Temperature adjustable moccvd pipeline

Abstract

The utility model discloses a kind of temperature-adjustable MOCVD pipelines, specifically related to semiconductor manufacturing technology field, including reaction chamber, the inside bottom end of the reaction chamber is installed with sleeve socket, the inside of sleeve socket is installed with center tube, the outer wall bottom end of center tube is installed with sliding assembly, the inside center of center tube is provided with fan;The outer wall bottom end of sleeve socket is opened with a plurality of heat dissipation holes, the bottom of center tube is opened with communicating hole, and the bottom of center tube is fixedly connected with the inside bottom end of reaction chamber, and the sidewall bottom of reaction chamber is opened with air hole;The sliding assembly includes inner ring, the outer wall of inner ring is provided with outer ring, and the both sides of inner ring are fixedly connected with mounting plate, and the bottom of mounting plate is provided with electric push rod;The center of fan is installed with driving rod, and the top of fan is provided with electromagnetic heating plate.The utility model has the advantages of keeping heating temperature, avoiding accidental stop cooling, and facilitating cooling adjustment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically to a temperature-adjustable MOCVD pipeline. Background Technology

[0002] MOCVD is a novel vapor phase epitaxial growth technology developed on the basis of vapor phase epitaxial growth. After nearly 20 years of rapid development, MOCVD has become one of the key technologies for the preparation of semiconductor compound materials. In MOCVD, ultrapure gas is injected into the reactor and precisely metered to deposit a very thin atomic layer onto the semiconductor wafer. The surface reaction of organic compounds or organometallic compounds and hydrides containing the required chemical elements creates conditions for crystal growth, forming the epitaxy of materials and compound semiconductors.

[0003] A device for regulating the temperature uniformity of a graphite substrate in MOCVD (Disclosure No. CN117802579A) is disclosed. It includes an MOCVD reaction chamber containing a graphite substrate. Below the substrate is a zoned heating element from a resistance furnace for heating the substrate. A high-precision infrared thermometer is installed at the center of the reaction chamber to measure the absolute temperature of the substrate center. An infrared thermal imager is installed on the side wall of the reaction chamber, monitoring the relative temperature of the entire substrate through an optical window on the side wall. The absolute temperature data measured by the high-precision infrared thermometer and the relative temperature data monitored by the infrared thermal imager are transmitted to a host computer. The host computer processes the data and runs a temperature control program to drive a power control device to adjust the heating power of the resistance furnace heating element in the corresponding area in real time, thereby regulating the temperature uniformity of the graphite substrate.

[0004] The aforementioned existing technologies have some defects in use. The heating element of the resistance furnace with zoned heating below the graphite substrate lacks an adjustment structure, making it inconvenient to control the temperature during heating. This results in difficulty in cooling down after the temperature rises, and it can only cool naturally, affecting the device's temperature control. At the same time, the electromagnetic heating element is directly set at the bottom of the graphite substrate, which can easily damage the graphite substrate in the event of an accident, causing unnecessary losses. Utility Model Content

[0005] The purpose of this invention is to provide a temperature-adjustable MOCVD pipeline, which solves the problems of existing heating devices lacking temperature regulation structures, being inconvenient for cooling, and posing safety hazards due to the heating device being directly at the bottom of the graphite substrate.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a temperature-adjustable MOCVD pipeline, including a reaction chamber, a sleeve installed at the bottom of the interior of the reaction chamber, a central tube installed inside the sleeve, a sliding component installed at the bottom of the outer wall of the central tube, and a fan installed at the center of the interior of the central tube.

[0007] The outer wall of the sleeve is provided with multiple heat dissipation holes at the bottom, the bottom of the central tube is provided with a connecting hole, and the bottom of the central tube is fixedly connected to the inner bottom of the reaction chamber. The side wall of the reaction chamber is provided with ventilation holes at the bottom.

[0008] The sliding assembly includes an inner ring, an outer ring is provided on the outer wall of the inner ring, mounting plates are fixedly connected to both sides of the inner ring, and an electric push rod is provided at the bottom of the mounting plate;

[0009] A drive rod is installed at the center of the fan, an electromagnetic heating plate is installed inside the central tube near the top of the fan, and a flow equalization plate is installed inside the central tube near the top.

[0010] Preferably, a top plate is installed at the top of the interior of the reaction chamber, and a fixing plate is fixedly connected to the top position of the center of the reaction chamber near the top of the sleeve. A graphite bearing plate is provided at the center of the fixing plate corresponding to the position of the central tube, and the diameter of the graphite bearing plate is the same as the diameter of the central tube.

[0011] Preferably, the inner ring slides against the outer wall of the central tube, the outer ring slides against the inner wall of the sleeve, the top of the sleeve is fixedly connected to the bottom of the fixing plate, the bottom of the sleeve is not against the bottom of the reaction chamber, and the bottom end of the sleeve slides against the outer wall of the outer ring.

[0012] Preferably, the top outer wall of the inner ring is fixedly connected to the bottom two sides of the outer ring via mounting plates, the bottom of the mounting plates is fixedly connected to the top protruding end of the electric push rod, and the outer wall of the electric push rod passes through the bottom end of the central tube and is fixedly connected to the central tube.

[0013] Preferably, a drive motor is installed at the bottom of the drive rod, penetrating the bottom of the reaction chamber. The position of the drive motor is higher than the top of the connecting hole, and the top of the central tube is lower than the top of the sleeve.

[0014] Preferably, the height of the heat dissipation hole is less than the height of the inner ring, and the height of the connecting hole is greater than the height of the outer ring.

[0015] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0016] 1. The air is heated by an electromagnetic heating plate and then the hot air is transferred to the graphite support plate, thus avoiding direct contact between the electromagnetic heating plate and the graphite support plate and maintaining a sufficient safe distance. At the same time, since the heating is done by the air, even if the electromagnetic heating plate is accidentally interrupted, the hot air can continue to maintain the temperature of the graphite support plate, preventing the temperature from dropping suddenly and effectively maintaining the temperature.

[0017] 2. Stopping the electromagnetic heating plate allows for easy activation of the electric push rod extension, which pushes the mounting plate upwards. This causes both the inner and outer rings to move upwards, unblocking the heat dissipation holes and facilitating the exhaust of hot air. Simultaneously, the upward movement of the inner ring blocks the top of the connecting hole, allowing the bottom of the connecting hole to connect with the outside. This blocks the connection between the central tube and the sleeve, enabling the fan to draw in cool air from the outside into the central tube through the connecting hole and then deliver cool air to the top. This effectively cools the graphite support plate, meeting various application requirements. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings.

[0019] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of the sleeve of this utility model;

[0021] Figure 3 This is a schematic diagram of the internal structure of the central tube of this utility model;

[0022] Figure 4 This is a front view of the internal structure of the central tube of this utility model;

[0023] Figure 5 This is a schematic diagram of the sliding component structure of this utility model.

[0024] Explanation of reference numerals in the attached figures:

[0025] 1. Reaction chamber; 101. Top plate; 102. Fixing plate; 103. Graphite support plate; 2. Sleeve sleeve; 201. Heat dissipation hole; 3. Central tube; 301. Connecting hole; 302. Flow equalization plate; 4. Sliding assembly; 401. Inner ring; 402. Outer ring; 403. Mounting plate; 404. Electric push rod; 5. Fan; 501. Drive rod; 502. Drive motor; 503. Electromagnetic heating plate. Detailed Implementation

[0026] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0027] This utility model provides, for example Figure 1-5 The illustrated temperature-adjustable MOCVD pipeline includes a reaction chamber 1, a sleeve 2 installed at the bottom of the interior of the reaction chamber 1, a central tube 3 installed inside the sleeve 2, a sliding assembly 4 installed at the bottom of the outer wall of the central tube 3, and a fan 5 located at the center of the interior of the central tube 3. Multiple heat dissipation holes 201 are provided at the bottom of the outer wall of the sleeve 2, and a connecting hole 301 is provided at the bottom of the central tube 3, with the bottom of the central tube 3 fixedly connected to the bottom of the interior of the reaction chamber 1. Ventilation holes are provided at the bottom of the side wall of the reaction chamber 1. The sliding assembly 4 includes an inner ring 401, an outer ring 402 on the outer wall of the inner ring 401, mounting plates 403 fixedly connected to both sides of the inner ring 401, and an electric push rod 404 at the bottom of the mounting plate 403. A drive rod 501 is installed at the center of the fan 5, an electromagnetic heating plate 503 is provided at the top of the fan 5, and a flow equalization plate 302 is provided near the top of the interior of the central tube 3.

[0028] Air can be heated by the electromagnetic heating plate 503, and then evenly blown to the bottom of the graphite support plate 103 through the top flow equalization plate 302, thus achieving continuous heating. This heat transfer from the air to the graphite support plate 103 facilitates the reaction at the top. A thermometer is used to detect the temperature. The electromagnetic heating plate 503 heats the air, and then the hot air is transferred to the graphite support plate 103, thus avoiding direct contact between the electromagnetic heating plate 503 and the graphite support plate 103. The mounting plate 403 is pushed upwards, thereby... This causes both the inner ring 401 and the outer ring 402 to move upwards, thereby removing the obstruction from the heat dissipation hole 201 and allowing hot air to be discharged to the outside through the heat dissipation hole 201. At the same time, the movement of the inner ring 402 upwards obstructs the top of the connecting hole 301, making the bottom of the connecting hole 301 connected to the outside, thus blocking the connection between the central tube 3 and the sleeve 2. This allows the fan 5 to draw in cold air from the bottom of the connecting hole 301 into the central tube 3 when it rotates, and then deliver cold air to the top, which can effectively cool the graphite support plate 103 and meet different usage requirements.

[0029] like Figure 1 , Figure 2As shown, a top plate 101 is installed at the top of the interior of the reaction chamber 1. A fixing plate 102 is fixedly connected to the top of the center of the reaction chamber 1 near the top of the sleeve 2. A graphite support plate 103 is set at the center of the fixing plate 102, corresponding to the center tube 3. The diameter of the graphite support plate 103 is the same as the diameter of the center tube 3. The air at the bottom of the center tube 3 is blown to the top, so that the air can be heated by the electromagnetic heating plate 503. Then, it is blown evenly to the bottom of the graphite support plate 103 through the top flow equalization plate 302, thereby achieving continuous heating. The graphite support plate 103 can be heated by heat transfer through the air, thereby transferring heat to the raw material at the top, which facilitates the reaction.

[0030] like Figure 3 , Figure 5 As shown, the inner ring 401 slides against the outer wall of the central tube 3, and the outer ring 402 slides against the inner wall of the sleeve 2. The top of the sleeve 2 is fixedly connected to the bottom of the fixing plate 102, and the bottom of the sleeve 2 is not against the bottom of the reaction chamber 1. The bottom end of the sleeve 2 slides against the outer wall of the outer ring 402. The top outer wall sides of the inner ring 401 are fixedly connected to the bottom sides of the outer ring 402 through the mounting plate 403. The bottom of the mounting plate 403 is fixedly connected to the top protruding end of the electric push rod 404. The outer wall of the electric push rod 404 penetrates the bottom end of the central tube 3 and is fixedly connected to the central tube 3. The height of the heat dissipation hole 201 is less than that of the inner ring. The height of the connecting hole 301 is greater than the height of the outer ring 402. The electric push rod 404 retracts, causing the mounting plate 403 to move to the bottom. This causes both the inner ring 401 and the outer ring 402 to move to the bottom, allowing the outer ring 402 to block the heat dissipation hole 201. The bottom of the central tube 3 is connected to the inside of the sleeve 2 through the top of the connecting hole 301. The hot air at the top can flow to the bottom through the space between the sleeve 2 and the outer wall of the central tube 3, and then be drawn back into the central tube 3 through the connecting hole 301 at the bottom. This cyclical heating of the air effectively prevents additional heat loss.

[0031] like Figure 1 , Figure 2 As shown, the bottom of the drive rod 501 penetrates the bottom of the reaction chamber 1 and a drive motor 502 is installed. The position of the drive motor 502 is higher than the top of the connecting hole 301, and the top of the central tube 3 is lower than the top of the sleeve 2. When the drive motor 502 is started, the drive motor 502 drives the fan 5 to rotate through the drive rod 501, which in turn blows the air at the bottom of the central tube 3 to the top, so that the air can be heated by the electromagnetic heating plate 503, and then blown evenly to the bottom of the graphite support plate 103 through the top flow equalization plate 302, thereby achieving continuous heating.

[0032] In use, the corresponding raw materials can be easily placed on the surface of the graphite support plate 103, and then the electromagnetic heating plate 503 can be activated. This allows the drive motor 502 to be easily started, causing the drive motor 502 to drive the fan 5 to rotate via the drive rod 501. This causes the air at the bottom of the central tube 3 to be blown upwards, allowing the air to be heated by the electromagnetic heating plate 503. The air is then evenly blown towards the bottom of the graphite support plate 103 via the top flow equalization plate 302, thus achieving continuous heating. This heat transfer from the air to the graphite support plate 103 ensures continuous heating. Heating transfers heat to the raw materials at the top, facilitating the reaction. Temperature is monitored by a thermometer. Air is heated by an electromagnetic heating plate 503 and then transferred to the graphite support plate 103. This avoids direct contact between the electromagnetic heating plate 503 and the graphite support plate 103, maintaining a sufficient safe distance. Furthermore, since the heating is done on air, even if the electromagnetic heating plate 503 is accidentally interrupted, the temperature of the graphite support plate 103 can be continuously maintained by the hot air, preventing a sudden drop in temperature and effectively maintaining temperature stability.

[0033] During use, the electric push rod 404 can retract, causing the mounting plate 403 to move to the bottom. This, in turn, causes both the inner ring 401 and the outer ring 402 to move to the bottom, allowing the outer ring 402 to block the heat dissipation hole 201. The bottom of the central tube 3 is connected to the inside of the sleeve 2 through the top of the connecting hole 301. Hot air from the top can flow to the bottom through the space between the sleeve 2 and the outer wall of the central tube 3, and then be drawn back into the central tube 3 through the connecting hole 301 at the bottom. This cyclical heating effectively prevents additional heat loss. Furthermore, the electromagnetic heating plate 503 can be easily started when the temperature needs to be lowered and stopped. The electric push rod 404 extends, which pushes the mounting plate 403 to the top, causing both the inner ring 401 and the outer ring 402 to move upwards. This removes the obstruction from the heat dissipation hole 201, allowing hot air to escape to the outside through the heat dissipation hole 201. At the same time, the inner ring 402 moves upwards and blocks the top of the connecting hole 301, making the bottom of the connecting hole 301 connected to the outside. This blocks the connection between the central tube 3 and the sleeve 2, allowing the fan 5 to draw in cold air from the bottom of the connecting hole 301 into the central tube 3 and then deliver cold air to the top, thus effectively cooling the graphite support plate 103 and meeting different usage requirements.

[0034] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A temperature-adjustable MOCVD pipeline, comprising a reaction chamber (1), characterized in that: The reaction chamber (1) is equipped with a sleeve (2) at the bottom of the interior, a central tube (3) is installed inside the sleeve (2), a sliding component (4) is installed at the bottom of the outer wall of the central tube (3), and a fan (5) is installed at the center of the interior of the central tube (3). The outer wall bottom of the sleeve (2) is provided with multiple heat dissipation holes (201), the bottom of the central tube (3) is provided with a connecting hole (301), and the bottom of the central tube (3) is fixedly connected to the inner bottom of the reaction chamber (1). The bottom of the side wall of the reaction chamber (1) is provided with a ventilation hole. The sliding assembly (4) includes an inner ring (401), an outer ring (402) is provided on the outer wall of the inner ring (401), and mounting plates (403) are fixedly connected to both sides of the inner ring (401). An electric push rod (404) is provided at the bottom of the mounting plate (403). A drive rod (501) is installed at the center of the fan (5), an electromagnetic heating plate (503) is provided inside the central tube (3) near the top of the fan (5), and a flow equalization plate (302) is provided inside the central tube (3) near the top.

2. The temperature-adjustable MOCVD pipeline according to claim 1, characterized in that: The top of the reaction chamber (1) is fitted with a top plate (101). A fixing plate (102) is fixedly connected to the top of the sleeve (2) near the center of the reaction chamber (1). A graphite bearing plate (103) is provided at the center of the fixing plate (102) corresponding to the center tube (3). The diameter of the graphite bearing plate (103) is the same as that of the center tube (3).

3. The temperature-adjustable MOCVD pipeline according to claim 2, characterized in that: The inner ring (401) slides against the outer wall of the central tube (3), the outer ring (402) slides against the inner wall of the sleeve (2), the top of the sleeve (2) is fixedly connected to the bottom of the fixing plate (102), the bottom of the sleeve (2) is not against the bottom of the reaction chamber (1), and the bottom end of the sleeve (2) slides against the outer wall of the outer ring (402).

4. The temperature-adjustable MOCVD pipeline according to claim 1, characterized in that: The top outer wall of the inner ring (401) is fixedly connected to the bottom two sides of the outer ring (402) by the mounting plate (403). The bottom of the mounting plate (403) is fixedly connected to the top protruding end of the electric push rod (404). The outer wall of the electric push rod (404) passes through the bottom end of the central tube (3) and is fixedly connected to the central tube (3).

5. The temperature-adjustable MOCVD pipeline according to claim 1, characterized in that: The bottom of the drive rod (501) passes through the bottom of the reaction chamber (1) and a drive motor (502) is installed thereon. The position of the drive motor (502) is higher than the top of the connecting hole (301), and the top of the central tube (3) is lower than the top of the sleeve (2).

6. The temperature-adjustable MOCVD pipeline according to claim 1, characterized in that: The height of the heat dissipation hole (201) is less than the height of the inner ring (401), and the height of the connecting hole (301) is greater than the height of the outer ring (402).

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