A silicon wafer chamfer detection device

Abstract

This utility model belongs to the field of semiconductor testing technology, specifically relating to a chamfering inspection device for silicon wafers. The device includes: a base; a conveyor mounted on the base for transporting silicon wafers; and a testing component including: an industrial camera mounted above the conveyor, wherein the industrial camera is adapted to acquire and upload images of the chamfering of the silicon wafer; a reciprocating assembly mounted above the conveyor and connected to the industrial camera, adapted to drive the industrial camera to move; a rotary telescopic cylinder mounted on the base, located in the middle of the conveyor, adapted to lift the silicon wafer and drive it to rotate; and a main control module electrically connected to the conveyor, industrial camera, reciprocating assembly, and rotary telescopic cylinder. This silicon wafer chamfering inspection device achieves 360-degree omnidirectional inspection of the entire circumference chamfer of the silicon wafer by using the rotary telescopic cylinder to drive the silicon wafer to rotate and the industrial camera to move under the drive of the reciprocating assembly, thus improving inspection efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor testing technology, specifically relating to a chamfering testing device for silicon wafers. Background Technology

[0002] In the semiconductor manufacturing field, silicon wafers are the basic material for integrated circuits, and the quality of their chamfered edges directly affects the precision of subsequent processes and chip performance. Chamfer defects (such as chipping, burrs, and angle deviations) can lead to wafer breakage, photolithography alignment failure, or packaging failure. Therefore, efficient and accurate inspection must be implemented during the production process.

[0003] Traditional silicon wafer chamfering inspection is usually carried out manually or by optical inspection devices. Manual inspection relies on experience, is prone to fatigue, and cannot meet the needs of large-scale production. Although traditional optical inspection devices (such as multi-mirror group designs) can achieve automation, the optical path is complex, multiple reflections can easily lead to image distortion, and the equipment maintenance cost is high.

[0004] Therefore, in order to solve the above problems, it is necessary to design a chamfering detection device for silicon wafers. Utility Model Content

[0005] The purpose of this invention is to provide a chamfering inspection device for silicon wafers to solve the technical problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, this utility model provides a chamfering inspection device for silicon wafers, comprising:

[0007] Base;

[0008] A conveyor mounted on the base is suitable for transporting silicon wafers;

[0009] The detection assembly includes: an industrial camera positioned above the conveyor; wherein

[0010] The industrial camera is suitable for capturing and uploading images of the chamfering of silicon wafers;

[0011] The reciprocating component, located above the conveyor, is connected to the industrial camera and is suitable for moving the industrial camera.

[0012] A rotary telescopic cylinder mounted on the base is located in the middle of the conveyor and is suitable for lifting the silicon wafer and driving it to rotate.

[0013] The main control module is electrically connected to the conveyor, industrial camera, reciprocating assembly, and rotary telescopic cylinder.

[0014] Furthermore, a support plate is provided on the top of the rotary telescopic cylinder;

[0015] The top of the support plate is equipped with a rubber sheet.

[0016] Furthermore, the detection component also includes: a light source bracket positioned at the bottom of the industrial camera, a ring light positioned at the bottom of the light source bracket, and a connecting block connected to the industrial camera; wherein

[0017] The lamp source bracket is L-shaped and consists of a straight section and a circular section;

[0018] The straight section is connected to the connecting block;

[0019] The circular part is connected to the ring light.

[0020] Furthermore, the reciprocating assembly includes: a gantry frame mounted on a base, a guide rail mounted on the gantry frame, a slider slidably connected to the guide rail, support blocks mounted at both ends of the guide rail, a lead screw connected to the bearings of the two support blocks, and a motor connected to one end of the lead screw; wherein

[0021] The slider is connected to the straight section;

[0022] The two support blocks are fixed to the gantry frame;

[0023] The lead screw passes through the connecting block and is threadedly connected to the connecting block;

[0024] The motor is fixed to any support block; and

[0025] The motor is electrically connected to the main control module.

[0026] The beneficial effects of this utility model are:

[0027] (I) The main control module of this utility model controls the conveyor to transport silicon wafers. When the silicon wafer is transported by the conveyor to the detection area of ​​the industrial camera, the industrial camera recognizes the silicon wafer and uploads the signal to the main control module. The main control module controls the conveyor to stop transporting and simultaneously controls the rotary telescopic cylinder to extend upwards and lift the silicon wafer through the support plate and rubber sheet, so that the silicon wafer is removed from the conveyor. At this time, the main control module controls the reciprocating assembly to drive the industrial camera to move in order to acquire images of the chamfer. The main control module controls the rotary telescopic cylinder to drive the silicon wafer to rotate 90 degrees. The main control module controls the reciprocating assembly to drive the industrial camera to reset. At the same time, the industrial camera acquires images of the chamfer. The rotary telescopic cylinder's rotation action (specifically, the process is: extension-rotation-retraction (silicon wafer placed on the conveyor)-rotation reset-repeating the above actions) and the reciprocating assembly driving the industrial camera's reciprocating motion are repeated. The process continues until all chamfering images are acquired. During the movement of the industrial camera, a ring light continuously provides uniform illumination. The industrial camera uploads the acquired image data to the main control module, which processes and analyzes the image data, comparing it with preset standard images or parameters to determine whether the silicon wafer chamfering is qualified (defects such as chipped edges, burrs, and angle deviations are considered unqualified). Finally, the inspection result is output. After the inspection is completed, the rotary telescopic cylinder retracts, and the silicon wafer falls back to the conveyor. The main control module controls the conveyor to start, so as to transport the silicon wafer to the next process. The silicon wafer is automatically transported by the conveyor, and the rotary telescopic cylinder drives the silicon wafer to rotate. The industrial camera and reciprocating components realize automated image acquisition without manual intervention, which greatly improves the inspection speed, meets the needs of large-scale production, and solves the problem of low efficiency of manual inspection.

[0028] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and the accompanying drawings.

[0029] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0030] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0031] Figure 1 This is a perspective view of a preferred embodiment of the present invention.

[0032] Figure 2 This is a perspective view of a preferred embodiment of the rotary telescopic cylinder 5 of this utility model;

[0033] Figure 3 This is a perspective view of a preferred embodiment of the detection component and reciprocating component of this utility model;

[0034] Figure 4 yes Figure 3 A magnified view of region A in the middle.

[0035] In the picture:

[0036] Base 1, conveyor 2;

[0037] Detection component 3, industrial camera 301, lamp source bracket 302, straight part 3021, circular part 3022, ring lamp 303, connecting block 304;

[0038] Reciprocating assembly 4, gantry frame 401, guide rail 402, slider 403, support block 404, lead screw 405, motor 406;

[0039] 5. Rotary telescopic cylinder; 6. Support plate; 7. Rubber sheet;

[0040] Silicon wafer 8. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model. Example 1

[0042] like Figures 1 to 4 As shown, this embodiment provides a chamfering inspection device for silicon wafers, including:

[0043] The system comprises: a base 1; a conveyor 2 mounted on the base 1, suitable for conveying silicon wafers; and a detection component 3, including: an industrial camera 301 mounted above the conveyor 2, wherein the industrial camera 301 is suitable for acquiring and uploading images of the chamfered edges of the silicon wafer; a reciprocating component 4 mounted above the conveyor 2 and connected to the industrial camera 301, suitable for moving the industrial camera 301; a rotary telescopic cylinder 5 mounted on the base 1, located in the middle of the conveyor 2, suitable for lifting the silicon wafer and rotating it; and a main control module electrically connected to the conveyor 2, the industrial camera 301, the reciprocating component 4, and the rotary telescopic cylinder 5. Preferably, the conveyor 2 is a single-motor driven double parallel belt conveyor; preferably, the main control module is a PLC or a microcontroller; preferably, the rotary telescopic cylinder 5 rotates 90 degrees. The rotary telescopic cylinder 5 drives the silicon wafer to rotate, and the industrial camera 301 moves under the drive of the reciprocating component 4, achieving 360-degree all-around detection of the entire circumference chamfer of the silicon wafer, eliminating blind spots and ensuring that no chamfer defect is missed.

[0044] The top of the rotary telescopic cylinder 5 is provided with a support plate 6; the top of the support plate 6 is provided with a rubber sheet 7; by providing the support plate 6, the contact area with the silicon wafer is increased, the weight of the silicon wafer is evenly borne, and the deformation or damage to the silicon wafer is prevented during lifting and rotation; it is preferable that the rubber sheet 7 is pasted on the top of the support plate 6; by providing the rubber sheet 7, the direct hard contact between the support plate 6 and the silicon wafer is avoided, which would damage the surface of the silicon wafer, and the friction between them is increased, preventing the silicon wafer from slipping during rotation and affecting the detection effect.

[0045] The detection component 3 further includes: a light source bracket 302 disposed at the bottom of the industrial camera 301, a ring light 303 disposed at the bottom of the light source bracket 302, and a connecting block 304 connected to the industrial camera 301; wherein the light source bracket 302 is L-shaped and consists of a straight portion 3021 and a circular portion 3022; the straight portion 3021 is connected to the connecting block 304; the circular portion 3022 is connected to the ring light 303; wherein the ring light 303 is preferably an LED light; wherein by setting the circular portion 3022 and the ring light 303, the field of view of the industrial camera 301 is avoided. The industrial camera 301 provides a stable and uniform illumination source, enabling it to capture the detailed features of the chamfer more accurately, resulting in more precise inspection results. The direct imaging method using the industrial camera 301 in conjunction with the ring lamp 303 eliminates the need for complex multi-mirror groups, reducing imaging distortion caused by optical path reflections and making the acquired images more realistic and clear, thus ensuring the accuracy of the inspection results. Furthermore, the simple optical path structure reduces the use of vulnerable components such as mirrors, lowering the difficulty and cost of equipment maintenance and solving the problem of high maintenance costs associated with traditional optical inspection devices.

[0046] The reciprocating assembly 4 includes: a gantry frame 401 mounted on the base 1, a guide rail 402 mounted on the gantry frame 401, a slider 403 slidably connected to the guide rail 402, support blocks 404 mounted at both ends of the guide rail 402, a lead screw 405 bearing-connected to the two support blocks 404, and a motor 406 connected to one end of the lead screw 405; wherein the slider 403 is connected to the straight section 3021; ​​the two support blocks 404 are fixed on the gantry frame 401; the lead screw 405 passes through the connecting block 304 and is threadedly connected to the connecting block 304; the motor 406 is fixed on any of the support blocks 404; and the motor 406 is electrically connected to the main control module; wherein adding a speed reducer between the motor 406 and the lead screw 405 is the most preferred option.

[0047] In this embodiment, the working principle of the reciprocating component 4 is as follows: the main control module controls the motor 406 to rotate forward, the motor 406 drives the lead screw 405 to rotate, the lead screw 405 converts the rotational motion into the linear motion of the connecting block 304 through the threaded transmission, the connecting block 304 drives the slider 403 to slide on the guide rail 402 through the straight part 3021, the connecting block 304 drives the industrial camera 301 to move, and when the main control module controls the motor 406 to rotate in reverse, the industrial camera 301 is reset.

[0048] In this embodiment, the overall working principle is as follows: The main control module controls the conveyor 2 to transport silicon wafers. When the silicon wafer is transported by the conveyor 2 to the detection area of ​​the industrial camera 301, the industrial camera 301 identifies the silicon wafer and uploads the signal to the main control module. The main control module controls the conveyor 2 to stop transporting and simultaneously controls the rotary telescopic cylinder 5 to extend upwards and lift the silicon wafer through the support plate 6 and rubber sheet 7, causing the silicon wafer to detach from the conveyor 2. At this time, the main control module controls the reciprocating assembly 4 to drive the industrial camera 301 to move in order to acquire images of the chamfer. The main control module controls the rotary telescopic cylinder 5 to drive the silicon wafer to rotate 90 degrees. The main control module controls the reciprocating assembly 4 to drive the industrial camera 301 to reset. At the same time, the industrial camera 301 acquires images of the chamfer. The rotation action of the rotary telescopic cylinder 5 is repeated (specifically, the process is: extension-rotation-retraction (silicon wafer placed on the conveyor 2)-rotation reset-repeated action) and the reciprocating assembly 4 drives the industrial camera 301 to move. The reciprocating motion of camera 301 continues until all chamfering images are acquired. During the movement of industrial camera 301, ring light 303 continuously provides uniform illumination. Industrial camera 301 uploads the acquired image data to the main control module. The main control module processes and analyzes the image data, compares it with preset standard images or parameters, and determines whether the silicon wafer chamfer is qualified (defects such as chipped edges, burrs, and angle deviations are considered unqualified). Finally, the inspection result is output. After the inspection is completed, rotary telescopic cylinder 5 retracts, and the silicon wafer falls back to conveyor 2. The main control module controls the start of conveyor 2 to transport the silicon wafer to the next process. The silicon wafer is automatically transported by conveyor 2, and rotary telescopic cylinder 5 drives the silicon wafer to rotate. Industrial camera 301 and reciprocating assembly 4 achieve automated image acquisition without manual intervention, which greatly improves the inspection speed, meets the needs of large-scale production, and solves the problem of low efficiency of manual inspection.

[0049] All the devices selected in this application (parts whose specific structures are not specified) are general standard parts or parts known to those skilled in the art. Their structures and principles can be learned by those skilled in the art through technical manuals or conventional experimental methods.

[0050] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0051] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0052] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0053] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0054] In addition, in the various embodiments of this utility model, each functional unit can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0055] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A chamfering inspection device for silicon wafers, characterized in that, include: Base (1); A conveyor (2) mounted on a base (1) is suitable for conveying silicon wafers; The detection component (3) includes an industrial camera (301) disposed above the conveyor (2); wherein The industrial camera (301) is adapted to acquire and upload images of the chamfering of silicon wafers; The reciprocating component (4) is located above the conveyor (2) and connected to the industrial camera (301), and is suitable for driving the industrial camera (301) to move; The rotary telescopic cylinder (5) is set on the base (1) and located in the middle of the conveyor (2), which is suitable for lifting the silicon wafer and driving the silicon wafer to rotate; The main control module is electrically connected to the conveyor (2), industrial camera (301), reciprocating assembly (4) and rotary telescopic cylinder (5).

2. The chamfering inspection device for silicon wafers as described in claim 1, characterized in that, The top of the rotary telescopic cylinder (5) is provided with a support plate (6). The top of the support plate (6) is provided with a rubber sheet (7).

3. The chamfering inspection device for silicon wafers as described in claim 2, characterized in that, The detection component (3) further includes: a light source bracket (302) at the bottom of the industrial camera (301), a ring light (303) at the bottom of the light source bracket (302), and a connecting block (304) connected to the industrial camera (301); wherein The lamp source bracket (302) is L-shaped and consists of a straight part (3021) and a circular part (3022); The straight section (3021) is connected to the connecting block (304); The annular portion (3022) is connected to the ring lamp (303).

4. The chamfering inspection device for silicon wafers as described in claim 3, characterized in that, The reciprocating assembly (4) includes: a gantry frame (401) mounted on a base (1), a guide rail (402) mounted on the gantry frame (401), a slider (403) slidably connected to the guide rail (402), support blocks (404) mounted at both ends of the guide rail (402), a lead screw (405) bearing connected to the two support blocks (404), and a motor (406) connected to one end of the lead screw (405); wherein The slider (403) is connected to the straight section (3021); The two support blocks (404) are fixed on the gantry frame (401); The lead screw (405) passes through the connecting block (304) and is threadedly connected to the connecting block (304); The motor (406) is fixed to any of the support blocks (404); and The motor (406) is electrically connected to the main control module.

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