Optical inspection equipment

Abstract

This application relates to the field of semiconductor manufacturing technology, and in particular to an optical inspection device. The optical inspection device includes a support base, a support frame, a 2D vision module, and a 3D vision module. The support base includes a Y-axis linear module, an X-axis linear module connected to the Y-axis linear module, and a support platform connected to the X-axis linear module in some embodiments. The support frame includes at least a horizontal beam spaced vertically above the support base in some embodiments, with the length direction of the horizontal beam along the X-axis in some embodiments. The 2D vision module is connected to one side of the horizontal beam along the Y-axis in some embodiments, and the 3D vision module is connected to the other side of the horizontal beam along the Y-axis in some embodiments. The optical inspection device provided by this application can reduce the load on the linear module, improve the response speed of the linear module, and thus improve the inspection accuracy.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to an optical inspection device. Background Technology

[0002] AOI (Automated Optical Inspection) is a front-end wafer fabrication process in semiconductor manufacturing. It uses optical algorithms to measure critical dimensions of the wafer, such as linewidth and lineheight, film thickness, and surface roughness. AOI equipment typically consists of wafer loading, wafer handling robots, wafer pre-alignment, a wafer stage, and optical inspection equipment.

[0003] In related technologies, optical inspection equipment typically includes a 2D vision module and a 3D vision module, both mounted on a gantry. The gantry also features a horizontal linear module for moving the 2D and 3D vision modules and adjusting their horizontal position relative to the workpiece under test. However, because both the 2D and 3D vision modules are integrated into the horizontal linear module, the module experiences a high load, which in turn affects its response speed. Utility Model Content

[0004] Therefore, it is necessary to provide an optical inspection device that can reduce the load on the linear module, improve the response speed of the linear module, and thus improve the inspection accuracy.

[0005] An optical inspection device, comprising:

[0006] The support base includes a Y-axis linear module, an X-axis linear module connected to the Y-axis linear module, and a support platform connected to the X-axis linear module;

[0007] The support frame includes at least crossbeams spaced vertically above the bearing base, the length direction of the crossbeams being along the X-axis;

[0008] A 2D vision module is connected to one side of the crossbeam along the Y-axis.

[0009] A 3D vision module is connected to the other side of the crossbeam along the Y-axis.

[0010] Understandably, by using the Y-axis and X-axis linear modules, the support platform can be moved along the Y-axis and X-axis directions to adjust its position relative to the 2D and 3D vision modules. Furthermore, because the 2D and 3D vision modules are located on opposite sides of the crossbeam along the Y-axis, the crossbeam is subjected to forces on both sides along the Y-axis, thus maintaining a basic balance of forces on the crossbeam. Moreover, because the 2D and 3D vision modules are located on different sides of the crossbeam, even when a horizontal linear module is required, the load on a single horizontal linear module is reduced, thereby eliminating the response delay problem caused by a large load and improving detection accuracy.

[0011] In some embodiments, the crossbeam has a Z-axis linear module on at least one side along the Y-axis direction, and the 2D vision module or the 3D vision module is connected to the Z-axis linear module.

[0012] In some embodiments, the Z-axis linear module is located in the middle or near the middle of the crossbeam.

[0013] In some embodiments, the support frame further includes an assembly base connected to the Z-axis linear module and used to connect the 2D vision module or the 3D vision module.

[0014] In some embodiments, the mounting base includes:

[0015] A fixed base is connected to the Z-axis linear module;

[0016] An adjustable seat is connected to the fixed seat and is used to connect the 2D vision module or the 3D vision module. The adjustable seat can tilt and swing relative to the fixed seat.

[0017] A locking element is used to lock the adjusting seat to the fixed seat.

[0018] In some embodiments, the adjusting seat includes a connecting portion and a reference portion connected to the connecting portion, which are angled together; the mounting base also includes a positioning member and a plurality of spaced adjusting members, the positioning member being connected to the reference portion and the fixed seat, the adjusting members being connected to the connecting portion and the fixed seat, and the adjusting members being used to drive the adjusting seat to pitch and swing relative to the fixed seat about the positioning member.

[0019] In some embodiments, the connecting portion is provided with a plurality of adjustment holes arranged at intervals along its circumference, and the wall of each adjustment hole is threadedly connected to an adjustment member, and the adjustment member is rotatably connected to the fixed base.

[0020] In some embodiments, the reference portion is provided with a guide hole, the guide hole is arranged in an arc around the positioning member, and the locking member passes through the guide hole.

[0021] In some embodiments, the support frame further includes a connecting base plate connected to the assembly base; the 2D vision module includes a 2D detection module and a 2D re-inspection module, which are arranged at intervals along the X-axis direction, and the 2D detection module and the 2D re-inspection module are respectively connected to one of the assembly bases, and the two assembly bases are arranged at intervals and staggered on the connecting base plate.

[0022] In some embodiments, the support frame further includes columns, and the columns are connected to both sides of the crossbeam along the X-axis; the optical inspection equipment further includes a base, and the bearing base and the columns are both disposed on the base. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of an optical inspection device provided in one embodiment of this application;

[0025] Figure 2 This is a top view of an optical inspection device provided in an embodiment of this application;

[0026] Figure 3 This is a side view of an optical inspection device provided in an embodiment of this application;

[0027] Figure 4 This is a partial enlarged view of the optical inspection device provided in an embodiment of this application at the assembly base.

[0028] Reference numerals: 10, Support base; 11, Y-axis linear module; 12, X-axis linear module; 13, Support platform; 20, Support frame; 21, Crossbeam; 22, Z-axis linear module; 23, Assembly base; 24, Connecting base plate; 25, Column; 30, 2D vision module; 31, 2D inspection module; 32, 2D re-inspection module; 33, Ring light source; 40, 3D vision module; 50, Base; 231, Fixed seat; 232, Adjustable seat; 2321, Connecting part; 2322, Reference part; 2323, Positioning hole; 2324, Guide hole; 2325, Adjustment hole. Detailed Implementation

[0029] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0030] It should be noted that when a component is referred to as being "fixed to" or "attached to" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.

[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0032] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application's specification is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0034] Please see Figures 1 to 3One embodiment of this application provides an optical inspection device, including a support base 10, a support frame 20, a 2D vision module 30, and a 3D vision module 40. The support base 10 includes a Y-axis linear module 11, an X-axis linear module 12 connected to the Y-axis linear module 11, and a support platform 13 connected to the X-axis linear module 12. The support frame 20 includes at least two horizontal beams 21 spaced vertically above the support base 10, with the length direction of the horizontal beams 21 along the X-axis. The 2D vision module 30 is connected to one side of the horizontal beams 21 along the Y-axis, and the 3D vision module 40 is connected to the other side of the horizontal beams 21 along the Y-axis.

[0035] In this configuration, the driving direction of the Y-axis linear module 11 is along the Y-axis direction, and the driving direction of the X-axis linear module 12 is along the X-axis direction. Furthermore, the driving directions of the Y-axis linear module 11 and the X-axis linear module 12 are at an angle. In some specific embodiments, the driving direction of the Y-axis linear module 11 is perpendicular to the driving direction of the X-axis linear module 12, meaning the Y-axis direction is perpendicular to the X-axis direction.

[0036] Understandably, the stage 13 is used for the wafer under test. By utilizing the Y-axis linear module 11 and the X-axis linear module 12, the stage 13 can be moved along the Y-axis and X-axis directions to adjust its position relative to the 2D vision module 30 and the 3D vision module 40. Specifically, the X-axis linear module 12 drives the stage 13 to reciprocate along the X-axis, and the Y-axis linear module 11 drives the X-axis linear module 12 to reciprocate along the Y-axis. The stage 13 moves synchronously along the Y-axis with the X-axis linear module 12, thereby adjusting its position in the X-axis and Y-axis directions—that is, adjusting its position on the horizontal plane. This satisfies the requirement for adjusting the position of the wafer under test on the stage 13 relative to the 2D vision module 30 and the 3D vision module 40, thus enabling the inspection of the wafer under test. Based on this, because the 2D vision module 30 and the 3D vision module 40 are respectively located on both sides of the crossbeam 21 along the Y-axis, the crossbeam 21 is subjected to force on both sides along the Y-axis, thus maintaining a basic balance of forces on the crossbeam 21. Moreover, because the 2D vision module 30 and the 3D vision module 40 are located on different sides of the crossbeam 21, even if a horizontal linear module is required, a horizontal linear module can be set on both sides of the crossbeam 21 to achieve position adjustment of the 2D vision module 30 and the 3D vision module 40 respectively. This also reduces the load on a single horizontal linear module, thereby eliminating the problem of response delay caused by a large load on a single linear module and improving detection accuracy.

[0037] The 2D vision module 30 is used to acquire and inspect two-dimensional images of the wafer under test on the stage 13, i.e., planar images, such as the two-dimensional dimensions, shape, and surface defects of the wafer under test, which is more suitable for preliminary screening of the wafer surface. The 3D vision module 40 is used to acquire and inspect three-dimensional images of the wafer under test on the stage 13, i.e., stereo images, such as the three-dimensional features of the wafer under test, such as height, coplanarity, and stereo defects.

[0038] Please continue reading. Figures 1 to 3 In some embodiments, at least one side of the crossbeam 21 along the Y-axis is provided with a Z-axis linear module 22, and a 2D vision module 30 or a 3D vision module 40 is connected to the Z-axis linear module 22. The crossbeam 21 has a first side and a second side along the Y-axis, with the first side connected to the 2D vision module 30 and the second side connected to the 3D vision module 40. Alternatively, both the first and second sides of the crossbeam 21 may be provided with Z-axis linear modules 22, in which case the 2D vision module 30 and the 3D vision module 40 are each correspondingly connected to the Z-axis linear module 22 to independently adjust their height along the Z-axis direction for optimal detection results. For example, when the support stage 13 moves the wafer under test to adjust its horizontal position under the action of the Y-axis linear module 11 and the X-axis linear module 12, the Z-axis linear module 22 can be used to adjust the 2D vision module 30 and the 3D vision module 40 to a higher position to reduce interference with the position adjustment of the wafer under test. Once adjusted, the 2D vision module 30 or 3D vision module 40 can be driven downwards via the corresponding Z-axis linear module 22 to approach the wafer under test and achieve detection. Furthermore, due to the Z-axis linear module 22, the vertical distances of the 2D vision module 30 and 3D vision module 40 relative to the wafer under test can be adjusted, suitable for detecting wafers of different heights, or for adjusting the focal length of each vision module to obtain a clearer image.

[0039] Of course, it is also possible that only the first side of the crossbeam 21 is provided with the Z-axis linear module 22, or only the second side of the crossbeam 21 is provided with the Z-axis linear module 22.

[0040] Among them, the Z-axis linear module 22, the Y-axis linear module 11 and the X-axis linear module 12 can all be electric lead screw drives, cylinder drives or other linear drive modules, as long as they have high-precision position control capabilities to accurately adjust the horizontal and vertical positions.

[0041] Please see Figure 1 and Figure 2In some embodiments, the Z-axis linear module 22 is located at or near the center of the crossbeam 21. This arrangement allows for a more balanced load distribution on the Z-axis linear module 22, improving system stability and accuracy. Specifically, when the Z-axis linear module 22 is located at the center of the crossbeam 21, its center of gravity coincides with or nearly coincides with the centerline of the crossbeam 21, resulting in uniform stress on the crossbeam 21, reducing deformation and vibration, and improving the stability of the detection system. Simultaneously, the central position of the Z-axis linear module 22 reduces the eccentric torque exerted on the crossbeam 21 by the corresponding vision module during movement, lowering system vibration and improving detection accuracy.

[0042] Please continue reading. Figures 1 to 3 In some embodiments, the support frame 20 further includes an assembly base 23, which is connected to the Z-axis linear module 22 and used to connect the 2D vision module 30 or the 3D vision module 40. Taking the 3D vision module 40 corresponding to the Z-axis linear module 22 as an example, the assembly base 23 connects the output end of the Z-axis linear module 22 to the 3D vision module 40. The output end of the Z-axis linear module 22 can be a slider. By using the assembly base 23 as a transition point between the 3D vision module 40 and the slider, a stable mounting platform is provided, facilitating the installation and adjustment of the 3D vision module 40. The assembly base 23 and the slider of the Z-axis linear module 22 are connected by bolts to ensure a secure and reliable connection. The assembly base 23 has multiple mounting holes for mounting the vision module, and the mounting position and angle of the 3D vision module 40 can be adjusted as needed.

[0043] Of course, the 2D vision module 30 can also be equipped with a mounting base 23. The following description takes the connection between the mounting base 23 and the 3D vision module 40 as an example, and the assembly of the 2D vision module 30 is the same.

[0044] Please see Figure 1 and Figure 4 In some embodiments, the mounting base 23 includes a fixed base 231, an adjustable base 232, and a locking element. The fixed base 231 is connected to the Z-axis linear module 22, the adjustable base 232 is connected to the fixed base 231 and is used to connect the 3D vision module 40, the adjustable base 232 can pitch relative to the fixed base 231, and the locking element is used to lock the adjustable base 232 to the fixed base 231.

[0045] Specifically, the fixed base 231 can be bolted to the slider of the Z-axis linear module 22, providing stable foundation support. The adjusting base 232 is connected to the side of the fixed base 231 away from the slider. The fixed base 231 is provided with a connecting structure for mounting the adjusting base 232, such as a hinge, ball joint, or other adjustable connecting structure, allowing the adjusting base 232 to tilt relative to the fixed base 231. The adjusting base 232 is connected to the fixed base 231 through the aforementioned connecting structure, thereby driving the 3D vision module 40 to tilt relative to the fixed base 231, achieving angle adjustment to obtain the optimal detection angle. The adjusting base 232 is provided with a mounting structure for mounting the vision module, such as mounting holes or mounting slots. A locking component is used to lock the adjusting base 232 onto the fixed base 231 after the angle of the vision module has been adjusted, preventing angle changes during the detection process. The locking component can be a bolt, screw, clamping device, or other locking mechanism.

[0046] Therefore, the assembly base 23 provided in this embodiment, by utilizing the cooperation of the fixed base 231, the adjusting base 232 and the locking component, can adjust the detection angle of the 3D vision module 40 according to different detection requirements, thereby improving the flexibility and adaptability of detection.

[0047] Please continue reading. Figure 1 and Figure 4 In some embodiments, the adjusting seat 232 includes a connecting portion 2321 and a reference portion 2322 connected to the connecting portion 2321, which are arranged at an angle; the mounting base 23 also includes a positioning member and a plurality of spaced adjusting members, the positioning member is connected to the reference portion 2322 and the fixed seat 231, and the adjusting members are connected to the connecting portion 2321 and the fixed seat 231. The adjusting members are used to drive the adjusting seat 232 to pitch and swing relative to the fixed seat 231 around the positioning member.

[0048] Specifically, the connecting portion 2321 and the reference portion 2322 are angled together, forming an L-shape to enclose an assembly groove for connecting the aforementioned fixed base 231. The connecting portion 2321 is located on the side of the fixed base 231 away from the slider, and the reference portion 2322 is located on the side of the fixed base 231. The positioning member passes through the reference portion 2322 and connects to the fixed base 231. The reference portion 2322 can be rotatably connected to the positioning member, and the positioning member is fixedly connected to the fixed base 231; or, the positioning member is fixedly connected to the reference portion 2322 and rotatably connected to the fixed base 231. The adjusting member passes through the connecting portion 2321 and connects to the fixed base 231, so as to drive the reference portion 2322 to rotate around the axis of the positioning member through the connecting portion 2321, thereby realizing the adjustment of the pitch angle of the adjusting base 232 relative to the fixed base 231. In this process, the positioning component serves as the fulcrum for the pitch swing of the adjusting seat 232, and the position of the positioning component determines the axis of the pitch swing of the adjusting seat 232.

[0049] In practical use, the angle of the visual module can be adjusted by adjusting the length of the adjusting member between the adjusting body 232 and the fixed body 231, thereby driving the adjusting body 232 to tilt relative to the fixed body 231 around the positioning member. For example, the projection of the connecting part 2321 along the Y-axis is a square, and an adjusting member can be connected to each of its four corners. When the length of the adjusting member located at the top along the Z-axis increases, it causes the adjusting body 232 to swing counterclockwise relative to the fixed body 231; conversely, when the length of the adjusting member located at the bottom along the Z-axis increases, it causes the adjusting body 232 to swing clockwise relative to the fixed body 231.

[0050] The connecting part 2321 and the reference part 2322 can be an integrally formed structure or a separate structure connected by welding, bolts or other means.

[0051] like Figure 4 As shown, in some specific embodiments, the connecting portion 2321 is connected to two reference portions 2322 on both sides along the X-axis. The two reference portions 2322 and the connecting portion 2321 together form a U-shape, surrounding a U-shaped groove to accommodate the fixed base 231. In this case, a positioning element is connected between each reference portion 2322 and the fixed base 231 to improve the reliability of the connection.

[0052] like Figure 4 As shown, in some embodiments, the connecting part 2321 is provided with a plurality of adjustment holes 2325 arranged at intervals along its own circumference. Each adjustment hole 2325 has an adjustment member threadedly connected to its hole wall, and the adjustment member is rotatably connected to the fixed base 231.

[0053] In other words, by rotating each adjusting component around its own axis, the adjusting seat 232 can be driven to pitch and oscillate using a threaded connection, thereby achieving pitch angle adjustment. For example, adjusting holes 2325 can be provided at the four apex of the connecting part 2321, with each adjusting hole 2325 having a corresponding threaded connection to an adjusting component. When the adjusting component rotates along its own axis and screws into the adjusting hole 2325, the connecting part 2321 moves away from the fixed seat 231 along the axial direction of the adjusting component, increasing the length of the adjusting component between the adjusting seat 232 and the fixed seat 231. Conversely, when the adjusting component rotates along its own axis and screws out of the adjusting hole 2325, the connecting part 2321 moves closer to the fixed seat 231 along the axial direction of the adjusting component, decreasing the length of the adjusting component between the adjusting seat 232 and the fixed seat 231.

[0054] The adjusting components are made directly using screws or bolts.

[0055] like Figure 4As shown, the reference part 2322 is further provided with a positioning hole 2323 for the positioning component to be inserted and assembled.

[0056] like Figure 4 As shown, in some embodiments, the reference part 2322 is provided with a guide hole 2324, which is arc-shaped around the positioning member, and the locking member passes through the guide hole 2324. The arc-shaped design of the guide hole 2324 matches the pitch swing trajectory of the adjusting seat 232, allowing the locking member to move along the guide hole 2324 during the pitch swing of the adjusting seat 232. Therefore, the cooperation between the locking member and the guide hole 2324 guides the pitch swing of the adjusting seat 232. The arc length of the guide hole 2324 determines the pitch swing range of the adjusting seat 232, ensuring it is neither too large (causing insufficient structural strength) nor too small (limiting the adjustment range).

[0057] In actual use, the locking element passes through the guide hole 2324, with one end contacting the reference part 2322 and the other end connected to the fixed base 231. The locking element can be a bolt, screw, or other fastener that can provide a locking function. After adjusting the angle of the adjusting base 232, tighten the locking element to make the reference part 2322 fit tightly against the fixed base 231, thereby locking the angle of the adjusting base 232.

[0058] Please see Figures 1 to 4 In some embodiments, the support frame 20 further includes a connecting base plate 24 connected to the assembly base 23. The 2D vision module 30 includes a 2D detection module 31 and a 2D re-inspection module 32, which are arranged at intervals along the X-axis. The 2D detection module 31 and the 2D re-inspection module 32 are each connected to an assembly base 23, and the two assembly bases 23 are arranged at intervals and staggered on the connecting base plate 24. That is, the 2D detection module 31 and the 2D re-inspection module 32 are integrated and assembled using the connecting base plate 24, and each has an assembly base 23 corresponding to it to achieve pitch angle adjustment. Due to the interval and staggered arrangement of the two assembly bases 23, the two modules can be adjusted to the optimal detection position and angle without interfering with each other. Specifically, the assembly base 23 corresponding to the 2D detection module 31 can be located at a higher position along the Z-axis, and the assembly base 23 corresponding to the 2D re-inspection module 32 can be located at a lower position along the Z-axis; conversely, the opposite can also be achieved.

[0059] The connecting base plate 24 and the slider of the Z-axis linear module 22 are connected by screws, and the fixing body 231 of each assembly base 23 is connected to the connecting base plate 24 by screws, which facilitates disassembly and assembly and ensures high connection reliability.

[0060] Furthermore, the 2D inspection module 31 can be used for the initial inspection of the wafer under test, and the 2D re-inspection module 32 can be used for the re-inspection of the wafer under test to improve the inspection accuracy. In actual use, a ring light source 33 is installed below the crossbeam 21, and both the 2D inspection module 31 and the 2D re-inspection module 32 are equipped with ring light sources 33.

[0061] Alternatively, only the 2D inspection module 31 or only the 2D re-inspection module 32 may be equipped with an assembly base 23.

[0062] Please see Figures 1 to 3 In some embodiments, the support frame 20 further includes columns 25, with columns 25 connected to both sides of the crossbeam 21 along the X-axis. It is understood that the use of two columns 25 to support the crossbeam 21 allows the crossbeam 21 to span over the Y-axis linear module 11 and the X-axis linear module 12, maintaining the assembly stability of the crossbeam 21 and thus improving the assembly stability of the 2D vision module 30 and the 3D vision module 40, facilitating more accurate inspection of the wafer under test. The columns 25 are typically made of aluminum alloy profiles or steel, possessing sufficient strength and rigidity to stably support the crossbeam 21 and the various vision modules mounted on it.

[0063] Furthermore, the optical inspection equipment also includes a base 50, on which the supporting base 10 and the column 25 are both located. Understandably, the base 50 serves as the support platform for the entire optical inspection equipment. The column 25 and the aforementioned Y-axis linear module 11 are both supported on the base 50, achieving a modular design that facilitates the installation of the optical inspection equipment as a whole at the target location. Support portions protrude from both sides of the base 50 along the X-axis direction for connection to the two aforementioned columns 25.

[0064] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0065] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.

Claims

1. An optical detection device, characterized in that include: The support base (10) includes a Y-axis linear module (11), an X-axis linear module (12) connected to the Y-axis linear module (11), and a support platform (13) connected to the X-axis linear module (12); The support frame (20) includes at least a crossbeam (21) spaced vertically above the bearing base (10), the length direction of the crossbeam (21) being along the X-axis; A 2D vision module (30) is connected to one side of the crossbeam (21) along the Y-axis direction; A 3D vision module (40) is connected to the other side of the beam (21) along the Y-axis.

2. The optical detection device of claim 1, wherein, The crossbeam (21) has a Z-axis linear module (22) on at least one side along the Y-axis direction, and the 2D vision module (30) or the 3D vision module (40) is connected to the Z-axis linear module (22).

3. The optical inspection device according to claim 2, characterized in that, The Z-axis linear module (22) is located in the middle or near the middle of the crossbeam (21).

4. The optical inspection device according to claim 2, characterized in that, The support frame (20) also includes an assembly base (23), which is connected to the Z-axis linear module (22) and is used to connect the 2D vision module (30) or the 3D vision module (40).

5. The optical inspection device according to claim 4, characterized in that, The assembly base (23) includes: A fixed base (231) is connected to the Z-axis linear module (22); An adjustable seat (232) is connected to the fixed seat (231) and is used to connect the 2D vision module (30) or the 3D vision module (40). The adjustable seat (232) can tilt and swing relative to the fixed seat (231). A locking element is used to lock the adjusting seat (232) to the fixed seat (231).

6. The optical inspection device according to claim 5, characterized in that, The adjusting seat (232) includes a connecting part (2321) and a reference part (2322) connected to the connecting part (2321), which are set at an angle; The assembly base (23) also includes a positioning element and a plurality of spaced adjustment elements. The positioning element is connected to the reference part (2322) and the fixed base (231). The adjustment elements are connected to the connecting part (2321) and the fixed base (231). The adjustment elements are used to drive the adjustment base (232) to pitch and swing relative to the fixed base (231) around the positioning element.

7. The optical inspection device according to claim 6, characterized in that, The connecting part (2321) is provided with a plurality of adjustment holes (2325) arranged at intervals along its circumference. Each adjustment hole (2325) has a corresponding threaded connection to an adjustment member, and the adjustment member is rotatably connected to the fixed base (231).

8. The optical inspection device according to claim 6, characterized in that, The reference part (2322) is provided with a guide hole (2324), which is arranged in an arc around the positioning member, and the locking member passes through the guide hole (2324).

9. The optical inspection device according to claim 6, characterized in that, The support frame (20) also includes a connecting base plate (24) connected to the assembly base (23); The 2D vision module (30) includes a 2D detection module (31) and a 2D re-inspection module (32), which are arranged at intervals along the X-axis. The 2D detection module (31) and the 2D re-inspection module (32) are respectively connected to an assembly base (23), and the two assembly bases (23) are arranged at intervals and staggered on the connecting substrate (24).

10. The optical inspection device according to claim 1, characterized in that, The support frame (20) also includes columns (25), and the crossbeam (21) is connected to the columns (25) on both sides along the X-axis direction; The optical inspection equipment also includes a base (50), and the supporting base (10) and the column (25) are both located on the base (50).

Images