Visual recognition device and semiconductor device processing apparatus

Abstract

The utility model discloses a kind of visual identification device and semiconductor device processing equipment, wherein visual identification device includes shell, image acquisition component is arranged in shell, the lens of image acquisition component is correspondingly arranged in the shooting hole of the bottom plate of shell, transparent shield plate for shielding shooting hole is arranged on bottom plate, visual identification device further includes medium spray pipe, medium spray pipe is used to spray medium to the bottom surface of transparent shield plate and / or spray gas to the area below transparent shield plate.The utility model does not need to carry out the translation of transparent shield plate, structure is simpler, and more easily realize the closure of shell bottom, when spraying medium to the bottom surface of transparent shield plate by medium spray pipe, the bottom surface of transparent shield plate can be effectively cleaned, conducive to guaranteeing visual detection precision;When spraying gas to the area below transparent shield plate by medium spray pipe, it can reduce that chip, water mist pollutes transparent shield plate, influence visual detection precision.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment, and in particular to visual recognition devices and semiconductor device processing equipment. Background Technology

[0002] Patent document CN219466626U discloses a visual recognition mechanism used in a dicing device. In this structure, a covering mechanism is used to cover and open the first and second through holes.

[0003] The problem with this structure is that the baffle of the covering mechanism needs to be moved horizontally, and there will be a certain gap between the baffle and the first and second through holes. Water mist and impurities can easily enter the cover body through the first and second through holes and affect the lens of the image acquisition device.

[0004] The baffle of the masking mechanism needs to be able to cover the first and second through holes, and its size is relatively large. At the same time, a driving mechanism is required to drive the baffle to translate, which further results in a very long masking mechanism and a large size of the visual recognition mechanism. Utility Model Content

[0005] The purpose of this invention is to solve the above-mentioned problems in the prior art and to provide a visual recognition device and semiconductor device processing equipment.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] A visual recognition device includes a housing, within which an image acquisition component is disposed. A shooting hole corresponding to the lens of the image acquisition component is disposed on the bottom plate of the housing. A transparent shielding plate is disposed on the bottom plate to block the shooting hole. The visual recognition device also includes a medium nozzle for spraying a medium onto the bottom surface of the transparent shielding plate and / or spraying air onto the area below the transparent shielding plate.

[0008] Preferably, in the visual recognition device, the medium nozzle passes through the base plate and is connected to the air passage on the image acquisition component, and one end of the air passage is connected to a pipe connector.

[0009] Preferably, in the visual recognition device, the transparent shield is rotatably mounted on the base plate.

[0010] Preferably, in the visual recognition device, the transparent shield is coaxially disposed at the bottom of a turbine ring, the turbine ring is rotatably disposed on the base plate, and a driver for driving the turbine ring to rotate is disposed inside the housing.

[0011] Preferably, in the visual recognition device, the transparent shield is adhered to the turbine ring.

[0012] Preferably, in the visual recognition device, the actuator is an air-blowing component that blows air onto the turbine ring to make the turbine ring rotate.

[0013] Preferably, in the visual recognition device, the turbine ring is rotatably engaged with the guide groove on the guide ring.

[0014] Preferably, in the visual recognition device, the turbine ring and / or guide ring are made of a self-lubricating material.

[0015] Preferably, in the visual recognition device, the guide ring is assembled from an annular upper cover and an annular lower rail, or the guide ring is assembled from multiple arc-shaped rail components.

[0016] Semiconductor device processing equipment, including any of the visual recognition devices described above.

[0017] The advantages of this utility model's technical solution are mainly reflected in:

[0018] This invention uses a fixed-position transparent shield to cover the imaging hole, eliminating the need for translating the shield. This simplifies the structure and makes it easier to seal the bottom of the housing, reducing the amount of moisture entering the housing through the imaging hole. When a medium is sprayed onto the bottom surface of the transparent shield through the medium nozzle, it effectively cleans the bottom surface, ensuring the accuracy of the images acquired by the image acquisition component and thus improving visual inspection precision. When air is sprayed onto the area below the transparent shield through the medium nozzle, it effectively forms an air barrier below the shield, reducing debris and water mist contamination and minimizing impact on visual inspection precision.

[0019] This invention enables the transparent shield to be cleaned effectively through a single media spray nozzle by rotating the transparent shield, which helps ensure cleaning quality. At the same time, the rotation of the transparent shield also helps to throw debris and other materials off the transparent shield through centrifugal force, which helps to improve the cleaning effect.

[0020] Furthermore, this invention uses airflow to drive the turbine ring to propel the transparent shield, which helps to reduce the size of the visual recognition device. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the media nozzle of the visual recognition device of this utility model spraying air onto the bottom surface of a transparent baffle plate. One side plate of the outer shell is hidden in the figure.

[0022] Figure 2 This is a cross-sectional view of the media nozzle of the visual recognition device of this utility model spraying air onto the bottom surface of a transparent baffle plate.

[0023] Figure 3 This is a schematic diagram of the media nozzle of the visual recognition device of this utility model spraying air into the area below the transparent baffle.

[0024] Figure 4 This is a partial enlarged cross-sectional view of the transparent shielding plate of this utility model, which can be rotatably mounted on the base plate;

[0025] Figure 5 This is a partial perspective view of the visual recognition device of this utility model, with the medium nozzle hidden in the figure. Detailed Implementation

[0026] The purpose, advantages, and features of this utility model will be illustrated and explained through the following non-limiting description of preferred embodiments. These embodiments are merely typical examples of applying the technical solutions of this utility model, and all technical solutions formed by equivalent substitutions or equivalent transformations fall within the scope of protection claimed by this utility model.

[0027] In the description of the solution, it should be noted that the terms "center," "upper," "lower," "left," "right," "front," "rear," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience and simplification of description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] Example 1

[0029] The visual recognition device disclosed in this utility model will now be described in conjunction with the accompanying drawings, as shown below. Figure 1 -Appendix Figure 3 As shown, it includes a housing 100. The specific shape of the housing 100 can be designed as needed. It can usually be set as a cuboid cover, but other feasible shapes are also possible and are not limited here. An imaging component 200 is provided inside the housing 100. The imaging component 200 includes, for example, a microscope camera, a lens, a light source, and other components. Its specific structure is known technology and will not be described in detail here.

[0030] The number of the imaging components 200 can be only one, more preferably two and arranged side by side, and one imaging component 200 adopts a high-magnification microscope camera and the other imaging component 200 adopts a low-magnification microscope camera.

[0031] As attached Figure 1 -Appendix Figure 3As shown, the bottom plate 110 of the housing 100 is provided with a shooting hole 111 corresponding to the lens of each shooting component 200 for the shooting component 200 to capture images. A transparent shielding plate 300 is provided on the bottom plate 110 to shield the shooting hole 111. The transparent shielding plate 300 is a high-transmittance glass with a light transmittance of not less than 90%.

[0032] The visual recognition device also includes a media nozzle 400, as shown in the attached document. Figure 1 Appendix Figure 2 As shown, the medium nozzle 400 is used to spray medium onto the bottom surface of the transparent shield 300.

[0033] And / or, as attached Figure 3 As shown, the medium nozzle 400 is used to spray air into the area below the transparent baffle 300, that is, the medium outlet of the medium nozzle 400 is obliquely downward.

[0034] When the medium sprayed by the medium nozzle 400 is a gas, the medium nozzle 400 can spray the medium in real time during the operation of the visual recognition device. When the medium sprayed by the medium nozzle 400 is a liquid, the medium nozzle 400 can spray the medium onto the bottom surface of the transparent shield 300 after the detection has stopped. Of course, in other embodiments, the medium nozzle 400 can also be used to clean the area of ​​the workpiece to be photographed below the transparent shield 300 with the sprayed medium before the visual recognition device performs detection, thereby avoiding water mist and debris from affecting the accuracy of recognition.

[0035] The number of media nozzles 400 corresponding to each of the transparent shields 300 can be designed as needed. Preferably, each of the transparent shields 300 corresponds to one media nozzle 400. The media nozzle 400 passes through the base plate and is inserted into the imaging assembly above the transparent shield 300. The imaging assembly is provided with an air passage (not shown in the figure) for the insertion of the media nozzle 400. One end of the air passage is connected to a pipe connector 210, which is connected to a media supply system. The media supply system can be a known air supply system, which will not be described in detail here.

[0036] At this time, since one transparent shield 300 corresponds to only one medium nozzle 400, in order to fully clean the transparent shield 300, the transparent shield 300 is rotatably mounted on the base plate.

[0037] As attached Figure 4 Appendix Figure 5As shown, the transparent shield 300 is coaxially fixed to the bottom of a turbine ring 500. Preferably, the transparent shield 300 is bonded to the bottom of the turbine ring 500. The turbine ring 500 is annular and concentrically arranged with the imaging hole. The outer diameter of the turbine ring is larger than the diameter of the transparent shield 300. The turbine ring 500 is rotatably engaged in the guide groove 610 on the guide ring 600. The guide groove 610 is a circular groove that matches the outer circumference of the turbine ring 500. A small gap is maintained between the turbine ring 500 and the guide groove 610 so that the turbine ring 500 can rotate smoothly without being eccentric.

[0038] For ease of assembly, the guide ring 600 is assembled from multiple arc-shaped track components with U or J-shaped cross sections, such as two semi-circular track components or four 90° arc track components.

[0039] Alternatively, the guide ring 600 may include an annular upper cover 620 and an annular lower rail 630. The annular upper cover 620 has an L-shaped cross-section, and the annular lower rail 630 is disposed on the annular upper cover 620. During assembly, the turbine ring 500 can be placed on the annular upper cover 620 first, and then the annular lower rail 630 can be concentrically fixed on the annular upper cover 620 to limit the turbine ring 500.

[0040] Meanwhile, in order to ensure smooth rotation of the turbine ring 500, the turbine ring 500 and / or the turbine ring 500 are made of a self-lubricating material. The self-lubricating material is, for example, polytetrafluoroethylene or graphite, etc., and is not limited here.

[0041] The base plate is provided with a driver 700 for driving the turbine ring 500 to rotate. The driver 700 preferably is a blowing component that blows air onto the turbine ring 500, thereby causing the turbine ring 500 to rotate through the generated airflow. The blowing component can be a plate of suitable thickness, on which an air outlet 610 is provided. The air outlet 610 is biased to one side of the turbine ring 500 and blows air onto the protruding blades 410 above the turbine ring 500, thereby driving the turbine ring 500 to rotate.

[0042] When two shooting components 200 are set, the two turbine rings 500 are driven by a blowing component, that is, the blowing component includes two air outlets 610 corresponding to the two turbine rings 500 respectively. The axes of the two air outlets 610 are parallel, and the blowing component has an air passage communicating with the air outlet 610. The air passage is connected to an external air supply device through an external connector 620. The two air outlets 610 can be connected to the same external connector 620 through one air passage. Of course, the two air outlets 610 can also be connected to independent external connectors 620 through air passages respectively.

[0043] Example 2

[0044] This embodiment discloses a semiconductor device processing apparatus, including the visual recognition device described above.

[0045] This utility model has many other embodiments. All technical solutions formed by equivalent transformation or equivalent transformation fall within the protection scope of this utility model.

Claims

1. A visual recognition device, comprising a housing, wherein an image acquisition component is disposed within the housing, and a shooting hole corresponding to the lens of the image acquisition component is disposed on the bottom plate of the housing, characterized in that: The base plate is provided with a transparent shield for blocking the shooting hole. The visual recognition device also includes a medium nozzle for spraying medium onto the bottom surface of the transparent shield and / or spraying air into the area below the transparent shield.

2. The visual recognition device according to claim 1, characterized in that: The medium nozzle passes through the base plate and connects to the air passage on the image acquisition assembly, with one end of the air passage connected to a pipe connector.

3. The visual recognition device according to claim 1, characterized in that: The transparent shield is rotatably mounted on the base plate.

4. The visual recognition device according to claim 3, characterized in that: The transparent shield is coaxially disposed at the bottom of a turbine ring, the turbine ring is rotatably disposed on the base plate, and a driver for driving the turbine ring to rotate is disposed inside the housing.

5. The visual recognition device according to claim 4, characterized in that: The transparent shielding plate is bonded to the turbine ring.

6. The visual recognition device according to claim 4, characterized in that: The actuator is an air-blowing component that blows air onto the turbine ring to make the turbine ring rotate.

7. The visual recognition device according to claim 4, characterized in that: The turbine ring is rotatably engaged with the guide groove on the guide ring.

8. The visual recognition device according to claim 7, characterized in that: The turbine ring and / or guide ring are made of self-lubricating material.

9. The visual recognition device according to claim 7, characterized in that: The guide ring is assembled from an annular upper cover and an annular lower rail, or the guide ring is assembled from multiple arc-shaped rail components.

10. Semiconductor device processing equipment, characterized in that: Includes the visual recognition device as described in any one of claims 1-9.

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