A vacuum drying apparatus and flexible perovskite cell roll-to-roll manufacturing equipment

Abstract

The utility model relates to a kind of vacuum drying device and flexible perovskite battery roll-to-roll manufacturing equipment, vacuum drying device includes upper vacuum cavity, lower vacuum cavity, negative pressure support mechanism and several guide vanes, upper vacuum cavity and lower vacuum cavity are opposite and form the narrow slit passage for flexible substrate to pass through in middle, negative pressure support mechanism is located in lower vacuum cavity and its support surface is with narrow slit passage equal height, several guide vanes with angle can be adjusted in 0 °-45 ° range are equipped in upper vacuum cavity. Device is through guide vane and is optimized by air flow and makes flexible substrate stable by negative pressure support mechanism, realize the high-quality continuous preparation of perovskite layer. Equipment includes the roll-off device, slit coating device, vacuum drying device, high-temperature annealing device and winding device arranged in sequence. Equipment integrates slit coating, vacuum drying and high-temperature annealing function, especially suitable for efficient, low-cost, large-scale industrial production flexible perovskite thin-film battery.

Description

Technical Field

[0001] This utility model relates to the field of perovskite battery technology, and in particular to a vacuum drying device and a flexible perovskite battery roll-to-roll manufacturing equipment. Background Technology

[0002] Roll-to-roll (R2R) processing is an ideal way to industrialize flexible perovskite solar cells. However, existing technologies, especially VCD (vacuum drying) processes, face the following challenges in the use of flexible roll-to-roll processes: insufficient substrate stability; flexible substrates (such as PET and PI) are susceptible to thermal expansion and contraction, airflow impact, or mechanical tension during vacuum drying and high-temperature annealing, leading to wrinkles or vibrations, resulting in uneven coating and reduced cell performance; limitations of the vacuum drying process; although VCD can effectively remove solvents and improve film quality, the airflow control of existing equipment is insufficient and difficult to adapt to large-area continuous movement of flexible substrates, often resulting in uneven drying or solvent residue; difficulty in cycle time matching; significant differences in process time between coating (approximately 30 seconds), vacuum drying (approximately 30-40 seconds), and annealing (1-40 minutes); existing production lines often rely on buffer chambers or multi-stage processing, leading to increased equipment complexity and cost, and low production efficiency.

[0003] Chinese patent CN119116530A discloses a roll-to-roll printing device for flexible perovskite solar cells. This device unwinds the film using an unwinding roller, prints on one side of the film using a printing mechanism, dries it using a drying device, and finally rewinds it using a take-up roller. However, this device is used in the printing process, not for coating adhesion.

[0004] Therefore, it is necessary to improve the structure of manufacturing equipment to solve the above problems. Utility Model Content

[0005] The main objective of this invention is to provide a vacuum drying device capable of continuously producing perovskite layers with high quality.

[0006] This utility model achieves the above-mentioned objective through the following technical solution: A vacuum drying device includes an upper vacuum chamber, a lower vacuum chamber, a negative pressure support mechanism, and several guide plates. The upper vacuum chamber and the lower vacuum chamber are vertically opposite each other and form a narrow slit channel in the middle for flexible substrates to pass through. The negative pressure support mechanism is located in the lower vacuum chamber and its support surface is at the same height as the narrow slit channel. The upper vacuum chamber is provided with several guide plates whose angles can be adjusted in the range of 0°-45°. The upper vacuum chamber has an upper air extraction port at the top center. The guide plates are arranged around the upper air extraction port below the upper air extraction port. The lower vacuum chamber has a lower air extraction port on its side wall that connects to the lower part of the negative pressure support mechanism.

[0007] Specifically, the surface of the guide plate is provided with spaced-out guide structures.

[0008] Furthermore, the flow guiding structure is curved, and the depth between the flow guiding structures is 1-3 mm, with an interval of 5-10 mm.

[0009] Furthermore, the guide plate is located 5-10cm below the upper air extraction port, and the distance between it and the side wall of the upper vacuum cavity is 2-5mm.

[0010] Furthermore, the upper surface of the negative pressure support mechanism is provided with a plurality of air intake holes, the diameter of which ranges from 50 to 1000 μm.

[0011] Another major objective of this invention is to provide a roll-to-roll manufacturing equipment for flexible perovskite solar cells, which integrates slot coating, vacuum drying and high-temperature annealing functions, and is suitable for the manufacture of flexible perovskite thin-film solar cells.

[0012] This utility model achieves the above-mentioned objective through the following technical solution: a flexible perovskite battery roll-to-roll manufacturing equipment, comprising an unwinding device, a slot coating device, a vacuum drying device, a high-temperature annealing device, and a winding device arranged in sequence.

[0013] The beneficial effects of this utility model's technical solution are:

[0014] 1. The device optimizes airflow through a guide plate and stabilizes the flexible substrate through a negative pressure support mechanism, thereby achieving high-quality continuous preparation of perovskite layers.

[0015] 2. The equipment integrates slot coating, vacuum drying and high-temperature annealing functions, and is particularly suitable for efficient, low-cost, large-scale industrial production of flexible perovskite thin-film batteries. Attached Figure Description

[0016] Figure 1 This is a perspective view of the roll-to-roll manufacturing equipment for flexible perovskite solar cells in the embodiment.

[0017] Figure 2 This is a perspective view of the vacuum drying apparatus in the embodiment;

[0018] Figure 3 This is a cross-sectional view of the vacuum drying apparatus in the embodiment;

[0019] Figure 4 This is a perspective view of the deflector plate in the embodiment.

[0020] The numbers in the diagram represent:

[0021] 100-Flexible perovskite solar cell roll-to-roll manufacturing equipment

[0022] 1-Unwinding device;

[0023] 2-Slit coating device;

[0024] 3-Vacuum drying device, 31-Upper vacuum chamber, 311-Upper air extraction port, 32-Lower vacuum chamber, 321-Lower air extraction port, 33-Negative pressure support mechanism, 331-Suction hole, 34-Guide plate, 341-Guide structure;

[0025] 4-High-temperature annealing apparatus;

[0026] 5-Rewinding device;

[0027] 200 - Flexible substrate. Detailed Implementation

[0028] The present invention will be further described in detail below with reference to specific embodiments.

[0029] Example:

[0030] like Figure 1 As shown, the flexible perovskite battery roll-to-roll manufacturing equipment 100 of this utility model includes an unwinding device 1, a slot coating device 2, a vacuum drying device 3, a high-temperature annealing device 4, and a winding device 5 arranged in sequence.

[0031] The unwinding device 1 provides the flexible substrate 200 and is equipped with a tension controller to ensure smooth unwinding. The slot coating device 2 contains a coating head for coating the perovskite precursor solution onto the flexible substrate 200. The high-temperature annealing device 4 uses a chain conveyor mechanism to ensure smooth movement of the flexible substrate 200. The high-temperature annealing device 4 has a staged heating unit; the time for each annealing unit is matched to the preceding process (approximately 30 seconds / unit), improving the quality of film crystallization. The vacuum drying device 3 and the slot coating device 2 operate alternately in dual-station mode, simultaneously processing different substrate segments to achieve seamless integration. The dual-station design and cycle time matching increase the output per unit time by 20%. This equipment integrates slot coating, vacuum drying, and high-temperature annealing functions, making it particularly suitable for efficient, low-cost, large-scale industrial production of flexible perovskite thin-film batteries.

[0032] like Figure 2 and Figure 3As shown, the vacuum drying device 3 includes an upper vacuum chamber 31, a lower vacuum chamber 32, a negative pressure support mechanism 33, and several guide plates 34. The upper vacuum chamber 31 and the lower vacuum chamber 32 are vertically opposite each other and form a narrow slit channel in the middle for the flexible substrate 200 to pass through. The negative pressure support mechanism 33 is located in the lower vacuum chamber 32 and its support surface is at the same height as the narrow slit channel. The upper vacuum chamber 31 is provided with several guide plates 34 whose angle can be adjusted in the range of 0°-45°. The upper vacuum chamber 31 has an upper air extraction port 311 at the top center. The guide plates 34 are arranged around the upper air extraction port 311 below it. The lower vacuum chamber 32 has a lower air extraction port 321 on its side wall that connects to the lower part of the negative pressure support mechanism 33.

[0033] The upper vacuum chamber 31 and the lower vacuum chamber 32 form a semi-enclosed space with only a narrow slit channel leading to the outside. This narrow slit channel allows the flexible substrate 200 to pass horizontally and also allows air to enter the semi-enclosed space. The vacuum drying device 3 uses suction from above to vacuum dry the upper surface (coating surface) of the flexible substrate 200. As the ambient pressure of the flexible substrate 200 decreases, solvent evaporation is accelerated, thereby improving the quality of the perovskite film. Process parameters: Chamber pressure: 10-50 Pa; Drying time: 25-40 seconds; Temperature: Room temperature to 60°C. Suction is generated from the upper exhaust port 311, drawing air upwards from the entire semi-enclosed space. The airflow direction is controlled by the angle of the guide plate 34, preventing direct impact on the coating surface. The lower exhaust port 321 is equipped with a venting valve, controlled by a butterfly valve, to introduce a small amount of gas (flow rate 0.1-1 L / min) to prevent excessive vacuum (e.g., below 10 Pa) from causing film cracking. This device optimizes airflow through a guide plate 34 and stabilizes the flexible substrate 200 through a negative pressure support mechanism 33, enabling high-quality continuous fabrication of perovskite layers. Experience shows that films fabricated using this device exhibit approximately 30% fewer defects, the negative pressure support mechanism 33 reduces the deformation rate of the flexible substrate 200 to below 5%, and the photoelectric conversion efficiency is improved by approximately 10%.

[0034] like Figure 4 As shown, the surface of the guide plate 34 is provided with spaced guide structures 341. The guide structures 341 are curved, and the depth between the guide structures 341 is 1-3 mm, with a spacing of 5-10 mm.

[0035] The airflow guiding structure 341 is not only uneven in height, but also has front and back bends. When the airflow passes between adjacent guide plates 34, the airflow guiding structure 341 can generate turbulence in the airflow, reduce dead air angles, and thus improve airflow uniformity.

[0036] like Figure 3 As shown, the guide plate 34 is located 5-10cm below the upper air extraction port 311, and the distance between it and the side wall of the upper vacuum chamber 31 is 2-5mm.

[0037] The distance between the guide plate 34 and the upper air extraction port 311 is greater than the distance between the guide plate 34 and the upper vacuum chamber 31, so the pressure can be quickly and evenly distributed above the guide plate 34, with a relatively large flow velocity at the side wall and a smaller flow velocity in the middle of the upper vacuum chamber 31, which makes the flexible substrate 200 more stable.

[0038] like Figure 3 As shown, the upper surface of the negative pressure support mechanism 33 is provided with several air intake holes 331, and the diameter of the air intake holes 331 ranges from 50 to 1000 μm.

[0039] The negative pressure support mechanism 33 has a sponge-like structure with very fine air intake channels inside. Therefore, the air intake holes 331 can generate a dispersed and uniform suction force, thus preventing damage to the surface of the flexible substrate 200 when it is supported. The lower surface of the flexible substrate 200 is attached to the negative pressure support mechanism 33 under a micro-negative pressure ranging from -5 Pa to -20 Pa. This stabilizes the flexible substrate 200 and effectively reduces vibration and deformation. The negative pressure support mechanism 33 has a dynamic pressure adjustment device that can adjust the adsorption force in real time according to the thickness (100-2000 μm) and moving speed (5-50 mm / s) of the flexible substrate 200.

[0040] The workflow of the flexible perovskite solar cell roll-to-roll manufacturing equipment 100 is as follows:

[0041] 1. Unwinding: The flexible substrate 200 (PET, 500μm thick) is unwound from the unwinding device 1 with tension controlled at 5-10N.

[0042] 2. Coating: The coating head in the slot coating device 2 moves at a speed of 20 mm / s, the gap between the coating head and the flexible substrate 200 is 75 μm, the dispensing speed is 40 μL / s, and the coating time for a single application is about 30 seconds.

[0043] 3. Vacuum drying: After coating, one component on the flexible substrate 200 enters the vacuum drying device 3. The pressure is reduced to 15Pa within 10 seconds by evacuating the top. The bottom negative pressure support mechanism 33 adsorbs the flexible substrate 200 (negative pressure -10Pa). The angle of the guide plate 34 is set to 30°. The drying time is 25 seconds. At the same time, the next component on the flexible substrate 200 begins to be coated.

[0044] 4. Annealing: Flexible substrate 200 enters high-temperature annealing device 4, each unit is 600cm, 20 units are set, the temperature is graded as 100℃, 150℃, 180℃ and 200℃, and the total annealing time is 10 minutes.

[0045] 5. Winding: After annealing, the flexible substrate 200 is wound up at point 5 of the winding device to produce a flexible perovskite module.

[0046] The above descriptions are merely some embodiments of this utility model. For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and all such modifications and improvements fall within the protection scope of this utility model.

Claims

1. A vacuum drying apparatus, characterized by: The device comprises an upper vacuum chamber, a lower vacuum chamber, a negative pressure supporting mechanism and several guide plates, the upper vacuum chamber and the lower vacuum chamber are opposite to each other and a narrow gap channel for passing the flexible substrate is formed in the middle, the negative pressure supporting mechanism is arranged in the lower vacuum chamber and the supporting surface of the negative pressure supporting mechanism is level with the narrow gap channel, several guide plates with the angle adjustable in the range of 0°-45° are arranged in the upper vacuum chamber, the top center of the upper vacuum chamber is provided with an upper air outlet, the guide plates are arranged around the upper air outlet below the upper air outlet, and the lower vacuum chamber is provided with a lower air outlet connected to the lower part of the negative pressure supporting mechanism.

2. The vacuum drying apparatus according to claim 1, characterized in that: The surface of the guide plate is provided with spaced guide structures.

3. The vacuum drying apparatus according to claim 2, characterized in that: The guide structure is in a curve shape, the depth between the guide structures is 1-3 mm, and the interval is 5-10 mm.

4. The vacuum drying apparatus according to claim 2, wherein: The guide plate is located 5-10 cm below the upper air outlet and is spaced 2-5 mm from the side wall of the upper vacuum chamber.

5. The vacuum drying apparatus according to claim 1, wherein: The upper surface of the negative pressure supporting mechanism is provided with several air suction holes, and the hole diameter of the air suction holes ranges from 50 to 1000 μm.

6. A flexible perovskite cell roll-to-roll manufacturing apparatus characterized by: The device comprises a unwinding device, a slit coating device, a vacuum drying device, a high temperature annealing device and a winding device arranged in sequence, and the vacuum drying device is the vacuum drying device of any one of claims 1 to 5.

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