 is fixedly connected to the output shaft of the motor 13. The third gear 14 meshes with the second gear 12.

[0035] In this embodiment, the motor 13 drives the third gear 14 to rotate. Since the third gear 14 meshes with the second gear 12, the rotating plate 3 starts to rotate. When conducting comparative experiments on various coating processes, the rotation of the rotating plate 3 can move the samples placed on different bases 4 to the magnetron sputtering coating source 21 in sequence, without the need for researchers to manually change the sample position.

[0036] In a preferred embodiment, the central axis of the base 4 passes through the rotating plate 3 and is fixedly connected to the first gear 10. The bottom of the inner wall of the vacuum chamber 2 is fixedly connected to the gear ring 11, and the first gear 10 is meshed with the gear ring 11.

[0037] In this embodiment: During the rotation of the rotating plate 3, the base 4 moves with the rotating plate 3. Since the first gear 10 on the base 4 meshes with the gear ring 11, the base 4 will rotate around its own central axis while following the rotation of the rotating plate 3. When conducting experiments on some complex shaped samples that require uniform coating, the rotation of the base 4 can enable all surfaces of the sample to uniformly receive the deposition of coating material.

[0038] In a preferred embodiment, a top cover 15 is hinged to one side of the top of the vacuum coating equipment body 1. A sealing plug 16 for use with the vacuum chamber 2 is fixedly connected to the bottom of the top cover 15, and a lifting handle 17 is fixedly connected to the top of the top cover 15.

[0039] In this embodiment: Before placing the sample to be coated, the researcher holds the lifting handle 17 and opens the top cover 15. At this time, the sealing plug 16 is separated from the vacuum chamber 2, making it convenient for the researcher to place the sample on the upper seat 6 on the base 4. After placing the sample, the researcher closes the top cover 15, and the sealing plug 16 is tightly embedded in the vacuum chamber 2 to ensure the airtightness of the vacuum chamber 2.

[0040] In a preferred embodiment, a vacuum pump assembly 18 is fixedly connected to one side of the vacuum coating equipment body 1. A filter 19 is fixedly connected to the input end of the vacuum pump assembly 18. A connecting pipe 20 is fixedly connected to the end of the filter 19 away from the vacuum pump assembly 18. The end of the connecting pipe 20 away from the filter 19 passes through the top cover 15 and the sealing plug 16.

[0041] In this embodiment: after the top cover 15 is closed, the vacuum pump unit 18 draws air from the vacuum chamber 2 through the connecting pipe 20. The filter 19 filters out impurities in the drawn gas to prevent impurities from entering the vacuum pump unit 18 and affecting the performance and service life of the vacuum pump unit 18.

[0042] In a preferred embodiment, a plurality of magnetron sputtering coating sources 21 are symmetrically arranged at equal intervals on the inner wall of the vacuum chamber 2. A connecting line 22 is fixedly connected between the input ends of the plurality of magnetron sputtering coating sources 21, and one end of the connecting line 22 is connected to an external magnetron sputterer.

[0043] In this embodiment: when the vacuum chamber 2 reaches the required vacuum level for the experiment, the external magnetron sputtering device provides energy to multiple magnetron sputtering coating sources 21 through the connecting line 22. The multiple magnetron sputtering coating sources 21 work simultaneously to spray coating material onto the rotating sample surface.

[0044] In a preferred embodiment, a control panel 23 is fixedly connected to one side of the top of the vacuum coating equipment body 1, and the motor 13, vacuum pump group 18 and magnetron sputtering coating source 21 are all electrically connected to the control panel 23.

[0045] In this embodiment, the researchers mainly control the operation of the equipment through the control panel 23. During the experimental preparation stage, the researchers set the rotation speed of the motor 13 on the control panel 23 to adjust the rotation rate of the rotating plate 3 and the base 4 to meet the coating requirements of different samples.

[0046] Working principle: When in use, first open the top cover 15 by lifting the cover handle 17 and place the sample to be coated on the base 4. The sample is quickly fixed by the cooperation of the limiting pin 7 and the pressure spring 9.

[0047] After closing the top cover 15, the control panel 23 starts the vacuum pump group 18 to evacuate the vacuum chamber 2 through the connecting pipe 20 and the filter 19.

[0048] Once the predetermined vacuum level is reached, the motor 13 drives the second gear 12 through the third gear 14 to rotate the rotating plate 3. At the same time, the first gear 10 of the base 4 meshes with the fixed gear ring 11 to generate rotation, realizing the composite motion of sample revolution and rotation.

[0049] The magnetron sputtering coating source 21 receives the signal from the external magnetron sputterer via the connecting line 22 and starts working, uniformly coating the sample rotating at multiple angles in a vacuum environment.

[0050] Throughout the process, the control panel 23 adjusts the speed of the motor 13, the power of the vacuum pump group 18, and the coating parameters in real time to ensure coating quality and achieve efficient and uniform experimental-grade vacuum coating.

[0051] The above description is merely a preferred embodiment of this utility model, but the protection scope of this utility model is not limited thereto. The substitutions may be replacements of some structures, devices, or method steps, or they may be complete technical solutions. Equivalent substitutions or modifications made based on the technical solution and inventive concept of this utility model should all be covered within the protection scope of this utility model.

Claims

1. A vacuum coating apparatus for coating experiments, comprising a vacuum coating apparatus body (1), characterized in that, The vacuum coating equipment body (1) is a hollow structure with grooves on both sides for heat dissipation. A vacuum chamber (2) is provided on the top of the vacuum coating equipment body (1). A hexagonal rotating plate (3) is rotatably connected to the bottom of the inner wall of the vacuum chamber (2). A base (4) is rotatably connected inside the rotating plate (3). Two connecting rods (5) are fixedly connected to the top of the base (4) on both sides. A fixing plate (8) is fixedly connected to the top of the two connecting rods (5). An upper seat (6) is slidably connected to the outside of the two connecting rods (5). A limiting pin (7) is fixedly connected to the top of the base (4) and the bottom of the upper seat (6). The two limiting pins (7) are used in conjunction with each other. A pressure spring (9) is fixedly connected between the top of the upper seat (6) and the bottom of the fixing plate (8) and outside the connecting rod (5).

2. The vacuum coating equipment for coating experiments according to claim 1, characterized in that, The bottom of the rotating plate (3) extends into the interior of the vacuum coating equipment body (1) and is fixedly connected to a second gear (12). A motor (13) is fixedly connected inside the vacuum coating equipment body (1). The output shaft of the motor (13) is fixedly connected to a third gear (14). The third gear (14) meshes with the second gear (12).

3. The vacuum coating equipment for coating experiments according to claim 2, characterized in that, The central axis of the base (4) passes through the rotating plate (3) and is fixedly connected to the first gear (10). The bottom of the inner wall of the vacuum chamber (2) is fixedly connected to the gear ring (11). The first gear (10) is meshed with the gear ring (11).

4. The vacuum coating equipment for coating experiments according to claim 2, characterized in that, The top of the vacuum coating equipment body (1) is connected to a top cover (15) by a hinge on one side. The bottom of the top cover (15) is fixedly connected to a sealing plug (16) that works with the vacuum chamber (2). The top of the top cover (15) is fixedly connected to a lifting handle (17).

5. The vacuum coating equipment for coating experiments according to claim 4, characterized in that, A vacuum pump group (18) is fixedly connected to one side of the vacuum coating equipment body (1). A filter (19) is fixedly connected to the input end of the vacuum pump group (18). A connecting pipe (20) is fixedly connected to the end of the filter (19) away from the vacuum pump group (18). The end of the connecting pipe (20) away from the filter (19) passes through the top cover (15) and the sealing plug (16).

6. The vacuum coating equipment for coating experiments according to claim 4, characterized in that, The inner wall of the vacuum chamber (2) is symmetrically and equidistantly provided with multiple magnetron sputtering coating sources (21). A connecting line (22) is fixedly connected between the input ends of the multiple magnetron sputtering coating sources (21), and one end of the connecting line (22) is connected to an external magnetron sputterer.

7. The vacuum coating equipment for coating experiments according to claim 6, characterized in that, A control panel (23) is fixedly connected to one side of the top of the vacuum coating equipment body (1). The motor (13), vacuum pump group (18) and magnetron sputtering coating source (21) are all electrically connected to the control panel (23).

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