Boron diffusion main machine furnace body

Abstract

The utility model relates to the field of boron diffusion main machine furnace bodies, in particular to a boron diffusion main machine furnace body. Comprising a boron diffusion main machine furnace body, two moving devices and two furnace tubes are installed in the boron diffusion main machine furnace body, a storage plate is installed on the sides, close to the furnace tubes, of the moving devices, a control cabinet is installed on one side of the boron diffusion main machine furnace body, and a cabinet door is installed on one side of the control cabinet. A limiting structure is arranged on one side of the control cabinet and comprises a fixing plate and a positioning plate, the fixing plate is fixedly connected with the control cabinet, and the positioning plate is fixedly connected with the cabinet door. According to the boron diffusion host furnace body provided by the utility model, the defects that in the process that personnel open a cabinet door to control the boron diffusion host furnace body, the cabinet door rotates due to external factors, and the cabinet door is in contact with personnel in the rotating process, so that the working smoothness of the personnel is influenced, and the working efficiency of the personnel is low are overcome.

Description

Technical Field

[0001] This utility model relates to the field of boron expansion main furnace body, and in particular to a boron expansion main furnace body. Background Technology

[0002] The boron diffusion furnace is a piece of equipment used in the boron diffusion process. It is widely used in industries such as semiconductor manufacturing, battery materials, and photovoltaic materials. The boron diffusion process plays an important role in these industries, especially in changing the electrical properties of materials. For example, adding boron to silicon wafers changes their conductivity, thereby enabling different types of semiconductor materials.

[0003] Existing technologies, such as the utility model patent with publication number CN219409990U, disclose a diffusion furnace. This patent employs a furnace body with a chamber inside. The furnace body is provided with a first air inlet, a second air inlet, and an air outlet, all communicating with the chamber. A first gas supply pipe and a second gas supply pipe supply oxygen to the chamber are provided. The inlet of the first gas supply pipe is located on the wall of the first air inlet. The second gas supply pipe supplies boron trichloride gas, and its inlet is located on the wall of the second air inlet. In this device, the gas supply pipes for oxygen and boron trichloride gas are separate, which avoids the reaction between oxygen and boron trichloride gas before entering the chamber, preventing the formation of liquid viscous boron oxide that adheres to the gas supply pipes and causes blockage.

[0004] The inventors discovered in their daily work that in the existing technology, when personnel open the cabinet door to control the boron expansion host furnace body, the cabinet door may rotate due to external factors. During the rotation, the door may come into contact with the personnel, which will affect the smoothness of the personnel's work and lead to low work efficiency.

[0005] Therefore, it is necessary to provide a new type of boron expansion furnace body to solve the above-mentioned technical problems. Utility Model Content

[0006] The purpose of this utility model is to solve the problem that in the existing technology, when personnel open the cabinet door to control the boron expansion host furnace body, the cabinet door may rotate due to external factors, and during the rotation, it may come into contact with the personnel, thus affecting the smoothness of the personnel's work and resulting in low work efficiency. Therefore, a boron expansion host furnace body is proposed.

[0007] To solve the above-mentioned technical problems, this utility model provides a boron expansion main furnace body, including: a boron expansion main furnace body, inside which two moving devices and two furnace tubes are installed, a shelf is installed on the side of the moving devices near the furnace tubes, a control cabinet is installed on one side of the boron expansion main furnace body, a cabinet door is installed on one side of the control cabinet, a limiting structure is provided on one side of the control cabinet, the limiting structure includes a fixed plate and a positioning plate, the fixed plate is fixedly connected to the control cabinet, the positioning plate is fixedly connected to the cabinet door, a slot is formed on the inner wall of the positioning plate, a limiting groove is formed on the inner wall of the fixed plate, a moving block and a moving rod are slidably connected to the inner wall of the limiting groove, the moving block and the moving rod are fixedly connected, the moving rod is slidably connected to the fixed plate, a spring is sleeved on the arc surface of the moving rod, the two ends of the spring are fixedly connected to the moving block and the limiting groove respectively, and a locking block is fixedly connected to the side of the moving block away from the fixed plate.

[0008] The effect achieved by the above-mentioned components is that when personnel need to open the cabinet door to control the operation of the boron expansion main furnace body, they can rotate the cabinet door, which will drive the positioning plate to rotate until the locking block slides into the inner wall of the slot. This prevents the cabinet door from rotating during the operation of the control cabinet, thus affecting the smoothness of the operation and improving the work efficiency of the personnel.

[0009] Preferably, the inner wall of the limiting groove is fixedly connected to two limiting rods, and the limiting rods are slidably connected to the moving block.

[0010] The effect achieved by the above components is that the limiting rod can limit the movement of the moving block and prevent the moving block from becoming misaligned during the sliding process on the inner wall of the limiting groove.

[0011] Preferably, a protective pad is fixedly connected to the upper surface of the movable block, and the protective pad is slidably connected to the limiting groove.

[0012] The effect achieved by the above components is that the protective pad can protect the moving block and prevent the upper surface of the moving block from directly contacting the side wall of the limiting groove.

[0013] Preferably, the surface of the mobile device is provided with an auxiliary structure, which includes two fixing blocks. The two fixing blocks are fixedly connected to the mobile device. A connecting rod is slidably connected to the inner wall of the fixing blocks. An adjusting plate is fixedly connected to one end of the two connecting rods near the furnace tube. A heat insulation pad is fixedly connected to the side of the adjusting plate away from the connecting rod. The adjusting plate is slidably connected to the placement plate. A compression spring is provided on the side of the adjusting plate that is close to the mobile device. The two ends of the compression spring are fixedly connected to the adjusting plate and the mobile device, respectively.

[0014] The effect achieved by the above-mentioned components is that when personnel need to move the shelf and the materials on the shelf into the interior of the furnace tube for heat treatment, the heat insulation pad can be used to abut against one end of the furnace tube, thereby sealing one end of the furnace tube, preventing heat loss and cold air from entering, and reducing energy waste.

[0015] Preferably, a telescopic rod is fixedly connected to the side of the moving device near the adjusting plate, the output end of the telescopic rod is fixedly connected to the adjusting plate, and the compression spring is sleeved on the arc surface of the telescopic rod.

[0016] The effect achieved by the above components is that the telescopic rod can limit the compression spring and prevent the compression spring from deforming during short-term use.

[0017] Preferably, the heat insulation pad is a ceramic fiber pad.

[0018] The effects achieved by the above components are: ceramic fiber pads have the characteristics of high thermal insulation performance, light weight, and good thermal shock resistance, which can effectively reduce heat loss and maintain good stability at extremely high temperatures.

[0019] Compared with related technologies, the boron expansion main furnace body provided by this utility model has the following beneficial effects:

[0020] This utility model provides a boron expansion main furnace body. By setting a limiting structure, when personnel need to open the cabinet door to operate the boron expansion main furnace body, the limiting structure can limit the cabinet door, which can prevent the cabinet door from rotating during the operation of the control cabinet and affecting the smoothness of the operation, thereby improving the safety of personnel operation and work efficiency.

[0021] By setting up an auxiliary structure, when personnel need to move materials from the shelf to the inside of the furnace tube for heat treatment, one end of the furnace tube can be sealed off through the auxiliary structure, thereby preventing heat loss and cold air from entering, and reducing energy waste. Attached Figure Description

[0022] Figure 1 A schematic diagram of the structure of a boron expansion main furnace body provided by this utility model;

[0023] Figure 2 for Figure 1 The diagram shows the structure of the limiting structure.

[0024] Figure 3 for Figure 2 A schematic diagram of the enlarged structure at point A shown;

[0025] Figure 4 for Figure 1 The diagram shows the enlarged structure at point B.

[0026] The following are the labeling elements in the diagram: 1. Boron expansion main furnace body; 2. Control cabinet; 3. Limiting structure; 301. Fixing plate; 302. Limiting groove; 303. Moving rod; 304. Spring; 305. Moving block; 306. Protective pad; 307. Locking block; 308. Limiting rod; 309. Positioning plate; 310. Locking groove; 311. Pull ring; 4. Auxiliary structure; 41. Fixing block; 42. Connecting rod; 43. Adjusting plate; 44. Heat insulation pad; 45. Telescopic rod; 46. Compression spring; 5. Furnace tube; 6. Moving device; 7. Shelf; 8. Cabinet door. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0028] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0029] Please see Figure 1 The present invention provides a boron expansion main furnace body, comprising: a boron expansion main furnace body 1, two moving devices 6 and two furnace tubes 5 installed inside the boron expansion main furnace body 1, a shelf 7 installed on the side of the moving device 6 near the furnace tube 5, a control cabinet 2 installed on one side of the boron expansion main furnace body 1, a cabinet door 8 installed on one side of the control cabinet 2, a limiting structure 3 provided on one side of the control cabinet 2, and an auxiliary structure 4 provided on the surface of the moving device 6.

[0030] In the embodiments of this utility model, please refer to Figure 2 and Figure 3The limiting structure 3 includes a fixed plate 301 and a positioning plate 309. The fixed plate 301 is fixedly connected to the control cabinet 2, and the positioning plate 309 is fixedly connected to the cabinet door 8. The inner wall of the positioning plate 309 is provided with a slot 310. The inner wall of the fixed plate 301 is provided with a limiting groove 302. The inner wall of the limiting groove 302 is slidably connected with a moving block 305 and a moving rod 303. The moving block 305 is fixedly connected to the moving rod 303, and the moving rod 303 is slidably connected to the fixed plate 301. A spring 304 is sleeved on the arc surface of the moving rod 303. The two ends of the spring 304 are fixedly connected to the moving block 305 and the limiting groove 302 respectively. A locking block 307 is fixedly connected to the side of the moving block 305 away from the fixed plate 301. When personnel need to open cabinet door 8 to control the operation of the boron expansion main furnace body 1, they can rotate cabinet door 8. Cabinet door 8 drives positioning plate 309 to rotate until the locking block 307 slides into the inner wall of locking groove 310. This prevents cabinet door 8 from rotating during operation of control cabinet 2, thus improving the smoothness of operation and increasing work efficiency. Two limiting rods 308 are fixedly connected to the inner wall of limiting groove 302, and the limiting rods 308 are slidably connected to moving block 305. The limiting rods 308 can limit the moving block 305, preventing the moving block 305 from misaligning during sliding on the inner wall of limiting groove 302. A pull ring 311 with a circular cross-section is fixedly connected to the end of moving rod 303 away from moving block 305. The pull ring 311 facilitates the movement of the movable rod 303, improving operational convenience. A protective pad 306 is fixedly connected to the upper surface of the movable block 305, and the protective pad 306 is slidably connected to the limiting groove 302. The protective pad 306 protects the movable block 305, preventing direct contact between the upper surface of the movable block 305 and the side wall of the limiting groove 302.

[0031] In the embodiments of this utility model, please refer to Figure 4The auxiliary structure 4 includes two fixed blocks 41, which are fixedly connected to the moving device 6. Connecting rods 42 are slidably connected to the inner walls of the fixed blocks 41. Adjusting plates 43 are fixedly connected to the ends of the connecting rods 42 near the furnace tube 5. A heat insulation pad 44 is fixedly connected to the side of the adjusting plate 43 away from the connecting rods 42. The adjusting plate 43 is slidably connected to the shelf 7. A compression spring 46 is provided on the side of the adjusting plate 43 closest to the moving device 6. Both ends of the compression spring 46 are fixedly connected to the adjusting plate 43 and the moving device 6, respectively. This design allows the heat insulation pad 44 to abut against one end of the furnace tube 5 when personnel need to move the shelf 7 and the materials on it into the furnace tube 5 for heat treatment. This seals one end of the furnace tube 5, preventing heat loss and cold air entry, thus reducing energy waste. A telescopic rod 45 is fixedly connected to the side of the moving device 6 near the adjusting plate 43. The output end of the telescopic rod 45 is fixedly connected to the adjusting plate 43, and the compression spring 46 is fitted onto the arc surface of the telescopic rod 45. The telescopic rod 45 can limit the compression spring 46, preventing deformation of the compression spring 46 during short-term use. The heat insulation pad 44 is a ceramic fiber pad. Ceramic fiber pads have the characteristics of high heat insulation performance, light weight, and good thermal shock resistance, which can effectively reduce heat loss and maintain good stability at extremely high temperatures.

[0032] The working principle of the boron expansion main furnace body provided by this utility model is as follows: When personnel need to open the cabinet door 8 to operate the boron expansion main furnace body 1, the personnel can first rotate the cabinet door 8. The cabinet door 8 drives the positioning plate 309 to rotate until the positioning plate 309 abuts against the inclined surface of the locking block 307. Then, the positioning plate 309 drives the locking block 307 to move downward. The locking block 307 drives the moving block 305 to move downward. The moving block 305 drives the protective pad 306 and the moving rod 303 to move downward. The protective pad 306 can protect the moving block 305 and prevent the upper surface of the moving block 305 from directly contacting the side wall of the limiting groove 302. Upon contact, the movable block 305 also drives the spring 304 to rewind. The movable block 305 also slides on the arc surface of the two limiting rods 308. The limiting rods 308 can limit the movable block 305 to prevent it from being misaligned during sliding on the inner wall of the limiting groove 302. Then, the movable rod 303 drives the pull ring 311 to move downward. The pull ring 311 facilitates the movement of the movable rod 303 by personnel, improving the ease of operation. Until the locking block 307 corresponds to the locking groove 310, the spring 304 rebounds, causing the locking block 307 to move upward until the locking block 307 slides into the inner wall of the locking groove 310.

[0033] When personnel move the placement plate 7 and the material on it into the furnace tube 5 for heat treatment by activating the moving device 6, the moving device 6 drives the placement plate 7, the two fixed blocks 41, the telescopic rod 45, and the compression spring 46 to move closer to the furnace tube 5. The compression spring 46 drives the adjusting plate 43 to move closer to the furnace tube 5, and the adjusting plate 43 drives the heat insulation pad 44 and the two connecting rods 42 to move closer to the furnace tube 5. The telescopic rod 45 can limit the compression spring 46 to prevent deformation during short-term use, until the heat insulation pad 44 abuts against one end of the furnace tube 5. At this time, the moving device 6 will drive the compression spring 46 to retract until the moving device 6 moves to the appropriate position. At this time, the connecting rod 42 slides on the inner wall of the fixed block 41. The heat insulation pad 44 is a ceramic fiber pad, which has the characteristics of high heat insulation performance, light weight, and good thermal shock resistance. It can effectively reduce heat loss and maintain good stability at extremely high temperatures.

[0034] The circuits and controls involved in this utility model are all existing technologies, and will not be described in detail here.

[0035] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A boron dilution master furnace body characterized by, include: The boron expansion main furnace body (1) has two moving devices (6) and two furnace tubes (5) installed inside. A shelf (7) is installed on the side of the moving device (6) near the furnace tube (5). A control cabinet (2) is installed on one side of the boron expansion main furnace body (1). A cabinet door (8) is installed on one side of the control cabinet (2). A limiting structure (3) is provided on one side of the control cabinet (2). The limiting structure (3) includes a fixing plate (301) and a positioning plate (309). The fixing plate (301) is fixedly connected to the control cabinet (2), and the positioning plate (309) is fixedly connected to the cabinet door (8). The inner wall of the fixed plate (309) is provided with a slot (310), and the inner wall of the fixed plate (301) is provided with a limiting groove (302). The inner wall of the limiting groove (302) is slidably connected with a moving block (305) and a moving rod (303). The moving block (305) is fixedly connected with the moving rod (303), and the moving rod (303) is slidably connected with the fixed plate (301). A spring (304) is sleeved on the arc surface of the moving rod (303). The two ends of the spring (304) are fixedly connected to the moving block (305) and the limiting groove (302) respectively. A locking block (307) is fixedly connected to the side of the moving block (305) away from the fixed plate (301).

2. The boron expansion main furnace body according to claim 1, characterized in that, The inner wall of the limiting groove (302) is fixedly connected to two limiting rods (308), and the limiting rods (308) are slidably connected to the moving block (305).

3. The boron expansion main furnace body according to claim 1, characterized in that, A pull ring (311) is fixedly connected to one end of the moving rod (303) away from the moving block (305), and the pull ring (311) has a circular cross-section.

4. The boron expansion main furnace body according to claim 1, characterized in that, A protective pad (306) is fixedly connected to the upper surface of the movable block (305), and the protective pad (306) is slidably connected to the limiting groove (302).

5. The boron expansion main furnace body according to claim 1, characterized in that, The surface of the mobile device (6) is provided with an auxiliary structure (4), which includes two fixing blocks (41). The two fixing blocks (41) are fixedly connected to the mobile device (6). The inner wall of the fixing blocks (41) is slidably connected with a connecting rod (42). The end of the two connecting rods (42) near the furnace tube (5) is fixedly connected with an adjusting plate (43). The side of the adjusting plate (43) away from the connecting rod (42) is fixedly connected with a heat insulation pad (44). The adjusting plate (43) is slidably connected to the placement plate (7). The side of the adjusting plate (43) and the mobile device (6) close to each other is provided with a compression spring (46). The two ends of the compression spring (46) are fixedly connected to the adjusting plate (43) and the mobile device (6) respectively.

6. The boron expansion main furnace body according to claim 5, characterized in that, The moving device (6) has a telescopic rod (45) fixedly connected to the side near the adjusting plate (43). The output end of the telescopic rod (45) is fixedly connected to the adjusting plate (43), and the compression spring (46) is sleeved on the arc surface of the telescopic rod (45).

7. The boron expansion main furnace body according to claim 5, characterized in that, The heat insulation pad (44) is a ceramic fiber pad.

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