A variable inner diameter evaporation apparatus wire feeding tube structure

Abstract

The utility model discloses a kind of inner diameter variable type evaporation equipment wire feeding pipe structure, it is related to evaporation equipment wire feeding pipe technical field, including wire feeding inlet pipe, wire feeding middle section pipe and wire feeding outlet pipe.The utility model discloses inner diameter variable type evaporation equipment wire feeding pipe structure, by reducing the inner diameter size of pipeline, wire feeding is strengthened in front middle section portion, and shaking is reduced, to reduce the aluminum wire deviation phenomenon in wire feeding process, improve production efficiency;Through the expansion angle of expansion sleeve guide aluminum vapor radial diffusion, in turn reduce pipe wall condensate, prevent wire feeding outlet pipe due to aluminum vapor condensate blockage, and when aluminum wire end heated swing touches pipe wall, expansion sleeve can provide certain swing margin space, avoid the fracture caused by aluminum wire friction;By spring reset, so that fixed pin is inserted into limiting block, and then expansion sleeve is quickly fixed, improve maintenance efficiency.

Description

Technical Field

[0001] This utility model relates to the field of wire feeding tube technology for vapor deposition equipment, specifically a structure for a wire feeding tube in vapor deposition equipment with variable inner diameter. Background Technology

[0002] Vacuum deposition equipment is a common piece of machinery in vacuum coating processes. Within this equipment, the wire feed tube typically refers to the pipe or conduit system used to precisely and continuously feed the evaporation material, usually metal wire, into the evaporation source. It plays a crucial role in certain types of evaporation technologies, especially when using wire evaporation sources. Its design, material selection, processing precision, sealing performance, and routine maintenance directly affect the stability of the deposition process. Variable-diameter wire feed tube structures in vacuum deposition equipment aim to avoid the risks of downtime, seal damage, and contamination associated with frequent replacement of fixed-diameter wire feed tubes. This is mostly achieved by replacing bushings with different inner diameters.

[0003] Application No. 202420684963.7 discloses a wire feeding tube, a wire feeding mechanism, and an evaporation coating equipment. This patent includes a tube body and a nozzle. The tube body has a wire inlet end, a first connecting end, and a first channel. The nozzle has a wire outlet end, a second connecting end, and a second channel. A first mounting component and a second mounting component are fixedly connected to the first and second connecting ends, respectively. The first and second mounting components are detachably connected via a connector. When the first and second mounting components are connected, the nozzle engages with the tube body, and the first channel communicates with the second channel. With this wire feeding tube, if the nozzle is damaged, only the nozzle needs to be replaced; the tube body does not need to be disassembled. This reduces the risk of decreased assembly accuracy due to tube body replacement. Furthermore, during connection operations, the connector provides positioning, resulting in higher assembly accuracy between the nozzle and the tube body, improved wire feeding accuracy, and reduced risk of wire outlet point deviation.

[0004] While the above comparison documents can improve the assembly precision of the nozzle and the tube body, thereby reducing the risk of wire exit point deviation, the metal vapor generated in the evaporation area of ​​the evaporation boat will rise and come into contact with the outlet end of the wire feeding tube. The cylindrical straight tube is prone to accumulating splashed aluminum dross, causing the diameter of the outlet section of the wire feeding tube to gradually shrink, which makes the outlet section of the wire feeding tube prone to blockage due to metal vapor condensation. Utility Model Content

[0005] The purpose of this invention is to provide a wire feeding tube structure for a vapor deposition equipment with a variable inner diameter, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a wire feeding tube structure for a variable inner diameter vapor deposition equipment, comprising a wire feeding inlet tube, a wire feeding middle section tube, and a wire feeding outlet tube. The top of the outer wall of the wire feeding inlet tube is fixedly connected to the wire feeding middle section tube, and the wire feeding outlet tube is fixedly connected to one side of the outer wall of the wire feeding middle section tube. The inner diameter of the wire feeding inlet tube and the wire feeding middle section tube is lower than that of the wire feeding outlet tube. A first limiting plate is welded and fixed to the outer wall of the wire feeding middle section tube near the wire feeding inlet tube, and a second limiting plate is welded and fixed to the outer wall of the wire feeding middle section tube near the wire feeding outlet tube. A limiting seat is connected inside the wire feeding outlet tube, and an expansion sleeve is connected to one side of the outer wall of the limiting seat. The expansion sleeve is trumpet-shaped. An extension disc is fixedly sleeved in the middle of the outer wall of the limiting seat, and limiting blocks are fixedly connected to both sides of the outer wall of the extension disc. A limiting sleeve is sleeved in the middle of the outer wall of the wire feeding outlet tube, and a fixing disc is fixedly connected to one side of the outer wall of the limiting sleeve. A fixing pin is movably connected inside the limiting block.

[0007] The conical structure of the expansion sleeve forms a heat shielding zone, thereby reducing heat transfer and lowering the tube temperature, preventing pre-melting of the aluminum wire. Furthermore, the expansion angle of the expansion sleeve can guide the radial diffusion of aluminum vapor, thereby reducing condensation on the tube wall and preventing blockage of the wire feeding outlet tube due to aluminum vapor condensation.

[0008] Preferably, the limiting seat is divided into inner and outer layers, and both the inner and outer layers are "O" shaped structures. A limiting cavity is opened inside the wire feeding outlet tube, and the inner layer of the limiting seat extends into it. The outer layer of the limiting seat is connected to the outer wall of the wire feeding outlet tube.

[0009] By inserting the limiting seat into the wire feeding outlet tube, the expansion sleeve is then positioned outside the wire feeding outlet tube.

[0010] Preferably, both the limiting block and the fixing pin are arc-shaped, and the limiting block has an arc-shaped fixing hole inside, into which the fixing pin extends.

[0011] By inserting the retaining pin into the limiting block, the expansion sleeve is secured to prevent it from moving arbitrarily.

[0012] Preferably, a transmission seat is welded to one side of the outer wall of the fixing pin, and a limit rail is slidably connected inside the transmission seat. The limit rail is connected to the outer wall of the limit sleeve through a support block, and the limit rail can guide the transmission seat to rotate.

[0013] The transmission seat is guided to rotate by a limit track.

[0014] Preferably, a spring is sleeved on the outer wall of the limiting track, and the two sides of the outer wall of the spring are fixedly connected to the transmission seat and the support block respectively. The transmission seat, the limiting track and the spring constitute an elastic telescopic mechanism.

[0015] The spring force generated by the spring reset drives the fixed pin to move.

[0016] Preferably, a turntable is fixedly connected to the side of the transmission seat away from the fixed pin, and a fixed track is rotatably connected inside the turntable.

[0017] The turntable rotates by being guided by a fixed track.

[0018] Preferably, grips are welded to both sides of the outer wall of the turntable, and the inner wall of the fixed track is fixedly connected to the outer wall of the limiting sleeve.

[0019] Pushing the lever causes the turntable to rotate.

[0020] Preferably, both the turntable and the fixed track have an "O" shaped structure, and the fixed track can guide the turntable to rotate.

[0021] As can be seen from the above, the wire feeding tube structure of the variable inner diameter vapor deposition equipment provided by this utility model has the following beneficial effects.

[0022] 1. By reducing the inner diameter of the pipe, the wire feeding stability is enhanced in the middle section before wire feeding to reduce vibration, thereby reducing the phenomenon of aluminum wire feeding deviation during the wire feeding process and improving production efficiency.

[0023] 2. The expansion angle of the expansion sleeve guides the radial diffusion of aluminum vapor, and the aluminum vapor will preferentially deposit on the inner wall of the expansion sleeve, thereby reducing the condensation on the tube wall and preventing the wire feeding outlet pipe from being blocked by aluminum vapor condensation. Furthermore, when the end of the aluminum wire is heated and swings to touch the tube wall, the expansion sleeve can provide a certain swing margin to avoid the aluminum wire from breaking due to friction.

[0024] 3. The spring reset allows the fixing pin to be inserted into the limit block, thus eliminating the need for workers to stand inside the equipment for extended periods. The expansion sleeve can be installed by repeatedly turning multiple sets of bolts with tools, thereby quickly fixing the expansion sleeve and improving maintenance efficiency. Attached Figure Description

[0025] Figure 1 This is a front-view three-dimensional structural schematic diagram of the present invention;

[0026] Figure 2 This is a side view of the three-dimensional structure of the present invention;

[0027] Figure 3 This is a three-dimensional structural diagram of the wire feeding outlet pipe of this utility model;

[0028] Figure 4 This is a three-dimensional structural diagram of the extension disc of this utility model;

[0029] Figure 5 This is a three-dimensional cross-sectional view of the wire feeding outlet tube of this utility model;

[0030] Figure 6This is a schematic diagram of the main sectional view of the wire feeding outlet tube of this utility model;

[0031] Figure 7 This is a schematic diagram of the main sectional view of the expansion sleeve of this utility model;

[0032] Figure 8 This is a three-dimensional structural diagram of the fixed disk of this utility model;

[0033] Figure 9 This is a schematic diagram of the three-dimensional structure of the turntable of this utility model;

[0034] Figure 10 This is a schematic diagram of the three-dimensional cross-sectional structure of the turntable of this utility model.

[0035] In the diagram: 1. Wire feeding inlet pipe; 2. Wire feeding middle section pipe; 3. Wire feeding outlet pipe; 4. No. 1 limit plate; 5. No. 2 limit plate; 6. Limit seat; 7. Expansion sleeve; 8. Extension disc; 9. Limit block; 10. Limit sleeve; 11. Fixed disc; 12. Fixed pin; 13. Transmission seat; 14. Limit rail; 15. Spring; 16. Turntable; 17. Fixed rail; 18. Handle. Detailed Implementation

[0036] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0037] Please see Figures 1-6This utility model provides a technical solution: a wire feeding tube structure for a variable inner diameter vapor deposition equipment, including a wire feeding inlet pipe 1, a wire feeding middle section pipe 2, and a wire feeding outlet pipe 3. The top of the outer wall of the wire feeding inlet pipe 1 is fixedly connected to the wire feeding middle section pipe 2, and the wire feeding outlet pipe 3 is fixedly connected to one side of the outer wall of the wire feeding middle section pipe 2. A first limiting plate 4 is welded and fixed to the outer wall of the wire feeding middle section pipe 2 near the wire feeding inlet pipe 1, and a second limiting plate 5 is welded and fixed to the outer wall of the wire feeding middle section pipe 2 near the wire feeding outlet pipe 3. A limiting seat 6 is connected inside the wire feeding outlet pipe 3, and one side of the outer wall of the limiting seat 6 is connected to... An expansion sleeve 7 is connected, and the expansion sleeve 7 is trumpet-shaped. An extension disc 8 is fixedly sleeved in the middle of the outer wall of the limiting seat 6, and limiting blocks 9 are fixedly connected to both sides of the outer wall of the extension disc 8. A limiting sleeve 10 is fixedly sleeved in the middle of the outer wall of the wire feeding outlet pipe 3, and a fixing disc 11 is fixedly connected to one side of the outer wall of the limiting sleeve 10. A fixing pin 12 is movably connected inside the limiting block 9. The limiting seat 6 is divided into inner and outer layers, and both the inner and outer layers are "O"-shaped structures. A limiting cavity is opened inside the wire feeding outlet pipe 3, and the inner layer of the limiting seat 6 extends into it. The outer layer of the limiting seat 6 is connected to the outer wall of the wire feeding outlet pipe 3.

[0038] For specific implementation, please refer to Figures 1-3 The wire feeding inlet pipe 1 is connected to the external wire feeding mechanism in advance, and the entire wire feeding guide is fixed by the cooperation of the first limiting plate 4. This ensures that the aluminum wire is accurately connected and introduced after being driven by the pressure roller of the wire feeding mechanism, so that the aluminum wire exits along the path of the wire feeding guide. For example, if the diameter of the aluminum wire is 2mm, the inner diameter of the wire feeding inlet pipe 1 is adjusted to 2.4mm, thereby strengthening the stability of the front section of wire feeding with the cooperation of the first limiting plate 4. After the aluminum wire passes through the wire feeding inlet pipe 1, it will enter the wire feeding middle section pipe 2, and the inner diameter of the wire feeding middle section pipe 2 is also adjusted to 2.4mm, thereby strengthening the stable guidance of the aluminum wire and reducing the vibration of the aluminum wire.

[0039] The aluminum wire enters the wire feeding outlet pipe 3 through the wire feeding middle section pipe 2. The inner diameter of the wire feeding outlet pipe 3 is 4mm. At this time, the wire feeding outlet pipe 3 ensures that the aluminum wire enters the evaporation boat area with a precise position, angle and speed, which determines the uniformity of the coating. By reducing the inner diameter of the wire feeding pipe and cooperating with the first limiting plate 4 and the second limiting plate 5, the wire feeding stability is enhanced in the middle section before wire feeding, so as to realize the centering of the wire feeding position at the outlet. This reduces the wire feeding deviation during film formation, thereby preventing unstable wire feeding during film formation, which may lead to product defects or even production interruption, and ultimately improves production efficiency.

[0040] See Figures 4-7Because the expansion sleeve 7 is connected to the limiting seat 6, the expansion sleeve 7 is first moved so that the limiting seat 6 is inserted into the wire feeding outlet pipe 3. Then the expansion sleeve 7 is set outside the wire feeding outlet pipe 3. When the aluminum wire is discharged through the wire feeding outlet pipe 3, the conical structure of the trumpet-shaped expansion sleeve 7 forms a heat shielding area, thereby reducing heat transfer and lowering the pipe opening temperature, preventing the aluminum wire from pre-melting. The expansion angle of the expansion sleeve 7 can guide the radial diffusion of aluminum vapor, and the aluminum vapor will preferentially deposit on the inner wall of the expansion sleeve 7, thereby reducing the condensation on the pipe wall and preventing the wire feeding outlet pipe 3 from being blocked by aluminum vapor condensation. When the end of the aluminum wire is heated and swings to touch the pipe wall, the expansion sleeve 7 can provide a certain swing margin space to avoid the aluminum wire from breaking due to friction.

[0041] See Figures 4-10 Both the limiting block 9 and the fixing pin 12 are arc-shaped. The limiting block 9 has an arc-shaped fixing hole inside, into which the fixing pin 12 extends. A transmission seat 13 is welded to one side of the outer wall of the fixing pin 12, and a limiting track 14 is slidably connected inside the transmission seat 13. The limiting track 14 is fixedly connected to the outer wall of the limiting sleeve 10 via a support block, and the limiting track 14 can guide the transmission seat 13 to rotate. A spring 15 is sleeved on the outer wall of the limiting track 14, and both sides of the outer wall of the spring 15 are fixedly connected to the transmission seat 13 and the support block, respectively. The track 14 and the spring 15 form an elastic telescopic mechanism; the turntable 16 is fixedly connected to the side of the transmission seat 13 away from the fixed pin 12, and the fixed track 17 is rotatably connected inside the turntable 16. The turntable 16 has an annular groove inside, and the fixed track 17 matching the annular groove is set inside the annular groove; the handles 18 are welded to both sides of the outer wall of the turntable 16, and the inner wall of the fixed track 17 is fixedly connected to the outer wall of the limiting sleeve 10; both the turntable 16 and the fixed track 17 are "O" shaped structures, and the fixed track 17 can guide the turntable 16 to rotate.

[0042] See Figure 4 Because the limiting seat 6 is connected to the limiting block 9 through the extension plate 8, when the limiting seat 6 is connected to the wire feeding outlet pipe 3, and the expansion sleeve 7 is set outside the wire feeding outlet pipe 3, the limiting block 9 will be inserted into the fixing plate 11 on the outer wall of the limiting sleeve 10. Since the inner wall of the fixing plate 11 is fixedly connected to the outer wall of the limiting sleeve 10, the limiting block 9 and the fixing plate 11 are engaged, thereby accurately positioning the expansion sleeve 7 and preventing the expansion sleeve 7 from rotating at will, thus positioning the expansion sleeve 7 to prevent it from moving at will and affecting subsequent fixing.

[0043] See Figures 8-10Then, the spring 15 returns to its original position and generates elastic force, causing the transmission seat 13 to move along the limit track 14. Since the transmission seat 13 is connected to the fixing pin 12, the movement of the transmission seat 13 will drive the fixing pin 12 to move together, thereby causing the fixing pin 12 to insert into the limit block 9 under the action of elastic force, thus fixing the expansion sleeve 7 to prevent it from moving at will. As a result, the expansion sleeve 7 can be installed without the need for the staff to stand inside the equipment for a long time and use tools to repeatedly turn multiple sets of bolts, thus quickly fixing the expansion sleeve 7 and improving maintenance efficiency.

[0044] When it is necessary to disassemble and replace the expansion sleeve 7, first manually grasp the handle 18 and push the turntable 16 so that the turntable 16 rotates along the fixed track 17. Since the turntable 16 is connected to the transmission seat 13, the movement of the turntable 16 will drive the transmission seat 13 to move together. At this time, the movement of the transmission seat 13 will squeeze the spring 15, causing it to deform, until the transmission seat 13 drives the fixing pin 12 to disengage from the limit block 9, thereby canceling the fixation of the expansion sleeve 7. At this time, the operator only needs to move the extension plate 8 to remove the expansion sleeve 7. Thus, the disassembly of the expansion sleeve 7 can be completed by simply rotating the interface of the turntable 16.

[0045] The above description is merely a preferred embodiment of this utility model, but the protection scope of this utility model is not limited thereto. The substitutions may be replacements of some structures, devices, or method steps, or they may be complete technical solutions. Equivalent substitutions or modifications made based on the technical solution and inventive concept of this utility model should all be covered within the protection scope of this utility model.

Claims

1. A wire feeding tube structure for a variable inner diameter vapor deposition equipment, comprising a wire feeding inlet tube (1), a wire feeding middle section tube (2), and a wire feeding outlet tube (3), wherein the top of the outer wall of the wire feeding inlet tube (1) is fixedly connected to the wire feeding middle section tube (2), and the wire feeding outlet tube (3) is fixedly connected to one side of the outer wall of the wire feeding middle section tube (2), characterized in that: The inner diameter of the wire feeding inlet pipe (1) and the wire feeding middle section pipe (2) is lower than that of the wire feeding outlet pipe (3). A first limiting plate (4) is welded and fixed on the outer wall of the wire feeding middle section pipe (2) near the wire feeding inlet pipe (1), and a second limiting plate (5) is welded and fixed on the outer wall of the wire feeding middle section pipe (2) near the wire feeding outlet pipe (3). A limiting seat (6) is connected inside the wire feeding outlet pipe (3), and an expansion sleeve (7) is connected to one side of the outer wall of the limiting seat (6). The expansion sleeve (7) is flared. An extension plate (8) is fixedly sleeved in the middle of the outer wall of the limiting seat (6), and limiting blocks (9) are fixedly connected on both sides of the outer wall of the extension plate (8). A limiting sleeve (10) is sleeved in the middle of the outer wall of the wire feeding outlet pipe (3), and a fixed plate (11) is fixedly connected to one side of the outer wall of the limiting sleeve (10). A fixing pin (12) is movably connected inside the limiting block (9).

2. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 1, characterized in that: The limiting seat (6) is divided into inner and outer layers, and both the inner and outer layers are "O" shaped structures.

3. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 2, characterized in that: The wire feeding outlet tube (3) has a limiting cavity inside, and the inner layer of the limiting seat (6) extends into it, and the outer layer of the limiting seat (6) is connected to the outer wall of the wire feeding outlet tube (3).

4. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 3, characterized in that: Both the limiting block (9) and the fixing pin (12) are arc-shaped.

5. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 4, characterized in that: The limiting block (9) has an arc-shaped fixing hole inside, and the fixing pin (12) extends into it.

6. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 5, characterized in that: A transmission seat (13) is welded to one side of the outer wall of the fixed pin (12), and a limit rail (14) is slidably connected inside the transmission seat (13). The limit rail (14) is fixedly connected to the outer wall of the limit sleeve (10) through a support block. The limit rail (14) can guide the transmission seat (13) to rotate.

7. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 6, characterized in that: The outer wall of the limiting track (14) is fitted with a spring (15), and the two sides of the outer wall of the spring (15) are fixedly connected to the transmission seat (13) and the support block respectively. The transmission seat (13), the limiting track (14) and the spring (15) constitute an elastic telescopic mechanism.

8. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 7, characterized in that: The transmission seat (13) is fixedly connected to a turntable (16) on the side away from the fixed pin (12), and a fixed track (17) is rotatably connected inside the turntable (16).

9. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 8, characterized in that: The turntable (16) has handles (18) welded on both sides of its outer wall, and the inner wall of the fixed track (17) is fixedly connected to the outer wall of the limiting sleeve (10).

10. The wire feeding tube structure of the variable inner diameter vapor deposition equipment according to claim 9, characterized in that: Both the turntable (16) and the fixed track (17) are "O" shaped structures, and the fixed track (17) can guide the turntable (16) to rotate.

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