Split device for cross-section detection

Abstract

The utility model discloses a kind of crack device for section detection, including clamping assembly, scratch component and knock component. Clamping assembly includes base and the clamping piece being located above base, base can be matched with clamping piece to clamp sample to be detected. Scratch component includes the scratch knife being located above base and controllably moving along horizontal direction, the tip of scratch knife is towards sample to be detected, scratch knife is used to scratch on the surface of sample to be detected along preset track. Knock component includes the knock piece being located above base and controllably moving along vertical direction, the bottom end of knock piece is towards sample to be detected, for knocking sample to be detected with scratch. The utility model can realize the automation of sample's crack, improve the efficiency and quality of sample crack.

Description

Technical Field

[0001] This utility model belongs to the field of cross-section detection technology, and specifically relates to a dicing device for cross-section detection. Background Technology

[0002] SEM cross-sectional inspection involves observing and analyzing the cross-section of a sample to obtain information such as its internal structure, composition distribution, defect characteristics, and dimensional accuracy.

[0003] Before SEM cross-sectional inspection, the sample needs to be diced. Currently, the dicing of the sample is mainly done manually. The efficiency and quality of dicing depend entirely on the operator's skill. If the operation is not done properly, it will cause the sample to tilt, bend and scratch.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0005] The purpose of this invention is to provide a dicing device for cross-sectional detection, which solves the problems of poor efficiency and quality of manual dicing.

[0006] To achieve the above objectives, a specific embodiment of this utility model provides a dicing device for cross-sectional inspection, including a clamping assembly, a scratching assembly, and a striking assembly. The clamping assembly includes a base and a clamping member disposed above the base, the base cooperating with the clamping member to clamp the sample to be inspected. The scratching assembly includes a scratching blade located above the base and controllably movable horizontally, the tip of the scratching blade facing the sample to be inspected, and the scratching blade used to scratch the surface of the sample along a preset trajectory. The striking assembly includes a striking member located above the base and controllably movable vertically, the bottom end of the striking member facing the sample to be inspected, used to strike the scratched sample.

[0007] In one or more embodiments of this utility model, on the side near the scratching tool, the base protrudes horizontally from the clamping member.

[0008] In one or more embodiments of this utility model, the base and the clamping member are located on the same side of the tip of the scratching knife in the horizontal direction.

[0009] In one or more embodiments of this utility model, the dicing device further includes a sample receiving groove disposed below the striking member.

[0010] In one or more embodiments of this utility model, the groove wall facing the striking member of the sample receiving groove is configured as a downwardly concave arc surface.

[0011] In one or more embodiments of the present invention, the scratching assembly further includes a lifting mechanism connected to the scratching blade, the lifting mechanism being used to adjust the height of the scratching blade.

[0012] In one or more embodiments of this utility model, the striking element is located on the side of the scratching knife away from the clamping assembly.

[0013] In one or more embodiments of this utility model, the bottom end face of the striking member is configured as a downwardly convex arc surface.

[0014] In one or more embodiments of the present invention, the dicing device further includes a dust collection assembly, which includes a dust collection hose for absorbing sample fragments from the surface of the dicing device.

[0015] In one or more embodiments of the present invention, the dicing device further includes a first guide rail extending in a horizontal direction, along which the dicing blade can be moved in a controlled manner.

[0016] In one or more embodiments of the present invention, the sharding device further includes a second guide rail extending in a vertical direction, and the striking element can be moved controllably along the second guide rail.

[0017] Compared with existing technologies, the dicing device of this invention can achieve automated sample dicing, improving the efficiency and quality of sample dicing. Specifically, the clamping assembly clamps and fixes the sample to be tested, the scratching blade of the scratching assembly scratches the top surface of the sample, and the striking component of the striking assembly strikes the unclamped area of ​​the sample, causing the scratches on the sample to extend along a predetermined direction and dice along the scratches, forming a sample suitable for cross-sectional testing. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural view of a sharding device for cross-section detection in one embodiment of the present invention, taken from a certain perspective.

[0020] Figure 2 This is a three-dimensional structural view of the dicing device for cross-section detection in one embodiment of the present invention from another perspective;

[0021] Figure 3This is a side view of a dicing device for cross-section detection according to an embodiment of the present invention;

[0022] Figure 4 This is a side view of the clamping assembly and the scratching tool in one embodiment of the present invention.

[0023] Explanation of main reference numerals in the attached drawings: 1. Clamping assembly; 11. Base; 12. Clamping component; 2. Scraping assembly; 21. Scraping blade; 211. Blade tip; 212. Blade tip point; 22. First guide rail; 23. Lifting mechanism; 3. Tapping assembly; 31. Tapping component; 32. Second guide rail; 4. Sample receiving slot; 5. Base plate; 6. Support; 7. Sample to be tested. Detailed Implementation

[0024] To enable those skilled in the art to better understand the technical solutions of this utility model, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0025] In the description of this utility model, it should be understood that the terms "top", "bottom", "upper", "lower", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0026] Furthermore, the terms "second" and "first" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined as "second" or "first" may explicitly or implicitly include one or more of the stated features. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0027] In one embodiment, reference is made to Figure 1 As shown, this utility model provides a dicing device for cross-sectional detection. The dicing device includes a clamping component 1, a scratching component 2, a striking component 3, a sample receiving groove 4, and a base plate 5. The clamping component 1, the scratching component 2, the striking component 3, and the sample receiving groove 4 are all disposed on the base plate 5.

[0028] The clamping assembly 1 includes a base 11 and a clamping member 12 that cooperate to clamp the sample 7 to be tested. The scratching assembly 2 includes a scratching blade 21, and the striking assembly 3 includes a striking member 31. The scratching blade 21 and the striking member 31 are located on the same side of the clamping assembly 1. The tip 211 of the scratching blade 21 is located above and facing the sample 7 to be tested. The scratching blade 21 is used to scratch the top surface of the sample 7 to be tested along a preset trajectory. The striking member 31 is also located above and facing the sample 7 to be tested. After scratching the sample 7 to be tested, the striking member 31 is used to strike the area of ​​the sample 7 to be tested that is not clamped, causing the scratch on the sample 7 to extend along a predetermined direction and crack along the scratch, forming a sample that can be used for cross-sectional testing. The sample receiving groove 4 is located below the striking member 31 and is used to receive the sample 7 to be tested that has cracked due to the strike.

[0029] In one embodiment, reference is made to Figure 3 and Figure 4 As shown, the base 11 of the clamping assembly 1 cooperates with the clamping member 12 to clamp the sample 7 to be tested. The base 11 is fixed on the substrate 5 and is used to support the sample 7 to be tested. The clamping member 12 is located above the base 11 and can be moved relative to the base 11 in a controlled manner to change the distance between it and the base 11, so as to clamp and fix the sample 7 to be tested with different thicknesses.

[0030] The position of the clamping member 12 can be adjusted manually or automatically. When adjusted manually, the base 11 and the clamping member 12 can be temporarily connected together using bolts or clips to ensure sufficient clamping force on the sample 7 to be tested. When adjusted automatically, a linear movement mechanism can be used to drive the clamping member 12 to move up and down. This linear movement mechanism includes, but is not limited to, cylinders, hydraulic cylinders, linear motors, ball screw mechanisms, rack and pinion mechanisms, belt mechanisms, and chain mechanisms.

[0031] In one embodiment, reference is made to Figure 3 and Figure 4 As shown, in order to avoid the scratching knife 21, the base 11 protrudes horizontally from the clamping member 12 on the side close to the scratching knife 21, so as to leave enough room for the scratching knife 21 to move beside the clamping member 12.

[0032] Furthermore, to improve the success rate and quality of the dicing process, the scratches on the sample 7 to be tested should be located outside the bearing area of ​​the base 11. Specifically, the base 11 and the clamping member 12 are located on the same side of the tip 212 of the scratching blade 21 in the horizontal direction, and the base 11 and the clamping member 12 are spaced apart from the tip 212 of the scratching blade 21 in the horizontal direction, but this distance should not be too large.

[0033] In one embodiment, reference is made to Figure 3 and Figure 4 As shown, the scratching blade 21 of the scratching assembly 2 extends approximately in a vertical direction. The scratching blade 21 is located beside the base 11 and the clamping member 12. The tip 211 of the scratching blade 21 faces the sample 7 to be tested and is used to scratch the area of ​​the sample 7 to be tested that is not clamped.

[0034] Furthermore, the scratching assembly 2 also includes a first guide rail 22 and a lifting mechanism 23. The lifting mechanism 23 is connected to the scratching blade 21 and is used to drive the scratching blade 21 to move up and down, adjust the height of the blade tip 212 of the scratching blade 21, and thus adjust the scratch depth on the sample 7 to be tested. The first guide rail 22 extends approximately horizontally, and the lifting mechanism 23 is connected to the first guide rail 22 and can move along the first guide rail 22 to limit the movement direction of the scratching blade 21, making its movement trajectory approximately a smooth straight line, thereby improving the smoothness of the scratch.

[0035] Furthermore, the lifting mechanism 23 includes, but is not limited to, cylinders, hydraulic cylinders, and linear motors.

[0036] Furthermore, a linear motion mechanism can be provided to drive the lifting mechanism 23 to move along the first guide rail 22. The linear motion mechanism includes, but is not limited to, cylinders, hydraulic cylinders, linear motors, ball screw mechanisms, gear and rack mechanisms, belt mechanisms, and chain mechanisms.

[0037] In one embodiment, reference is made to Figure 1 and Figure 2 As shown, the striking assembly 3 also includes a second guide rail 32 and a movable plate. The second guide rail 32 is mounted on the base plate 5 and extends in the vertical direction. The movable plate is movably mounted on the second guide rail 32, and the striking element 31 is fixed to the bottom of the movable plate.

[0038] Furthermore, a linear movement mechanism can be provided to drive the striking element 31 and the moving plate to move along the second guide rail 32. The linear movement mechanism includes, but is not limited to, cylinders, hydraulic cylinders, linear motors, ball screw mechanisms, gear and rack mechanisms, belt mechanisms, and chain mechanisms.

[0039] In one embodiment, reference is made to Figure 3 As shown, the striking element 31 is located on the side of the scratching knife 21 away from the clamping assembly 1, so that the striking element 31 can strike the area of ​​the sample 7 to be tested that is not clamped.

[0040] Furthermore, the bottom end face of the striking component 31 is set as a downward convex arc surface to avoid generating unnecessary scratches on the sample 7 to be tested.

[0041] In one embodiment, reference is made to Figure 1 and Figure 2As shown, the groove wall of the sample receiving groove 4 facing the striking member 31 is set as a downward concave arc surface. When the sample to be tested 7 falls into the sample receiving groove 4 after it is broken, the contact area between the groove wall of the sample receiving groove 4 and the sample to be tested 7 can be reduced, thus protecting the sample to be tested 7 from being scratched.

[0042] In one embodiment, reference is made to Figure 1 and Figure 2 As shown, the sample receiving slot 4 is set close to the base 11, and the side of the sample receiving slot 4 away from the base 11 is set as an opening to facilitate the test personnel to take out the sample 7 to be tested after the fragment is broken from the sample receiving slot 4.

[0043] In one embodiment, the suction assembly includes a suction hose and a negative pressure source. The negative pressure source is connected to the suction hose and is used to generate negative pressure within the suction hose. The negative pressure source includes, but is not limited to, a negative pressure pump. The suction hose has a certain length, and its end suction port can be moved to various areas of the dicing device under the control of the testing personnel to absorb sample fragments that fall onto the surface of the dicing device.

[0044] In one embodiment, the sharding device further includes a bracket 6, which is mounted on the substrate 5 to support the first guide rail 22, and a linear movement mechanism for driving the striking member 31 is also fixed on the bracket 6.

[0045] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0046] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A dicing device for cross-sectional detection, characterized in that, include: The clamping assembly (1) includes a base (11) and a clamping member (12) disposed above the base (11), wherein the base (11) can cooperate with the clamping member (12) to clamp the sample to be tested (7); The scratching assembly (2) includes a scratching blade (21) located above the base (11) and controllably movable in the horizontal direction. The tip (211) of the scratching blade (21) faces the sample to be tested (7). The scratching blade (21) is used to scratch the surface of the sample to be tested (7) along a preset trajectory. The striking assembly (3) includes a striking element (31) located above the base (11) and controllably movable in a vertical direction, the bottom end of the striking element (31) facing the sample to be tested (7) for striking the sample to be tested (7) with scratches.

2. The dicing apparatus according to claim 1, characterized in that, On the side near the scratching knife (21), the base (11) protrudes horizontally from the clamping member (12).

3. The dicing apparatus according to claim 2, characterized in that, The base (11) and the clamp (12) are located on the same side of the tip (211) of the scratching knife (21) in the horizontal direction.

4. The dicing apparatus according to claim 1, characterized in that, The dicing device also includes a sample receiving groove (4) located below the striking member (31).

5. The dicing apparatus according to claim 4, characterized in that, The groove wall of the sample receiving groove (4) facing the striking member (31) is set as a downward concave arc surface.

6. The dicing apparatus according to claim 1, characterized in that, The scratching assembly (2) also includes a lifting mechanism (23) connected to the scratching blade (21), the lifting mechanism (23) being used to adjust the height of the scratching blade (21).

7. The dicing apparatus according to claim 1, characterized in that, The striking element (31) is located on the side of the scratching knife (21) away from the clamping assembly (1).

8. The dicing apparatus according to claim 1, characterized in that, The bottom end face of the striking element (31) is configured as a downwardly convex arc surface.

9. The dicing apparatus according to claim 1, characterized in that, The dicing device also includes a dust collection assembly, which includes a dust collection hose for absorbing sample fragments from the surface of the dicing device.

10. The dicing apparatus according to claim 1, characterized in that, The dicing device further includes a first guide rail (22) extending in a horizontal direction, along which the dicing blade (21) can be controllably moved; and / or, The sharding device further includes a second guide rail (32) extending in a vertical direction, along which the striking element (31) can be moved in a controlled manner.

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