A kind of single crystal furnace gas guide cylinder of convenient cleaning reduces consumption

Abstract

The utility model discloses a kind of single crystal furnace gas guide cylinder of reducing consumption convenient to clean, including barrel body and be located in the spiral structure of barrel body inside and rotate with furnace gas, the spiral structure includes rotating shaft and be located in the blade of rotating shaft's outer circumferential surface, upper protective cover and lower protective cover of being located in the barrel body top and bottom and mutually symmetrical, the both ends of rotating shaft are connected with upper protective cover and lower protective cover respectively.Lower oxide in furnace is reduced to accumulate here, to achieve the purpose of cleaning-free, can effectively reduce the heat radiation between hot field and argon recovery pipeline, realize reducing power consumption.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon manufacturing technology, specifically to a gas guide tube for a monocrystalline furnace that is easy to clean and reduces energy consumption. Background Technology

[0002] In existing gas guide tube designs, heat leakage through thermal radiation remains a challenge. Since the heat generated by the heater needs to be transferred to the argon recovery pipeline through the central hole of the gas guide tube, uneven heat distribution at the furnace bottom can lead to uneven crystal growth and defects such as dislocations. Because the gas guide tube operates in a high-temperature environment with corrosive gases, oxides accumulate inside the tube, requiring frequent cleaning and maintenance, which extends working hours and increases production costs.

[0003] Therefore, this application is submitted. Utility Model Content

[0004] The purpose of this invention is to provide a gas guide tube for a single crystal furnace that is easy to clean and reduces energy consumption. By setting a spiral structure inside the gas guide tube, the gas drives the spiral structure to rotate during the passage of gas, which carries away oxides and reduces heat radiation, thus solving the problems existing in the prior art.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following solution:

[0006] A gas guide tube for a single crystal furnace that is easy to clean and reduces energy consumption includes a cylinder body and a spiral structure located inside the cylinder body and rotating with the gas inside the furnace. The spiral structure includes a rotating shaft and blades located on the outer circumference of the rotating shaft, an upper cover located at the top of the cylinder body and a lower cover located at the bottom, which are symmetrical to each other. The two ends of the rotating shaft are respectively connected to the upper cover and the lower cover.

[0007] Furthermore, both the upper and lower covers include two mutually perpendicular crossbars, and a stepped hole for assembling the end of the rotating shaft is provided at the intersection of the two crossbars.

[0008] Furthermore, limiting plates are provided at both ends of the rotating shaft, and the limiting plates are located at the top or bottom of the stepped hole.

[0009] Furthermore, in the stepped hole of the upper cover, the bottom diameter of the hole is larger than the outer diameter of the rotating shaft, and the top diameter of the hole is larger than the outer diameter of the limiting plate.

[0010] Furthermore, the top and bottom of the cylinder body are respectively provided with corresponding grooves, and the two ends of the crossbar are engaged in the grooves.

[0011] Furthermore, a positioning post is provided inside the groove, and a positioning groove adapted to the positioning post is provided at the end of the crossbar.

[0012] Furthermore, both the positioning post and the positioning groove are cylindrical or frustum-shaped.

[0013] Furthermore, there is a gap between the end of the blade and the inner wall of the cylinder body.

[0014] Furthermore, it also includes a clamp located on the surface of the furnace bottom, with the bottom of the cylinder body located inside the clamp.

[0015] Furthermore, the upper cover, lower cover, rotating shaft, and blades are all made of carbon-carbon composite material.

[0016] The beneficial effects of this utility model are:

[0017] This invention features a spiral structure inside the cylinder body. The spiral structure includes upper and lower covers and a rotating shaft and blades located between the upper and lower covers. When argon gas at the bottom of the furnace passes through the blades, it drives the blades to rotate, reducing the accumulation of oxides in the furnace at this point, thereby achieving the purpose of eliminating the need for cleaning and reducing the time required for maintenance and cleaning. At the same time, the blades partially block heat radiation, which can effectively reduce the heat radiation from the thermal field to the argon gas recovery pipeline, thereby reducing power consumption. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a cross-sectional structural diagram of the present invention;

[0020] Figure 3 for Figure 1 A magnified schematic diagram of a portion of circle A;

[0021] Figure 4 This is a top view of the structure of this utility model.

[0022] Attached reference numerals: 1-Cylinder body, 10-Groove, 110-Positioning post, 2-Upper cover, 3-Lower cover, 30-Horizontal bar, 31-Step hole, 32-Positioning groove, 4-Rotating shaft, 40-Limiting plate, 5-Blade, 6-Clamp, 7-Furnace bottom. Detailed Implementation

[0023] The present invention will be further described in detail below with reference to the embodiments and accompanying drawings, but the implementation of the present invention is not limited thereto.

[0024] In the description of this utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0025] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set up," "have," "install," "connect," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0026] Example 1

[0027] Embodiment 1 of this utility model is a gas guide tube for a single crystal furnace that is easy to clean and reduces energy consumption. It includes a cylinder body 1 and a spiral structure located inside the cylinder body 1 and rotating with the gas inside the furnace. The spiral structure includes a rotating shaft 4 and blades 5 located on the outer circumference of the rotating shaft 4, an upper cover 2 located at the top of the cylinder body 1 and a lower cover 3 located at the bottom, which are symmetrical to each other. The two ends of the rotating shaft 4 are respectively connected to the upper cover 2 and the lower cover 3.

[0028] Reference Figure 1 and Figure 2 This invention mainly features a spiral structure inside the cylinder body 1. During the operation of the single crystal furnace, when the gas from the furnace enters the cylinder body 1, the flow of the gas causes the spiral structure to rotate. The rotation of the blades 5 reduces the accumulation of oxides in the furnace, thus achieving the purpose of eliminating the need for cleaning and reducing the time required for maintenance and cleaning. The gas guide cylinder is cleaned while it is in operation. At the same time, this spiral structure has multiple blades 5, which partially block heat radiation, effectively reducing the heat radiation between the thermal field and the argon gas recovery pipeline. As argon gas passes through this spiral structure, it causes the spiral structure to rotate, thereby reducing power consumption.

[0029] Meanwhile, by setting an upper cover 2 and a lower cover 3 at both ends of the rotating shaft 4, the connection between the upper cover 2 and the lower cover 3 in the cylinder body 1 provides installation conditions for the rotating shaft 4, allowing the rotating shaft 4 and the blade 5 to rotate inside the guide tube.

[0030] In some preferred embodiments, both the upper cover 2 and the lower cover 3 include two mutually perpendicular crossbars 30, and the intersection of the two crossbars 30 is provided with a stepped hole 31 for assembling the end of the rotating shaft 4.

[0031] The structure of the upper cover 2 and the lower cover 3, and their installation with the rotating shaft 4, are described here. Both the upper cover 2 and the lower cover 3 are formed by welding two intersecting crossbars 30 perpendicularly. Their ends overlap the top or top of the cylinder body 1, respectively. Argon gas passes between adjacent crossbars 30, allowing for smooth argon flow. A stepped hole 31 is provided at the intersection. The bottom diameter of the stepped hole 31 in the upper cover 2 is small, while the top diameter is large. Since the lower cover 3 is symmetrically positioned to the upper cover 2 (i.e., the bottom diameter of the lower cover 3 is large, and the top diameter is small), the rotating shaft 4 passes through the smaller diameter portion of the stepped hole 31.

[0032] Furthermore, limiting plates 40 are provided at both ends of the rotating shaft 4. The limiting plates 40 are located at the top or bottom of the stepped hole 31, that is, the limiting plates 40 are located in the larger diameter part of the stepped hole 31, thereby limiting the rotating shaft 4 to the smaller diameter part of the stepped hole 31, preventing it from detaching from the upper cover 2 or the lower cover 3 during rotation. The limiting plates 40 can be connected by welding or screws. When connected by screws, it is convenient to disassemble and assemble the rotating shaft 4 and the blade 5 in the upper and lower covers 3. The specific assembly structure can be selected according to the actual situation, which is a conventional operation and will not be described in detail here.

[0033] Specifically, in the stepped hole 31 of the upper cover 2, the bottom diameter is larger than the outer diameter of the rotating shaft 4, and the top diameter is larger than the outer diameter of the limiting plate 40. Since the upper cover 2 and the lower cover 3 are symmetrical, in the stepped hole 31 of the lower cover 3, the bottom diameter is larger than the outer diameter of the limiting plate 40, and the top diameter is larger than the outer diameter of the rotating shaft 4, thereby realizing the free rotation of the rotating shaft 4 within the upper and lower covers 3 and its limiting function.

[0034] Example 2

[0035] This embodiment 2 is implemented based on embodiment 1. The top and bottom of the cylindrical body 1 are respectively provided with corresponding grooves 10, and the two ends of the crossbar 30 are engaged in the grooves 10. The grooves 10 are provided with positioning posts 110, and the ends of the crossbar 30 are provided with positioning grooves 32 that are adapted to the positioning posts 110.

[0036] Specifically, refer to Figure 3 and Figure 4 By providing grooves 10 at the top and bottom of the cylinder body 1 for assembling the upper cover 2 and the lower cover 3, and by having the positioning pin 110 in the groove 10 assemble with the positioning groove 32, the assembly of the upper cover 2 and the lower cover 3 is ensured and the detachment is avoided.

[0037] Furthermore, the shape of the positioning post 110 is described, and a suitable specific shape can be selected according to the actual situation, which will not be elaborated here. Both the positioning post 110 and the positioning groove 32 are cylindrical or frustum-shaped.

[0038] In some preferred embodiments, there is a gap between the end of the blade 5 and the inner wall of the cylinder body 1. This gap ensures that the blade 5 rotates under the action of rotation, and avoids contact between the blade 5 and the inner wall of the cylinder body 1 during rotation, which would cause scratches and affect its lifespan, thereby improving the service life of both the blade 5 and the cylinder body 1.

[0039] In some preferred embodiments, a clamp 6 is also included on the surface of the furnace bottom 7, with the bottom of the cylinder body 1 located inside the clamp 6. The clamp 6 is provided on the surface of the single crystal furnace bottom 7, and the clamp 6 is adapted to the outer periphery of the cylinder body 1, thereby directly placing the cylinder body 1 with the assembled spiral structure inside the clamp 6 during installation, providing conditions for the installation of the cylinder body 1.

[0040] Meanwhile, the upper cover 2, lower cover 3, rotating shaft 4, and blades 5 are all made of carbon-carbon composite material. Carbon-carbon composite material has high-temperature oxidation resistance, high strength, high modulus, high thermal conductivity, and low density, which extends its service life.

[0041] The working principle of this utility model is as follows: When in use, the argon gas in the furnace bottom 7 flows through the inside of the cylinder body 1, causing the argon gas to flow and thus drive the rotating shaft 4 and blades 5 to rotate. During the rotation of blades 5, the accumulation of oxides in the furnace is reduced, thereby achieving the purpose of cleaning-free operation and reducing the time required for maintenance and cleaning. At the same time, blades 5 partially block heat radiation, which can effectively reduce the heat radiation between the heat field and the argon gas recovery pipeline. Thus, when argon gas passes through this spiral structure, it will drive the rotation, thereby achieving the purpose of reducing power consumption.

[0042] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Any simple modifications, equivalent substitutions, and improvements made to the above embodiments based on the technical essence of the present utility model and within the spirit and principles of the present utility model shall still fall within the protection scope of the present utility model.

Claims

1. A gas guide tube for a single crystal furnace that is easy to clean and reduces energy consumption, characterized in that, It includes a cylinder body (1) and a spiral structure located inside the cylinder body (1) and rotating with the gas inside the furnace. The spiral structure includes a rotating shaft (4) and blades (5) located on the outer circumference of the rotating shaft (4), an upper cover (2) located at the top of the cylinder body (1) and a lower cover (3) located at the bottom, which are symmetrical to each other. The two ends of the rotating shaft (4) are connected to the upper cover (2) and the lower cover (3) respectively.

2. The easy-to-clean, energy-saving gas guide tube for a single crystal furnace according to claim 1, characterized in that, Both the upper cover (2) and the lower cover (3) include two mutually perpendicular crossbars (30), and a stepped hole (31) for assembling the end of the rotating shaft (4) is provided at the intersection of the two crossbars (30).

3. The easy-to-clean, energy-saving gas guide tube for a single crystal furnace according to claim 2, characterized in that, Limiting plates (40) are provided at both ends of the rotating shaft (4), and the limiting plates (40) are located at the top or bottom of the stepped hole (31).

4. The easy-to-clean, energy-saving gas guide tube for a single crystal furnace according to claim 3, characterized in that, In the stepped hole (31) of the upper cover (2), the bottom hole diameter is larger than the outer diameter of the rotating shaft (4), and the top hole diameter is larger than the outer diameter of the limiting plate (40).

5. The easy-to-clean, energy-saving gas guide tube for a single crystal furnace according to claim 3, characterized in that, The top and bottom of the cylinder body (1) are respectively provided with corresponding grooves (10), and the two ends of the crossbar (30) are engaged in the grooves (10).

6. The easy-to-clean, energy-saving gas guide tube for a single crystal furnace according to claim 5, characterized in that, The groove (10) is provided with a positioning post (110) inside, and the end of the crossbar (30) is provided with a positioning groove (32) that is adapted to the positioning post (110).

7. The easy-to-clean, energy-saving gas guide tube for a single crystal furnace according to claim 6, characterized in that, The positioning post (110) and the positioning groove (32) are both cylindrical or frustum-shaped.

8. The easy-to-clean, energy-saving gas guide tube for a single crystal furnace according to claim 6, characterized in that, There is a gap between the end of the blade (5) and the inner wall of the cylinder body (1).

9. A gas guide tube for a single crystal furnace that is easy to clean and reduces energy consumption, as described in claim 6, is characterized in that... It also includes a clamp (6) located on the surface of the furnace bottom (7), with the bottom of the cylinder body (1) located inside the clamp (6).

10. A gas guide tube for a single crystal furnace that is easy to clean and reduces energy consumption, as described in claim 6, is characterized in that... The upper cover (2), lower cover (3), rotating shaft (4), and blade (5) are all made of carbon-carbon composite material.

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