A single crystal furnace cover structure

Abstract

This application discloses a single-crystal furnace cover structure, belonging to the field of single-crystal furnace technology. It mainly includes a cover assembly comprising an insulation shell; an inner cover fixedly installed inside the insulation shell, with a flange fixedly installed on one side of the inner cover; and a connecting cylinder fixedly installed at the upper end of the inner cover, with its top protruding from and fixedly connected to the insulation shell. A discharge pipe is bolted to the top of the connecting cylinder. This single-crystal furnace cover structure incorporates a pressure relief pipe, a baffle plate, a spring, and a sealing ball. During operation, the sealing ball seals the pressure relief pipe, preventing temperature loss within the furnace. When pressure relief is needed, the sealing ball is pushed upwards, removing it from the pressure relief pipe, opening the pipe and allowing gas to escape, thus releasing pressure and improving the yield of crystal products.

Description

Technical Field

[0001] This application relates to the field of single crystal furnace technology, specifically a single crystal furnace cover structure. Background Technology

[0002] A single crystal furnace is a key piece of equipment used to produce semiconductor materials such as single crystal silicon. It is widely used in fields such as solar photovoltaics, integrated circuits, and semiconductor devices. Its core function is to transform polycrystalline silicon raw materials into high-purity, large-size single crystal silicon rods through specific processes, providing the basic materials for subsequent silicon wafer processing and chip manufacturing. The furnace cover is one of the key components of the single crystal furnace equipment. It is usually located at the top of the furnace body and is used to seal the furnace cavity and connect with other parts of the furnace body. The furnace cover is a core component in single crystal silicon growth equipment. By optimizing the design of the furnace cover, the growth quality, process stability, and equipment reliability of single crystal silicon can be significantly improved.

[0003] The existing single crystal furnace cover is generally composed of a flange, a cover body, and an isolation valve. The cover body is connected to the single crystal furnace through the flange to ensure the stability of the single crystal furnace cover, and the isolation valve is used to seal the single crystal furnace to prevent other gases and external impurities from entering the single crystal furnace during operation.

[0004] Although the aforementioned furnace cover achieves a seal for the single crystal furnace, a high-temperature reaction process occurs inside the furnace during operation, where silicon and catalysts are heated to high temperatures. However, during heating, the silicon releases moisture and other impurities such as gases. As the high-temperature reaction of the silicon continues, the gas inside the furnace increases, leading to higher furnace pressure. At this point, it is necessary to release the pressure inside the furnace to prevent a decrease in crystal quality and to avoid affecting the yield of single crystal silicon. Therefore, it is necessary to provide a furnace cover structure for a single crystal furnace to solve the above problems.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore may include information that does not constitute prior art. Summary of the Invention

[0006] Based on the aforementioned problems in the existing technology, the problem to be solved by this application is to provide a single crystal furnace cover structure that solves the problem of gas pressure not being released inside the single crystal furnace.

[0007] The technical solution adopted by this application to solve its technical problem is: a single crystal furnace cover structure, comprising: a cover assembly, the cover assembly including a heat insulation shell; an inner cover, the inner cover being fixedly installed inside the heat insulation shell, and a flange being fixedly installed on one side of the outer side of the inner cover; a connecting cylinder, the connecting cylinder being fixedly installed on the upper end of the inner cover, the top of the connecting cylinder protruding from the heat insulation shell and fixedly connected to the heat insulation shell, and a discharge pipe being fixedly installed on the top of the connecting cylinder by bolts; at least two sets of pressure relief pipes, the pressure relief pipes being fixedly installed on the inner cover; a baffle plate, the baffle plate being fixedly installed inside the pressure relief pipe, and the baffle plate being provided with a through hole; a spring, the spring being fixedly installed on the top of the baffle plate; a sealing ball, the sealing ball being fixedly installed on the top of the spring, and the top of the pressure relief pipe being provided with an arc surface, the arc surface being adapted to the sealing ball; wherein: when the sealing ball is in contact with the arc surface, the spring is in a stretched state.

[0008] Furthermore, a sealing gasket is fixedly installed on the top of the pressure relief pipe, and the inner side of the sealing gasket is in contact with the outer surface of the sealing ball.

[0009] Furthermore, a furnace body is provided at the bottom of the inner cover, and an installation end is provided at the upper end of the furnace body. The flange is fixedly connected to the installation end by at least two sets of bolts.

[0010] Furthermore, a first threaded sleeve is rotatably connected to the discharge pipe via a bearing. The outer surface of the first threaded sleeve is provided with an external thread. A second threaded sleeve is threadedly connected to the outer surface of the first threaded sleeve. Guide rods are provided through both sides of the second threaded sleeve. One side of the guide rod is fixedly connected to the top of the connecting cylinder, and the other side of the guide rod is fixedly connected to the discharge pipe. A connecting rod is fixedly installed on the top of the sealing ball. A connecting piece is fixedly installed on the other end of the connecting rod. The two sides of the connecting piece are connected to the side of the second threaded sleeve by bolts.

[0011] Furthermore, the second threaded sleeve is provided with a locking threaded sleeve, which is threadedly connected to the first threaded sleeve.

[0012] Furthermore, a pressure gauge is fixedly installed on the insulation shell, and an insulation chamber is provided between the insulation shell and the inner cover.

[0013] The beneficial effects of this application are as follows: The single crystal furnace cover structure provided in this application, by being equipped with a pressure relief pipe, a baffle plate, a spring, and a sealing ball, allows the pressure relief pipe to be sealed by the sealing ball during operation of the single crystal furnace, thus preventing temperature loss inside the furnace. When pressure relief is required, the sealing ball can be pushed up to remove it from the pressure relief pipe, at which point the pressure relief pipe is in the open state, and the gas inside the single crystal furnace can be discharged from the pressure relief pipe, thereby releasing the gas pressure inside the single crystal furnace and improving the yield of crystal products.

[0014] In addition to the purposes, features, and advantages described above, this application has other purposes, features, and advantages. A further detailed description of this application will be provided below with reference to the figures. Attached Figure Description

[0015] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an undue limitation of this application.

[0016] In the attached diagram:

[0017] Figure 1 This is an overall schematic diagram of a single crystal furnace cover structure according to this application;

[0018] Figure 2 for Figure 1 Schematic diagram of the overall structure of the middle cover component;

[0019] Figure 3 for Figure 2 Overall structural sectional view;

[0020] Figure 4 for Figure 2 Enlarged view of the structure of region A in the middle;

[0021] Figure 5 for Figure 3 Enlarged view of the structure of region B in the middle.

[0022] The following are the labeling elements in the figure:

[0023] 1. Furnace body; 11. Mounting end; 2. Cover assembly; 21. Insulation shell; 22. Flange; 23. Inner cover; 24. Connecting cylinder; 25. Discharge pipe; 26. First threaded sleeve; 27. Second threaded sleeve; 28. Locking threaded sleeve; 3. Pressure relief pipe; 31. Baffle plate; 32. Spring; 33. Sealing ball; 34. Connecting rod; 35. Connecting piece; 4. Sealing gasket; 5. Guide rod. Detailed Implementation

[0024] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0025] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0026] like Figures 1-3 As shown, this application provides a single crystal furnace cover structure, including a cover assembly 2. The cover assembly 2 includes a heat insulation shell 21, and an inner cover 23 is fixedly installed inside the heat insulation shell 21. A furnace body 1 is provided at the bottom of the inner cover 23. The furnace body 1 is the existing single crystal furnace, and the inner cover 23 is in direct contact with the furnace body 1. A heat insulation chamber is provided between the heat insulation shell 21 and the inner cover 23. When the temperature inside the furnace body 1 is high, the temperature at the inner cover 23 will also be high. The heat insulation chamber plays a role in heat preservation to prevent heat loss.

[0027] An installation end 11 is provided at the upper end of the furnace body 1. At the same time, a flange 22 is fixedly installed on the side of the inner cover 23 near the installation end 11. The flange 22 is fixedly connected to the installation end 11 by multiple sets of bolts, thereby realizing the fixation between the inner cover 23 and the furnace body 1. The flange 22 facilitates the disassembly and assembly of the cover assembly 2 while ensuring the airtightness of the furnace body 1.

[0028] A connecting cylinder 24 is fixedly installed on the upper end of the inner cover 23. The top of the connecting cylinder 24 protrudes from the insulation shell 21 and is fixedly connected to the insulation shell 21. At the same time, a discharge pipe 25 is fixedly installed on the top of the connecting cylinder 24 by bolts. The discharge pipe 25 is connected to the connecting cylinder 24. An electromagnetic discharge valve (not shown in the figure) is also provided inside the connecting cylinder 24. In the initial state, the electromagnetic discharge valve is in the closed state. At this time, the material cannot be discharged from the connecting cylinder 24 and the discharge pipe 25. At the same time, the electromagnetic discharge valve also plays a sealing role. When it is necessary to discharge, simply open the electromagnetic discharge valve, and the connecting cylinder 24 and the discharge pipe 25 are connected, and the material can be discharged from the connecting cylinder 24 and the discharge pipe 25.

[0029] When the furnace body 1 is working, the inner cover 23 is fixedly connected to the furnace body 1 through the flange 22 to ensure the sealing of the furnace body 1, and is provided with a heat insulation shell 21 to keep the furnace body 1 warm. When the furnace body 1 is finished working, the operator can open the electromagnetic discharge valve through electrical control, and then the product in the furnace body 1 can be discharged through the discharge pipe 25.

[0030] Because high-temperature operations occur within furnace 1 for extended periods, it is necessary to release the pressure inside furnace 1 to prevent excessively high gas pressure from affecting product yield. For example... Figures 2-5 As shown, at least two sets of pressure relief pipes 3 are fixedly installed on the inner cover 23. The pressure relief pipes 3 are connected to the furnace body 1, and the air pressure inside the furnace body 1 is suitable for being discharged through the pressure relief pipes 3.

[0031] A baffle plate 31 is fixedly installed inside the pressure relief pipe 3. The baffle plate 31 has a through hole and does not affect the release of gas from the pressure relief pipe 3. A spring 32 is fixedly installed on the top of the baffle plate 31, and a sealing ball 33 is fixedly installed on the top of the spring 32. It should be noted that an arc surface is provided on the top of the pressure relief pipe 3. The arc surface is adapted to the surface of the sealing ball 33. When the surface of the sealing ball 33 contacts the arc surface, the sealing ball 33 seals the pressure relief pipe 3. Furthermore, in order to ensure the sealing effect, a sealing gasket 4 is also fixedly installed on the top of the pressure relief pipe 3. The inner side of the sealing gasket 4 contacts the outer surface of the sealing ball 33. The sealing gasket 4 is mainly used to block the gap between the sealing ball 33 and the pressure relief pipe 3, so as to achieve a better sealing effect.

[0032] It should be noted that, in the initial state, the spring 32 is in a stretched state. When there is no external force, the sealing ball 33 is tightly attached to the arc surface of the pressure relief pipe 3, and the pressure relief pipe 3 is in a closed state. When pressure relief is required, the staff only needs to use external tools to pull the sealing ball 33 upward, and the sealing ball 33 will separate from the pressure relief pipe 3. The pressure relief pipe 3 will change from a closed state to an open state. At this time, the gas pressure in the furnace body 1 can be discharged from the pressure relief pipe 3 to achieve the effect of pressure relief.

[0033] To facilitate staff control of the upward movement of the blocking ball 33, please continue to refer to... Figures 2-5 A first threaded sleeve 26 is rotatably connected to the discharge pipe 25 via a bearing. The first threaded sleeve 26 is adapted to rotate around the discharge pipe 25 as the center. An external thread is provided on the outer surface of the first threaded sleeve 26. At the same time, a second threaded sleeve 27 is threadedly connected to the surface of the first threaded sleeve 26. Guide rods 5 are provided through both sides of the second threaded sleeve 27. One side of the guide rod 5 is fixedly connected to the top of the connecting cylinder 24, and the other side of the guide rod 5 is fixedly connected to the discharge pipe 25. The guide rod 5 plays a role in limiting and guiding the second threaded sleeve 27.

[0034] When the first threaded sleeve 26 rotates under the drive of an external force, due to the threaded connection between the first threaded sleeve 26 and the second threaded sleeve 27, the movement of the first threaded sleeve 26 will drive the second threaded sleeve 27 to move synchronously. However, due to the restriction of the guide rod 5, the second threaded sleeve 27 cannot rotate. Consequently, the second threaded sleeve 27 will move up or down as the first threaded sleeve 26 rotates forward or backward.

[0035] A connecting rod 34 is fixedly installed on the top of the plugging ball 33, and a connecting piece 35 is fixedly installed on the other end of the connecting rod 34. The two sides of the connecting piece 35 are connected to the side of the second threaded sleeve 27 by bolts. When the second threaded sleeve 27 moves up or down, the connecting rod 34 moves up or down synchronously, and drives the plugging ball 33 to move synchronously.

[0036] Furthermore, to prevent the second threaded sleeve 27 from continuing to move due to external forces after its position has been adjusted, continue to refer to... Figure 4 A locking sleeve 28 is provided on the second sleeve 27. The locking sleeve 28 is threadedly connected to the first sleeve 26. After the position of the second sleeve 27 is adjusted, the locking sleeve 28 needs to be tightened. The tightened locking sleeve 28 fits against the second sleeve 27 and plays a limiting role. At the same time, in order to facilitate the monitoring of the gas pressure in the furnace body 1, a pressure gauge is fixedly installed on the insulation shell 21. One end of the pressure gauge extends into the furnace body 1.

[0037] In the initial state, the second screw sleeve 27 is located at the lower end of the first screw sleeve 26. At this time, the sealing ball 33 is in contact with the top surface of the pressure relief pipe 3, the pressure relief pipe 3 is in the closed state, and the furnace body 1 is working normally. When the furnace body 1 is subjected to long-term high-temperature operation, the internal air pressure will continuously increase and a high-pressure state will appear. The staff can clearly understand the air pressure in the furnace body 1 through the pressure gauge.

[0038] If it is necessary to depressurize the furnace body 1, the operator must first loosen the locking nut 28, and then tighten the first nut 26. The rotation of the first nut 26 causes the second nut 27 to move upward. The upward movement of the second nut 27 causes the connecting rod 34 to move upward. The upward movement of the connecting rod 34 causes the sealing ball 33 to move upward. The sealing ball 33 moves upward and separates from the top of the pressure relief pipe 3. The pressure relief pipe 3 changes from the closed state to the open state. The gas pressure in the furnace body 1 is discharged from the pressure relief pipe 3.

[0039] After the pressure relief is completed, the staff only needs to reverse the first threaded sleeve 26 to drive the second threaded sleeve 27 to move down. After the sealing ball 33 is once again in contact with the arc surface at the top of the pressure relief pipe 3, the staff stops reversing the first threaded sleeve 26 and then tightens the locking threaded sleeve 28.

[0040] By using the first threaded sleeve 26 and the second threaded sleeve 27 together, the upward or downward movement of the sealing ball 33 can be controlled without the operator having to contact it, which increases the safety during pressure relief. At the same time, the connecting rod 34 is connected to the second threaded sleeve 27 by bolts, which is convenient for disassembly and assembly and facilitates subsequent maintenance operations.

[0041] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A single-crystal furnace lid structure, characterized in that: include: Cover assembly (2), which includes an insulation shell (21); An inner cover (23) is fixedly installed inside the insulation shell (21), and a flange (22) is fixedly installed on one side of the outer side of the inner cover (23); A connecting cylinder (24) is fixedly installed on the upper end of the inner cover (23). The top of the connecting cylinder (24) protrudes from the heat insulation shell (21) and is fixedly connected to the heat insulation shell (21). A discharge pipe (25) is fixedly installed on the top of the connecting cylinder (24) by bolts. At least two sets of pressure relief pipes (3) are fixedly installed on the inner cover (23); A baffle (31) is fixedly installed inside the pressure relief pipe (3), and the baffle (31) is provided with a through hole; A spring (32) is fixed to the top of the baffle (31); A sealing ball (33) is fixedly installed on the top of the spring (32), and the top of the pressure relief pipe (3) is provided with an arc surface, which is adapted to the sealing ball (33); Wherein: when the blocking ball (33) is in contact with the arc surface, the spring (32) is in a stretched state.

2. The single-crystal furnace lid structure according to claim 1, characterized in that: A sealing gasket (4) is fixedly installed on the top of the pressure relief pipe (3), and the inner side of the sealing gasket (4) is in contact with the outer surface of the sealing ball (33).

3. The single-crystal furnace lid structure according to claim 2, characterized in that: The bottom of the inner cover (23) is provided with a furnace body (1), and the upper end of the furnace body (1) is provided with an installation end (11). The flange (22) is fixedly connected to the installation end (11) by at least two sets of bolts.

4. The single-crystal furnace lid structure according to claim 3, characterized in that: The discharge pipe (25) is rotatably connected to a first threaded sleeve (26) via a bearing. The outer surface of the first threaded sleeve (26) is provided with an external thread. The outer surface of the first threaded sleeve (26) is threadedly connected to a second threaded sleeve (27). Guide rods (5) are provided through both sides of the second threaded sleeve (27). One side of the guide rod (5) is fixedly connected to the top of the connecting cylinder (24), and the other side of the guide rod (5) is fixedly connected to the discharge pipe (25). A connecting rod (34) is fixedly installed on the top of the sealing ball (33). A connecting piece (35) is fixedly installed on the other end of the connecting rod (34). The two sides of the connecting piece (35) are connected to the side of the second threaded sleeve (27) by bolts.

5. The single-crystal furnace lid structure according to claim 4, characterized in that: The second threaded sleeve (27) is provided with a locking threaded sleeve (28), which is threadedly connected to the first threaded sleeve (26).

6. The single-crystal furnace lid structure according to claim 5, characterized in that: A pressure gauge is fixedly installed on the heat insulation shell (21), and a heat insulation chamber is provided between the heat insulation shell (21) and the inner cover (23).

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