Novel two-stage partition pressurization structure and single-side polishing equipment

Abstract

This utility model discloses a novel two-stage partitioned pressurization structure, including a pressurization outer cover and an airbag base. The airbag base has two air inlets, both of which extend upwards through the upper side of the airbag base. One air inlet connects to an inner air outlet, and the other connects to an outer air outlet. The lower side of the airbag base has an inner annular groove connecting to the inner air outlet and an outer annular groove connecting to the outer air outlet. The lower end of the airbag base holds an airbag diaphragm that simultaneously covers the inner and outer annular grooves. A pressure plate is axially slidably connected inside the opening of the pressurization outer cover. The pressure plate is fixedly connected to an inner annular platform facing the inner annular groove and an outer annular platform facing the outer annular groove. Both the inner and outer annular platforms are located below the airbag diaphragm. This application addresses the technical problem of edge effects on the surface of the polished wafer during polishing in existing single-sided polishing equipment, resulting in poor surface planarization and affecting the yield of polished finished products.

Description

Technical Field

[0001] This application relates to the field of polishing equipment technology, and in particular to a novel two-stage partitioned pressure structure and a single-sided polishing device. Background Technology

[0002] Chemical mechanical polishing (CMP) is a key process in integrated circuit manufacturing for achieving wafer surface planarization. It combines surface chemical action and mechanical abrasion to remove micron / nanoscale materials from the wafer surface, achieving nanoscale surface planarization and enabling subsequent photolithography processes. The main working principle of CMP is that under pressure and the action of a polishing slurry, the wafer being polished moves relative to the polishing pad. Through the combined mechanical and chemical action, the polished wafer surface achieves high planarization, low surface roughness, and low defects.

[0003] In single-sided polishing equipment, the main disk rotates while the main polishing head rotates eccentrically under pressure during product processing. Surface polishing is achieved through the mechanical grinding action of nano-abrasives and the chemical action of various chemical reagents. During CMP polishing, the polishing effect exhibits a CMP edge effect when the pressure is consistent, posing a potential challenge to the high planarity requirements of wafer surfaces and presenting certain limitations. Specifically: First, because the edge has a larger polishing area compared to other parts, the distribution of CMP liquid and abrasive in the edge region is uneven, leading to inconsistent CMP results. Second, the edge may have geometric or structural irregularities, such as sharp edges or steps, which also affect the polishing effect. Furthermore, the poorer contact between the edge and the CMP pad results in fewer abrasive particles in the edge region, further exacerbating the edge effect. Utility Model Content

[0004] This application provides a novel two-stage partitioned pressurization structure and a single-sided polishing device, which can improve the technical problem that when the single-sided polishing device in the prior art polishes, there is an edge effect on the surface of the polished wafer, resulting in poor surface flattening effect and affecting the yield of polished finished products.

[0005] Firstly, this application provides a novel two-stage partitioned pressurization structure, employing the following technical solution:

[0006] A novel two-stage partitioned pressurization structure includes a pressurization outer cover with a downward opening and an airbag base detachably connected to the opening of the pressurization outer cover. The airbag base has two air inlets, both of which extend upward through the upper side of the airbag base. One of the air inlets connects to an inner air outlet, and the other connects to an outer air outlet. The lower side of the airbag base has an inner annular groove connecting the inner air outlet and an outer annular groove connecting the outer air outlet. The lower end of the airbag base holds an airbag diaphragm that simultaneously covers the inner and outer annular grooves. A pressure plate is axially slidably connected inside the opening of the pressurization outer cover. The pressure plate is fixedly connected to an inner annular platform facing the inner annular groove and an outer annular platform facing the outer annular groove. Both the inner and outer annular platforms are located below the airbag diaphragm.

[0007] Optionally, the airbag base includes a base, a rotating mechanism connecting seat, an inner sealing ring, and an outer sealing ring. The upper side of the base is detachably connected to the pressurized outer cover. The rotating mechanism connecting seat, the inner sealing ring, and the outer sealing ring are all detachably connected to the lower side of the base, simultaneously clamping the airbag diaphragm to the base. The air inlet, the inner air outlet, the outer air outlet, the inner ring groove, and the outer ring groove are all formed in the base. The inner ring platform extends between the rotating mechanism connecting seat and the inner sealing ring, and the outer ring platform extends between the inner sealing ring and the outer sealing ring.

[0008] Optionally, the airbag base further includes a pressure ring, the upper side of which abuts against the lower side of the airbag diaphragm, and the lower side abuts against the upper side of the rotating mechanism connecting seat, the inner sealing ring, and the outer sealing ring. The pressure ring is provided with a plurality of inner clearance holes corresponding to the inner ring groove and a plurality of outer clearance holes corresponding to the outer ring groove.

[0009] Optionally, the airbag base further includes multiple sealing strips embedded in the lower side of the base, each sealing strip abutting against the upper side of the airbag diaphragm, and each sealing strip being distributed on both sides of the inner annular groove and the outer annular groove.

[0010] Optionally, the pressure plate has a central groove for mounting the rotating mechanism connecting seat, an inner mounting groove for mounting the inner sealing ring, and an outer mounting groove for mounting the outer sealing ring.

[0011] Optionally, it also includes an outer ring, an inner ring, and a spring ring. The upper end of the outer ring is detachably connected to the lower side of the outer edge of the pressure cover. The inner ring is axially slidably connected to the opening of the pressure cover and is detachably connected to the upper side of the pressure plate. The outer edge of the spring ring is clamped between the pressure cover and the outer ring, and the inner end is clamped between the inner ring and the pressure plate.

[0012] Optionally, the inner ring is provided with a plurality of fastening screws, each of which is threaded to the pressure plate; the pressure cover is provided with a plurality of stepped holes, each of which is provided with a sliding screw, each of which is threaded to the inner ring.

[0013] Optionally, the pressurized outer cover has multiple limiting holes facing the airbag base. Each limiting hole is equipped with a limiting post that is detachably connected to the airbag base. The upper end of each limiting post extends outward with an overlapping ring. A collar is fitted on the outer side of each overlapping ring. The lower end of each collar extends inward with a buckle that engages with the corresponding overlapping ring. Each collar is threaded with multiple limiting screws. Each limiting screw passes through the pressurized outer cover, and its rod end abuts against the airbag base.

[0014] Optionally, both air intake ports are equipped with air intake connectors.

[0015] Secondly, this application provides a single-sided polishing device, including the novel two-stage partitioned pressurization structure.

[0016] In summary, this application includes the following beneficial technical effects:

[0017] This application's novel two-stage partitioned pressurization structure, through two different air inlets, can deliver compressed gas at varying pressures for adjustment. A flexible, inflatable diaphragm is pressed downwards onto the inner and outer ring platforms of the pressure plate. Based on a defined pressurized area on the inner and outer ring platforms, two-stage partitioned pressurization of the pressure plate is achieved. This results in a pressure on the workpiece that is higher in the center and lower at the outer edge, compensating for the linear velocity decreasing linearly from the outer edge to the center. This balances the polishing loss between the outer and inner rings, or allows adjustment of the pressure ratio between the inner and outer sides according to the actual workpiece requirements, thereby regulating the grinding speed. This addresses the technical problem in existing single-sided polishing equipment where edge effects on the polished wafer surface lead to poor surface flattening, affecting the finished product's yield. Attached Figure Description

[0018] Figure 1 This is a structural diagram of the novel two-stage partitioned pressurization structure of this application.

[0019] Figure 2 yes Figure 1 A partial sectional view along the AA direction.

[0020] Figure 3 yes Figure 2 An enlarged view of the left side of the structure.

[0021] Figure 4 yes Figure 3A partial sectional view of section C.

[0022] Figure 5 yes Figure 1 A partial sectional view along the BB direction.

[0023] Figure 6 yes Figure 5 An enlarged view of the right-side structure.

[0024] Figure 7 yes Figure 6 A partial sectional view of section D in the middle.

[0025] Figure 8 yes Figure 6 A partial sectional view of section E in the middle.

[0026] Figure 9 This is a partial exploded view of the novel two-stage partitioned pressurization structure of this application, mainly used to show the structure of the airbag base.

[0027] Explanation of reference numerals in the attached drawings: 1. Pressurized outer cover; 11. Stepped hole; 12. Limiting hole; 13. Protective cover; 2. Airbag base; 21. Base; 211. Air inlet; 2111. Air inlet connector; 212. Inner air outlet; 213. Outer air outlet; 214. Inner annular groove; 215. Outer annular groove; 22. Rotating mechanism connecting seat; 23. Inner sealing ring; 24. Outer sealing ring; 25. Pressure ring; 251. Inner clearance hole; 25 2. External clearance hole; 26. Sealing strip; 3. Airbag diaphragm; 4. Pressure plate; 41. Inner ring platform; 42. Outer ring platform; 43. Center groove; 44. Inner mounting groove; 45. Outer mounting groove; 5. Outer ring; 51. End screw; 52. Arc-shaped limit block; 6. Inner ring; 61. Fastening screw; 62. Sliding screw; 7. Spring ring; 8. Limiting post; 81. Overlapping ring; 9. Collar; 91. Buckle ring; 92. Limiting screw. Detailed Implementation

[0028] The following is in conjunction with the appendix Figure 1-9 This application will be described in further detail.

[0029] This application discloses a novel two-stage partitioned pressurization structure.

[0030] Reference Figures 1-9A novel two-stage partitioned pressurization structure includes a pressurization outer cover 1 with a downward opening and an airbag base 2 detachably connected to the opening of the pressurization outer cover 1. The airbag base 2 has two air inlets 211, both of which extend upward through the upper side of the airbag base 2. One air inlet 211 is connected to an inner air outlet 212, and the other is connected to an outer air outlet 213. The lower side of the airbag base 2 has a section connecting to the inner air outlet 212. The inner ring groove 214 and the outer ring groove 215 that connects to the outward air passage 213 are connected. The lower end of the airbag base 2 holds the airbag diaphragm 3 that covers both the inner ring groove 214 and the outer ring groove 215. A pressure plate 4 is axially slidably connected inside the opening of the pressurized outer cover 1. The pressure plate 4 is fixedly connected to an inner ring platform 41 that faces the inner ring groove 214 and an outer ring platform 42 that faces the outer ring groove 215. Both the inner ring platform 41 and the outer ring platform 42 are located on the lower side of the airbag diaphragm 3.

[0031] By supplying air to the two air intakes 211 respectively, the airbag diaphragm 3 deforms in front of the inner ring groove 214 and the outer ring groove 215, and pressurizes the inner ring platform 41 and the outer ring platform 42, thereby pressurizing the pressure plate 4 and forming a two-zone pressurization structure.

[0032] Specifically, through two different air inlets 211, compressed gas of different pressures can be delivered for adjustment, causing the flexible, inflatable diaphragm 3 to press downwards and adhere to the inner ring platform 41 and outer ring platform 42 of the pressure plate 4. Based on the determined pressurized area of ​​the inner ring platform 41 and outer ring platform 42, a two-stage partitioned pressurization (P=p*A, where P is pressure, p is intensity, and A is area) is achieved on the pressure plate 4. This results in the pressure applied by the pressure plate 4 to the workpiece exhibiting a characteristic of being higher in the middle and lower at the outer ring, compensating for the linear velocity decreasing linearly from the outer ring to the center. This makes the polishing loss of the outer and inner rings tend to be balanced, or the ratio of the inner and outer pressures can be adjusted according to the actual needs of the workpiece, thereby adjusting the grinding speed of the inner and outer sides. This improves the technical problem in existing single-sided polishing equipment where the polished wafer surface has an edge effect, resulting in poor surface flattening and affecting the yield of polished finished products.

[0033] Each of the two air inlets 211 includes a vertical section and a horizontal section. The vertical section extends upward through the upper side of the airbag base 2 to connect to the air source. One end of the horizontal section extends laterally through the outer edge of the airbag base 2, and the other end connects to the lower end of the corresponding vertical section. The middle sections of the two horizontal sections connect to the inner air outlet 212 and the outer air outlet 213, respectively. During installation, a plug (not shown in the figure) is installed at one end of the horizontal section to form a seal, allowing gas to flow towards the inner air outlet 212 and the outer air outlet 213.

[0034] Both air intakes 211 have air intake connectors 2111 installed at their vertical sections to enable rapid connection with the air source and ensure airtightness.

[0035] Furthermore, a protective cover 13 is detachably connected to the upper side of the pressurized outer cover 1 by screws. The protective cover 13 has a through-hole for installation, and two air inlet connectors 2111 are respectively installed in the installation hole so as to protect the air inlet connectors 2111 through the protective cover 13.

[0036] The pressure plate 4 has a through opening at its center. In use, a ceramic disc is installed on the underside of the pressure plate 4.

[0037] Reference Figures 2-9 The airbag base 2 includes a base 21, a rotating mechanism connecting seat 22, an inner sealing ring 23, and an outer sealing ring 24. The upper side of the base 21 is detachably connected to the pressurized outer cover 1. The rotating mechanism connecting seat 22, the inner sealing ring 23, and the outer sealing ring 24 are all detachably connected to the lower side of the base 21, and simultaneously clamp the airbag diaphragm 3 to the base 21. The air inlet 211, the inner air outlet 212, the outer air outlet 213, the inner ring groove 214, and the outer ring groove 215 are all opened in the base 21. The inner ring platform 41 extends between the rotating mechanism connecting seat 22 and the inner sealing ring 23, and the outer ring platform 42 extends between the inner sealing ring 23 and the outer sealing ring 24.

[0038] This allows the deformable and inflatable diaphragm 3 to directly and rapidly apply pressure to the inner ring platform 41 and the outer ring platform 42.

[0039] The base 21 has a stepped ring structure, with its small-diameter end vertically slidingly connected to the inner side of the pressure cover 1 and sealed by a sealing strip; its large-diameter end is located in the opening structure of the pressure cover 1.

[0040] The rotating mechanism connecting seat 22, the inner sealing ring 23, and the outer sealing ring 24 can all be connected to the base 21 by screws. Furthermore, the rotating mechanism connecting seat 22 also has a stepped ring structure.

[0041] The airbag base 2 also includes a pressure ring 25. The upper side of the pressure ring 25 abuts against the lower side of the airbag diaphragm 3, and the lower side abuts against the upper side of the rotating mechanism connecting seat 22, the inner sealing ring 23 and the outer sealing ring 24. The pressure ring 25 is provided with a plurality of inner clearance holes 251 corresponding to the inner ring groove 214 and a plurality of outer clearance holes 252 corresponding to the outer ring groove 215.

[0042] The pressure ring 25 forms a planar contact with the airbag diaphragm 3, replacing the multi-point contact method formed by the rotating mechanism connecting seat 22, inner sealing ring 23, and outer sealing ring 24. This ensures the sealing of the inner and outer air cavities formed by the airbag diaphragm 3 with the inner ring groove 214 and outer ring groove 215, respectively, and reduces the possibility of tearing and damage to the airbag diaphragm 3. When the airbag diaphragm 3 deforms and expands, it expands out from multiple inner clearance holes 251 and multiple outer clearance holes 252 and applies pressure to the pressure plate 4.

[0043] Among them, the airbag diaphragm 3 can be made of rubber, and the pressure ring 25 can be made of metal steel.

[0044] Based on the above embodiment, the area formed by the multiple inner clearance holes 251 is S1, and the area formed by the multiple outer clearance holes 252 is S2, S1>S2, so that under the same air pressure, the pressure borne by the middle ring of the pressure plate 4 can also be greater than the pressure borne by the outer ring, in order to compensate for the characteristic that the linear velocity decreases linearly from the outer ring to the center, so that the polishing loss of the outer ring and the inner ring tends to be balanced.

[0045] The airbag base 2 also includes multiple sealing strips 26 embedded in the lower side of the base 21. Each sealing strip 26 abuts against the upper side of the airbag diaphragm 3, and each sealing strip 26 is distributed on both sides of the inner annular groove 214 and the outer annular groove 215. Under the compression of the rotating mechanism connecting seat 22, the inner sealing ring 23, and the outer sealing ring 24, the sealing strips 26 improve the sealing between the airbag diaphragm 3 and the base 21, preventing gas leakage.

[0046] Correspondingly, the pressure plate 4 has a central groove 43 for installing the rotating mechanism connecting seat 22, an inner mounting groove 44 for installing the inner sealing ring 23, and an outer mounting groove 45 for installing the outer sealing ring 24, so that the installation space for the rotating mechanism connecting seat 22, the inner sealing ring 23, and the outer sealing ring 24 is formed by the avoidance of the central groove 43, the inner mounting groove 44, and the outer mounting groove 45.

[0047] Reference Figures 6-8 The new two-stage partitioned pressurization structure also includes an outer ring 5, an inner ring 6, and a spring ring 7. The upper end of the outer ring 5 is detachably connected to the lower side of the outer edge of the pressurization cover 1. The inner ring 6 is axially slidably connected to the opening of the pressurization cover 1 and is detachably connected to the upper side of the pressure plate 4. The outer edge of the spring ring 7 is clamped between the pressurization cover 1 and the outer ring 5, and the inner end is clamped between the inner ring 6 and the pressure plate 4.

[0048] When the airbag diaphragm 3 deforms, it creates pressure on the pressure plate 4, causing the pressure plate 4 to slide downwards away from the pressurized outer cover 1. The spring coil 7 undergoes adaptive deformation. When the gas in the air intake duct 211 is discharged, the pressure plate 4 can slide back to its original position under the action of the spring coil 7, which restores its original shape.

[0049] The upper end of the outer ring 5 is connected to the pressure cover 1 by an end screw 51.

[0050] The spring coil 7 can be made of spring steel.

[0051] The inner ring 6 is provided with multiple fastening screws 61, each of which is threaded to the pressure plate 4; the pressure cover 1 is provided with multiple stepped holes 11, each of which is provided with a sliding screw 62, each of which is threaded to the inner ring 6.

[0052] The inner ring 6 is stably installed on the pressure plate 4 by means of the fastening screws 61, and the inner ring 6 can slide relative to the pressure cover 1 by means of the sliding screws 62, so that the pressure plate 4 can slide relative to the pressure cover 1.

[0053] Of course, before the airbag diaphragm 3 deforms and compresses the pressure plate 4, the ceramic disk abuts against the polished wafer, and there is a gap between the head of the sliding screw 62 and the shoulder of the stepped hole 11. Furthermore, the size of the gap between the head of the sliding screw 62 and the shoulder of the stepped hole 11 can be adjusted by rotating the sliding screw 62, thereby controlling the sliding distance of the pressure plate 4; when the initial gap is 0, the pressure plate 4 will not slide, and when force is applied, it directly presses against the corresponding part of the ceramic disk.

[0054] Based on the above embodiment, a plurality of arc-shaped limiting blocks 52 are detachably connected to the lower end of the outer ring 5 by screws. Each arc-shaped limiting block 52 forms a ring structure around the outer ring 5 and together forms an inward opening. The edge end of the pressure plate 4 extends into the opening so as to limit the sliding stroke of the pressure plate 4 under force by each arc-shaped limiting block 52.

[0055] Reference Figure 6 and Figure 8 The pressurized outer cover 1 has multiple limiting holes 12 facing the airbag base 2. Each limiting hole 12 is equipped with a limiting post 8 that is detachably connected to the airbag base 2. The upper end of each limiting post 8 extends outward with an overlapping ring 81. A collar 9 is fitted on the outer side of each overlapping ring 81. The lower end of each collar 9 extends inward with a buckle 91 that engages with the corresponding overlapping ring 81. Each collar 9 is threaded with multiple limiting screws 92. Each limiting screw 92 passes through the pressurized outer cover 1 and its rod end abuts against the airbag base 2.

[0056] The airbag base 2 and the pressurized outer cover 1 can be detachably connected by multiple limiting posts 8, collars 9 and limiting screws 92. Specifically, the buckle 91 can be fastened to the overlapping ring 81 first, and then the limiting post 8 can be connected to the airbag base 2. The limiting post 8 and collar 9, which form a whole, can be placed in the corresponding limiting hole 12. Finally, the collar 9 can be fixed by tightening the limiting screw 92, so as to realize the installation of the pressurized outer cover 1 and the airbag base 2.

[0057] This application also discloses a single-sided polishing device, including the novel two-stage partitioned pressurization structure, and a ceramic disc, which is installed on the lower side of the pressure plate 4.

[0058] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A novel two-stage partitioned pressurization structure, characterized in that: The device includes a pressurized outer cover (1) with a downward opening structure and an airbag base (2) detachably connected to the opening of the pressurized outer cover (1). The airbag base (2) has two air inlets (211), both of which extend upward through the upper side of the airbag base (2). One of the air inlets (211) is connected to an inner air outlet (212), and the other is connected to an outer air outlet (213). The lower side of the airbag base (2) has an inner annular groove (214) connecting the inner air outlet (212) and an outer annular groove (213) connecting the outer air outlet (213). The outer ring groove (215) of the channel (213) is held by the lower end of the airbag base (2), which simultaneously covers the inner ring groove (214) and the outer ring groove (215). A pressure plate (4) is axially slidably connected inside the opening of the pressurized outer cover (1). The pressure plate (4) is fixedly connected to an inner ring platform (41) facing the inner ring groove (214) and an outer ring platform (42) facing the outer ring groove (215). The inner ring platform (41) and the outer ring platform (42) are both located on the lower side of the airbag diaphragm (3).

2. The novel two-stage partitioned pressurization structure according to claim 1, characterized in that: The airbag base (2) includes a base (21), a rotating mechanism connecting seat (22), an inner sealing ring (23), and an outer sealing ring (24). The upper side of the base (21) is detachably connected to the pressurized outer cover (1). The rotating mechanism connecting seat (22), the inner sealing ring (23), and the outer sealing ring (24) are all detachably connected to the lower side of the base (21) and simultaneously clamp the airbag diaphragm (3) to the base (21). The air inlet (211), the inner air outlet (212), the outer air outlet (213), the inner ring groove (214), and the outer ring groove (215) are all opened on the base (21). The inner ring platform (41) extends between the rotating mechanism connecting seat (22) and the inner sealing ring (23), and the outer ring platform (42) extends between the inner sealing ring (23) and the outer sealing ring (24).

3. The novel two-stage partitioned pressurization structure according to claim 2, characterized in that: The airbag base (2) also includes a pressure ring (25). The upper side of the pressure ring (25) abuts against the lower side of the airbag diaphragm (3), and the lower side abuts against the upper side of the rotating mechanism connecting seat (22), the inner sealing ring (23) and the outer sealing ring (24). The pressure ring (25) is provided with a plurality of inner clearance holes (251) corresponding to the inner ring groove (214) and a plurality of outer clearance holes (252) corresponding to the outer ring groove (215).

4. The novel two-stage partitioned pressurization structure according to claim 2, characterized in that: The airbag base (2) also includes multiple sealing strips (26) embedded in the lower side of the base (21). Each sealing strip (26) abuts against the upper side of the airbag diaphragm (3), and each sealing strip (26) is distributed on both sides of the inner ring groove (214) and the outer ring groove (215).

5. The novel two-stage partitioned pressurization structure according to claim 2, characterized in that: The pressure plate (4) has a central groove (43) for installing the rotating mechanism connecting seat (22), an inner mounting groove (44) for installing the inner sealing ring (23), and an outer mounting groove (45) for installing the outer sealing ring (24).

6. The novel two-stage partitioned pressurization structure according to claim 1, characterized in that: It also includes an outer ring (5), an inner ring (6) and a spring ring (7). The upper end of the outer ring (5) is detachably connected to the lower side of the outer edge of the pressure cover (1). The inner ring (6) is axially slidably connected to the opening of the pressure cover (1) and is detachably connected to the upper side of the pressure plate (4). The outer edge of the spring ring (7) is clamped between the pressure cover (1) and the outer ring (5), and the inner end is clamped between the inner ring (6) and the pressure plate (4).

7. The novel two-stage partitioned pressurization structure according to claim 6, characterized in that: The inner ring (6) is provided with a plurality of fastening screws (61), each of which is threaded to the pressure plate (4); the pressure cover (1) is provided with a plurality of stepped holes (11), each of which is provided with a sliding screw (62), each of which is threaded to the inner ring (6).

8. The novel two-stage partitioned pressurization structure according to claim 1, characterized in that: The pressurized outer cover (1) has multiple limiting holes (12) facing the airbag base (2). Each limiting hole (12) is equipped with a limiting post (8) that is detachably connected to the airbag base (2). Each limiting post (8) has an overlapping ring (81) extending outward from its upper end. Each overlapping ring (81) has a collar (9) sleeved on its outer side. Each collar (9) has a buckle (91) extending inward from its lower end that engages with the corresponding overlapping ring (81). Each collar (9) is threaded with multiple limiting screws (92). Each limiting screw (92) passes through the pressurized outer cover (1) and its rod end abuts against the airbag base (2).

9. The novel two-stage partitioned pressurization structure according to any one of claims 1-8, characterized in that: Both of the aforementioned air intakes (211) have an air intake connector (2111) installed at their air intake ports.

10. A single-sided polishing device, characterized in that: Including the novel two-stage partitioned pressurization structure as described in any one of claims 1-9.

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