A clamping mechanism compatible with wafers or cassettes of different sizes

Abstract

The utility model discloses a kind of compatible multi-size wafer or cassette's clamping mechanism, two mounting arms are slidably connected on base, and can simultaneously carry out bidirectional or back movement;A clamping roller is installed at the same position of each mounting arm, the circumference wall of clamping roller is divided into two with clamping roller axis as center, one half circumference wall surface is arranged with several card slots for inserting wafer, the other half circumference wall surface is provided with support table for supporting cassette.The clamping roller is designed ingeniously, the card slot and support table are used for clamping wafer and cassette respectively, the limiting roller cooperates with the clamping roller, and double limiting ensures wafer stability.Left and right spin electric screw mechanism is accurately driven, ensures that mounting arm moves stably, flexibly adjusts the spacing between clamping roller, adapts different size wafer and cassette, improves versatility.

Description

Technical Field

[0001] This utility model relates to a clamping mechanism compatible with wafers or cassettes of multiple sizes. Background Technology

[0002] In tank-type equipment for wafer cleaning or etching, wafers need to be precisely transported from the loading position to each tank for cleaning or etching processes to achieve efficient and high-quality production. Different sizes of wafers require corresponding equipment; therefore, the wafer clamping and conveying mechanism must accommodate different wafer sizes. Existing clamping mechanisms can only clamp wafers, and sometimes it is necessary to transport them together with the wafer cassette. Therefore, this application designs a clamping mechanism compatible with multiple wafer or cassette sizes. Summary of the Invention

[0003] This invention provides a clamping mechanism compatible with wafers or cassettes of multiple sizes to solve the problems existing in the prior art.

[0004] The technical solutions adopted in this utility model are as follows:

[0005] A clamping mechanism compatible with multiple sizes of wafers or cassettes, comprising:

[0006] Base;

[0007] Mounting arms: Two mounting arms are slidably connected to the base and can move in both directions or in opposite directions simultaneously.

[0008] A clamping roller is installed at the same position on each mounting arm. The circumferential wall of the clamping roller is divided into two parts with the axis of the clamping roller as the center. Several slots for inserting wafers are arranged on one half of the circumferential wall, and a support platform for supporting the cassette is set on the other half of the circumferential wall.

[0009] Furthermore, the clamping rollers are fixed to the mounting arm by bolts. By rotating the two clamping rollers and arranging the two slots facing each other, the wafer can be clamped and held; or by rotating the two clamping rollers and arranging the two support platforms facing each other, the cartridge can be supported and clamped.

[0010] Furthermore, a limiting roller is provided on the mounting arm, above the clamping roller, and a plurality of limiting grooves are provided on the circumferential wall of the limiting roller. Each limiting groove corresponds to each slot position, and the two grooves have the same width.

[0011] Furthermore, the base is provided with a slide rail and a slider, the two sliders are slidably connected to the slide rail, and the two mounting arms are respectively fixed to the two sliders.

[0012] Furthermore, the bidirectional or backward motion of the two sliders is driven by a left-right rotating electric lead screw mechanism.

[0013] Furthermore, the mounting arm is a detachable structure. It includes a crossbar, a mounting base, and mounting plates. The crossbar is slidably connected to the base, the mounting base is fixed to the crossbar, two mounting plates are fixed to the mounting base at intervals, and the clamping roller is fixed between the two mounting plates.

[0014] This utility model has the following beneficial effects:

[0015] The clamping rollers are ingeniously designed, with slots and support platforms for clamping the wafer and cassette respectively. Limiting rollers work in conjunction with the clamping rollers, providing double-limiting to ensure wafer stability. A left-right rotating electric screw mechanism precisely drives the arm, ensuring smooth movement and allowing for flexible adjustment of the clamping roller spacing to accommodate wafers and cassettes of different sizes, thus improving versatility. Attached Figure Description

[0016] Figure 1 This is a structural diagram of the present utility model.

[0017] Figure 2 This is a schematic diagram of a wafer being clamped.

[0018] Figure 3 This is a diagram showing the position of the clamping rollers when holding a wafer.

[0019] Figure 4 This is a schematic diagram of the cartridge holder.

[0020] Figure 5 This is a diagram showing the position of the clamping rollers when clamping the cartridge.

[0021] Figure 6 A schematic diagram showing the slider installed on the base.

[0022] Figure 7 This is a schematic diagram of a left-right rotating electric lead screw mechanism mounted on a base. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings.

[0024] like Figure 1 As shown, this utility model discloses a clamping mechanism compatible with multiple sizes of wafers or cassettes, including a base 1, mounting arms 2, and clamping rollers 3. Two mounting arms 2 are slidably connected to the base 1 and can move in both directions or in opposite directions simultaneously. A clamping roller 3 is installed at the same position on each mounting arm 2. The circumferential wall of the clamping roller 3 is divided into two parts with the axis of the clamping roller 3 as the center. Several slots 31 for inserting wafers are arranged on one half of the circumferential wall, and a support platform 32 for supporting cassettes is provided on the other half of the circumferential wall.

[0025] like Figures 2 to 5The clamping rollers 3 are fixed to the mounting arm 2 by bolts. By loosening the bolts and rotating the two clamping rollers 3, the slots 31 can be arranged to face each other to achieve clamping of the wafer; or the support platforms 32 can be arranged to face each other to achieve support and clamping of the cartridge. Figure 2 This is a schematic diagram of a wafer being clamped. Figure 4 This is a schematic diagram of the cartridge holder.

[0026] The rotatable design of the clamping roller 3 allows the mechanism to flexibly switch between wafer clamping and cassette support, making it widely applicable, easy to operate, and providing stable clamping.

[0027] A limiting roller 4 is also provided on the mounting arm 2, above the clamping roller 3. Several limiting grooves 41 are provided on the circumferential wall of the limiting roller 4, each corresponding to a corresponding slot 31, and both grooves have the same width. The design of the limiting roller 4 provides an additional limiting function for the wafer, effectively preventing the wafer from shaking or shifting during handling, ensuring precise positioning of the wafer, and improving the accuracy and safety of handling.

[0028] The base 1 is equipped with a slide rail and two sliders 12. The two sliders 12 are slidably connected to the slide rail, and the two mounting arms 2 are fixed to the two sliders 12 respectively. The structural design of the slide rail and sliders 12 enables the smooth sliding of the mounting arms 2, ensuring the accuracy and stability of the clamping mechanism when adjusting the spacing, and providing a reliable foundation for clamping wafers and cassettes of different sizes.

[0029] The bidirectional or backward movement of the two sliders 12 is driven by the left and right rotating electric screw mechanism 4. The left and right rotating electric screw mechanism 4 can precisely control the movement of the sliders 12, thereby achieving precise adjustment of the spacing between the mounting arms 2, improving the automation level and ease of operation of the clamping mechanism, and also ensuring the uniform distribution of clamping force.

[0030] The drive structure of the left and right rotating electric lead screw mechanism 4 is as follows: a helical gear is fixed on the lead screw, and a helical gear is also fixed on the motor shaft of the motor. The two helical gears mesh with each other to achieve force transmission.

[0031] like Figure 6 and Figure 7 The mounting arm 2 is a detachable structure, including a crossbar 21, a mounting base 22, and mounting plates 23. The crossbar 21 is slidably connected to the base 1, the mounting base 22 is fixed to the crossbar 21, and two mounting plates 23 are fixed to the mounting base 22 at intervals. The clamping roller 3 is fixed between the two mounting plates 23. The detachable mounting arm 2 structure facilitates maintenance or replacement when needed, especially the replacement of the clamping roller 3, thus improving the maintainability of the equipment.

[0032] First, install the clamping mechanism on the multi-axis robotic arm, start the motor to drive the left and right rotating electric screw mechanism 4, drive the slider 12 to move along the slide rail, and drive the mounting arm 2 to move outward to form sufficient space.

[0033] When wafer clamping is required, the wafer carrier is placed directly below the clamping mechanism. A multi-axis robotic arm is used to adjust the wafer to be transported, aligning it with the slot 31 on the clamping roller 3. Then, the left and right rotating electric screw mechanism 4 is controlled to rotate in opposite directions, driving the mounting arm 2 to move towards the center. The clamping rollers 3 rotate towards each other, and the slots 31 move closer together, firmly clamping the wafer. The limiting groove 41 on the limiting roller 4 corresponds to the slot 31 in position and has the same width. The limiting groove 41 above the wafer restricts wafer movement, ensuring stability.

[0034] When clamping the cartridge, loosen the bolts, rotate the two clamping rollers 180°, arrange the support platform 32 facing each other, and then tighten the bolts fixing the clamping rollers. Clamp the cartridge in the same manner.

[0035] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements can be made without departing from the principle of the present utility model, and these improvements should also be considered within the protection scope of the present utility model.

Claims

1. A clamping mechanism compatible with multiple sizes of wafers or cassettes, characterized in that: include: Base; Mounting arms: Two mounting arms are slidably connected to the base and can move in both directions or in opposite directions simultaneously. A clamping roller is installed at the same position on each mounting arm. The circumferential wall of the clamping roller is divided into two parts with the axis of the clamping roller as the center. Several slots for inserting wafers are arranged on one half of the circumferential wall, and a support platform for supporting the cassette is set on the other half of the circumferential wall.

2. The clamping mechanism for multi-size wafers or cassettes as described in claim 1, characterized in that: The clamping rollers are fixed to the mounting arm by bolts. By rotating the two clamping rollers and arranging the two slots facing each other, the wafer can be clamped and held; or by rotating the two clamping rollers and arranging the two support platforms facing each other, the cassette can be supported and clamped.

3. The clamping mechanism for multi-size wafers or cassettes as described in claim 1, characterized in that: On the mounting arm, and above the clamping roller, there is also a limiting roller. On the circumferential wall of the limiting roller, there are several limiting grooves. Each limiting groove corresponds to each slot, and the two grooves have the same width.

4. The clamping mechanism for multi-size wafers or cassettes as described in claim 1, characterized in that: The base is provided with a slide rail and a slider, with two sliders slidably connected to the slide rail, and two mounting arms fixed to the two sliders respectively.

5. The clamping mechanism for multi-size wafers or cassettes as described in claim 4, characterized in that: The bidirectional or backward movement of the two sliders is driven by a left-right rotating electric lead screw mechanism.

6. The clamping mechanism for multi-size wafers or cassettes as described in claim 1, characterized in that: The mounting arm is a detachable structure, including a crossbar, a mounting base, and mounting plates. The crossbar is slidably connected to the base, the mounting base is fixed on the crossbar, two mounting plates are fixed on the mounting base at intervals, and the clamping roller is fixed between the two mounting plates.

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