A vertical carrier plate transport device

Abstract

The utility model discloses a vertical type carrier plate transmission device, include: transmission device body, wherein is equipped with vacuum cavity, a plurality of transmission magnetic fluid, its length direction of vacuum cavity is provided on transmission device body and one end extends to vacuum cavity in side -by -side, a plurality of transmission gyro wheel, its setting is in transmission magnetic fluid and is located in vacuum cavity, a plurality of drive motor, it is used for driving transmission magnetic fluid, carrier plate transmission subassembly, it is hunged on transmission gyro wheel and is driven in vacuum cavity along the arrangement direction of transmission gyro wheel and moves, the other end is hunged carrier plate, carrier plate limiting subassembly, it is set up in the bottom of vacuum cavity, is used for with carrier plate other end one end connection, prevents carrier plate to shake in the process of moving, and sensor, it includes at least three, it is set up on transmission device body, and sensor is used for detecting carrier plate in vacuum cavity different position respectively and according to the position signal detected, respectively all drive motor provides the instruction of keeping rotation, deceleration rotation or stop rotation.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell manufacturing technology, specifically to a vertical carrier plate transmission device. Background Technology

[0002] Heterojunction solar cells are hailed as the next-generation high-efficiency battery technology with the greatest industrial potential due to their advantages such as high conversion efficiency, short process flow, thin silicon wafer application, low temperature coefficient, and bifacial power generation. Among them, CVD (Chemical Vapor Deposition) is the core process for heterojunction solar cell fabrication. Currently, there are two main heterojunction amorphous silicon thin film deposition technologies: PECVD (Plasma Enhanced CVD) and HWCVD (Hot Wire CVD). HWCVD uses vertical deposition and vertical transport, so the carrier plate supporting the silicon wafer must also be vertical.

[0003] However, existing vertical carrier plate transmission devices use gear and rack transmission structures, which have problems such as complicated assembly, easy tooth skipping and idle rotation, and complex internal transmission mechanisms with insufficient transmission limit at the bottom of the carrier plate, which can easily cause shaking and jamming during the transmission of the carrier plate. Utility Model Content

[0004] The purpose of this invention is to address the aforementioned problems of existing vertical carrier plate transmission devices by designing a novel vertical carrier plate transmission device that solves the problems of shaking and jamming during carrier plate transmission. Furthermore, this invention is not a gear or rack transmission structure, thus avoiding the problems of cumbersome assembly and easy tooth skipping and idle rotation.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0006] This utility model designs a vertical carrier plate transmission device, which includes the following structural configuration:

[0007] The main body of the transmission device has a vacuum chamber inside that can accommodate the transmission of the carrier plate;

[0008] Several transmission magnetofluids are arranged side by side on the body of the transmission device along the length of the vacuum cavity and one end extends into the vacuum cavity (the several transmission magnetofluids have the same height on the body of the transmission device).

[0009] A number of transmission rollers are arranged one-to-one on the transmission magnetofluid and located in the vacuum cavity, and each transmission roller is kept flush in the vacuum cavity;

[0010] Several drive motors are mounted on the main body of the transmission device to drive the transmission magnetofluid to rotate, thereby driving the transmission roller to rotate;

[0011] The carrier plate transmission assembly has one end flexibly attached to the transmission roller and driven by it to move in the vacuum cavity along the arrangement direction of the transmission roller (i.e., along the transmission magnetofluid), and the other end is used to attach the carrier plate.

[0012] A carrier plate limiting assembly is disposed at the bottom of the vacuum chamber and is used to connect to the end of the carrier plate away from the carrier plate transmission assembly to prevent the carrier plate from shaking during movement.

[0013] The device also includes at least three sensors, which are respectively disposed on the main body of the transmission device. These sensors are used to detect different positions of the carrier plate in the vacuum cavity and, based on the detected carrier plate position signal, provide commands to all drive motors to keep rotating, decelerate rotating, or stop rotating.

[0014] The vertical carrier plate transmission device of this invention is suitable for hot-wire chemical vapor deposition equipment for heterojunction batteries and amorphous silicon thin films.

[0015] Furthermore, a vertical carrier plate transmission device includes a coupling for connecting the drive motor to the transmission magnetofluid, so as to realize the drive motor driving the transmission magnetofluid through the coupling.

[0016] Furthermore, a vertical carrier plate transfer device includes a sealing gasket disposed between the transmission magnetofluid and the transfer device body to ensure the airtightness of the vacuum chamber.

[0017] Furthermore, a vertical carrier plate transfer device: the transfer device body is configured as a rectangular box structure, and the vacuum chamber is configured as a rectangular structure.

[0018] Furthermore, a vertical carrier plate transmission device is provided: several of the aforementioned transmission magnetohydrodynamic fluids are symmetrically distributed on opposite sides of the transmission device body; the carrier plate transmission components are configured in two sets, which are respectively attached to the transmission rollers on both sides; the carrier plate limiting components are configured in two sets.

[0019] Furthermore, a vertical carrier plate transfer device: the carrier plate transfer assembly includes the following structural configuration:

[0020] The carrier plate transmission guide is configured with a "J" shaped structure, which has a length extending along the length direction of the vacuum cavity, and its end is provided with a hanging groove for suspending on the transmission roller, the hanging groove being arranged along its length direction.

[0021] Several carrier plate transmission beams are connected to the other end of the carrier plate transmission guide rail (i.e., the carrier plate transmission frame is connected to the end of the carrier plate transmission guide rail away from the hanging groove).

[0022] And several carrier plate transfer hooks, one end of which is attached to the carrier plate transfer beam, and the other end is used to attach the carrier plate.

[0023] Furthermore, a vertical carrier plate conveying device is provided in which the entrance of the hanging groove is set as an inclined surface to facilitate the movement of the carrier plate conveying guide rail onto the subsequent transmission rollers.

[0024] Specifically, the inclined plane facilitates the connection between the carrier plate and the transmission roller during transmission, making it easier for the transmission roller to enter the hanging groove.

[0025] Furthermore, a vertical plate conveying device is provided: a rotating shaft is rotatably mounted on the plate conveying beam, and the plate conveying hook is attached to the rotating shaft.

[0026] Specifically, the rotating shaft allows the plate transfer hook to have a certain rotation angle when it is hung on the plate transfer beam. Furthermore, the rotating shaft also reduces wear between the plate transfer hook and the plate transfer beam.

[0027] Furthermore, a vertical carrier plate conveying device includes the following structural configuration for the carrier plate limiting assembly:

[0028] Two carrier plate fixing blocks are respectively connected to both sides of the carrier plate;

[0029] Two omnidirectional ball joints are respectively connected to two carrier plate fixing blocks;

[0030] Two carrier plate limiting guide rods are connected to two universal ball joints respectively;

[0031] Two rolling bearings are respectively mounted on two carrier plate limiting guide rods;

[0032] A limiting base is disposed at the bottom of the vacuum cavity along its length;

[0033] And a carrier plate limiting guide rail, which is disposed on the limiting base along the length direction of the vacuum cavity and extends at one end to the space between two rolling bearings to form rolling contact with them.

[0034] Furthermore, a vertical carrier plate transfer device: the sensor includes a first sensor, a second sensor, and a third sensor;

[0035] The first sensor is used to provide the drive motor with a command to maintain rotation at a set first speed when it detects that the carrier plate has entered the vacuum cavity.

[0036] The second sensor is used to provide a command to the drive motor to decelerate and rotate at a set second speed when the carrier plate is close to the moving end point.

[0037] The third sensor is used to detect when the carrier plate moves to the endpoint and provide a command to the drive motor to stop rotating.

[0038] The beneficial effects of this utility model are:

[0039] The vertical carrier plate transfer device designed in this utility model can ensure the stability of the carrier plate transfer process and reduce carrier plate shaking; at the same time, the structural design of the carrier plate transfer component can also ensure simple carrier plate installation; more importantly, the vertical carrier plate transfer device designed in this utility model has fewer transfer structure parts in the vacuum chamber, which can simultaneously install two carrier plates into the vacuum chamber, thereby saving device costs. Attached Figure Description

[0040] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0041] Figure 1 A side view of a vertical carrier plate transfer device designed for Example 1;

[0042] Figure 2 Front view of a vertical carrier plate transfer device designed for Embodiment 1;

[0043] Figure 3 A schematic diagram showing the connection between the carrier plate transmission component, the carrier plate, and the carrier plate limiting component in a vertical carrier plate transmission device designed for Embodiment 1.

[0044] Figure 4 A schematic diagram of the structure of the carrier plate transfer assembly in a vertical carrier plate transfer device designed for Example 1;

[0045] Figure 5 This is a schematic diagram of the structure of the carrier plate transmission guide rail in the carrier plate transmission assembly of Example 1;

[0046] Figure 6 This is a schematic diagram of the structure of the carrier plate transmission beam in the carrier plate transmission assembly of Example 1;

[0047] Figure 7 This is a schematic diagram of the structure of the carrier plate limiting component in a vertical carrier plate transfer device designed for Example 1.

[0048] The markings in the image are as follows:

[0049] 1-Transmission device body, 2-Transmission magnetic fluid, 3-Transmission roller, 4-Drive motor, 5-Carrier plate transmission assembly, 6-Carrier plate limiting assembly, 7-First sensor, 8-Second sensor, 9-Third sensor, 10-Coupling, 11-Sealing gasket, 12-Carrier plate, 13-Vacuum chamber, 51-Carrier plate transmission guide rail, 52-Carrier plate transmission hanging beam, 53-Carrier plate transmission hook, 61-Carrier plate fixing block, 62-Universal ball joint, 63-Carrier plate limiting guide rod, 64-Rolling bearing, 65-Limiting base, 66-Carrier plate limiting guide rail, 511-Hanging groove, 512-Inclined surface, 521-Rotating shaft. Detailed Implementation

[0050] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the present utility model or its application or use. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0051] In the description of this utility model, it should be understood that the terms "upper," "lower," "left," "right," "top," and "bottom," etc., indicating orientation or positional relationships, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this utility model described herein can be implemented in orders other than those illustrated or described herein.

[0052] Example 1

[0053] like Figures 1-7 As shown, this embodiment 1 designs a vertical carrier plate transfer device, which includes the following specific structural configuration:

[0054] The main body of the transmission device 1 is configured as a rectangular box structure, and its interior is provided with a rectangular vacuum cavity 13 that can accommodate the transmission of the carrier plate 12.

[0055] There are 8 transmission magnetic fluids 2. These transmission magnetic fluids 2 are symmetrically distributed on opposite sides of the transmission device body 1 in the width direction. The 4 transmission magnetic fluids 2 on each side are arranged side by side on the transmission device body 1 along the length direction of the vacuum cavity 13 and one end extends into the vacuum cavity 13. The 8 transmission magnetic fluids 2 have the same height on the transmission device body 1. A sealing gasket 11 is also provided between each transmission magnetic fluid 2 and the transmission device body 1 to ensure the airtightness of the vacuum cavity 13.

[0056] There are 8 transmission rollers 3, which are arranged one-to-one on the transmission magnetofluid 2 and located in the vacuum chamber 13. Each transmission roller 3 is kept flush in the vacuum chamber 13.

[0057] The drive motor 4, of which there are a total of 8, is connected to the transmission magnetofluid 2 via the coupling 10 to drive the transmission magnetofluid 2 to rotate, thereby driving the transmission roller 3 to rotate.

[0058] The carrier plate transmission assembly 5 consists of two sets, which are respectively attached to the transmission rollers 3 on both sides (e.g., ...). Figure 1 As shown), one end of the carrier plate transmission assembly 5 is flexibly attached to the transmission roller 3 and driven by it to move in the vacuum chamber 13 along the arrangement direction of the transmission roller 3 (i.e. the transmission magnetofluid 2), and the other end is used to attach the carrier plate 12.

[0059] The carrier plate limiting component 6 is provided in two sets. It is located at the bottom of the vacuum chamber 13 along its length and is used to connect to the end of the carrier plate 12 away from the carrier plate transmission component 5 to prevent the carrier plate 12 from shaking during movement (transmission).

[0060] The device also includes sensors, including a first sensor 7, a second sensor 8 and a third sensor 9 disposed on the main body 1 of the transmission device. The first sensor 7 is used to provide the drive motor 4 with a command to maintain rotation at a set first speed when it detects that the carrier plate 12 has entered the vacuum chamber (13). The second sensor 8 is used to provide the drive motor 4 with a command to decelerate rotation at a set second speed when it detects that the carrier plate 12 is close to the end point of the movement. The third sensor 9 is used to provide the drive motor 4 with a command to stop rotation when it detects that the carrier plate 12 has moved (transmitted) to the end point.

[0061] Specifically, the carrier plate transmission assembly 5 in Embodiment 1 above includes the following structural configuration:

[0062] The carrier plate transmission guide rail 51 is configured with a "J" shaped structure and has a length extending along the length direction of the vacuum cavity 13. Its end is provided with a hanging groove 511 for suspending on the transmission roller 3, and the hanging groove 511 is arranged along its length direction. The entrance of the hanging groove 511 is configured with a slope 512. Through the guiding effect of the slope 512, it is convenient for the carrier plate transmission guide rail 51 to dock with the transmission roller 3 during transmission, so that the transmission roller 3 can be more easily inserted into the hanging groove 511.

[0063] Four carrier plate transmission hanging beams 52 are provided. One end of each beam is connected to the end of the carrier plate transmission guide rail 51 that is away from the hanging groove 511. The other end of the carrier plate transmission hanging beam 52 is also rotatably provided with a rotating shaft 521.

[0064] And there are four carrier plate transmission hooks 53. One end of each of the four carrier plate transmission hooks 53 is attached to one end of the four carrier plate transmission beams 52 which are equipped with a rotating shaft 521. Specifically, the carrier plate transmission hooks 53 are attached to the rotating shaft 521.

[0065] Specifically, the carrier plate limiting assembly 6 in Embodiment 1 above includes the following structural configuration:

[0066] The carrier plate fixing block 61 is configured as two pieces, which are respectively connected to both sides of the carrier plate 12;

[0067] Two universal ball joints 62 are provided, which are respectively connected to two carrier plate fixing blocks 61;

[0068] The carrier plate limiting guide rod 63 is provided in two parts, which are respectively connected to two universal ball joints 62;

[0069] Two rolling bearings 64 are provided and are respectively installed on the carrier plate limiting guide rod 63;

[0070] A limiting base 65 is disposed at the bottom of the vacuum cavity 13 along the length direction of the vacuum cavity 13;

[0071] And a carrier plate limiting guide rail 66, which is disposed on the limiting base 65 along the length direction of the vacuum cavity 13 and extends at one end between the two rolling bearings 64 to form rolling contact with them.

[0072] Specifically, in Embodiment 1 above, the transmission roller 3 rotates in the hanging groove 511 of the carrier plate transmission guide rail 51. Relying on the gravity of the carrier plate 12 and the friction within the hanging groove 511, the carrier plate transmission guide rail 51 can move smoothly along the arrangement direction of the transmission roller 3 under the drive of the transmission roller 3. Four carrier plate transmission hanging beams 52 are installed below the carrier plate transmission guide rail 51, and four carrier plate transmission hooks 53 are installed on the carrier plate transmission hanging beams 52. The carrier plate 12 is then hung on the carrier plate transmission hooks 53. In Embodiment 1 above, the carrier plate fixing block 61 is threadedly connected and fixed to the universal ball joint 62. The universal ball joint 62 is fixed to one end of the carrier plate limiting guide rod 63. A rolling bearing 64 is installed on the carrier plate limiting guide rod 63, which can make rolling contact with the carrier plate limiting guide rail 66. The carrier plate fixing blocks 61 in the carrier plate limiting assembly 6 are fixed on both sides of the bottom of the carrier plate 12, and are symmetrically distributed. The carrier plate limiting guide rail 66 is located between two rolling bearings 64. The rolling bearings 64 on the carrier plate limiting guide rod 63 move along the carrier plate limiting guide rail 66, which can play the role of center limiting. The carrier plate limiting guide rail 66 is fixed to the vacuum chamber 13 through the limiting base 65.

[0073] When the vertical carrier plate 12 enters the vacuum chamber: the drive motor 4 rotates, and the hanging groove 511 on the carrier plate transmission guide rail 51 contacts and adheres to the transmission roller 3 in the vacuum chamber 13. Due to the gravity of the carrier plate 12 and the friction between the transmission roller 3 and the hanging groove 511, the carrier plate transmission guide rail 51 moves under the drive of the transmission roller 3, thus driving the carrier plate 12 to move synchronously. When the carrier plate 12 passes the first sensor 7, it is known that the carrier plate 12 has entered the vacuum chamber 13, and the drive motor 4 maintains rotation at the set first speed. When the carrier plate 12 moves past the second sensor 8, since it is close to the end point of movement, the drive motor 4 decelerates and rotates at the set second speed. When the carrier plate 12 moves past the third sensor 9, the drive motor 4 stops rotating, and the carrier plate 12 stops. At this time, the first, second, and third sensors 7, 8, and 9 simultaneously sense the carrier plate 12, indicating that the carrier plate 12 has stopped at the set position.

[0074] When the carrier plate 12 enters the vacuum chamber 13: Because the carrier plate 12 is vertically suspended, it will sway slightly during transport. The carrier plate limiting component 6 at the bottom of the carrier plate 12 prevents this swaying. When the rolling bearing 64 in the carrier plate limiting component 6 contacts the carrier plate limiting guide rail 66, if the carrier plate 12 sways, the rolling bearing 64 will first impact the carrier plate limiting guide rail 66, generating an axial eccentric force. Because the universal ball joint 62 is located above the carrier plate limiting guide rod 63, the carrier plate limiting component 6 deflects from the universal ball joint 62, and the force generated by the impact is released by the universal ball joint 62, preventing all the force from being transmitted to the carrier plate 12, thus reducing swaying. The carrier plate limiting component 6 designed in Embodiment 1 can restrict the carrier plate 12 to move along the length of the carrier plate limiting guide rail 66, thus preventing swaying.

[0075] The above-described preferred embodiments of this utility model are for illustrative purposes only and are not intended to limit the scope of this utility model. Any obvious variations or modifications derived from the technical solutions of this utility model are still within the protection scope of this utility model.

Claims

1. A vertical carrier plate conveying device, characterized in that, The transmission device includes the following structural configuration: The main body of the transmission device (1) has a vacuum chamber (13) inside which can accommodate the transmission of the carrier plate (12). Several transmission magnetofluids (2) are arranged side by side on the body (1) of the transmission device along the length of the vacuum cavity (13) and one end extends into the vacuum cavity (13); A number of transmission rollers (3) are arranged one-to-one on the transmission magnetofluid (2) and located in the vacuum cavity (13); Several drive motors (4) are mounted on the main body (1) of the transmission device for driving the transmission magnetofluid (2) to rotate; The carrier plate transfer assembly (5) has one end attached to the transmission roller (3) and driven by it to move in the vacuum chamber (13) along the arrangement direction of the transmission roller (3), and the other end is used to attach the carrier plate (12). A carrier plate limiting assembly (6) is disposed at the bottom of the vacuum chamber (13) and is used to connect to one end of the carrier plate (12) away from the carrier plate transmission assembly (5) to prevent the carrier plate (12) from shaking during movement. And sensors, including at least three, are disposed on the body (1) of the transmission device. The sensors are used to detect different positions of the carrier plate (12) in the vacuum cavity (13) and, based on the detected position signal of the carrier plate (12), to provide instructions to all drive motors (4) to keep rotating, decelerate rotating or stop rotating.

2. The vertical carrier plate conveying device according to claim 1, characterized in that, The transmission device also includes a coupling (10) for connecting the drive motor (4) to the transmission magnetofluid (2).

3. The vertical carrier plate conveying device according to claim 1, characterized in that, The transmission device also includes a sealing gasket (11) disposed between the transmission magnetofluid (2) and the transmission device body (1).

4. A vertical carrier plate conveying device according to any one of claims 1 to 3, characterized in that, The main body (1) of the transmission device is configured as a rectangular box structure, and the vacuum cavity (13) is configured as a rectangular structure.

5. A vertical carrier plate conveying device according to claim 1, characterized in that, Several of the aforementioned transmission magnetofluids (2) are symmetrically distributed on opposite sides of the transmission device body (1); the carrier plate transmission assembly (5) is configured in two sets, which are respectively attached to the transmission rollers (3) on both sides; the carrier plate limiting assembly (6) is configured in two sets.

6. A vertical carrier plate conveying device according to claim 1, characterized in that, The carrier plate transmission assembly (5) includes the following structural configuration: The carrier plate transmission guide (51) is configured with a "J" shaped structure and has a hanging groove (511) at its end for hanging on the transmission roller (3). Several carrier plate transmission beams (52) are connected to the other end of the carrier plate transmission guide rail (51); And several carrier plate transfer hooks (53), one end of which is attached to the carrier plate transfer beam (52), and the other end is used to attach the carrier plate (12).

7. A vertical carrier plate conveying device according to claim 6, characterized in that, The entrance of the hanging groove (511) is set as an inclined surface (512) so that the carrier plate transmission guide rail (51) can move into the subsequent transmission roller (3).

8. A vertical carrier plate conveying device according to claim 6, characterized in that, A rotating shaft (521) is rotatably mounted on the carrier plate transmission beam (52), and the carrier plate transmission hook (53) is attached to the rotating shaft (521).

9. A vertical carrier plate conveying device according to claim 1, characterized in that, The carrier plate limiting assembly (6) includes the following structural configuration: Two carrier plate fixing blocks (61) are respectively connected to both sides of the carrier plate (12); Two universal ball joints (62) are respectively connected to two carrier plate fixing blocks (61); Two plate limiting guide rods (63) are respectively connected to two universal ball joints (62); Two rolling bearings (64) are respectively mounted on two carrier plate limiting guide rods (63); A limiting base (65) is provided at the bottom of the vacuum cavity (13) along its length direction; And a carrier plate limiting guide rail (66), which is disposed on the limiting base (65) along the length direction of the vacuum cavity (13) and extends at one end between two rolling bearings (64) to form rolling contact with them.

10. A vertical carrier plate conveying device according to claim 1, characterized in that, The sensor includes a first sensor (7), a second sensor (8), and a third sensor (9); The first sensor (7) is used to provide the drive motor (4) with a command to maintain rotation at a set first speed when it detects that the carrier plate (12) has entered the vacuum chamber (13); the second sensor (8) is used to provide the drive motor (4) with a command to decelerate rotation at a set second speed when it detects that the carrier plate (12) is close to the end point of the movement; and the third sensor (9) is used to provide the drive motor (4) with a command to stop rotation when it detects that the carrier plate (12) has moved to the end point.

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