Sealing connection device and vacuum system

Abstract

The utility model discloses a sealing connection device and a vacuum system. The sealing connection device comprises a driving assembly, a first transmission assembly, a second transmission assembly and a sealing connection assembly. The driving assembly comprises a driving part, a lead screw and a nut, the driving part is used for driving the lead screw to rotate in the first direction, and the nut is in threaded connection with the lead screw; the first transmission assembly comprises a first connecting piece, and the first connecting piece is connected with the nut; the second transmission assembly comprises a second connecting piece, a first guide rail, a second guide rail, a third connecting piece and a limiting piece, the second connecting piece is connected with the first connecting piece and slidably connected with the first guide rail, the second guide rail is connected to the second connecting piece, the third connecting piece is slidably connected with the second guide rail, and at least part of projection of the limiting piece is located on the third connecting piece; the sealing connecting assembly is connected with the third connecting piece. According to the sealing connection device, the pressing mode of the sealing ring of the vacuum chamber can be optimized.

Description

Technical Field

[0001] This utility model relates to the field of vacuum system technology, and more specifically, to a sealing connection device and a vacuum system. Background Technology

[0002] In some vacuum systems, sealing connections are typically used to connect the vacuum chambers for isolation and communication. Traditional sealing connections have significant drawbacks when compressing the sealing rings. During compression, the sealing rings are subjected to both positive pressure and lateral friction. This non-positive compression accelerates wear on the sealing rings, shortening their lifespan and generating dust particles during repeated friction, which can contaminate the vacuum chambers. Utility Model Content

[0003] In view of this, the purpose of this application is to overcome the shortcomings of the prior art and provide a sealing connection device that can optimize the compression method of the sealing ring of the vacuum chamber.

[0004] This application also provides a vacuum system.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] In a first aspect, this application provides a sealing connection device having a first direction and a second direction, the first direction being perpendicular to the second direction. The sealing connection device includes: a driving assembly including a driving member, a lead screw, and a lead screw nut; the driving member being connected to the lead screw and used to drive the lead screw to rotate around the first direction; the lead screw nut being threadedly connected to the lead screw; a first transmission assembly including a first connecting member connected to the lead screw nut; a second transmission assembly including a second connecting member, a first guide rail, a second guide rail, a third connecting member, and a limiting member; the first guide rail extending along the first direction; the second connecting member being connected to the first connecting member and slidably connected to the first guide rail; the second guide rail being connected to the second connecting member and extending at an angle to both the first and second directions; the third connecting member slidably connected to the second guide rail; the limiting member being spaced apart from the third connecting member along the first direction; and at least a portion of the projection of the limiting member being located on the third connecting member in the first direction; and a sealing connection assembly connected to the third connecting member.

[0007] In an optional embodiment, the first transmission assembly further includes an elastic pushing member having elastic potential energy along the first direction. The elastic pushing member is connected to the first connecting member and disposed between the first connecting member and the second connecting member. The second transmission assembly further includes a first connecting rod extending along the first direction. One end of the first connecting rod along the first direction is rotatably connected to the second connecting member, and the other end of the first connecting rod along the first direction is threadedly connected to the first connecting member.

[0008] In an optional embodiment, the first connecting rod has a connecting portion and a limiting portion. The connecting portion extends along the first direction, one end of the connecting portion along the first direction is rotatably connected to the second connecting member, and the other end of the connecting portion along the first direction is threadedly connected to the first connecting member. The limiting portion is connected to the end of the connecting portion near the first connecting member and is disposed on the side of the first connecting member away from the second connecting member along the first direction.

[0009] In an optional embodiment, the second transmission assembly further includes an elastic support member, which is arranged parallel to the first guide rail, with one end of the elastic support member connected to the third connector and the other end of the elastic support member connected to the second connector.

[0010] In an optional embodiment, the sealing connection device further includes a frame, the first guide rail, the driving member and the limiting member are all connected to the frame, and the limiting member and the driving member are respectively disposed at both ends of the first guide rail along the first direction.

[0011] In an optional embodiment, the frame has a clearance hole at one end away from the drive member along the first direction, and the sealing connection assembly includes a second connecting rod and a push plate. One end of the second connecting rod is connected to the third connecting member, and the other end of the second connecting rod passes through the clearance hole and is connected to the push plate. The diameter of the clearance hole is larger than the diameter of the second connecting rod.

[0012] In an optional embodiment, the sealing connection assembly further includes an elastic sleeve, which is sleeved on the second connecting rod, with one end of the elastic sleeve connected to the third connecting member and the other end of the elastic sleeve passing through the edge of the clearance hole. The elastic sleeve is capable of extending and retracting along the first direction and deforming along the second direction.

[0013] In an optional embodiment, the second transmission assembly further includes a first guide member, which is arranged parallel to the first guide rail, connected to the second connector, and slidably connected to the first guide rail.

[0014] In an optional embodiment, the second transmission assembly further includes a second guide member, which is arranged parallel to the second guide rail, connected to the third connector, and slidably connected to the second guide rail.

[0015] Secondly, this application provides a vacuum system, including a sealing connection device as described in any of the foregoing embodiments.

[0016] The sealing connection device of this application has the following advantages:

[0017] In the sealing connection device of this application, a drive member can drive a lead screw to rotate around a first direction, causing a lead screw nut to move along the lead screw in the first direction. This leads to the first connecting member moving along the first direction via the lead screw nut, and further, the first connecting member moves the second connecting member. Simultaneously, the first guide rail guides the second connecting member to move along the first direction. Since the second guide rail is connected to the second connecting member, and the third connecting member is slidably connected to the second guide rail, the third connecting member can be connected to the second connecting member via the second guide rail. This allows the third connecting member to move along the first direction under the influence of the second connecting member, enabling the third connecting member to move the sealing connection assembly along the first direction to the location of the sealing ring. Furthermore, since the limiting member and the third connecting member are spaced apart along the first direction, and at least a portion of the projection of the limiting member is located on the third connecting member in the first direction, the third connecting member will abut against the limiting member during the movement of the third connecting member along the first direction. At this time, the third connecting member can no longer move along the first direction. However, under the driving action of the first connecting member and the guiding and limiting action of the first guide rail, the second connecting member still moves along the first direction. At this time, relative movement will occur between the second connecting member and the third connecting member. Since the second guide rail extends at an angle to both the first and second directions, the relative movement between the third connecting member and the second connecting member is decomposed into the movement of the second connecting member along the first direction and the movement of the third connecting member along the second direction under the cooperation of the limiting member and the second guide rail. In this way, the movement of the third connecting member along the second direction can be realized, so that the third connecting member drives the sealing connection assembly to move along the second direction, thereby realizing the compression of the sealing ring by the sealing connection assembly. During this process, the sealing connection assembly moves sequentially along the first direction and the second direction, meaning that the sealing connection assembly will not move in a non-positive direction. In this way, the sealing ring is only subjected to positive pressure when compressed, thereby reducing wear on the sealing ring, extending the service life of the sealing ring, reducing friction on the sealing ring, and reducing the generation of dust particles. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A three-dimensional structural schematic diagram of the sealing connection device in this application is shown;

[0020] Figure 2 A three-dimensional structural schematic diagram of the drive assembly, the first transmission assembly, the second transmission assembly, and the frame in this application is shown;

[0021] Figure 3 A three-dimensional structural diagram of the sealing connection assembly and the frame in this application is shown.

[0022] Explanation of key component symbols:

[0023] 100 - Drive assembly; 110 - Drive component; 120 - Lead screw; 130 - Nut;

[0024] 200 - First transmission assembly; 210 - First connecting member; 220 - Elastic pushing member; 230 - Third guide member;

[0025] 300 - Second transmission assembly; 310 - Second connector; 320 - First guide rail; 330 - Second guide rail; 340 - Third connector; 350 - Limiting member; 360 - First connecting rod; 361 - Connecting part; 362 - Limiting part; 370 - Elastic support member; 380 - First guide member; 390 - Second guide member;

[0026] 400 - Sealing connection assembly; 410 - Second connecting rod; 420 - Push plate; 430 - Flexible sleeve;

[0027] 500 - Frame; 510 - Clearance hole;

[0028] x - First direction; y - Second direction; z - Third direction. Detailed Implementation

[0029] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0030] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0032] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0033] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0034] Reference Figure 1 as well as Figure 2 As shown, the sealing connection device involved in the embodiments of this application has a first direction x and a second direction y, the first direction x is perpendicular to the second direction y, and the sealing connection device includes: a driving assembly 100, a first transmission assembly 200, a second transmission assembly 300, and a sealing connection assembly 400.

[0035] Specifically, the drive assembly 100 includes a drive member 110, a lead screw 120, and a lead nut 130. The drive member 110 is connected to the lead screw 120 and is used to drive the lead screw 120 to rotate around a first direction x. The lead nut 130 is threadedly connected to the lead screw 120. The first transmission assembly 200 includes a first connector 210, which is connected to the lead nut 130. The second transmission assembly 300 includes a second connector 310, a first guide rail 320, a second guide rail 330, a third connector 340, and a limiting member 350. The first guide rail 320 extends along the first direction x. The second connector 310 is connected to the first connector 210 and slidably connected to the first guide rail 320. The second guide rail 330 is connected to the second connector 310 and extends at an angle to the first direction x and the second direction y. The third connector 340 is slidably connected to the second guide rail 330. The limiting member 350 and the third connector 340 are spaced apart along the first direction x, and at least a portion of the projection of the limiting member 350 is located on the third connector 340 in the first direction x. The sealing connection assembly 400 is connected to the third connector 340.

[0036] It should be noted that the first direction x is Figure 1 The direction indicated by x in the middle, and the second direction y is... Figure 1 The direction indicated by y in the middle.

[0037] In the sealing connection device of this application, the drive member 110 drives the lead screw 120 to rotate around the first direction x, so that the lead screw nut 130 moves along the first direction x on the lead screw 120. This causes the lead screw nut 130 to drive the first connecting member 210 to move along the first direction x, and further drives the second connecting member 310 to move through the first connecting member 210. Simultaneously, the guiding effect of the first guide rail 320 ensures that the second connecting member 310 can move along the first direction x. Since the second guide rail 330 is connected to the second connecting member 310, and the third connecting member 340 is slidably connected to the second guide rail 330, the third connecting member 340 can be connected to the second connecting member 310 through the second guide rail 330. This allows the third connecting member 340 to move along the first direction x under the drive of the second connecting member 310, enabling the third connecting member 340 to drive the sealing connection assembly 400 to move along the first direction x to the location of the sealing ring. Furthermore, since the limiting member 350 and the third connecting member 340 are spaced apart along the first direction x, and at least part of the projection of the limiting member 350 is located on the third connecting member 340 in the first direction x, the third connecting member 340 will abut against the limiting member 350 during the movement of the third connecting member 340 along the first direction x. At this time, the third connecting member 340 can no longer move along the first direction x. However, under the driving action of the first connecting member 210 and the guiding and limiting action of the first guide rail 320, the second connecting member 310 still moves along the first direction x. At this time, relative movement will occur between the second connecting member 310 and the third connecting member 340. Because the second guide rail 330 extends at an angle to both the first direction x and the second direction y, the relative movement between the third connecting member 340 and the second connecting member 310, in cooperation with the limiting member 350 and the second guide rail 330, is decomposed into the movement of the second connecting member 310 along the first direction x and the movement of the third connecting member 340 along the second direction y. This allows the third connecting member 340 to move along the second direction y, thereby driving the sealing connection assembly 400 to move along the second direction y, thus achieving the compression of the sealing ring by the sealing connection assembly 400. During this process, the sealing connection assembly 400 moves sequentially along the first direction x and the second direction y; that is, the sealing connection assembly 400 does not move in a non-positive direction. This ensures that the sealing ring is only subjected to positive pressure when compressed, reducing wear on the sealing ring, extending its service life, and reducing friction, thereby reducing the generation of dust particles.

[0038] Reference Figure 2 As shown, the second transmission assembly 300 also includes a first connecting rod 360, one end of which is connected to the second connecting member 310, and the other end of which is connected to the first connecting member 210.

[0039] In this embodiment, since one end of the first connecting rod 360 is connected to the second connecting member 310 and the other end of the first connecting rod 360 is connected to the first connecting member 210, the first connecting member 210 and the second connecting member 310 can be connected through the first connecting rod 360, so that the first connecting member 210 can drive the second connecting member 310 to move along the first direction x.

[0040] Continue to refer to Figure 2 As shown, the first transmission assembly 200 further includes an elastic pusher 220, which has elastic potential energy along the first direction x. The elastic pusher 220 is connected to the first connector 210 and disposed between the first connector 210 and the second connector 310. The first connecting rod 360 extends along the first direction x. One end of the first connecting rod 360 along the first direction x is rotatably connected to the second connector 310, and the other end of the first connecting rod 360 along the first direction x is threadedly connected to the first connector 210.

[0041] In this embodiment, since the first connecting rod 360 extends along the first direction x, one end of the first connecting rod 360 along the first direction x is rotatably connected to the second connecting member 310, and the other end of the first connecting rod 360 along the first direction x is threadedly connected to the first connecting member 210, when the first connecting member 210 moves along the first direction x, the first connecting member 210 will move relative to the first connecting rod 360 along the first direction x, and the first connecting rod 360 will rotate relative to the second connecting member 310, so that the first connecting member 210 gradually approaches the second connecting member 310 along the first direction x. Since the elastic pusher 220 is connected to the first connector 210 and is disposed between the first connector 210 and the second connector 310, when the first connector 210 gradually approaches the second connector 310 along the first direction x, the elastic pusher 220 will gradually approach the second connector 310 and eventually abut against the second connector 310, so that the second connector 310 can move along the first direction x under the pushing action of the elastic pusher 220. Furthermore, when the push plate 420 presses the sealing ring, the sealing ring will be compressed under continuous pressure, which reduces the elasticity of the sealing ring and thus reduces its sealing performance. Since the elastic push member 220 has elastic potential energy along the first direction x, it can provide a continuous pushing force to the second connecting member 310. When the sealing performance of the sealing ring is reduced, the second connecting member 310 has a tendency to move continuously in the first direction x under the pushing action of the elastic push member 220, so that the push plate 420 can maintain a continuous pushing force on the sealing ring, thereby improving the durability of the sealing performance of the sealing ring.

[0042] Continue to refer to Figure 2As shown, the first connecting rod 360 has a connecting portion 361 and a limiting portion 362. The connecting portion 361 extends along the first direction x. One end of the connecting portion 361 along the first direction x is rotatably connected to the second connecting member 310. The other end of the connecting portion 361 along the first direction x is threadedly connected to the first connecting member 210. The limiting portion 362 is connected to the end of the connecting portion 361 near the first connecting member 210 and is disposed on the side of the first connecting member 210 away from the second connecting member 310 along the first direction x.

[0043] In this embodiment, when the driving member 110 drives the lead screw 120 to rotate clockwise around the first direction x, the first connecting member 210, driven by the nut 130, moves relative to the connecting portion 361 along the first direction x toward the direction closer to the second connecting member 310. This causes the elastic pushing member 220 to move along the first direction x toward the direction closer to the second connecting member 310, thereby realizing the pushing of the elastic pushing member 220 onto the second connecting member 310. When the driving member 110 drives the lead screw 120 to rotate counterclockwise around the first direction x, the first connecting member 210, driven by the nut 130, moves relative to the connecting portion 361 along the first direction x toward the direction away from the second connecting member 310. Since the limiting part 362 is connected to the end of the connecting portion 361 near the first connecting member 210 and is provided on the first connecting member 210 along the first direction x... The first direction x is away from the side of the second connector 310. Thus, when the first connector 210 moves along the first direction x in a direction away from the second connector 310, the first connector 210 will gradually approach the limiting part 362 and eventually abut against the limiting part 362. When the first connector 210 abuts against the limiting part 362, the connecting part 361 will move along the first direction x in a direction away from the limiting part 350 under the drive of the first connector 210. This will cause the second connector 310 to move along the first direction x in a direction away from the limiting part 350 under the drive of the connecting part 361. Furthermore, the third connector 340 can move in a direction away from the sealing ring under the drive of the second connector 310, so that the push plate 420 and the sealing ring are released, thereby relieving the tightness of the sealing ring.

[0044] Reference Figure 1 as well as Figure 2 As shown, the sealing connection device also has a third direction z, the third direction z, the second direction y, and the first direction x are mutually perpendicular, and the third direction z is... Figure 1In the direction indicated by z, two first connecting rods 360 are provided between the first connecting member 210 and the second connecting member 310. The two first connecting rods 360 are symmetrically arranged on both sides of the lead screw 120 along the third direction z to improve the stability of the first connecting member 210 moving along the first direction x. Two elastic pushing members 220 are provided on the first connecting member 210. The two elastic pushing members 220 are symmetrically arranged on both sides of the lead screw 120 along the third direction z to improve the uniformity of the pushing force applied by the elastic pushing members 220 to the second connecting member 310 and to improve the uniformity of the pushing force applied by the push plate 420 to the sealing ring.

[0045] Reference Figure 2 As shown, the second transmission assembly 300 also includes an elastic support member 370, which is arranged parallel to the first guide rail 320. One end of the elastic support member 370 is connected to the third connector 340, and the other end of the elastic support member 370 is connected to the second connector 310.

[0046] In this embodiment, since the elastic support 370 is arranged parallel to the first guide rail 320, and one end of the elastic support 370 is connected to the third connector 340 and the other end of the elastic support 370 is connected to the second connector 310, the elastic support 370 can support the third connector 340. When the third connector 340 slides relative to the second guide rail 330, the elastic support 370 can provide buffer support for the third connector 340, effectively suppressing its movement range and reducing the risk of structural impact.

[0047] Reference Figure 1 as well as Figure 2 As shown, the third connector 340 is provided with elastic support members 370 on both sides along the third direction z to improve the uniformity of the support force applied by the elastic support members 370 to the third connector 340, thereby improving the motion stability of the third connector 340.

[0048] Reference Figure 2 As shown, the sealing connection device also includes a frame 500, a first guide rail 320, a drive member 110 and a limiting member 350 are all connected to the frame 500, and the limiting member 350 and the drive member 110 are respectively disposed at both ends of the first guide rail 320 along the first direction x.

[0049] In this embodiment, the first guide rail 320, the drive member 110, and the limiting member 350 can be fixed by the frame 500. Since the limiting member 350 and the drive member 110 are respectively located at both ends of the first guide rail 320 along the first direction x, when the drive member 110 drives the lead screw 120 to rotate clockwise around the first direction x, the first transmission assembly 200 can drive the second transmission assembly 300 to move along the first direction x toward the limiting member 350, so that the third connecting member 340 abuts against the limiting member 350, and further, the third connecting member 340 moves along the second direction x. The push plate 420 moves towards the sealing ring, thereby squeezing the sealing ring. When the drive member 110 drives the lead screw 120 to reverse around the first direction x, the first transmission component 200 drives the second transmission component 300 to move away from the limiting member 350 along the first direction x, so that the third connecting member 340 is in contact with the limiting member 350. Furthermore, the third connecting member 340 can move away from the sealing ring under the drive of the second connecting member 310, so that the push plate 420 and the sealing ring are released, thereby relieving the tightness of the sealing ring.

[0050] Reference Figure 1 as well as Figure 2 As shown, the frame 500 is provided with two limiting members 350 at the end away from the drive member 110 along the first direction x. The two limiting members 350 are symmetrically arranged on both sides of the lead screw 120 along the third direction z. One of the limiting members 350 abuts against one end of the third connecting member 340 along the third direction z, and the other limiting member 350 abuts against the other end of the third connecting member 340 along the third direction z, so as to improve the uniformity of the abutting effect of the limiting member 350 on the third connecting member 340.

[0051] Reference Figure 3 As shown, the frame 500 has a clearance hole 510 at one end away from the drive member 110 along the first direction x. The sealing connection assembly 400 includes a second connecting rod 410 and a push plate 420. One end of the second connecting rod 410 is connected to the third connecting member 340, and the other end of the second connecting rod 410 passes through the clearance hole 510 and is connected to the push plate 420. The diameter of the clearance hole 510 is larger than the diameter of the second connecting rod 410.

[0052] In this embodiment, since one end of the second connecting rod 410 is connected to the third connecting member 340, and the other end of the second connecting rod 410 passes through the clearance hole 510 and is connected to the push plate 420, the push plate 420 and the third connecting member 340 can be connected through the second connecting rod 410. Since the diameter of the clearance hole 510 is larger than the diameter of the second connecting rod 410, the interference of the clearance hole 510 on the second connecting rod 410 can be reduced when the third connecting member 340 drives the second connecting rod 410 to move along the second direction y.

[0053] Continue to refer to Figure 3 As shown, the sealing connection assembly 400 also includes an elastic sleeve 430, which is sleeved on the second connecting rod 410. One end of the elastic sleeve 430 is connected to the third connecting member 340, and the other end of the elastic sleeve 430 is connected to the edge of the clearance hole 510. The elastic sleeve 430 can extend and retract along the first direction x and deform along the second direction y.

[0054] In this embodiment, since the elastic sleeve 430 is sleeved on the second connecting rod 410, the second connecting rod 410 can be protected by the elastic sleeve 430 to improve the structural strength of the second connecting rod 410. Since one end of the elastic sleeve 430 is connected to the third connecting member 340 and the other end of the elastic sleeve 430 is connected to the edge of the clearance hole 510, the elastic sleeve 430 can extend and retract along the first direction x and deform along the second direction y. Therefore, when the third connecting member 340 drives the second connecting rod 410 to move along the first direction x, the elastic sleeve 430 can extend and retract along the first direction x to reduce the interference of the elastic sleeve 430 on the movement of the second connecting rod 410 along the first direction x. When the third connecting member 340 drives the second connecting rod 410 to move along the second direction y, the elastic sleeve 430 can deform along the second direction y to reduce the interference of the elastic sleeve 430 on the movement of the second connecting rod 410 along the second direction y.

[0055] Reference Figure 2 As shown, the second transmission assembly 300 also includes a first guide member 380, which is arranged parallel to the first guide rail 320. The first guide member 380 is connected to the second connector 310 and is slidably connected to the first guide rail 320.

[0056] In this embodiment, since the first guide member 380 is arranged parallel to the first guide rail 320, the first guide member 380 is connected to the second connector 310 and slidably connected to the first guide rail 320, the first guide member 380 can guide the sliding of the second connector 310 relative to the first guide rail 320, so as to ensure that the second connector 310 can move relative to the first guide rail 320 along the first direction x.

[0057] Continue to refer to Figure 2 As shown, the second transmission assembly 300 also includes a second guide member 390, which is arranged parallel to the second guide rail 330. The second guide member 390 is connected to the third connector 340 and is slidably connected to the second guide rail 330.

[0058] In this embodiment, since the second guide member 390 is arranged parallel to the second guide rail 330, and the second guide member 390 is connected to the third connector 340 and slidably connected to the second guide rail 330, the second guide member 390 can guide the sliding of the third connector 340 relative to the second guide rail 330, thereby ensuring the accuracy of the direction of movement of the third connector 340 relative to the second guide rail 330.

[0059] Continue to refer to Figure 2 As shown, the first transmission assembly 200 also includes a third guide member 230, which is arranged parallel to the first guide rail 320. The third guide member 230 is connected to the first connector 210 and slidably connected to the first guide rail 320. Thus, the first connector 210 can be slidably connected to the first guide rail 320 through the third guide member 230, so as to ensure that the first connector 210 can move relative to the first direction x.

[0060] The vacuum system involved in the embodiments of this application includes: the sealing connection device described above.

[0061] In the vacuum system of this application, since the above-mentioned sealing connection device can optimize the compression method of the sealing ring of the vacuum chamber, the wear of the sealing ring can be reduced, so that the vacuum system of this application has better sealing performance and longer service life.

[0062] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0063] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A sealing connection device, characterized in that, The sealing connection device includes a first direction and a second direction, wherein the first direction is perpendicular to the second direction. A drive assembly includes a drive component, a lead screw, and a lead nut. The drive component is connected to the lead screw and is used to drive the lead screw to rotate about a first direction. The lead nut is threadedly connected to the lead screw. A first transmission assembly includes a first connector, which is connected to the nut. The second transmission assembly includes a second connector, a first guide rail, a second guide rail, a third connector, and a limiting member. The first guide rail extends along the first direction. The second connector is connected to the first connector and slidably connected to the first guide rail. The second guide rail is connected to the second connector and extends at an angle to both the first and second directions. The third connector is slidably connected to the second guide rail. The limiting member is spaced apart from the third connector along the first direction, and at least a portion of the projection of the limiting member is located on the third connector in the first direction. A sealing connection assembly is connected to the third connector.

2. The sealing connection device according to claim 1, characterized in that, The first transmission assembly further includes an elastic pushing member having elastic potential energy along the first direction. The elastic pushing member is connected to the first connecting member and disposed between the first connecting member and the second connecting member. The second transmission assembly further includes a first connecting rod extending along the first direction. One end of the first connecting rod along the first direction is rotatably connected to the second connecting member, and the other end of the first connecting rod along the first direction is threadedly connected to the first connecting member.

3. The sealing connection device according to claim 2, characterized in that, The first connecting rod has a connecting portion and a limiting portion. The connecting portion extends along the first direction. One end of the connecting portion along the first direction is rotatably connected to the second connecting member. The other end of the connecting portion along the first direction is threadedly connected to the first connecting member. The limiting portion is connected to the end of the connecting portion near the first connecting member and is disposed on the side of the first connecting member away from the second connecting member along the first direction.

4. The sealing connection device according to claim 1, characterized in that, The second transmission assembly further includes an elastic support member, which is arranged parallel to the first guide rail, with one end of the elastic support member connected to the third connector and the other end of the elastic support member connected to the second connector.

5. The sealing connection device according to claim 1, characterized in that, The sealing connection device further includes a frame, the first guide rail, the driving component and the limiting component are all connected to the frame, and the limiting component and the driving component are respectively disposed at both ends of the first guide rail along the first direction.

6. The sealing connection device according to claim 5, characterized in that, The frame has a clearance hole at one end away from the drive member along the first direction. The sealing connection assembly includes a second connecting rod and a push plate. One end of the second connecting rod is connected to the third connecting member, and the other end of the second connecting rod passes through the clearance hole and is connected to the push plate. The diameter of the clearance hole is larger than the diameter of the second connecting rod.

7. The sealing connection device according to claim 6, characterized in that, The sealing connection assembly further includes an elastic sleeve, which is sleeved on the second connecting rod, with one end of the elastic sleeve connected to the third connecting member and the other end of the elastic sleeve passing through the edge of the clearance hole. The elastic sleeve is capable of extending and retracting along the first direction and deforming along the second direction.

8. The sealing connection device according to claim 1, characterized in that, The second transmission assembly further includes a first guide member, which is arranged parallel to the first guide rail, connected to the second connecting member, and slidably connected to the first guide rail.

9. The sealing connection device according to claim 1, characterized in that, The second transmission assembly further includes a second guide member, which is arranged parallel to the second guide rail, connected to the third connector, and slidably connected to the second guide rail.

10. A vacuum system, characterized in that, include: The sealing connection device as described in any one of claims 1-9.

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