Polishing tool for heating disc

Abstract

This utility model relates to the field of thin film deposition equipment processing technology, and discloses a polishing fixture for a heating plate, comprising: a support platform for supporting the plate body of the heating plate, the support platform having a clearance hole for the support cylinder of the heating plate to pass through; a support frame disposed on the side of the support platform away from the plate body, the support frame having an accommodating space for accommodating the support cylinder, the clearance hole communicating with the accommodating space; and a protective sleeve disposed within the accommodating space, the protective sleeve extending axially along the support cylinder, the protective sleeve being fitted over the support cylinder, and both ends of the protective sleeve being connected to the support platform and the support frame respectively. When the heating plate is installed on the fixture, the support cylinder is inserted into the protective sleeve through the clearance hole, which effectively isolates the support cylinder from the external environment, reduces the contamination of the support cylinder by splashed polishing liquid during polishing operations, ensures the safety performance of the heating plate, and the overall structure of the device is simple, the operation process is convenient, and the processing efficiency is significantly improved.

Description

Technical Field

[0001] This utility model relates to the field of thin film deposition equipment processing technology, specifically to a polishing fixture for a heating plate. Background Technology

[0002] In thin film deposition equipment, the heating plate is a core functional component. The processing of the metal heating plate involves several key steps, including grinding, drilling, and polishing. The heating plate mainly consists of a plate body and a support cylinder. In the polishing process, the working surface of the plate body away from the support cylinder needs to be polished to ensure that the surface roughness and flatness meet the stringent requirements of the thin film deposition process.

[0003] During the polishing process of the heating plate, the polishing slurry often splashes due to the high-speed operation of the polishing machine, causing contamination of the support cylinder surface. As a precision component, the support cylinder integrates key components such as sensors and electrical connection structures. Once the polishing slurry penetrates it, it can easily affect the product quality of the heating plate.

[0004] Currently, the industry commonly uses dustproof tape or cloth to wrap the end of the support cylinder during polishing operations. However, this traditional method is cumbersome to operate, and removing the dustproof tape or cloth is time-consuming and laborious. Moreover, in actual use, the protective effect is not ideal and cannot effectively prevent the intrusion of polishing fluid. Utility Model Content

[0005] This utility model provides a polishing fixture for a heating plate to solve or improve the problems in related technologies where the protective measures of using a support cylinder wrapped with dustproof tape or dustproof cloth in the polishing operation of a heating plate are cumbersome to operate, time-consuming and laborious to disassemble, and the protective effect is not ideal.

[0006] This utility model provides a polishing fixture for a heating plate, comprising:

[0007] A support platform for supporting the heating plate body, the support platform having clearance holes for the support cylinder of the heating plate to pass through;

[0008] A support frame is disposed on the side of the support platform away from the disk body. The support frame is provided with a receiving space for accommodating the support cylinder, and the clearance hole is connected to the receiving space.

[0009] A protective sleeve is disposed within the accommodating space. The protective sleeve extends axially along the support cylinder and is fitted over the support cylinder. Both ends of the protective sleeve are connected to the support platform and the support frame, respectively.

[0010] Beneficial effects: When the heating plate is installed on the tooling, the support cylinder is inserted into the protective sleeve through the clearance hole, which can effectively isolate the support cylinder from the external environment, reduce the contamination of the support cylinder by the polishing liquid splashed during the polishing operation, ensure the safety performance of the heating plate, and the overall structure of the device is simple, the operation process is convenient, and the processing efficiency is significantly improved.

[0011] In one alternative embodiment, the protective sleeve is configured as a telescopic sleeve.

[0012] Beneficial effects: The telescopic design allows the protective sleeve to extend or retract freely according to actual needs, avoiding installation limitations caused by fixed length and adapting to working scenarios of different lengths.

[0013] In one alternative embodiment, the protective sleeve is a corrugated pipe.

[0014] Beneficial effects: It provides a flexible telescopic structure that achieves axial telescopic expansion and contraction of the protective sleeve by means of the high elasticity material and pleated structure of the corrugated pipe, and the cost is low, which is conducive to the lightweight design of tooling.

[0015] In one alternative embodiment, the protective sleeve includes at least two sleeve sections that are slidably connected to each other.

[0016] Beneficial effects: It provides a rigid telescopic structure, which adopts a multi-layer nested sleeve structure and achieves axial expansion and contraction of the protective sleeve through sliding connection. The structure is stable and the connection is reliable.

[0017] In one optional embodiment, the protective sleeve has a first annular flange at one end facing the support platform, and the first annular flange is detachably connected to the support platform.

[0018] And / or, the protective sleeve has a second annular flange at one end away from the support platform, and the second annular flange is detachably connected to the support frame.

[0019] Beneficial effects: It facilitates connection with other components, enhances the reliability of the connection between the protective sleeve and other components, and optimizes the assembly process and maintenance convenience.

[0020] In one alternative embodiment, the detachable connection between the first annular flange and the support platform, and between the second annular flange and the support frame, includes at least one of the following connection structures: bolt connection, Velcro connection, snap-fit ​​connection, and hook connection.

[0021] Beneficial effects: It provides a variety of different detachable connection structures, enabling quick connection of the protective sleeve with other components and improving assembly efficiency.

[0022] In one alternative implementation, it further includes:

[0023] An annular seal is disposed between the disc body and the support platform. The annular seal is arranged along the circumference of the support cylinder, and the disc body abuts against the surface of the annular seal.

[0024] Beneficial effects: It can achieve a sealed connection between the disc and the support platform, preventing polishing fluid from seeping into the clearance hole from the connection seam between the disc and the support platform and then flowing into the protective sleeve, effectively avoiding polishing fluid contamination of the support sleeve and improving the protective effect.

[0025] In one alternative implementation, it further includes:

[0026] At least two limiting members are spaced apart along the circumference of the support platform. The disc body is provided with at least two first limiting holes corresponding to the limiting members one by one. The support platform is provided with at least two second limiting holes opposite to the first limiting holes. One end of the limiting member is inserted into the first limiting hole and the other end is inserted into the second limiting hole to limit and fix the disc body and the support platform.

[0027] Beneficial effects: The relative movement between the plate and the support platform can be restricted by multiple limiting components, which realizes the installation and fixation of the heating plate and is conducive to the polishing of the heating plate.

[0028] In one alternative embodiment, the support frame includes:

[0029] The base is spaced apart on the side of the support platform opposite to the disk body;

[0030] At least two support members are disposed between the support platform and the base, and each of the support members is spaced apart circumferentially along the support cylinder to form the accommodating space.

[0031] Beneficial effects: The base is connected to multiple support components to form a stable support system, which significantly improves the structural rigidity. Furthermore, the spaced design of multiple support components reduces material usage, lowers costs, and reduces weight while ensuring overall strength.

[0032] In one alternative embodiment, the support member includes:

[0033] The first support part is connected to the base;

[0034] The second support part is connected to the support platform, and the second support part is slidably connected to the first support part;

[0035] A locking mechanism is used to lock and fix the second support portion relative to the first support portion when they are in a predetermined position.

[0036] Beneficial effects: The overall height of the support can be adjusted, thereby changing the distance between the support platform and the base, which can then be adapted to the use requirements of support cylinders of different lengths, improving the applicability and flexibility of the tooling. Attached Figure Description

[0037] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0038] Figure 1 This is one of the structural schematic diagrams of the polishing fixture for the heating plate according to an embodiment of the present utility model;

[0039] Figure 2 This is a second schematic diagram of the structure of the polishing fixture for the heating plate according to an embodiment of the present utility model;

[0040] Figure 3 for Figure 2 A magnified view of a portion of point A in the middle;

[0041] Figure 4 This is a schematic diagram of the heating plate according to an embodiment of the present invention;

[0042] Figure 5 This is a front structural diagram of the support platform according to an embodiment of the present utility model;

[0043] Figure 6 This is a schematic diagram of the reverse structure of the support platform according to an embodiment of the present utility model;

[0044] Figure 7 This is a schematic diagram of the structure of the limiting member according to an embodiment of the present utility model;

[0045] Figure 8 This is a front structural diagram of the base according to an embodiment of the present utility model;

[0046] Figure 9 This is a schematic diagram of the reverse side structure of the base according to an embodiment of the present utility model;

[0047] Figure 10 This is a partial cross-sectional view of the support member according to an embodiment of the present utility model.

[0048] Explanation of reference numerals in the attached figures:

[0049] 1. Support platform; 101. Clearance hole; 102. Second limiting hole; 103. Second fixing hole; 104. First countersunk hole; 2. Protective sleeve; 201. First annular flange; 202. Second annular flange; 3. Support frame; 30. Accommodation space; 31. Base; 311. First fixing hole; 312. Second countersunk hole; 313. Groove; 314. Third mounting hole; 32. Support component; 321. First support part; 322. Second support 323. Locking mechanism; 3231. Locking hole; 3232. Locking part; 3233. Locking nut; 324. First protrusion; 325. Second protrusion; 326. First mounting hole; 327. Second mounting hole; 4. Limiting element; 401. External thread; 5. Annular seal; 6. Heating plate; 601. Plate body; 6011. First limiting hole; 602. Support cylinder; 7. Guide structure; 71. Guide protrusion; 72. Guide groove. Detailed Implementation

[0050] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0051] In the description of this application, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "a plurality of" means two or more, unless otherwise explicitly specified.

[0052] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, a direct connection, or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0053] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0054] The following is combined with Figures 1 to 10 This describes a polishing fixture for a heating plate according to an embodiment of the present invention.

[0055] According to an embodiment of this utility model, a polishing fixture for a heating plate is provided, including a support platform 1, a protective sleeve 2, and a support frame 3. Specifically, as Figure 1 As shown, the support platform 1 is used to support the plate body 601 of the heating plate 6, and the support frame 3 is used to support the support platform 1. Optionally, the support platform 1 is disc-shaped, and the surface of the plate body 601 abuts against the surface of the support platform 1.

[0056] like Figure 4 and Figure 5 As shown, the support platform 1 is provided with a clearance hole 101 through which the support cylinder 602 of the heating plate 6 passes.

[0057] like Figure 1 , Figure 4 and Figure 5 As shown, the support frame 3 is located on the side of the support platform 1 opposite to the disk body 601. The support frame 3 has a receiving space 30 for accommodating the support cylinder 602, and the clearance hole 101 communicates with the receiving space 30. The protective sleeve 2 is disposed within the receiving space 30, extends axially along the support cylinder 602, and is fitted over the support cylinder 602. Both ends of the protective sleeve 2 are connected to the support platform 1 and the support frame 3, respectively. It should be noted that, as shown in the figure... Figure 1 Regarding the placement of the heating plate using the polishing fixture, Figure 1The direction indicated by the middle arrow is the axial direction of the support cylinder 602.

[0058] With this configuration, when the heating plate 6 is installed on the tooling, the support cylinder 602 extends through the clearance hole 101 into the protective sleeve 2, which can effectively isolate the support cylinder 602 from the external environment, reduce the contamination of the support cylinder 602 by the polishing liquid splashed during the polishing operation, ensure the safety performance of the heating plate 6, and the overall structure of the device is simple, the operation process is convenient, and the processing efficiency is significantly improved.

[0059] Optionally, in some embodiments of this utility model, the protective sleeve 2 is configured as a telescopic sleeve. This telescopic design allows the protective sleeve 2 to freely expand and contract according to actual needs, avoiding installation limitations caused by a fixed length, adapting to working scenarios of different lengths, eliminating the need for redesign and manufacturing, and significantly improving the versatility and application flexibility of the tooling. For example, optionally, in some embodiments of this utility model, the telescopic sleeve structure includes at least two sleeve sections, with a sliding connection between the sleeves. This configuration provides a rigid telescopic structure, employing a multi-layer nested sleeve structure, achieving axial expansion and contraction of the protective sleeve 2 through a sliding connection, and ensuring structural stability and reliable connection.

[0060] Optionally, in some embodiments of this utility model, the protective sleeve 2 is configured as a corrugated pipe. This configuration provides a flexible telescopic structure. Utilizing the high elasticity of the corrugated pipe and its pleated structure, the axial expansion and contraction of the protective sleeve 2 is achieved, while maintaining low cost and facilitating lightweight tooling design.

[0061] It should be noted that telescopic sleeve structures or bellows structures composed of multiple sleeve sections are relatively common structures, and will not be described in detail in the embodiments of this application. However, it is understood that both structures are known in related technologies.

[0062] Optionally, in some embodiments of this utility model, such as Figure 1 and Figure 2 As shown, the protective sleeve 2 has a first annular flange 201 at one end facing the support platform 1, and the first annular flange 201 is detachably connected to the support platform 1. Figure 1 As shown, the protective sleeve 2 has a second annular flange 202 at the end opposite to the support platform 1, and the second annular flange 202 is detachably connected to the support frame 3.

[0063] This design, with an annular flange at the end of the protective sleeve 2, facilitates connection with other components, enhances the reliability of the connection between the protective sleeve 2 and other components, and optimizes the assembly process and maintenance convenience.

[0064] Optionally, in some embodiments of this utility model, the detachable connection between the first annular flange 201 and the support platform 1 includes at least one of the following connection structures: bolt connection, Velcro connection, snap-fit ​​connection, and hook connection. The detachable connection between the second annular flange 202 and the support frame 3 includes at least one of the following connection structures: bolt connection, Velcro connection, snap-fit ​​connection, and hook connection.

[0065] This design provides a variety of detachable connection structures, enabling quick connection of the protective sleeve 2 with other components, improving assembly efficiency, making operation convenient, and facilitating maintenance.

[0066] Taking the detachable connection between the first annular flange 201 and the support platform 1 as an example, it can be understood that the bolt connection can refer to opening a through hole on the first annular flange 201 and opening a threaded hole on the bottom surface of the support platform 1, and connecting the first annular flange 201 to the bottom surface of the support platform 1 by bolts.

[0067] The Velcro connection can refer to a situation where one of the bottom surfaces of the first annular flange 201 and the support platform 1 is provided with a male surface and the other with a female surface, and a detachable connection is achieved through nylon hooks and nylon loops.

[0068] The snap-fit ​​connection can refer to the fact that one of the bottom surfaces of the first annular flange 201 and the support platform 1 is provided with a snap-fit ​​male head: usually with a protruding hook, slot or elastic arm, which has a certain deformation capability; and the other is provided with a snap-fit ​​female head: correspondingly provided with a groove, hole or slot for engaging with the male head.

[0069] The hook connection can refer to the hook body (hook-shaped part, tip or bend) being provided on one of the bottom surfaces of the first annular flange 201 and the support platform 1, for hanging objects; and the other being provided with a load-bearing fulcrum: a hole, rod, groove, etc. that mates with the hook to provide support.

[0070] Optionally, in some embodiments of this utility model, such as Figure 2 As shown, the polishing fixture for the heating plate also includes an annular seal 5, which is disposed between the plate body 601 and the support platform 1. The annular seal 5 is arranged along the circumference of the support cylinder 602, and the surface of the plate body 601 abuts against the surface of the annular seal 5. Optionally, the annular seal 5 is a flexible gasket such as a rubber gasket or a silicone gasket.

[0071] When installing the heating plate 6, the bottom surface of the plate body 601 of the heating plate 6 is made to abut against the annular seal 5. With this arrangement, the annular seal 5 can achieve a sealed connection between the plate body 601 and the support platform 1, preventing polishing liquid from seeping into the clearance hole 101 from the connection seam between the plate body 601 and the support platform 1 and then flowing into the protective sleeve 2, further reducing the contamination of the support sleeve 602 and its internal components by polishing liquid and improving the protective effect.

[0072] Optionally, in some embodiments of this utility model, reference is made to Figures 4-10 The following describes one of the optional connection structures between the heating plate 6 and the support platform 1.

[0073] Reference Figure 4 The polishing fixture for the heating plate also includes at least two limiting members 4, each limiting member 4 being spaced apart circumferentially along the plate body 601. The plate body 601 is provided with at least two first limiting holes 6011 corresponding one-to-one with each limiting member 4. For example... Figure 5 As shown, the support platform 1 is provided with at least two second limiting holes 102 opposite to the first limiting hole 6011. One end of the limiting member 4 is inserted into the first limiting hole 6011. Optionally, the first limiting hole 6011 is a threaded hole, such as... Figure 7 As shown, the limiting member 4 is provided with an external thread 401 that is adapted to the first limiting hole 6011. The other end of the limiting member 4 is inserted into the second limiting hole 102, thereby limiting and fixing the disc body 601 and the support platform 1 through the limiting member 4.

[0074] Specifically, during installation, the limiting member 4 is first screwed into the corresponding first limiting hole 6011, and then the heating plate 6, together with the limiting member 4, is placed onto the surface of the support platform 1, with the other end of the limiting member 4 inserted into the second limiting hole 102. It should be noted that the second limiting hole 102 can be a through hole or a blind hole.

[0075] This configuration, using multiple limiting members 4, restricts the relative movement between the plate body 601 and the support platform 1 along the circumference of the support platform 1, thus achieving the installation and fixation of the heating plate 6 and facilitating the polishing process of the heating plate 6. It should be noted that the number of limiting members 4 can be determined according to actual usage requirements. For example, in this embodiment, there are three limiting members 4, and each limiting member 4 is evenly spaced.

[0076] In some embodiments, the limiting member 4 is made of engineering plastic, such as Teflon or polyethylene. This means the hardness of the limiting member 4 is lower than that of the heating plate 6, reducing frictional damage to the heating plate 6 and extending its service life.

[0077] Optionally, in some embodiments of this utility model, such as Figure 1 As shown, the support frame 3 includes a base 31 and at least two support members 32. The base 31 is spaced apart from the support platform 1, and is located on the side of the support platform 1 opposite to the disc body 601. Optionally, the base 31 is disc-shaped and can be used to connect a stage for polishing equipment. Figure 9As shown, the base 31 has a groove 313 on the side surface opposite to the support platform 1, and the platform is embedded in the groove 313. The groove 313 also has multiple third mounting holes 314, which are threaded holes, used to connect the platform and the base 31 with bolts. This allows the entire fixture to rotate with the platform, facilitating the polishing of the heating plate 6.

[0078] Each support member 32 is disposed between the support platform 1 and the base 31, and the support members 32 are spaced apart circumferentially around the support cylinder 602 to form an accommodating space 30. It should be noted that the number of support members 32 can be determined according to actual design requirements. For example, in this embodiment, there are three support members 32, and each support member 32 is evenly distributed around the support cylinder 602.

[0079] With this configuration, the base 31 is connected to multiple support members 32 to form a stable support system, which significantly improves the structural rigidity. Furthermore, the spaced design of multiple support members 32 reduces material usage, lowers costs, and reduces weight while ensuring overall strength.

[0080] Optionally, in some embodiments of this utility model, such as Figure 2 and Figure 10 As shown, the support member 32 includes a first support portion 321, a second support portion 322, and a locking mechanism 323. The first support portion 321 is connected to the base 31, and the second support portion 322 is connected to the support platform 1. The second support portion 322 is slidably connected to the first support portion 321, and the locking mechanism 323 is used to lock and fix the second support portion 322 relative to the first support portion 321 when it is in a predetermined position.

[0081] With this configuration, the overall height of the support member 32 can be adjusted by sliding the second support part 322 relative to the first support part 321, and then fixed by the locking mechanism 323. This allows the distance between the support platform 1 and the base 31 to be changed, thereby adapting to the usage requirements of support cylinders 602 of different lengths and improving the applicability and flexibility of the tooling.

[0082] In some embodiments, such as Figure 10 As shown, the first support portion 321 has a first protrusion 324 at one end near the base 31. (As indicated...) Figure 8 As shown, the base 31 is provided with a first fixing hole 311 that is adapted to the first protrusion 324. The first protrusion 324 is engaged in the first fixing hole 311 and the first protrusion 324 is bolted to the base 31.

[0083] Specifically, such as Figure 10 As shown, the first protrusion 324 is provided with a first mounting hole 326, which is a threaded hole. Figure 9As shown, a second countersunk hole 312 is provided on the side of the base 31 away from the support platform 1, and the second countersunk hole 312 communicates with the first fixing hole 311. Thus, during assembly, the first protrusion 324 is engaged in the first fixing hole 311, and then a bolt is screwed through the second countersunk hole 312 into the first mounting hole 326, thereby connecting the first support part 321 and the base 31. Furthermore, the countersunk hole design prevents the bolt head from protruding from the surface of the base 31, keeping the surface of the base 31 flat and smooth.

[0084] With this configuration, the first protrusion 324 is engaged in the first fixing hole 311 and connected by bolts, thereby improving the connection stability between the first support 321 and the base 31, and making the assembly process simple and quick.

[0085] In some embodiments, such as Figure 10 As shown, the second support portion 322 has a second protrusion 325 at one end near the support platform 1. For example... Figure 6 As shown, the support platform 1 is provided with a second fixing hole 103 that is adapted to the second protrusion 325. The second protrusion 325 is engaged in the second fixing hole 103, and the second fixing hole 103 is bolted to the support platform 1.

[0086] Specifically, such as Figure 10 As shown, the second protrusion 325 is provided with a second mounting hole 327, which is a threaded hole. Figure 5 As shown, a first countersunk hole 104 is provided on the side of the support platform 1 away from the base 31, and the first countersunk hole 104 communicates with the second fixing hole 103. Thus, during installation, the second protrusion 325 is engaged in the second fixing hole 103, and then a bolt is screwed through the first countersunk hole 104 into the second mounting hole 327 to fix the second support part 322 and the support platform 1, ensuring the stability of the connection. Simultaneously, the countersunk hole design ensures that the bolt head is recessed into the surface of the support platform 1, guaranteeing a flat surface and preventing scratches to the surface of the heating plate 6.

[0087] With this configuration, the second protrusion 325 is engaged in the second fixing hole 103 and connected by bolts, thus achieving a stable connection between the second support 322 and the support platform 1, simplifying the installation process and significantly improving the stability and assembly efficiency of the structure.

[0088] Optionally, in some embodiments of this utility model, such as Figure 2 As shown, the second support portion 322 is slidably sleeved onto the outside of the first support portion 321. The locking mechanism 323 includes a matching locking hole 3231 and a locking element 3232, as shown... Figure 10As shown, the second support portion 322 is provided with at least two locking holes 3231, and the locking holes 3231 are spaced apart along the sliding direction of the second support portion 322. The locking fastener 3232 is threaded into the locking hole 3231 and abuts against the outer wall of the first support portion 321 to lock and fix the second support portion 322 relative to the first support portion 321 when it is in a predetermined position.

[0089] This configuration provides a specific structure for the locking mechanism 323. After the first support portion 321 and the second support portion 322 reach the desired relative position, the locking fastener 3232 is tightened, causing one end of the locking fastener 3232 to abut against the outer wall of the first support portion 321. The locking of multiple locking fasteners 3232 facilitates reliable fixation of the first support portion 321 and the second support portion 322. This structure is characterized by its simple design and convenient operation. Of course, in other embodiments, the locking mechanism 323 may include, but is not limited to, the aforementioned locking hole 3231 and locking fastener 3232 cooperating with each other, and may also employ a snap-fit ​​structure, quick-release clamp, etc.

[0090] Optionally, in some embodiments of this utility model, such as Figure 3 and Figure 10 As shown, the polishing fixture for the heating plate also includes a locking nut 3233 adapted to the locking fastener 3232. The locking nut 3233 is sleeved on the outside of the locking fastener 3232 and abuts against the outer wall of the second support portion 322. With this configuration, the locking fastener 3232 is screwed into the threaded hole until it abuts against the outer wall of the first support portion 321, and then locked in place with the locking nut 3233, thereby further enhancing the reliability of the locking fastener 3232 and improving the connection stability and ease of operation of the fixture.

[0091] Optionally, in some embodiments of this utility model, the polishing fixture for the heating plate further includes a guide structure 7, which includes a matching guide protrusion 71 and a guide groove 72. One of the first support portion 321 and the second support portion 322 is provided with the guide protrusion 71, and the other is provided with the guide groove 72. That is, the first support portion 321 is provided with the guide protrusion 71, and the second support portion 322 is correspondingly provided with the guide groove 72; or, the second support portion 322 is provided with the guide protrusion 71, and the first support portion 321 is correspondingly provided with the guide groove 72. The guide groove 72 extends along the sliding direction of the second support portion 322, and the guide protrusion 71 is slidably connected to the guide groove 72.

[0092] Specifically, in this embodiment, such as Figure 10As shown, the outer wall of the first support portion 321 is provided with a guide groove 72, and the inner wall of the second support portion 322 is provided with a corresponding guide protrusion 71. When the second support portion 322 slides relative to the first support portion 321, the guide protrusion 71 slides along the guide groove 72. With this configuration, the structure can limit and guide the relative movement of the first support portion 321 and the second support portion 322, ensuring that the movement of both is more precise and stable.

[0093] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A polishing fixture for a heating plate, characterized in that, include: A support platform (1) is provided for supporting the plate body (601) of the heating plate (6). The support platform (1) is provided with a clearance hole (101) through which the support cylinder (602) of the heating plate (6) passes. A support frame (3) is provided on the side of the support platform (1) away from the disk body (601). The support frame (3) is provided with a receiving space (30) for accommodating the support cylinder (602). The clearance hole (101) is connected to the receiving space (30). A protective sleeve (2) is disposed within the accommodating space (30). The protective sleeve (2) extends along the axial direction of the support cylinder (602). The protective sleeve (2) is sleeved on the outside of the support cylinder (602), and both ends of the protective sleeve (2) are connected to the support platform (1) and the support frame (3) respectively.

2. The polishing fixture for the heating plate according to claim 1, characterized in that, The protective sleeve (2) is configured as a telescopic sleeve.

3. The polishing fixture for the heating plate according to claim 2, characterized in that, The protective sleeve (2) is a corrugated pipe.

4. The polishing fixture for the heating plate according to claim 2, characterized in that, The protective sleeve (2) includes at least two sleeve sections, which are slidably connected to each other.

5. The polishing fixture for the heating plate according to any one of claims 2-4, characterized in that, The protective sleeve (2) has a first annular flange (201) at one end facing the support platform (1), and the first annular flange (201) is detachably connected to the support platform (1); And / or, the protective sleeve (2) is provided with a second annular flange (202) at one end away from the support platform (1), and the second annular flange (202) is detachably connected to the support frame (3).

6. The polishing fixture for the heating plate according to claim 5, characterized in that, The detachable connection between the first annular flange (201) and the support platform (1), and between the second annular flange (202) and the support frame (3), includes at least one of the following connection structures: bolt connection, Velcro connection, snap-on connection, and hook connection.

7. The polishing fixture for the heating plate according to claim 1, characterized in that, Also includes: An annular seal (5) is disposed between the disc body (601) and the support platform (1). The annular seal (5) is disposed along the circumference of the support cylinder (602). The disc body (601) abuts against the surface of the annular seal (5).

8. The polishing fixture for the heating plate according to claim 5, characterized in that, Also includes: At least two limiting members (4) are arranged at intervals along the circumference of the support platform (1). The disc body (601) is provided with at least two first limiting holes (6011) corresponding to the limiting members (4). The support platform (1) is provided with at least two second limiting holes (102) opposite to the first limiting holes (6011). One end of the limiting member (4) is inserted into the first limiting hole (6011) and the other end is inserted into the second limiting hole (102) to limit and fix the disc body (601) and the support platform (1).

9. The polishing fixture for the heating plate according to claim 5, characterized in that, The support frame (3) includes: The base (31) is spaced apart on the side of the support platform (1) away from the disk body (601); At least two support members (32) are disposed between the support platform (1) and the base (31), and each of the support members (32) is spaced apart along the circumference of the support cylinder (602) to form the accommodating space (30).

10. The polishing fixture for the heating plate according to claim 9, characterized in that, The support member (32) includes: The first support part (321) is connected to the base (31); The second support part (322) is connected to the support platform (1), and the second support part (322) is slidably connected to the first support part (321); The locking mechanism (323) is used to lock and fix the second support (322) relative to the first support (321) in a predetermined position.

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