Silicon ring carrying tool
By designing an adjustable-spacing silicon ring handling fixture, the problem of poor versatility of silicon ring handling fixtures was solved, enabling adaptive handling of silicon rings of different sizes, reducing damage and improving production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU RUISHENG SEMICON TECH CO LTD
- Filing Date
- 2025-05-13
- Publication Date
- 2026-05-29
AI Technical Summary
Existing silicon ring handling fixtures have poor versatility and are difficult to adapt to silicon rings of different sizes, resulting in easy damage to silicon rings and low production efficiency during the change of handling fixtures.
A silicon ring handling fixture was designed, comprising a frame, a base plate, a positioning plate, and a sliding rod. The sliding rod is slidably connected to the frame, and the spacing between the positioning plates is adjusted by adjusting blocks and threaded connections to accommodate silicon rings of different sizes.
This technology facilitates the handling of silicon rings of different sizes, reduces scratches and damage during handling, and improves manufacturing efficiency.
Smart Images
Figure CN224306259U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to handling fixtures, and more particularly to a silicon ring handling fixture. Background Technology
[0002] Silicon rings are a core consumable component used in etching equipment. During wafer manufacturing, etching equipment is required for etching, so parameters such as the roughness and roundness of silicon rings directly affect the electrical performance of the wafer.
[0003] During the manufacturing process of silicon rings, they need to be handled frequently. However, the related handling fixtures are not very versatile and are difficult to adapt to silicon rings of different sizes. This results in the need to change different handling fixtures at different stages. This not only easily leads to scratches and damage to the silicon rings due to contact friction during the change of handling fixtures, but also easily leads to low manufacturing efficiency of silicon rings. Utility Model Content
[0004] Purpose of the utility model: The purpose of this utility model is to provide a silicon ring handling fixture that is easy to adapt to silicon rings of different sizes.
[0005] Technical solution:
[0006] A silicon ring handling fixture, comprising:
[0007] frame;
[0008] The base plate connected to the frame includes a plurality of second placement slots;
[0009] Two positioning plates are located on both sides of the frame. Each positioning plate includes a first plate body with a plurality of first placement slots and two sliding rods connected to both ends of the first plate body. The sliding rods are slidably connected to the frame.
[0010] Both the first placement groove and the second placement groove are used to mate with the silicon ring.
[0011] Optionally, the positioning plate may further include two adjusting blocks connected to the two sliding rods respectively, and the adjusting blocks abut against the frame.
[0012] Optionally, the cross-sectional shape of the sliding rod is non-rotational, and the adjusting block and the sliding rod are threadedly connected.
[0013] Optionally, the base plate further includes a second plate body connected to the frame, and a plurality of the second placement slots are disposed on the second plate body.
[0014] Optionally, it also includes four adjustment slots provided in the frame, and the sliding rod and the adjustment slots are slidably connected.
[0015] Optionally, the frame includes a first end plate, a first side plate, a second end plate, and a second side plate that are connected in sequence, the bottom plate is connected between the first end plate and the second end plate, and the sliding rod is slidably connected to both the first end plate and the second end plate.
[0016] Optionally, both the first end plate and the second end plate are provided with a handle groove one, and both the first side plate and the second side plate are provided with a handle groove two.
[0017] Optional, also includes:
[0018] The first protective pad is located within the first placement slot;
[0019] The second protective pad is located within the second placement slot;
[0020] Both the first protective pad and the second protective pad are used to cooperate with the silicon ring.
[0021] Beneficial effects: Because the sliding rod and the frame are slidably connected, it is easy to adjust the distance between the two positioning plates according to the different sizes of silicon rings, thus making it easy to adapt to silicon rings of different sizes. Attached Figure Description
[0022] Figure 1 This is one of the structural diagrams of a silicon ring handling fixture according to Embodiment 1 of this utility model;
[0023] Figure 2 This is a second structural diagram of a silicon ring handling fixture according to Embodiment 1 of this utility model;
[0024] In the diagram: 1. Frame; 11. First end plate; 12. First side plate; 13. Second end plate; 14. Second side plate; 15. Adjustment groove; 16. Handle groove one; 17. Handle groove two; 2. Base plate; 21. Second plate body; 211. Second placement groove; 3. Positioning plate; 31. First plate body; 311. First placement groove; 32. Sliding rod; 33. Adjustment block; 41. First protective pad; 42. Second protective pad; 5. Silicon ring. Detailed Implementation
[0025] To make the technical solution of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments.
[0026] The present application will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the relevant utility model and not intended to limit the utility model. Furthermore, it should be noted that, for ease of description, only the parts related to the utility model are shown in the accompanying drawings. The terms "first," "second," etc., used in this utility model are provided for the convenience of describing the technical solution of this utility model and have no specific limiting effect; they are all general terms and do not constitute a limitation on the technical solution of this utility model. It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of this application can be combined with each other. In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Multiple technical solutions in the same embodiment, as well as multiple technical solutions in different embodiments, can be arranged and combined to form new technical solutions that do not contradict or conflict, all of which are within the scope of protection claimed by this utility model.
[0027] Example 1
[0028] like Figures 1-2 This embodiment provides a silicon ring handling fixture, including: a frame 1; a base plate 2 connected to the frame 1, the base plate 2 including a plurality of second placement grooves 211; two positioning plates 3 located on both sides of the frame 1, the positioning plates 3 including a first plate body 31 having a plurality of first placement grooves 311, and two sliding rods 32 respectively connected to both ends of the first plate body 31, the sliding rods 32 being slidably connected to the frame 1; wherein, the first placement grooves 311 and the second placement grooves 211 are both used to cooperate with the silicon ring 5.
[0029] Specifically, frame 1 is used to support base plate 2, two positioning plates 3, etc.; base plate 2 is used to increase the structural strength of frame 1 and to support several second placement slots 211, which are used to place silicon rings 5. The number of second placement slots 211 is not limited and can be five, six, etc., to facilitate the one-time handling of multiple silicon rings 5. Preferably, there are two base plates 2 to ensure the placement stability of silicon rings 5. In order to ensure the force symmetry of silicon rings 5, the two positioning plates 3 are preferably arranged axially symmetrically about frame 1. The first plate 31 is used to support several first placement slots 311, which are used to place silicon rings 5. The number of first placement slots 311 is not limited, but preferably the number of second placement slots 211 is equal. Since the sliding rod 32 is slidably connected to frame 1, it is convenient to adjust the distance between the two positioning plates 3 according to silicon rings 5 of different sizes, thereby facilitating the adaptation to silicon rings 5 of different sizes.
[0030] Furthermore, such as Figures 1-2 The positioning plate 3 also includes two adjusting blocks 33 that are connected to the two sliding rods 32 respectively, and the adjusting blocks 33 abut against the frame 1.
[0031] Specifically, the adjusting block 33 serves both as a limit to prevent the positioning plate 3 and the frame 1 from separating from each other, and as a means for the operator to hold, thereby facilitating the sliding rod 32 to slide along the frame 1.
[0032] Furthermore, such as Figures 1-2 The sliding rod 32 has a non-rotational cross-sectional shape, and the adjusting block 33 and the sliding rod 32 are threaded together.
[0033] Specifically, the non-rotational design helps prevent the sliding rod 32 from rotating around the frame 1, while the threaded connection allows the adjusting block 33 to rotate around the sliding rod 32 after the distance between the two positioning plates 3 is adjusted, until the adjusting block 33 and the frame 1 are in close contact, thus completing the locking.
[0034] Furthermore, such as Figures 1-2 The base plate 2 also includes a second plate 21 connected to the frame 1, and a plurality of second placement slots 211 are provided on the second plate 21.
[0035] Specifically, the second plate 21 is used to support a number of second placement slots 211.
[0036] Furthermore, such as Figures 1-2 It also includes four adjustment slots 15 provided on the frame 1, and the sliding rod 32 is slidably connected to the adjustment slots 15.
[0037] Specifically, the adjusting groove 15 is used to accommodate the sliding rod 32, and the shape of the adjusting groove 15 is preferably oblong.
[0038] Furthermore, such as Figures 1-2The frame 1 includes a first end plate 11, a first side plate 12, a second end plate 13, and a second side plate 14 that are connected in sequence. The bottom plate 2 is connected between the first end plate 11 and the second end plate 13. The sliding rod 32 is slidably connected to both the first end plate 11 and the second end plate 13.
[0039] Specifically, the first end plate 11, the first side plate 12, the second end plate 13, and the second side plate 14 are used to enclose the frame 1, which makes the frame 1 have good integrity.
[0040] Furthermore, such as Figures 1-2 The first end plate 11 and the second end plate 13 are both provided with a handle groove 16, and the first side plate 12 and the second side plate 14 are both provided with a handle groove 17.
[0041] Specifically, both handle groove 16 and handle groove 2 are designed to facilitate the lifting of the silicon ring handling fixture of this solution by the operator, thereby facilitating the handling of the silicon ring 5.
[0042] Furthermore, such as Figures 1-2 It also includes: a first protective pad 41 located in the first placement groove 311; and a second protective pad 42 located in the second placement groove 211; wherein the first protective pad 41 and the second protective pad 42 are both used to cooperate with the silicon ring 5.
[0043] Specifically, the first protective pad 41 and the second protective pad 42 are both used to protect the silicon ring 5 and prevent the silicon ring 5 from being damaged. The materials of the first protective pad 41 and the second protective pad 42 can be silicone rubber, fluororubber, etc.
[0044] The above embodiments only illustrate several implementation methods of this utility model, and their descriptions are relatively specific and detailed, but they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.
Claims
1. A silicon ring handling fixture, characterized in that, include: Framework (1); A base plate (2) connected to the frame (1), the base plate (2) including a plurality of second placement slots (211); Two positioning plates (3) are located on both sides of the frame (1). The positioning plate (3) includes a first plate (31) with a plurality of first placement slots (311) and two sliding rods (32) connected to the two ends of the first plate (31). The sliding rods (32) are slidably connected to the frame (1). The first placement groove (311) and the second placement groove (211) are both used to cooperate with the silicon ring (5).
2. The silicon ring handling fixture according to claim 1, characterized in that, The positioning plate (3) also includes two adjusting blocks (33) corresponding to the two sliding rods (32), and the adjusting blocks (33) abut against the frame (1).
3. The silicon ring handling fixture according to claim 2, characterized in that, The sliding rod (32) has a non-rotational cross-sectional shape, and the adjusting block (33) and the sliding rod (32) are threadedly connected.
4. A silicon ring handling fixture according to any one of claims 1-3, characterized in that, The base plate (2) also includes a second plate (21) connected to the frame (1), and a plurality of second placement slots (211) are provided on the second plate (21).
5. A silicon ring handling fixture according to any one of claims 1-3, characterized in that, It also includes four adjustment slots (15) provided on the frame (1), and the sliding rod (32) and the adjustment slots (15) are slidably connected.
6. A silicon ring handling fixture according to any one of claims 1-3, characterized in that, The frame (1) includes a first end plate (11), a first side plate (12), a second end plate (13) and a second side plate (14) that are connected in sequence. The bottom plate (2) is connected between the first end plate (11) and the second end plate (13). The sliding rod (32) is slidably connected to both the first end plate (11) and the second end plate (13).
7. A silicon ring handling fixture according to claim 6, characterized in that, The first end plate (11) and the second end plate (13) are each provided with a handle groove 1 (16), and the first side plate (12) and the second side plate (14) are each provided with a handle groove 2 (17).
8. A silicon ring handling fixture according to any one of claims 1-3, characterized in that, Also includes: The first protective pad (41) is located in the first placement slot (311); The second protective pad (42) is located in the second placement slot (211); The first protective pad (41) and the second protective pad (42) are both used to cooperate with the silicon ring (5).