A cleaning device

Abstract

This application discloses a cleaning device, comprising: a support platform for supporting and fixing an object to be cleaned; and a protective cover surrounding the support platform circumferentially, wherein a plurality of protrusions are provided on the wall surface of the protective cover facing the support platform, the protrusions being used to puncture droplets splashed from the support platform toward the wall surface. The cleaning device according to this application can effectively limit the backsplash of cleaning fluid from damaging the object to be cleaned.

Description

Technical Field

[0001] This application relates to the field of semiconductor technology, and more specifically to a cleaning device. Background Technology

[0002] In the semiconductor industry, cleaning is frequently performed on items such as wafers. Cleaning equipment typically supplies a corrosive cleaning solution to these items while they are being rotated. Protective shields are usually installed in the cleaning equipment to prevent splashing of the cleaning solution during the cleaning process.

[0003] Currently, although the protective cover in the cleaning equipment can prevent the cleaning fluid from splashing, after the splashed cleaning fluid hits the protective cover at high speed, some of it will inevitably splash back onto the object to be cleaned, causing damage or defects to the surface of the object to be cleaned (for example, corrosive cleaning fluid splashing back onto areas of the object to be cleaned that are not intended to be cleaned, causing corrosion in those areas).

[0004] Therefore, improvements are needed to at least largely resolve the aforementioned problems. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To at least partially solve the above problems, this application provides a cleaning device comprising:

[0007] The support platform is used to support and fix the object to be cleaned;

[0008] A protective cover surrounds the support platform circumferentially. The wall surface of the protective cover facing the support platform is provided with a plurality of spikes, which are used to puncture droplets splashed from the support platform toward the wall surface.

[0009] For example, the spike is conical or pyramidal in shape, and the size of the top end of the spike is smaller than the size of the bottom end of the spike;

[0010] The bottom end of the spike is connected to the wall surface.

[0011] For example, the distance between the tips of adjacent spikes is 2mm-10mm;

[0012] The distance between the bottom ends of adjacent protrusions is 1.9mm-5mm;

[0013] The height of the spike is 10mm-20mm;

[0014] The distance between the bottom ends of adjacent protrusions is greater than the diameter of the droplet.

[0015] For example, the wall surface is provided with a plurality of spike arrays, each spike array including a plurality of spikes arranged in an array, and a drainage groove is provided between adjacent spike arrays.

[0016] For example, the sidewall of the spike is provided with at least one sub-spicule.

[0017] For example, the spike is provided with a plurality of sub-spiked spike groups, which are arranged at intervals along the extension direction of the spike, and each sub-spiked spike group includes a plurality of sub-spiked spikes that are equally spaced in the circumferential direction of the spike.

[0018] For example, the lengths of the plurality of sub-spiked spikes in the sub-spiked spike group are all equal;

[0019] The lengths of the sub-spines in the plurality of sub-spine groups are not equal, wherein the length of the sub-spines in the sub-spine groups adjacent to the wall is greater than the length of the sub-spines in the sub-spine groups away from the wall.

[0020] For example, the protective cover has a protrusion on the inner side of its top;

[0021] An airflow component is provided at the end of the protrusion away from the wall surface, and the airflow component is used to form an air curtain between the support platform and the spike.

[0022] For example, the wall surface is further roughened to a roughness of 4μm-50μm.

[0023] For example, a hydrophilic membrane layer is provided on the wall surface.

[0024] According to the cleaning equipment of this utility model, by providing multiple protrusions on the wall surface of the protective cover facing the support platform, the liquid droplets splashed from the support platform toward the wall surface can be punctured, which can effectively disperse the liquid droplets, break them into smaller particles, reduce their splashing energy, and thus effectively limit the back splashing of cleaning liquid onto the object to be cleaned, thereby preventing damage to the object to be cleaned. Attached Figure Description

[0025] The following drawings, which are incorporated herein by reference and are used to understand this application, illustrate embodiments of the invention and their descriptions, thereby explaining the apparatus and principles of the invention. In the drawings,

[0026] Figure 1 This is a schematic diagram of the structure of a cleaning device according to an embodiment of this application;

[0027] Figure 2 This is a schematic diagram showing the distribution of spikes on the protective cover wall according to an embodiment of this application;

[0028] Figure 3 for Figure 2 Schematic diagram of the cross section at point AA;

[0029] Figure 4 This is a cross-sectional view of the protrusion in another embodiment.

[0030] Explanation of reference numerals in the attached figures:

[0031] 100-Support platform, 200-Actuator, 300-Liquid supply unit, 400-Protective cover, 401-Spike, 402-Sub-spike group, 4021-Sub-spike, 410-Wall surface, 411-Drainage ditch, 420-Spike array, 500-Extension, 510-First plate, 520-Second plate, 600-Airflow component;

[0032] 10 - Item to be cleaned, 20 - Cleaning fluid, 30 - Air curtain, 40 - Droplets. Detailed Implementation

[0033] The following description provides numerous specific details to offer a more thorough understanding of this application. However, it will be apparent to those skilled in the art that this application can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described to avoid confusion with this application.

[0034] It should be understood that this application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this application to those skilled in the art. In the drawings, for clarity, the dimensions and relative dimensions of layers and regions may be exaggerated. The same reference numerals denote the same elements throughout.

[0035] It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or parts, these elements, components, areas, layers, and / or parts should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or part from another element, component, area, layer, or part. Therefore, without departing from the teachings of this application, the first element, component, area, layer, or part discussed below may be referred to as the second element, component, area, layer, or part.

[0036] Spatial relation terms such as "below," "under," "below," "under," "above," and "above" are used here for convenience to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of devices in use and operation.

[0037] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of this application. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0038] Embodiments of the utility model are described herein with reference to cross-sectional views that serve as schematic diagrams of preferred embodiments (and intermediate structures) of this application. Thus, variations in the shown shape can be anticipated due to, for example, manufacturing techniques and / or tolerances. Therefore, embodiments of this application should not be limited to the specific shapes shown herein, but include shape deviations due to, for example, manufacturing processes. Consequently, the figures are substantially schematic, and their shapes are not intended to show the actual shape of the device and are not intended to limit the scope of this application.

[0039] See attached document Figure 1-3 An exemplary description of a cleaning apparatus according to an embodiment of this application will be provided. The cleaning apparatus includes a support platform 100 and a protective cover 400.

[0040] The support platform 100 is used to support and fix the object 10 to be cleaned. For example, the support platform 100 may include a base and a plurality of clamping and fixing members disposed on the base. The clamping and fixing members are used to clamp and fix the object 10 to be cleaned, so that the object 10 to be cleaned can be fixed on the support platform 100 and cannot move, so that the object 10 to be cleaned can be cleaned subsequently. For example, the object 10 to be cleaned may be a wafer, and the clamping and fixing members may be chuck pins or other similar objects capable of clamping and fixing wafers. For example, the support platform 100 may be a tripod support platform.

[0041] A protective cover 400 surrounds the support platform 100 circumferentially. Exemplarily, the protective cover 400 may be cylindrical or other similar cylindrical structures to prevent the cleaning fluid 20 from splashing outwards. A plurality of spikes 401 are provided on the wall surface 410 of the protective cover 400 facing the support platform 100. These spikes 401 are used to puncture droplets 40 splashed from the support platform 100 onto the wall surface 410. Specifically, the spikes 401 are thorn-like protrusions provided on the wall surface 410 of the protective cover 400 facing the support platform 100, with sharp tips (i.e., the end furthest from the wall surface 410) that can puncture the splashed droplets 40 upon contact, causing the droplets 40 to break into multiple smaller particles. Exemplarily, the area of ​​the spike tip 401 is smaller than the projected area of ​​the droplet 40 on the wall surface 410. Exemplarily, when the spike tip 401 is circular, its diameter is smaller than the diameter of the droplet 40.

[0042] According to the cleaning equipment in the application embodiment, by providing a plurality of protrusions 401 on the wall 410 of the protective cover 400 facing the support platform 100, the liquid droplets 40 splashed from the support platform 100 toward the wall 410 can be effectively dispersed, causing them to break into smaller particles, releasing surface energy, and reducing their splashing energy. Thus, the backsplashing of the cleaning liquid 20 back onto the object to be cleaned 10 can be effectively limited, preventing damage to the object to be cleaned 10.

[0043] In this embodiment, the cleaning equipment also includes an actuator 200 and a liquid supply unit 300.

[0044] The actuator 200 is connected to the support platform 100 for driving the support platform 100 to rotate about a vertically extending rotation axis. For example, the actuator 200 may include a motor and a transmission structure, with the motor and support platform 100 connected via the transmission structure. When the actuator 200 drives the support platform 100 to rotate about the vertically extending rotation axis, the object 10 to be cleaned, fixed to the support platform 100, rotates synchronously about the vertically extending rotation axis.

[0045] The liquid supply unit 300 is used to supply cleaning fluid 20 to the object 10 to be cleaned. Exemplarily, there may be one or more liquid supply units 300, each of which may include a nozzle and a delivery pipe connected to the nozzle. The nozzle faces the object 10 to be cleaned, which is fixed on the support platform 100. The cleaning fluid 20 is sprayed onto the object 10 to be cleaned sequentially through the delivery pipe and the nozzle. When there are multiple liquid supply units 300, each unit can be used to spray different cleaning fluids 20. When the support platform 100 and the object 10 to be cleaned, fixed on the support platform 100, rotate synchronously about a vertically extending axis, and the liquid supply unit 300 supplies cleaning fluid 20 to the object 10 to clean it, the cleaning fluid 20 will splash outwards under centrifugal force.

[0046] In this embodiment, the spike 401 is conical. The bottom end of the spike 401 (i.e., the bottom surface of the cone) is connected to the wall surface 410. The top end of the spike 401 is smaller than the bottom end; specifically, the area of ​​the top end of the spike 401 is smaller than the area of ​​the bottom end, or the diameter of the top end of the spike 401 is smaller than the diameter of the bottom end. In other embodiments, the spike 401 may also be pyramidal, such as a triangular pyramid, a square pyramid, a pentagonal pyramid, etc., where the top end of the spike 401 is smaller than the bottom end. For example, the central axis of the spike 401 may extend horizontally. By configuring the spike 401 as conical or pyramidal, its top end can better pierce the droplets 40 splashed from the support platform 100 onto the wall surface 410.

[0047] In this embodiment, a plurality of spike arrays 420 (four spike arrays 420 are shown in the figure) are provided on the wall 410 of the protective cover 400 facing the support platform 100. Each spike array 420 includes a plurality of spikes 401 arranged in an array, and a drainage groove 411 is provided between adjacent spike arrays 420. Exemplarily, the plurality of spike arrays 420 can be arranged at intervals along the circumferential direction of the support platform 100, and the spikes 401 in the spike array 420 can be arranged in a rectangular array. A drainage groove 411 extending in a vertical direction can be provided between adjacent spike arrays 420. In some embodiments, the spikes 401 in the spike array 420 can also be arranged in an array such as a triangular array or a circular array, and the drainage groove 411 between adjacent spike arrays 420 can extend in an inclined direction at a certain angle to the vertical direction. By setting drainage channels 411 between the spike array 420, the residual cleaning liquid on the wall surface 410 can flow downward through the drainage channels 411 and leave the wall surface 410 as soon as possible.

[0048] See appendix Figure 3In this embodiment, the height of the spike 401 is 10mm-20mm, that is, the distance from the center of the bottom of the spike 401 to the center of its top is 10mm-20mm. In each spike array 420, the distance D1 between the tops of adjacent spikes 401 is 2mm-10mm, and the distance D2 between the bottoms of adjacent spikes 401 is 1.9mm-5mm. The distance D2 between the bottoms of adjacent spikes 401 is greater than the diameter of the droplet 40 splashed from the support platform 100 onto the wall surface 410, that is, the distance D1 between the tops of adjacent spikes 401 is greater than the diameter of the droplet 40 splashed from the support platform 100 onto the wall surface 410. It should be noted that adjacent spikes 401 refer to the two spikes 401 that are closest to each other in the spike array 420 (e.g., the two closest to each other at the bottom center). The distance D1 between the tops of adjacent spikes 401 and the distance D2 between the bottoms of adjacent spikes 401 are the distances between the closest points, not the center distance. The diameter of the droplets 40 splashed from the support platform 100 onto the wall surface 410 is typically around 1.5 mm. Since the tip size of the spikes 401 is smaller than the bottom size, the distance D1 between the tips of adjacent spikes 401 is greater than the distance D2 between the bottoms of adjacent spikes 401. By setting the height of the spikes 401, the distance D1 between the tips of adjacent spikes 401, and the distance D2 between the bottoms of adjacent spikes 401 within the aforementioned range, the droplets 40 splashed onto the wall surface 410 can be pierced by the spikes 401. The smaller particles that split from the different droplets 40 after being pierced by different spikes 401 can effectively collide with each other, and these smaller particles can also effectively collide with the spikes 401, further dissipating the energy of the droplets 40. Therefore, the smaller particles, after colliding with the wall surface 410, are unlikely to have sufficient kinetic energy to splash back onto the object 10 to be cleaned, thus avoiding damage to the object 10.

[0049] In some other embodiments, the wall surface 410 of the protective cover 400 facing the support platform 100 may not have drainage grooves 411. Multiple spikes 401 can be arranged in an array or irregularly on the wall surface 410. In this case, the height of the spikes 401 can be 10mm-20mm, that is, the distance from the center of the bottom of the spike 401 to the center of its top is 10mm-20mm. The distance between the tops of adjacent spikes 401 can be 2mm-10mm, and the distance between the bottoms of adjacent spikes 401 can be 1.9mm-5mm. The distance between the bottoms of adjacent spikes 401 is greater than the diameter of the droplets 40 splashed from the support platform 100 onto the wall surface 410; that is, the distance between the tops of adjacent spikes 401 is greater than the diameter of the droplets 40 splashed from the support platform 100 onto the wall surface 410. It should be noted that adjacent spikes 401 refer to the two spikes 401 that are closest to each other. The distance between the tops of adjacent spikes 401 and the distance between the bottoms of adjacent spikes 401 are the distances between the closest points, not the center distance.

[0050] See appendix Figure 3 In this embodiment, the wall surface 410 of the protective cover 400 facing the support platform 100 undergoes additional roughening treatment, with a roughness (Ra) smaller than the droplet diameter, preferably 4μm-50μm. For example, the wall surface 410 can be roughened using methods such as sandblasting to achieve a roughness within the aforementioned range. By setting the roughness (Ra) of the wall surface 410 within this range, the resistance to droplet flow on the wall surface 410 can be increased, causing energy to dissipate rapidly through mechanisms such as turbulence and viscous friction, reducing rebound kinetic energy, and thus suppressing droplet splashing.

[0051] For example, in some embodiments, a hydrophilic film layer is provided on the wall surface 410 of the protective cover 400 facing the support platform 100. For example, the hydrophilic film layer can be a silica coating, a titanium dioxide photocatalytic coating, a silane coupling agent modified coating, or other hydrophilic film layers known to those skilled in the art. The water contact angle of the hydrophilic film layer is typically less than 90° (even close to 0°), causing the droplet to quickly "adhere" to the surface and spread into a thin liquid film after impact, reducing the kinetic energy of upward rebound. Furthermore, the strong wettability of the hydrophilic film layer surface allows for a larger droplet spreading area, and the viscous friction (internal friction) within the liquid and the friction with the wall surface 410 during spreading consume more energy, thereby suppressing splashing. Many hydrophilic film layers (such as silica coatings) have nanoscale roughness, forming a micro-nano scale liquid storage structure. When liquid impacts, some liquid seeps into these pores and is fixed by capillary force, reducing splashing.

[0052] See appendix Figure 1 , 2In this embodiment, a protrusion 500 is provided on the inner side of the top of the protective cover 400. An airflow component 600 is provided at the end of the protrusion 500 away from the wall surface 410. The airflow component 600 is used to form an air curtain 30 between the support platform 100 and the spike 401. Specifically, the protrusion 500 includes a first plate 510 and a second plate 520 arranged in parallel. The cross-section of the protrusion 500 and the protective cover 400 as a whole is approximately inverted L-shaped. The airflow component 600 is an annular air pipe, which is fixed between the first plate 510 and the second plate 520 and is located at the end of the first plate 510 and the second plate 520 away from the wall surface 410. An air outlet is provided at the lower end of the air pipe. The vertical projection of the air pipe is located between the support platform 100 and the spike 401. An air outlet is provided at the lower end of the trachea. Viewed from below, the outlet is annular. Gas entering the trachea (such as inert gas) is discharged downwards through the outlet, forming an air curtain 30 between the support platform 100 and the spikes 401. Since droplets splashed from the support platform 100 towards the wall surface 410 have significant kinetic energy, they can pass through the air curtain 30 and splash towards the spikes 401. The air curtain 30 can initially reduce the kinetic energy of the droplets. Droplets splashed back from the spikes 401 and the wall surface 410 towards the support platform 100 have less kinetic energy and are unlikely to pass through the air curtain 30 to reach the support platform 100. Therefore, the protrusion 500 and the airflow component 600 effectively limit the backflow of cleaning fluid back onto the object to be cleaned 10, preventing damage to the object. In some other embodiments, the protrusion 500 may include multiple supports, and the airflow member 600 may include multiple nozzles disposed on the supports. The multiple nozzles are used to spray an ultra-thin planar air curtain downward to form an air curtain 30 between the support platform 100 and the spike 401. The nozzles may be wide-angle fan nozzles, slit-type air curtain nozzles, etc.

[0053] See appendix Figure 4 In some embodiments, each spike 401 may be further provided with a plurality of sub-spiked spike groups 402 (four sub-spiked spike groups 402 are shown in the figure). The plurality of sub-spiked spike groups 402 extend along the extension direction of the spike 401. Figure 4The sub-spiked spikes are arranged at intervals (vertically). Each sub-spiked spike group 402 includes a plurality of sub-spiked spikes 4021 equally spaced around the spike 401. Exemplarily, the sub-spiked spikes 4021 may be conical, pyramidal, columnar, or other similar shapes. The bottom end of the sub-spiked spike 4021 is connected to the spike 401, and the top end size of the sub-spiked spike 4021 is less than or equal to the bottom end size. Specifically, the area of ​​the top end of the sub-spiked spike 4021 is less than or equal to the area of ​​the bottom end. The angle between the extending direction of the sub-spiked spike 4021 (the direction extending outward from the spike 401) and the extending direction of the spike 401 (the direction extending outward from the wall surface 410) is an acute angle. The arrangement of multiple sub-spike groups 402 can increase the collision and contact with the droplets when the droplets splash towards the wall surface 410 and when the droplets splash back from the wall surface 410 towards the support platform 100, thereby effectively dissipating the energy of the droplets and suppressing the droplets from splashing back onto the support platform 100.

[0054] For example, see Appendix Figure 4 The sub-spicules 4021 in the sub-spicule group 402 are all of equal length. The sub-spicules 4021 in the multiple sub-spicule groups 402 are all of unequal length. That is, the sub-spicules 4021 in different sub-spicule groups 402 are not of equal length. Specifically, the sub-spicules 4021 in the sub-spicule group 402 adjacent to the wall surface 410 are longer than those in the sub-spicule group 402 farther from the wall surface 410. In other words, the closer the sub-spicule group 402 is to the wall surface 410, the longer the sub-spicules 4021 within it. This arrangement allows the spike 401 and its sub-spicules 4021 to form a tree-like structure, facilitating the further piercing of the droplet by the tip of the sub-spicule 4021. This allows the droplet to further break into smaller particles, releasing surface energy and reducing its splash energy. This effectively limits the backflow of cleaning fluid back onto the object 10 to be cleaned, preventing damage to the object 10.

[0055] In some embodiments, each spike 401 may not have multiple sub-spiked spike groups 402. Instead, one or more sub-spiked spikes 4021 may be provided on the sidewall (i.e., the circumferential surface of the spike 401). When there are multiple sub-spiked spikes 4021, they may be arranged in an array or irregularly on the sidewall of the spike 401. The arrangement of sub-spiked spikes 4021 can increase the collision and contact with the droplets when they splash towards the wall surface 410 and when they splash back from the wall surface 410 towards the support stage 100, thereby effectively dissipating the energy of the droplets and suppressing the droplets from splashing back onto the support stage 100.

[0056] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0057] Numerous specific details are set forth in the specification provided herein. However, it will be understood that embodiments of this application may be practiced without these specific details. In some instances, well-known methods, structures, and techniques have not been shown in detail so as not to obscure the understanding of this specification.

[0058] Similarly, it should be understood that, in order to streamline this application and aid in understanding one or more of the various aspects of the invention, features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the inventive point lies in solving the corresponding technical problem with fewer features than all of those in a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0059] Those skilled in the art will understand that, apart from the mutual exclusion of features, all features disclosed in this specification (including the accompanying claims, abstract, and drawings) and all processes or elements of any method or apparatus so disclosed can be combined in any combination. Unless otherwise expressly stated, each feature disclosed in this specification (including the accompanying claims, abstract, and drawings) may be replaced by an alternative feature serving the same, equivalent, or similar purpose.

[0060] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0061] It should be noted that the above embodiments are illustrative of this application and not restrictive of this application, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims.

Claims

1. A cleaning device, characterized in that, include: The support platform is used to support the items to be cleaned; A protective cover surrounds the support platform circumferentially. The wall surface of the protective cover facing the support platform is provided with a plurality of spikes, which are used to puncture droplets splashed from the support platform toward the wall surface.

2. The cleaning equipment according to claim 1, characterized in that, The spike is conical or pyramidal in shape, and the size of the top end of the spike is smaller than the size of the bottom end of the spike; The bottom end of the spike is connected to the wall surface.

3. The cleaning equipment according to claim 2, characterized in that, The distance between the tips of adjacent protrusions is 2mm-10mm; The distance between the bottom ends of adjacent protrusions is 1.9mm-5mm; The height of the spike is 10mm-20mm; The distance between the bottom ends of adjacent protrusions is greater than the diameter of the droplet.

4. The cleaning equipment according to claim 1, characterized in that, The wall surface is provided with multiple spike arrays, each spike array including multiple spikes arranged in an array, and drainage grooves are provided between adjacent spike arrays.

5. The cleaning equipment according to claim 1, characterized in that, The sidewall of the spike is provided with at least one sub-spicule.

6. The cleaning equipment according to claim 1, characterized in that, The spike is provided with a plurality of sub-spiked spike groups, which are arranged at intervals along the extension direction of the spike, and each sub-spiked spike group includes a plurality of sub-spiked spikes arranged at intervals in the circumferential direction of the spike.

7. The cleaning equipment according to claim 6, characterized in that, The lengths of all the sub-spines in the sub-spine group are equal; The lengths of the sub-spines in the plurality of sub-spine groups are not equal, wherein the length of the sub-spines in the sub-spine groups adjacent to the wall is greater than the length of the sub-spines in the sub-spine groups away from the wall.

8. The cleaning equipment according to claim 1, characterized in that, The protective cover has a protruding part on the inner side of its top; An airflow component is provided at the end of the protrusion away from the wall surface, and the airflow component is used to form an air curtain between the support platform and the spike.

9. The cleaning equipment according to claim 1, characterized in that, The wall surface has also undergone additional roughening treatment, with a roughness of 4μm-50μm.

10. The cleaning equipment according to claim 1, characterized in that, A hydrophilic membrane layer is provided on the wall surface.

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