An exposure machine for inductor production which is convenient to maintain

Abstract

The utility model relates to the field of exposure machine especially relates to an exposure machine for inductor production convenient to maintain, one side of exposure machine body is provided with liquid inlet pipeline, and liquid inlet pipeline is connected with refrigeration pipeline through flange, the flange is divided into sub flange and female flange, a plurality of mounting posts are fixedly arranged on the sub flange, and the female flange is correspondingly provided with mounting cavities on the mounting post, and a plurality of locking posts for clamping the mounting post are arranged on the refrigeration pipeline. In the utility model, the quick locking structure between the sub flange, the female flange and the locking post is arranged to replace the traditional multi-bolt connection mode, so that the bolts on both sides are only needed to be disassembled and the locking piece is pulled out during maintenance, the quick separation between the liquid inlet pipeline and the refrigeration pipeline can be realized, the operation difficulty is reduced, the maintenance time is reduced, the efficiency is improved, and the downtime loss is reduced.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, and in particular to an exposure machine for sensor production that is easy to maintain. Background Technology

[0002] In the field of high-precision equipment manufacturing, lithography exposure machines are core equipment for producing various optical, imaging, and MEMS sensors. Their performance directly determines the sensor's linewidth, accuracy, and final yield. To ensure thermal stability and nanometer-level resolution during the exposure process, a highly efficient and stable cooling system must be provided to control internal temperature fluctuations within a strict range.

[0003] The cooling system connects to the factory's cooling water system via the equipment's inlet, with a constant cooling medium provided by the plant's maintenance system. Given that the cleanliness of the cooling water directly affects the safe operation of the exposure machine, a precision filter is typically installed at the inlet of the water inlet pipe to intercept mechanical impurities such as rust particles, mineral deposits, and fragments of sealing material from the plant's delivery pipeline.

[0004] Currently, the connection between the exposure machine and the plant's cooling water pipes is generally achieved using flange bolts for reasons of sealing reliability, pressure resistance, and industrial standards. While this connection method is common and robust, it requires handling a large number of bolts during disassembly and maintenance, making it rather cumbersome. Therefore, there is an urgent need for an exposure machine for sensor production that is easier to maintain. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing an easy-to-maintain exposure machine for sensor production.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] An easy-to-maintain exposure machine for sensor production includes an exposure machine body. A liquid inlet pipe is provided on one side of the exposure machine body, and the liquid inlet pipe is connected to a cooling pipe through a flange. The flange is divided into a sub-flange and a mother flange. Multiple mounting posts are fixedly provided on the sub-flange. The mother flange has mounting cavities adapted to each mounting post. Multiple locking posts for locking the mounting posts are provided on the cooling pipe.

[0008] In addition, a preferred structure is that multiple locking elements are installed on the refrigeration pipe, and multiple locking pins are fixedly installed on the locking elements.

[0009] Furthermore, in a preferred configuration, each of the mounting posts has a locking cavity, and the locking cavity is adapted to the locking post.

[0010] In addition, a preferred structure is that hooks are fixedly provided on both sides of the locking member, and each hook has a vertical through hole.

[0011] Furthermore, in a preferred configuration, two locking components are provided. When both locking components are installed on the refrigeration pipe, the locking pins are both locked in the locking cavity, and the through holes are all fitted and aligned.

[0012] In addition, a preferred structure is that bolts are inserted between the through holes, and nuts are fitted on the bolts.

[0013] The beneficial effects of this utility model are as follows: by setting up a quick-locking structure between the sub-flange, the female flange and the locking column, the traditional multi-bolt connection method is replaced. In this way, during maintenance, only the bolts on both sides need to be removed and the locking parts pulled out to achieve quick separation between the liquid inlet pipe and the refrigeration pipe. This structure reduces the difficulty of operation, reduces maintenance time, improves efficiency and reduces downtime losses while ensuring the reliability of the connection and sealing. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of an exposure machine for sensor production that is easy to maintain, as proposed in this utility model.

[0015] Figure 2 This is a schematic diagram of the structure between the liquid inlet pipe, the refrigeration pipe, the locking component, and the bolts proposed in this utility model.

[0016] Figure 3 for Figure 2 A schematic diagram of the exploded structure in the image;

[0017] Figure 4 This is a schematic diagram of the liquid inlet pipe proposed in this utility model;

[0018] Figure 5 This is a schematic diagram of the locking component proposed in this utility model.

[0019] In the diagram: 1 Exposure machine body, 2 Liquid inlet pipe, 21 Sub-flange, 22 Mounting column, 23 Locking cavity, 3 Cooling pipe, 31 Female flange, 32 Mounting cavity, 4 Locking component, 41 Locking column, 42 Hook, 43 Through hole, 5 Bolt, 51 Nut. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0021] Reference Figure 1-5An easy-to-maintain exposure machine for sensor production includes an exposure machine body 1. A liquid inlet pipe 2 is provided on one side of the exposure machine body 1, and the liquid inlet pipe 2 is connected to a cooling pipe 3 via a flange. The flange is divided into a sub-flange 21 and a mother flange 31. Multiple mounting posts 22 are fixedly installed on the sub-flange 21, and mounting cavities 32 are adapted to fit the mounting posts 22 on the mother flange 31. Multiple locking posts 41 for securing the mounting posts 22 are provided on the cooling pipe 3.

[0022] The refrigeration pipe 3 is equipped with multiple locking components 4, and each locking component 4 has multiple locking posts 41 fixedly mounted on it. Each mounting post 22 has a locking cavity 23, and each locking cavity 23 is adapted to the locking post 41. Through the adaptation between the locking cavity 23 and the locking post 41, the mounting post 22 can be fixed.

[0023] The locking component 4 has hooks 42 fixedly installed on both sides, and each hook 42 has a vertical through hole 43. Bolts 5 are inserted between the through holes 43, and nuts 51 are fitted on the bolts 5.

[0024] Among them, there are two locking parts 4. When both locking parts 4 are installed on the refrigeration pipe 3, the locking pins 41 are both locked in the locking cavity 23, and the through holes 43 are all adapted and aligned.

[0025] In this embodiment, the sensor can be processed through the exposure machine body 1. The liquid inlet pipe 2 is connected to the cooling pipe 3 to supply coolant. The cooling pipe 3 is connected to an external cooling mechanism. The above are all prior art and do not address the maintenance-friendly technical problem to be solved in this technical solution; therefore, they will not be elaborated upon further in this application.

[0026] Furthermore, when the user needs to disassemble the refrigeration pipe 3 for maintenance, simply rotate the nuts 51 on both sides to disengage the connection between the nuts 51 and the bolts 5, and then remove the nuts 51 and bolts 5.

[0027] Next, simply pull out the locking parts 4 on both sides to move the locking pin 41 synchronously, thereby releasing the mutual jamming between the locking pin 41 and the locking cavity 23, thus releasing the connection between the sub-flange 21 and the female flange 31, thereby enabling the disassembly and maintenance of the refrigeration pipe 3.

[0028] Furthermore, after maintenance of the refrigeration pipe 3 is completed, simply align the sub-flange 21 and the female flange 31 so that the mounting post 22 can be inserted into the mounting cavity 32. Then, simply insert the locking posts 41 on the locking member 4 into the locking cavity 23 to install the locking member 4, ensuring that the through holes 43 on both sides of the locking member 4 are aligned. Finally, simply use bolts 5 and screws 51 to lock the locking members 4 on both sides, thus achieving the fixed installation of the refrigeration pipe 3.

[0029] In this utility model, the quick-locking structure between the sub-flange 21, the female flange 31 and the locking column 41 replaces the traditional multi-bolt connection method. In this way, during maintenance, only the bolts 5 on both sides need to be removed and the locking parts 4 can be pulled out to achieve quick separation between the liquid inlet pipe 2 and the refrigeration pipe 3. This structure ensures the reliability of the connection and seal while reducing the difficulty of operation, reducing maintenance time, improving efficiency and reducing downtime losses.

[0030] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. An easy-to-maintain exposure machine for sensor production, comprising an exposure machine body (1), characterized in that, The exposure machine body (1) is provided with a liquid inlet pipe (2) on one side, and the liquid inlet pipe (2) is connected to the cooling pipe (3) through a flange; The flange is divided into a sub-flange (21) and a mother flange (31). Multiple mounting posts (22) are fixedly installed on the sub-flange (21). The mother flange (31) is provided with mounting cavities (32) corresponding to the mounting posts (22). Multiple locking posts (41) for locking the mounting posts (22) are provided on the refrigeration pipe (3).

2. The easily maintainable exposure machine for sensor production according to claim 1, characterized in that, The refrigeration pipe (3) is equipped with multiple locking parts (4), and multiple locking pins (41) are fixedly installed on the locking parts (4).

3. The easily maintainable exposure machine for sensor production according to claim 2, characterized in that, Each of the mounting posts (22) has a locking cavity (23), and the locking cavity (23) is adapted to the locking post (41).

4. The easily maintainable exposure machine for sensor production according to claim 3, characterized in that, The locking member (4) is fixedly provided with hooks (42) on both sides, and each hook (42) has a vertical through hole (43).

5. The easily maintainable exposure machine for sensor production according to claim 4, characterized in that, There are two locking components (4). When both locking components (4) are installed on the refrigeration pipe (3), the locking pins (41) are locked in the locking cavity (23), and the through holes (43) are aligned and adapted to each other.

6. The easily maintainable exposure machine for sensor production according to claim 5, characterized in that, Bolts (5) are inserted between the through holes (43), and nuts (51) are fitted on the bolts (5).

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