Vacuum viewing window and evaporation apparatus resistant to metal deposition
By setting a roughened substrate on the vacuum observation window and coating it with an anti-metal deposition coating, the problem of reduced light transmittance caused by metal vapor deposition is solved, thereby improving equipment operating efficiency and reducing maintenance costs.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU QUINGYUE OPTOELECTRONICS TECH CO LTD
- Filing Date
- 2025-05-23
- Publication Date
- 2026-05-29
AI Technical Summary
In vacuum evaporation equipment, the deposition of metal vapor on the surface of the observation window leads to a decrease in light transmittance, affecting the observation effect, increasing maintenance costs and reducing production efficiency.
The substrate and anti-metal deposition coating are stacked. The substrate surface is roughened at the micron level and coated with an anti-metal deposition coating, such as a silicon dioxide coating, with a thickness of 400-600nm. This coating prevents metal vapor deposition through physical blocking or chemical inertness, thus maintaining high light transmittance.
It significantly improves the continuous operating time of vapor deposition equipment, reduces maintenance costs, reduces the light transmittance of the vacuum observation window by only <5%, and makes the surface deposit layer easy to remove.
Smart Images
Figure CN224299345U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of vapor deposition technology and relates to a vacuum observation window and vapor deposition equipment that resists metal deposition. Background Technology
[0002] Vacuum evaporation, or evaporation deposition for short, is a thin film preparation technology widely used in the fields of electronics, optics, and materials science. This process involves heating a solid material to the point of evaporation in a high vacuum environment, causing it to deposit onto the surface of a substrate to form a thin film. It has advantages such as simple film formation methods, high film purity and density, and unique film structure and properties.
[0003] In vacuum evaporation equipment, the observation window is an essential component. Operators can monitor the evaporation process in real time without disrupting the vacuum environment, including the operating status of the evaporation source, the deposition on the substrate surface, and the uniformity of the thin film. This allows operators to promptly identify and adjust process parameters to ensure evaporation quality, and to take swift action in case of abnormalities to prevent equipment damage or product quality issues.
[0004] Although the observation window plays a crucial role in vacuum evaporation, it faces significant challenges in practical applications. During metal evaporation, especially aluminum evaporation, it is necessary to observe the remaining aluminum content and melting effect in the chamber every 20 minutes. If there is irregular aluminum, the position of the light spot needs to be adjusted to melt the aluminum. Prolonged operation can cause aluminum to evaporate onto the observation window, significantly reducing light transmittance, obstructing the observation field, and making it impossible to clearly see the aluminum evaporation process.
[0005] To restore the light transmittance of the observation window, it is usually necessary to open the cavity to replace the observation window or to stop the machine for cleaning. Opening the cavity requires replacing the electron gun and ceramic column, which increases production costs and also causes the vacuum level of the chamber to decrease. In addition, frequent shutdowns not only increase the maintenance costs of the equipment, but also seriously affect production efficiency, significantly reduce equipment utilization, and significantly increase production costs.
[0006] In summary, there is an urgent need to develop a new type of vacuum observation window to solve the technical problem of reduced light transmittance caused by the deposition of metal vapor on the surface of the observation window in the high-temperature vacuum environment of the vapor deposition equipment, and to improve the operating efficiency of the vapor deposition equipment, reduce maintenance costs, and improve product quality. Utility Model Content
[0007] To address the shortcomings of existing technologies, the purpose of this invention is to provide a vacuum observation window and evaporation equipment that resists metal deposition. By using a layered substrate and an anti-metal deposition coating, the invention solves the problem in existing evaporation equipment where metal vapor deposition on the surface of the vacuum observation window leads to a decrease in light transmittance and makes it impossible to observe the evaporation process. This significantly improves the continuous operating time of the evaporation equipment and reduces maintenance costs.
[0008] To achieve this objective, the present invention adopts the following technical solution:
[0009] In a first aspect, the present invention provides a vacuum observation window that resists metal deposition, the vacuum observation window comprising a substrate and an anti-metal deposition coating applied to the substrate;
[0010] The surface roughness of the substrate is 10-50 μm;
[0011] The thickness of the anti-metal deposition coating is 400-600 nm.
[0012] The vacuum observation window provided by this utility model includes a substrate and an anti-metal deposition coating stacked together. By performing micron-level roughening treatment on the surface of the substrate, the adhesion of subsequent deposition or coating of the anti-metal deposition coating can be enhanced, and the stability of the coating can be improved. Then, an anti-metal deposition coating of a certain thickness is applied to prevent the deposition of metal vapor on the surface of the observation window through physical blocking or chemical inertness, while maintaining the high light transmittance of the observation window and improving the service life of the coating. This effectively avoids the situation in existing equipment where metal vapor covers the observation window and affects observation, and can significantly improve the continuous operation time of the equipment and reduce maintenance costs.
[0013] It should be noted that if the anti-metal deposition coating is too thin, it may not be able to completely block the deposition of metal vapor on the surface of the observation window, resulting in a decrease in light transmittance; if the anti-metal deposition coating is too thick, it may affect the light transmittance and affect the operator's observation of the vapor deposition process.
[0014] It should also be noted that, after experiments conducted by the inventors, it was found that the light transmittance of the provided anti-metal deposition vacuum observation window decreased by less than 5% after 1200 hours of continuous use, and the aluminum deposition layer on the surface could be easily blown off or wiped off with 5% hydrochloric acid.
[0015] As a preferred technical solution of this utility model, the substrate is a glass substrate.
[0016] As a preferred technical solution of this utility model, the thickness of the substrate is 2.5-3.5mm.
[0017] As a preferred technical solution of this utility model, the anti-metal deposition coating is a silicon dioxide coating.
[0018] As a preferred technical solution of this utility model, the thickness of the anti-metal deposition coating is 450-550nm.
[0019] As a preferred technical solution of this utility model, the light transmittance of the vacuum observation window is ≥90%.
[0020] As a preferred technical solution of this utility model, the metal vapor deposition on the anti-metal deposition coating is in the form of a discontinuous island structure.
[0021] As a preferred technical solution of this utility model, after metal vapor deposition, the light transmittance of the vacuum observation window is ≥88%.
[0022] Secondly, this utility model provides a vapor deposition apparatus, wherein the vapor deposition apparatus is provided with a vacuum observation window for resisting metal deposition as described in the first aspect.
[0023] Compared with the prior art, the present invention has the following beneficial effects:
[0024] The vacuum observation window provided by this utility model includes a substrate and an anti-metal deposition coating stacked together. By performing micron-level roughening treatment on the surface of the substrate, the adhesion of subsequent deposition or coating of the anti-metal deposition coating can be enhanced, and the stability of the coating can be improved. Then, an anti-metal deposition coating of a certain thickness is applied to prevent the deposition of metal vapor on the surface of the observation window through physical blocking or chemical inertness, while maintaining the high light transmittance of the observation window and improving the service life of the coating. This effectively avoids the situation in existing vapor deposition equipment where metal vapor covers the observation window and affects observation, and can significantly improve the continuous operation time of the equipment and reduce maintenance costs. In particular, after 1200 hours of continuous use, the light transmittance of the vacuum observation window only decreases by <5%, and the aluminum deposition layer on the surface can be easily blown off. Attached Figure Description
[0025] Figure 1 This is a schematic diagram of the structure of the vacuum observation window provided in Embodiment 1 of this utility model;
[0026] Figure 2 This is a schematic diagram of the structure of the vacuum observation window after aluminum vapor deposition provided in Embodiment 1 of this utility model;
[0027] Among them, 1-substrate, 2-anti-metal deposition coating, 3-discontinuous island structure. Detailed Implementation
[0028] It should be understood that in the description of this utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0029] It should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0030] This utility model provides a vacuum observation window that resists metal deposition, the vacuum observation window including a substrate and an anti-metal deposition coating applied to the substrate;
[0031] The surface roughness of the substrate is 10-50μm, for example, it can be 12μm, 15μm, 16μm, 18μm, 20μm, 22μm, 25μm, 30μm, 35μm, 40μm or 45μm, but is not limited to the listed values. Other unlisted values within this range are also applicable.
[0032] The thickness of the anti-metal deposition coating is 400-600nm, for example, it can be 420nm, 450nm, 460nm, 480nm, 500nm, 520nm, 550nm, 560nm or 580nm, but is not limited to the listed values. Other unlisted values within this range are also applicable.
[0033] It should be noted that this invention does not impose any special limitations on the preparation method of the provided vacuum observation window. It can also be carried out by referring to the following method, including the following steps:
[0034] (1) Clean the substrate surface and then immerse the substrate in acid solution for 5-15 seconds to form a rough surface and obtain the treated substrate.
[0035] The surface cleaning detergent includes acetone or ethanol; the acid solution includes hydrofluoric acid with a mass concentration of 3%-10%.
[0036] (2) An anti-metal deposition coating is formed on the surface of the substrate after treatment by means of sol-gel or chemical vapor deposition.
[0037] In some embodiments of this utility model, the substrate is a glass substrate.
[0038] In some embodiments of this utility model, the thickness of the substrate is 2.5-3.5mm, for example, it can be 2.6mm, 2.7mm, 2.8mm, 2.9mm, 3mm, 3.1mm, 3.2mm, 3.3mm or 3.4mm, but is not limited to the listed values. Other unlisted values within this range are also applicable.
[0039] In some embodiments of this utility model, the anti-metal deposition coating is a silicon dioxide coating.
[0040] It should be noted that the silica coating is used as an anti-metal deposition coating, which has the characteristics of transparency, high temperature resistance and low surface energy (long-term anti-deposition). It prevents metal atom deposition through physical blocking or chemical inertness, while maintaining the high light transmittance of the observation window, effectively avoiding the situation in existing equipment where metal vapor covers the observation window and affects the observation.
[0041] In some embodiments of this utility model, the thickness of the anti-metal deposition coating is 450-550nm, for example, it can be 460nm, 470nm, 480nm, 490nm, 500nm, 510nm, 520nm, 530nm or 540nm, but is not limited to the listed values. Other unlisted values within this range are also applicable.
[0042] In some embodiments of this utility model, the light transmittance of the vacuum observation window is ≥90%, for example, it can be 90.2%, 90.5%, 90.8%, 91%, 91.2%, 91.5%, 91.8%, 92%, 92.5%, 93%, 93.5%, 94%, 94.5%, 95%, or 96%, etc., but is not limited to the listed values, and other unlisted values within this range are also applicable.
[0043] In some embodiments of this invention, the metal vapor deposition on the anti-metal deposition coating is in the form of a discontinuous island structure.
[0044] It should be noted that the anti-metal deposition coating can prevent the deposition of metal atoms through physical barriers or chemical inertness, so that the metal vapor (especially aluminum vapor) is deposited on the anti-metal deposition coating in a discontinuous island structure. The discontinuous island structure has a large number of gaps, which allow light to pass through the coating. The vacuum observation window can still maintain a high light transmittance, allowing the operator to clearly observe the vapor deposition process without frequent shutdowns for cleaning or replacement of the observation window.
[0045] In some embodiments of this utility model, after metal vapor deposition, the light transmittance of the vacuum observation window is ≥88%, for example, it can be 88.2%, 88.5%, 88.8%, 89%, 89.2%, 89.5%, 89.8%, 90%, 90.2%, 90.5%, 90.8%, or 91%, etc., but is not limited to the listed values. Other unlisted values within this range are also applicable.
[0046] Secondly, this utility model provides a vapor deposition apparatus, wherein the vapor deposition apparatus is provided with a vacuum observation window for resisting metal deposition as described in the first aspect.
[0047] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.
[0048] Example 1
[0049] This embodiment provides a vacuum observation window resistant to metal deposition and its preparation method. The vacuum observation window (such as...) Figure 1 (As shown) includes a substrate 1 and an anti-metal deposition coating 2 applied to the substrate;
[0050] The substrate 1 is a glass substrate with a thickness of 3 mm and a surface roughness of 30 μm;
[0051] The anti-metal deposition coating 2 is a silicon dioxide coating with a thickness of 500 nm;
[0052] The light transmittance of the vacuum observation window is 95%;
[0053] The preparation method includes the following steps:
[0054] (1) The substrate was cleaned with ethanol and then immersed in a 5% hydrofluoric acid solution for roughening treatment for 10s to form a rough surface, thus obtaining the treated substrate 1.
[0055] (2) Using SiCl4 and O2 as precursors, chemical vapor deposition was performed at a temperature of 600°C to deposit an anti-metal deposition coating 2 on the treated substrate 1, and then the substrate was annealed at a temperature of 400°C for 2 hours in a nitrogen atmosphere to obtain the vacuum observation window.
[0056] This embodiment also provides a vapor deposition apparatus, which is equipped with the aforementioned anti-metal deposition vacuum observation window.
[0057] In this embodiment, aluminum products are produced using the vapor deposition equipment described above. The aluminum vapor is deposited on the anti-metal deposition coating 2 in a discontinuous island-like structure 3 (e.g., Figure 2As shown in the figure, no observation was affected by aluminum vapor covering the observation window during the production process. After 1200 hours of continuous use, the light transmittance of the vacuum observation window only decreased by 4%, which significantly improved the continuous operation time of the equipment and reduced maintenance costs.
[0058] Example 2
[0059] This embodiment provides a vacuum observation window resistant to metal deposition and its preparation method. The vacuum observation window includes a substrate and an anti-metal deposition coating applied to the substrate.
[0060] The substrate is a glass substrate with a thickness of 2.9 mm and a surface roughness of 15 μm;
[0061] The anti-metal deposition coating is a silicon dioxide coating with a thickness of 450 nm;
[0062] The light transmittance of the vacuum observation window is 93%;
[0063] The preparation method and vapor deposition equipment are both carried out in accordance with the method provided in Example 1.
[0064] In this embodiment, aluminum products are produced using the vapor deposition equipment. The aluminum vapor is deposited on the anti-metal deposition coating in a discontinuous island structure. During the production process, there was no situation where the observation was affected by aluminum vapor covering the observation window. After 1200 hours of continuous use, the light transmittance of the vacuum observation window only decreased by 3%, which significantly improved the continuous operation time of the equipment and reduced maintenance costs.
[0065] Example 3
[0066] This embodiment provides a vacuum observation window resistant to metal deposition and its preparation method. The vacuum observation window includes a substrate and an anti-metal deposition coating applied to the substrate.
[0067] The substrate is a glass substrate with a thickness of 3.2 mm and a surface roughness of 50 μm;
[0068] The anti-metal deposition coating is a silicon dioxide coating with a thickness of 560 nm;
[0069] The light transmittance of the vacuum observation window is 92%;
[0070] The preparation method and vapor deposition equipment are both carried out in accordance with the method provided in Example 1.
[0071] In this embodiment, aluminum products are produced using the vapor deposition equipment. The aluminum vapor is deposited on the anti-metal deposition coating in a discontinuous island structure. During the production process, there was no situation where the observation was affected by aluminum vapor covering the observation window. After 1200 hours of continuous use, the light transmittance of the vacuum observation window only decreased by 4%, which significantly improved the continuous operation time of the equipment and reduced maintenance costs.
[0072] Comparative Example 1
[0073] This comparative example provides a vacuum observation window and evaporation equipment, wherein the vacuum observation window is a glass substrate with a thickness of 3mm.
[0074] In this comparative example, aluminum products were produced using the aforementioned vapor deposition equipment. After 24 hours of continuous use, aluminum vapor was deposited onto the glass substrate in a continuous thin film form, resulting in a significant decrease in light transmittance. This obstructed the operator's view, making it impossible to clearly observe the aluminum vapor deposition process. Therefore, it was necessary to open the cavity and replace the observation window, which was expected to take 2 hours. Opening the cavity also required replacing the electron gun and ceramic column, incurring costs. Furthermore, the vacuum level upon resumption of use was lower than before the cavity was opened, which would affect product quality.
[0075] Comparative Example 2
[0076] This comparative example provides a vacuum observation window resistant to metal deposition and its preparation method. Except that the surface roughness of the substrate is 0 μm, all other conditions are the same as in Example 1.
[0077] In this comparative example, the adhesion of the anti-metal deposition coating was significantly weakened due to the excessive smoothness of the substrate, making the coating very easy to peel off and reducing the convenience and reliability of use.
[0078] Comparative Example 3
[0079] This comparative example provides a vacuum observation window resistant to metal deposition and its preparation method. Except for the surface roughness of the substrate being 100 μm, all other conditions are the same as in Example 1.
[0080] In this comparative example, due to the excessively high surface roughness of the substrate, the light transmittance was affected. Although the initial light transmittance of the vacuum observation window was still ≥90%, the light transmittance of the vacuum observation window gradually decreased by about 3%-5% per hour during the aluminum vapor deposition process. This may also cause unevenness in the coating during the deposition process. After continuous use for 24 hours, the light transmittance decreased significantly, obstructing the operator's field of vision and making it impossible to see the aluminum vapor deposition situation. It was necessary to open the cavity and replace the observation window.
[0081] Comparative Example 4
[0082] This comparative example provides a vacuum observation window resistant to metal deposition and its preparation method. Except that the thickness of the anti-metal deposition coating is 300 nm, all other conditions are the same as in Example 1.
[0083] In this comparative example, due to the excessively thin thickness of the anti-metal deposition coating, it was unable to completely block the deposition of metal vapor on the surface of the observation window, resulting in a decrease in the light transmittance of the vacuum observation window. After 24 hours of continuous use, the light transmittance decreased significantly, obstructing the operator's field of vision and making it impossible to see the aluminum vapor deposition. Therefore, it was necessary to open the cavity and replace the observation window.
[0084] Comparative Example 5
[0085] This comparative example provides a vacuum observation window resistant to metal deposition and its preparation method. Except that the thickness of the anti-metal deposition coating is 700 nm, all other conditions are the same as in Example 1.
[0086] In this comparative example, due to the excessive thickness of the anti-metal deposition coating, the light transmittance was affected. During the aluminum vapor deposition process, the light transmittance of the vacuum observation window gradually decreased. After 24 hours of continuous use, the light transmittance decreased significantly, obstructing the operator's field of vision and making it impossible to see the aluminum vapor deposition situation. It was necessary to open the cavity and replace the observation window.
[0087] The applicant declares that the above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.
Claims
1. A vacuum observation window resistant to metal deposition, characterized in that, The vacuum observation window includes a substrate and an anti-metal deposition coating applied to the substrate; The surface roughness of the substrate is 10-50 μm; The thickness of the anti-metal deposition coating is 400-600 nm.
2. The vacuum observation window against metal deposition according to claim 1, characterized in that, The substrate is a glass substrate.
3. The vacuum observation window against metal deposition according to claim 1, characterized in that, The thickness of the substrate is 2.5-3.5 mm.
4. The vacuum observation window against metal deposition according to claim 1, characterized in that, The anti-metal deposition coating is a silicon dioxide coating.
5. The vacuum observation window against metal deposition according to claim 1, characterized in that, The thickness of the anti-metal deposition coating is 450-550 nm.
6. The vacuum observation window against metal deposition according to claim 1, characterized in that, The light transmittance of the vacuum observation window is ≥90%.
7. The vacuum observation window against metal deposition according to claim 1, characterized in that, The metal vapor deposition on the anti-metal deposition coating forms a discontinuous island-like structure.
8. The vacuum observation window against metal deposition according to claim 1, characterized in that, After metal vapor deposition, the light transmittance of the vacuum observation window is ≥88%.
9. A vapor deposition apparatus, characterized in that, The vapor deposition equipment is equipped with a vacuum observation window for resisting metal deposition as described in any one of claims 1-8.