A device for preventing crystal flicker

Abstract

The utility model provides a device of preventing crystal to shake, the device of preventing crystal to shake is installed between single crystal furnace cover and vice furnace room, including inner race, outer ring, spring, the inner race sets up in the inside of outer ring, the spring is provided with a plurality, even connection between the inner race outer wall and the inner wall of outer ring, the inner wall of inner race is fixedly connected with ceramic ring. The ceramic ring inner wall is convex cambered surface structure. The outer ring is fixed in the fixed ring of setting of furnace cover, the inner wall of fixed ring sets up the location clamping groove, the outer wall of outer ring is provided with the clamping block in the location clamping groove. The inner wall of vice furnace room lower extreme sets up the fixed step of pressing on fixed ring and outer ring, this device will crystal bar cover in the inner race, and spring plays the buffering effect, prevents crystal bar to take place the shaking of big amplitude and leads to the drop bar, and the inner diameter of ceramic ring is set up according to the crystal bar diameter of drawing, so that crystal bar can just pass through ceramic ring, ceramic ring can bear high temperature, and the contact with crystal bar is gentle not fierce, reduces the damage to crystal bar.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon production technology, specifically to a device for preventing crystal wobbling. Background Technology

[0002] In the process of Czochralski pulling single crystal silicon rods, due to the relatively small diameter (4.5-5.5mm) and long length (250-300mm) of the crystal pulling section, when the tungsten wire rope or crystal rod is misaligned, or when there is an earthquake, base collapse, or other abnormal conditions causing the crystal to shake, arc, or sway, the fine crystal is prone to breakage, causing the crystal rod to fall into the silicon melt and making it impossible to continue pulling the crystal. Under high temperature conditions, the silicon melt is squeezed out of the crucible, damaging the heating elements or even burning through the furnace body. In severe cases, it can cause major accidents such as fire and explosion inside the furnace, posing a great threat to personal safety and property safety. Therefore, this utility model designs a device to prevent the crystal rod from breaking and falling due to large-scale shaking. Utility Model Content

[0003] In order to overcome the problems existing in the background technology, the present invention provides a device to prevent crystal swaying, so as to solve the technical problem in the prior art that the crystal rod sways and the fine crystal breaks, causing the crystal rod to fall off.

[0004] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0005] A device for preventing crystal swaying is installed between the furnace cover 1 of a single crystal furnace and the auxiliary furnace chamber 2. The device includes an inner ring 3, an outer ring 4, and springs 5. The inner ring 3 is disposed inside the outer ring 4. Multiple springs 5 ​​are disposed and evenly connected between the outer wall of the inner ring 3 and the inner wall of the outer ring 4. A ceramic ring 6 is fixedly connected to the inner wall of the inner ring 3.

[0006] Preferably, the inner wall of the ceramic ring 6 has a raised arc surface structure.

[0007] Preferably, the outer ring 4 is fixed in the fixing ring 7 provided on the furnace cover 1, the inner wall of the fixing ring 7 is provided with a positioning groove 8, and the outer wall of the outer ring 4 is provided with a locking block 9 that is locked in the positioning groove 8.

[0008] Preferably, the lower inner wall of the auxiliary furnace chamber 2 is provided with a fixing step 10 pressing on the fixing ring 7 and the outer ring 4, and the lower end of the auxiliary furnace chamber 2 is provided with a connecting flange 11 fixedly connected to the furnace cover 1.

[0009] Preferably, one end of the spring 5 is connected to the adjusting post 12 installed on the outer ring 4, and the other end is connected to the connecting post 13 installed on the inner ring 3; the adjusting post 12 is threadedly connected to the threaded hole 14 that runs through the inner wall of the outer ring 4, and the connecting post 13 is inserted into the fixing hole 15 that runs through the outer wall of the inner ring 3 and the inner wall of the ceramic ring 6.

[0010] Preferably, a fixing screw 16 is provided at one end of the inner wall of the ceramic ring 6 in the fixing hole 15. The fixing screw 16 is installed in the stepped hole opened at the end of the fixing hole 15 and is threaded to the end of the connecting post 13.

[0011] Preferably, the end of the adjusting column 12 is provided with a cross groove 17 for easy rotation with a screwdriver.

[0012] Preferably, a pressure sensor connected to a spring 5 is installed on the adjusting column 12 mounted on the outer ring 4, and the pressure sensor is connected to the PLC control system.

[0013] The beneficial effects of this utility model are: the device fits the crystal rod in the inner ring 3, the spring 5 acts as a buffer to prevent the crystal rod from shaking too much and falling off, the inner diameter of the ceramic ring 6 is set according to the diameter of the drawn crystal rod so that the crystal rod can just pass through the ceramic ring 6, the ceramic ring 6 can withstand high temperature and has a gentle and non-violent contact with the crystal rod, reducing damage to the crystal rod. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model.

[0015] Figure 2 This is an installation diagram of this utility model.

[0016] Figure 3 This is a schematic diagram of the connection structure of the spring.

[0017] Figure 4 This is a structural schematic diagram of the fixed step 10. Detailed Implementation

[0018] To make the objectives, technical solutions, and beneficial effects of this utility model clearer, the preferred embodiments of this utility model will be described in detail below with reference to the accompanying drawings, so as to facilitate the understanding of those skilled in the art.

[0019] like Figure 1-4As shown, this utility model provides a device for preventing crystal swaying. The device for preventing crystal swaying is installed between the furnace cover 1 of the single crystal furnace and the auxiliary furnace chamber 2. It includes an inner ring 3, an outer ring 4, and springs 5. The inner ring 3 is disposed inside the outer ring 4. Multiple springs 5 ​​are disposed and evenly connected between the outer wall of the inner ring 3 and the inner wall of the outer ring 4. A ceramic ring 6 is fixedly connected to the inner wall of the inner ring 3. The device is installed between the furnace cover 1 and the auxiliary furnace chamber 2 of the single crystal furnace. When drawing crystal rods, the crystal rods pass through the ceramic ring 6 in the inner ring 3. The ceramic ring 6 limits the movement of the crystal rods. When the crystal rods shake, they touch the ceramic ring 6, and the spring 5 provides a good buffering effect, effectively reducing the frequency and amplitude of shaking and quickly stabilizing the crystal rods, thereby preventing them from falling off due to large-amplitude shaking. The ceramic ring 6 can be made of high-temperature resistant materials such as silicon carbide, alumina, boron nitride, and silicon dioxide. It can withstand high temperatures, does not shed slag on the surface after long-term use, and has a gentle and non-violent contact with the crystal rods, reducing damage to the crystal rods. The inner diameter of the ceramic ring 6 is set according to the diameter of the drawn crystal rods so that the crystal rods can just pass through the ceramic ring 6.

[0020] The inner wall of the ceramic ring 6 has a raised arc surface structure. The arc surface structure can reduce the contact area between the ceramic ring 6 and the crystal rod, thus not affecting the crystal rod pulling process.

[0021] The outer ring 4 is fixed in the fixing ring 7 provided on the furnace cover 1. The inner wall of the fixing ring 7 is provided with a positioning groove 8, and the outer wall of the outer ring 4 is provided with a locking block 9 that is locked in the positioning groove 8. The outer ring 4 of the device is locked in the fixing ring 7, and the locking block 9 is locked in the positioning groove 8, thereby installing the device on the furnace cover 1. The auxiliary chamber can then be lowered for installation.

[0022] The lower inner wall of the auxiliary furnace chamber 2 is provided with a fixing step 10 that presses against the fixing ring 7 and the outer ring 4. The lower end of the auxiliary furnace chamber 2 is provided with a connecting flange 11 that is fixedly connected to the furnace cover 1. The device is installed in the fixing ring 7, and the auxiliary furnace chamber 2 is lowered so that the fixing step 10 presses against the fixing ring 7 and the outer ring 4 to fix the device.

[0023] One end of the spring 5 is connected to an adjusting post 12 mounted on the outer ring 4, and the other end is connected to a connecting post 13 mounted on the inner ring 3. The adjusting post 12 is threaded into a threaded hole 14 that penetrates the inner wall of the outer ring 4, and the connecting post 13 is inserted into a fixing hole 15 that penetrates the outer wall of the inner ring 3 and the inner wall of the ceramic ring 6. The position of the spring 5 can be moved radially by adjusting the adjusting post 12. By rotating the adjusting post 12 by thread, the movement of the adjusting post 12 in the threaded hole is controlled, thereby moving the position of the spring 5 radially. This facilitates the connection of inner rings 3 and ceramic rings 6 of different diameters to the connecting post 13 at the end of the spring 5, allowing for adjustment of the size of the inner ring 3 according to different crystal rod diameters, thus improving the applicability of the device.

[0024] A fixing screw 16 is provided at one end of the fixing hole 15 on the inner wall of the ceramic ring 6. The fixing screw 16 is installed in the stepped hole at the end of the fixing hole 15 and is threaded to the end of the connecting post 13. The connecting post 13, to which one end of the spring 5 is connected, is inserted into the fixing hole 15, and then the fixing screw 16 is threaded to the end of the connecting post 13, thereby fixing one end of the spring 5 to the inner ring 3.

[0025] The end of the adjusting column 12 is provided with a cross groove 17 for easy rotation with a screwdriver.

[0026] A pressure sensor connected to the spring 5 is mounted on the adjusting column 12 installed on the outer ring 4. The pressure sensor is connected to the PLC control system. The pressure sensor maintains the pressure on the spring 5. When the crystal rod shakes significantly, the pressure on the spring 5 increases, allowing the system to monitor the crystal rod's shaking and take timely action.

[0027] Work process:

[0028] The device is installed between the furnace cover 1 and the auxiliary furnace chamber 2 of the single crystal furnace. The outer ring 4 of the device is locked in the fixing ring 7, and the locking block 9 is locked in the positioning slot 8, thereby installing the device on the furnace cover 1. The auxiliary furnace chamber 2 is lowered so that the fixing step 10 presses on the fixing ring 7 and the outer ring 4 to fix the device. When drawing the crystal rod, the crystal rod passes through the ceramic ring 6 in the inner ring 3. The ceramic ring 6 limits the crystal rod. When the crystal rod shakes, it touches the ceramic ring 6. The spring 5 can play a good buffering role, effectively reducing the shaking frequency and amplitude, and quickly stabilizing the crystal rod, thereby preventing the crystal rod from shaking too much and falling off. The ceramic ring 6 can be made of high-temperature resistant materials such as silicon carbide, alumina, boron nitride, and silicon dioxide. It can withstand high temperatures, does not slag on the surface after long-term use, and has a gentle and non-violent contact with the crystal rod, reducing damage to the crystal rod. The inner diameter of the ceramic ring 6 is set according to the diameter of the drawn crystal rod so that the crystal rod can just pass through the ceramic ring 6.

[0029] Finally, it should be noted that the above preferred embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although the utility model has been described in detail through the above preferred embodiments, those skilled in the art should understand that various changes can be made to it in form and detail without departing from the scope defined by the claims of this utility model.

Claims

1. A device for preventing crystal wobbling, characterized in that: The device for preventing crystal sway is installed between the furnace cover (1) of the single crystal furnace and the auxiliary furnace chamber (2), and includes an inner ring (3), an outer ring (4), and a spring (5); the inner ring (3) is located inside the outer ring (4), and multiple springs (5) are provided and are evenly connected between the outer wall of the inner ring (3) and the inner wall of the outer ring (4); a ceramic ring (6) is fixedly connected to the inner wall of the inner ring (3).

2. The device for preventing crystal wobbling according to claim 1, characterized in that: The inner wall of the ceramic ring (6) has a raised arc surface structure.

3. The device for preventing crystal wobbling according to claim 1, characterized in that: The outer ring (4) is fixed in the fixing ring (7) provided on the furnace cover (1). The inner wall of the fixing ring (7) is provided with a positioning groove (8), and the outer wall of the outer ring (4) is provided with a card block (9) that is stuck in the positioning groove (8).

4. The device for preventing crystal wobbling according to claim 3, characterized in that: The lower inner wall of the auxiliary furnace chamber (2) is provided with a fixed step (10) pressing on the fixed ring (7) and the outer ring (4), and the lower end of the auxiliary furnace chamber (2) is provided with a connecting flange (11) fixedly connected to the furnace cover (1).

5. A device for preventing crystal wobbling according to any one of claims 1-4, characterized in that: One end of the spring (5) is connected to the adjusting post (12) installed on the outer ring (4), and the other end is connected to the connecting post (13) installed on the inner ring (3); the adjusting post (12) is threadedly connected to the threaded hole (14) through the inner wall and outer wall of the outer ring (4), and the connecting post (13) is inserted into the fixing hole (15) through the outer wall of the inner ring (3) and the inner wall of the ceramic ring (6).

6. The device for preventing crystal wobbling according to claim 5, characterized in that: The fixing hole (15) is located at one end of the inner wall of the ceramic ring (6) and a fixing screw (16) is provided. The fixing screw (16) is installed in the stepped hole opened at the end of the fixing hole (15) and the fixing screw (16) is threaded to the end of the connecting column (13).

7. The device for preventing crystal wobbling according to claim 6, characterized in that: The end of the adjusting column (12) is provided with a cross groove (17) to facilitate rotation with a screwdriver.

8. A device for preventing crystal wobbling according to any one of claims 1-4, 6, and 7, characterized in that: A pressure sensor (18) connected to a spring (5) is installed on an adjusting column (12) mounted on the outer ring (4). The pressure sensor (18) is connected to the PLC control system.

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