A heated spin coater

Abstract

The utility model discloses a kind of heating type rotary coating equipment, including shell main body, the top of shell main body is fixedly assembled with working chamber, the inner cavity center of working chamber is fixedly assembled with driving mechanism between the inner cavity of shell main body, the output end of driving mechanism is fixedly connected with vacuum adsorption sample loading tray, vacuum adsorption sample loading tray and working chamber between fixedly assembled with heating mechanism, the top of working chamber is embedded fixedly installed with liquid injector. The heating of rotary coating equipment is optimized, using the mode of heating at the bottom of vacuum adsorption sample loading tray, the sample film on sample loading tray can be heated and baked more uniformly, without causing film deformation and cracking, ensure the final quality of film. Using the mode of sample adsorption in vacuum adsorption sample loading tray, replace traditional fixture clamping, avoid the damage of fixture to sample and film in the process of rotary coating.

Description

Technical Field

[0001] This utility model relates to the field of spin coating technology, specifically to a heated spin coating device. Background Technology

[0002] Spin coating is a process technology that uses centrifugal force to uniformly spread liquid materials (such as photoresist, polymer solutions, etc.) and form a thin film by rotating the substrate at high speed. It features fast and uniform coating and is particularly suitable for planar coating. It is widely used in semiconductor manufacturing, microelectronics, optical coating, biochips and other fields.

[0003] Current spin coating equipment has the following problems:

[0004] First, in most spin coating equipment, the heating and baking function is located at the top cover. Heat radiates downwards from the top cover. Due to uneven heating of the heat source and different heat radiation distances, the sample film on the sample tray is heated and baked unevenly, which can easily cause film deformation and cracking, affecting the final quality of the coating.

[0005] Secondly, some spin coating equipment has the heating and baking function located at the bottom of the sample tray, but the sample is fixed by a clamp. This clamping and coating process can easily damage the sample and the film, which also affects the final quality of the coating.

[0006] Third, traditional spin coating equipment generally performs spin coating in an air environment. During the coating process, impurities in the air may react chemically with the coated liquid material or undergo other changes, causing film contamination and still affecting the final quality of the coating. Utility Model Content

[0007] The purpose of this invention is to provide a heated spin coating device to solve the problems mentioned in the background art.

[0008] To achieve the above objectives, this utility model provides the following technical solution: a heated spin coating device, comprising a housing body, a working chamber fixedly mounted on the top of the housing body, a driving mechanism fixedly mounted between the center of the inner cavity of the working chamber and the inner cavity of the housing body, a vacuum adsorption sample carrier plate fixedly connected to the output end of the driving mechanism, a heating mechanism fixedly mounted between the vacuum adsorption sample carrier plate and the working chamber, and a liquid injector embedded and fixedly installed on the top of the working chamber.

[0009] Preferably, an integrated controller is embedded in one side wall of the outer casing, and a discharge port, an air extraction port, and a pressure monitor are fixedly mounted on the other side wall of the outer casing from top to bottom.

[0010] Preferably, the working chamber includes a lower chamber and an upper chamber, which are hinged together. A right-angle elbow is embedded in the bottom of the lower chamber, and a connecting hose is fixedly connected between the right-angle elbow and the discharge port. A quartz glass cover is detachably and fixedly mounted on the top of the upper chamber via a pressure cap. A liquid injector fixing bracket is embedded in the middle of the quartz glass cover, and the liquid injector is fixedly mounted in the liquid injector fixing bracket.

[0011] Preferably, a sensing sensor is fixedly mounted between the lower chamber and the upper chamber.

[0012] Preferably, a first O-ring is fixedly assembled between the quartz glass cover and the cap, and a second O-ring is fixedly assembled between the quartz glass cover and the injector holder.

[0013] Preferably, the drive mechanism includes a motor support base, which is fixedly mounted on the bottom of the inner cavity of the outer shell body. A motor base is fixedly mounted on the top of the motor support base. An air extraction straight pipe is fixedly mounted on the side wall of the motor base. A connecting hose is fixedly connected between the air extraction straight pipe and the air extraction interface. A drive motor is fixedly mounted on the top of the motor base. A motor fixing flange and a connecting sleeve are fixedly mounted on the top of the drive motor. A pressure pad is fixedly mounted on the top of the connecting sleeve.

[0014] Preferably, a skeleton-type vacuum sealing ring is fixedly mounted on the top of the motor mounting flange and the bottom of the drive motor, respectively.

[0015] Preferably, the heating mechanism includes a heating outer plate, a heating inner plate that is detachably and fixedly mounted inside the heating outer plate, a ceramic heating plate that is mounted inside the heating inner plate, a support sleeve that is fixedly mounted between the ceramic heating plate and the heating inner plate, and a heating wire and a thermocouple that are fixedly mounted inside the ceramic heating plate.

[0016] Preferably, a heat insulation plate and heat insulation cotton are fixedly assembled between the outer heating plate and the inner heating plate.

[0017] Preferably, a waterproof sleeve is fitted at the connection between the heating outer plate and the lower chamber.

[0018] Compared with the prior art, the beneficial effects of this utility model are:

[0019] This invention optimizes the heating of the spin coating equipment by heating the sample tray at the bottom of the vacuum adsorption tray. This ensures more uniform heating and baking of the sample film on the tray, preventing film deformation and cracking, and guaranteeing the final quality of the film.

[0020] This invention employs a vacuum adsorption method within a vacuum adsorption sample tray to adsorb the sample, replacing the traditional clamping and fixing method and avoiding damage to the sample and film caused by the clamp during the spin coating process.

[0021] This invention provides different gas working environments: through the process of inflation and deflation, the gas in the working chamber can be replaced or a low vacuum working environment can be formed, which can ensure the purity and pollution-free coating film. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of this utility model.

[0023] Figure 2 This is a schematic diagram of the drive mechanism and working chamber of this utility model.

[0024] Figure 3 This is a schematic diagram of the heating mechanism of this utility model.

[0025] In the diagram: 1. Main casing; 2. Integrated controller; 3. Discharge port; 4. Suction port; 5. Pressure monitor; 6. Working chamber; 61. Lower chamber; 62. Upper chamber; 63. Sensor; 64. Right-angle elbow; 65. Cap; 66. Quartz glass cover; 67. First O-ring seal; 68. Injector holder; 69. Second O-ring seal; 7. Drive mechanism; 71. Motor support; 72. Motor 73. Base; 74. Suction straight pipe; 75. Drive motor; 76. Motor fixing flange; 77. Connecting sleeve; 78. Pressure pad; 79. Skeleton type vacuum rubber sealing ring; 80. Vacuum adsorption sample tray; 91. Heating mechanism; 92. Heating outer plate; 93. Heating inner plate; 94. Ceramic heating plate; 95. Support sleeve; 96. Heating wire; 97. Thermocouple; 98. Insulation board; 99. Insulation cotton; 10. Liquid injector; 11. Waterproof sleeve. Detailed Implementation

[0026] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0027] Please see Figure 1 , Figure 2 and Figure 3This utility model provides a technical solution: a heating-type rotary coating device, including a housing body 1. A housing base plate is embedded and fixedly mounted on the bottom of the housing body 1. Feet are fixedly mounted at the four corners of the bottom of the housing base plate, and the feet can be adjusted in height. The feet facilitate a more level placement of the housing body 1 on a table. An integrated controller 2 is embedded and fixedly mounted on one side wall of the housing body 1. The integrated controller 2 contains a touch screen and a temperature controller. The integrated controller 2 is electrically connected to various electrical components inside the housing body 1. The operation of each electrical component can be controlled through the touch screen in the integrated controller 2, and the operating parameters of each electrical component during the heating coating process can be monitored. The display shows the numbers, and the integrated controller 2 and the various electrical components inside the main body 1 are electrically connected to an external power source for power supply. The other side wall of the main body 1 is fixedly equipped with a discharge port 3, an air extraction port 4, and a pressure monitor 5 from top to bottom. The discharge port 3 is a drain / gas port used to discharge gas and water during the spin coating process. The air extraction port 4 is used to connect to an external oil-free vacuum pump to perform vacuuming operations inside the device. The output end of the pressure monitor 5 is electrically connected to the input end of the integrated controller 2. The pressure monitor 5 can monitor the pressure data inside the main body 1 to ensure the normal operation of each electrical component.

[0028] The top of the outer shell 1 is detachably fixed with a working chamber 6 by screws. A motor drive mechanism 7 is fixedly installed between the bottom center of the working chamber 6 and the inner cavity of the outer shell 1. The output end of the motor drive mechanism 7 is fixedly connected to a vacuum adsorption sample tray 8. The vacuum adsorption sample tray 8 is rotatably connected to the inside of the working chamber 6. The working chamber 6 is used for the coating process. The drive mechanism 7 is used to drive the vacuum adsorption sample tray 8 to rotate. A heating mechanism 9 is fixedly installed between the center of the vacuum adsorption sample tray 8 and the working chamber 6. By heating the vacuum adsorption sample tray 8 from the bottom, the sample film inside the vacuum adsorption sample tray 8 can be heated more evenly, preventing film deformation and cracking, and ensuring the final quality of the film.

[0029] like Figure 2As shown, the working chamber 6 is cylindrical in shape and consists of a lower chamber 61 and an upper chamber 62. One side wall of the lower chamber 61 and the upper chamber 62 are connected by a hinge, and a latch is fixedly fitted to the other side wall of the lower chamber 61 and the upper chamber 62. The hinge allows the lower chamber 61 and the upper chamber 62 to be opened and closed, while the latch locks them in place when closed. A sensor is embedded in the side wall of the lower chamber 61 and the upper chamber 62 near the hinge. 63. The sensing sensor 63 consists of two parts: a sensing metal block and a sensor body. The sensor body is embedded in the lower chamber 61, and the sensing metal block is embedded in the upper chamber 62. The sensing sensor 63 and the various electrical components in the equipment form a closed circuit. When the lower chamber 61 and the upper chamber 62 are closed, the various electrical components in the equipment are powered on and operate normally. When the lower chamber 61 and the upper chamber 62 are opened, the sensing sensor 63 cuts off the power to the circuit in the equipment, thereby achieving power-off protection for the equipment.

[0030] A right-angle elbow 64 is embedded in the bottom of the lower chamber 61. The right-angle elbow 64 is connected to the discharge port 3 via a connecting hose. The top of the right-angle elbow 64 is connected to the inner cavity of the lower chamber 61. The right-angle elbow 64 is used for venting and draining within the lower chamber 61. During gas replacement before coating, the right-angle elbow 64 cooperates with the discharge port 3 for gas discharge. During coating, the right-angle elbow 64 cooperates with the discharge port 3 to discharge the wastewater generated during the coating process.

[0031] A pressure cap 65 is detachably and fixedly mounted on the top of the upper chamber 62 by screws. A quartz glass cover plate 66 is fixedly mounted between the upper chamber 62 and the pressure cap 65. The quartz glass cover plate 66 can seal the upper chamber 62 while allowing observation of the interior of the working chamber 6 during the coating process. A first O-ring 67 is fixedly mounted between the quartz glass cover plate 66, the upper chamber 62, and the pressure cap 65. The first O-ring 67 achieves a vacuum seal between the quartz glass cover plate 66, the pressure cap 65, and the upper chamber 62. A liquid injector holder 68 is embedded and fixedly mounted in the middle of the quartz glass cover plate 66. A second O-ring 69 is fixedly mounted between the quartz glass cover plate 66 and the liquid injector holder 68. The second O-ring 69 provides a vacuum seal between the quartz glass cover plate 66 and the liquid injector holder 68.

[0032] The injector holder 68 is used for mounting the injector 10, which is used to inject samples into the vacuum adsorption sample tray 8 in the working chamber 6. The side wall of the injector holder 68 is integrally formed with an inflation port, which is used to fill the working chamber 6 with the inert gas required for the coating process.

[0033] like Figure 2As shown, the drive mechanism 7 includes a motor support base 71, which is fixedly mounted in the inner cavity of the outer shell 1. A motor base cover is integrally formed on the top of the motor support base 71, and a motor base 72 is fixedly mounted on the top of the motor support base 71. A motor base sealing gasket is fixedly mounted between the motor base cover and the motor base 72, improving the sealing performance between them. A vacuum straight pipe 73 is fixedly connected to the side wall of the motor base 72, and the vacuum straight pipe 73 is connected to the vacuum interface 4 via a connecting hose. An external vacuum pump device performs a vacuuming operation on the inner cavity of the motor base 72. A drive motor 74, which is a hollow motor, is fixedly mounted on the top of the motor base 72. A motor fixing flange 75 is fixedly mounted between the drive motor 74 and the lower chamber 61. The mounting flange 75 fixes the installation position of the drive motor 74. A connecting sleeve 76 is fixedly installed between the output end of the drive motor 74 and the vacuum adsorption sample tray 8. The vacuum adsorption sample tray 8 and the drive motor 74 are connected and fixed by flat-head hollow screws. The bottom side of the vacuum adsorption sample tray 8 is limited and fixed to the drive motor 74 by limit screws. The drive motor 74 drives the vacuum adsorption sample tray 8 to rotate through the connecting sleeve 76. A pressure pad 77 is fixedly connected to the top of the connecting sleeve 76 by screws. The pressure pad 77 is used to support the heating mechanism 9 and the vacuum adsorption sample tray 8 at the top. The top of the motor fixing flange 75 and the bottom of the drive motor 74 are respectively fixedly installed with skeleton-type vacuum rubber sealing rings 78. The skeleton-type vacuum rubber sealing rings 78 are used to achieve sealing between the drive motor 74, the motor fixing flange 75 and the motor base 72.

[0034] like Figure 3 As shown, the heating mechanism 9 includes a heating outer plate 91, which is fixedly connected to the top of the connecting sleeve 76 by screws. A waterproof sleeve 11 is fixedly fitted between the bottom of the heating outer plate 91 and the lower chamber 61. The waterproof sleeve 11 is installed by an interference fit. The waterproof sleeve 11 protects the connection between the connecting sleeve 76 and the heating outer plate 91, preventing water generated during the coating process from entering the connection.

[0035] An inner heating plate 92 is embedded within the outer heating plate 91. The outer heating plate 91 and the inner heating plate 92 are detachably and fixedly connected by fixing screws and fixing nuts, which facilitates the disassembly and maintenance of the inner heating plate 92. A ceramic heating plate 93 is embedded within the inner heating plate 92. A support sleeve 94 is fixedly fitted between the bottom of the ceramic heating plate 93 and the outer heating plate 91, which supports the ceramic heating plate 93. A heating wire 95 and a thermocouple 96 are embedded within the ceramic heating plate 93. The heat generated by energizing the heating wire 95 and the thermocouple 96 heats the vacuum adsorption sample carrier plate 8 at the top.

[0036] A heat insulation plate 97 and heat insulation cotton 98 are filled between the outer heating plate 91 and the inner heating plate 92. The heat insulation plate 97 and heat insulation cotton 98 can protect the heat generated by the heating wire 95 and thermocouple 96 in the ceramic heating plate 93, prevent the heat from being lost to the outside through the outer heating plate 91, and improve the heating effect of the ceramic heating plate 93 on the vacuum adsorption sample carrier plate 8.

[0037] Working Principle: During use, the main body 1 is first fixed on a laboratory table. The bottom feet are used to adjust the overall level of the device. The sample is then placed into the vacuum adsorption sample tray 8. An external oil-free vacuum pump draws a vacuum, adsorbing and fixing the sample within the tray 8, creating a vacuum in the working chamber 6. The heating mechanism 9 then heats the vacuum adsorption sample tray 8 from the bottom, ensuring more uniform heating of the sample within the tray. Then, the high-speed rotation of the vacuum adsorption sample carrier plate 8 is driven by the drive mechanism 7 to complete the overall rotational coating work. During the coating process, the working chamber 6 can be filled and vented through the inflation port at the top of the working chamber 6 and the exhaust port 3 at the rear of the outer shell 1, so that the working chamber 6 is in different gas working environments or low vacuum working environments. During the gas replacement process, the absolute pressure of vacuum adsorption needs to be less than the absolute pressure of the working chamber 6, so as to ensure that the sample is firmly adsorbed on the vacuum adsorption sample carrier plate 8. At the same time, the water generated can also be discharged to the outside through the exhaust port 3 during the coating process.

Claims

1. A heated spin coating apparatus, comprising a housing body (1), characterized in that: A working chamber (6) is fixedly assembled on the top of the outer shell body (1). A driving mechanism (7) is fixedly assembled between the center of the inner cavity of the working chamber (6) and the inner cavity of the outer shell body (1). A vacuum adsorption sample carrier plate (8) is fixedly connected to the output end of the driving mechanism (7). A heating mechanism (9) is fixedly assembled between the vacuum adsorption sample carrier plate (8) and the working chamber (6). A liquid injector (10) is embedded and fixedly installed on the top of the working chamber (6).

2. The heating-type spin coating equipment according to claim 1, characterized in that: An integrated controller (2) is embedded in one side wall of the outer shell (1), and a discharge port (3), an air extraction port (4), and a pressure monitor (5) are fixedly mounted on the other side wall of the outer shell (1) from top to bottom.

3. The heating-type spin coating equipment according to claim 1, characterized in that: The working chamber (6) includes a lower chamber (61) and an upper chamber (62). The lower chamber (61) and the upper chamber (62) are hinged together. A right-angle elbow (64) is embedded in the bottom of the lower chamber (61). A connecting hose is fixedly connected between the right-angle elbow (64) and the discharge port (3). A quartz glass cover plate (66) is detachably and fixedly mounted on the top of the upper chamber (62) through a pressure cap (65). A liquid injector fixing bracket (68) is embedded in the middle of the quartz glass cover plate (66). The liquid injector (10) is fixedly mounted in the liquid injector fixing bracket (68).

4. The heated spin coating apparatus according to claim 3, characterized in that: A sensing sensor (63) is fixedly installed between the lower chamber (61) and the upper chamber (62).

5. A heated spin coating apparatus according to claim 3, characterized in that: A first O-ring (67) is fixedly assembled between the quartz glass cover plate (66) and the pressure cap (65), and a second O-ring (69) is fixedly assembled between the quartz glass cover plate (66) and the injector holder (68).

6. The heating-type spin coating equipment according to claim 1, characterized in that: The drive mechanism (7) includes a motor support base (71), which is fixedly mounted on the bottom of the inner cavity of the outer shell body (1). A motor base (72) is fixedly mounted on the top of the motor support base (71). An air extraction straight pipe (73) is fixedly mounted on the side wall of the motor base (72). A connecting hose is fixedly connected between the air extraction straight pipe (73) and the air extraction interface (4). A drive motor (74) is fixedly mounted on the top of the motor base (72). A motor fixing flange (75) and a connecting sleeve (76) are fixedly mounted on the top of the drive motor (74). A pressure pad (77) is fixedly mounted on the top of the connecting sleeve (76).

7. A heated spin coating apparatus according to claim 6, characterized in that: The top of the motor mounting flange (75) and the bottom of the drive motor (74) are respectively fixedly fitted with skeleton-type vacuum sealing rings (78).

8. A heated spin coating apparatus according to claim 1, characterized in that: The heating mechanism (9) includes an outer heating plate (91), an inner heating plate (92) is detachably and fixedly assembled inside the outer heating plate (91), a ceramic heating plate (93) is assembled inside the inner heating plate (92), a support sleeve (94) is fixedly assembled between the ceramic heating plate (93) and the inner heating plate (92), and a heating wire (95) and a thermocouple (96) are fixedly assembled inside the ceramic heating plate (93).

9. A heated spin coating apparatus according to claim 8, characterized in that: A heat insulation plate (97) and heat insulation cotton (98) are fixedly assembled between the outer heating plate (91) and the inner heating plate (92).

10. A heated spin coating apparatus according to claim 9, characterized in that: A waterproof sleeve (11) is fitted at the connection between the heating outer plate (91) and the lower chamber (61).

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