A single crystal furnace heater

Abstract

The embodiment of the utility model provides a kind of single crystal furnace heater, it is related to single crystal furnace heater technical field.The single crystal furnace heater includes heating main body and at least two support feet, support foot is connected with heating main body by threaded fastener;Wherein, heating main body is annular, heating main body has outer end and inner end;In the radial direction from outer end to inner end, the distance from outer end to central axis is greater than the distance from inner end to central axis, so that the cross section of heating main body is tapered structure;Support foot is connected with heating main body by threaded fastener;Heating main body is gradually inclined to the side where support foot is from outer end to inner end direction, so that the axial section of heating main body is inclined arrangement.Threaded fastener can not only play the role of fixed, but also can provide certain heat conduction effect, increase heat exchange area.Inclined setting and tapered structure can reduce heat radiation loss, more concentrated heat is guided to central position, reduce energy consumption, improve material efficiency.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace heater technology, and more specifically, to a single crystal furnace heater. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline silicon in an inert gas environment (primarily argon) using a heater to grow dislocation-free single crystals using the Czochralski method. In single crystal silicon growth equipment, the furnace heater is one of the key components, and its performance directly affects the quality and efficiency of crystal growth.

[0003] However, the temperature uniformity of the current single crystal furnace heater is poor, which does not meet the temperature distribution requirements in the single crystal production process, and disassembly and installation are also inconvenient. Utility Model Content

[0004] This invention provides a single-crystal furnace heater that can change the distribution of the heating zone of the heating body, making the heat more concentrated and directed to the center, reducing energy consumption and improving material processing efficiency. It is also easy to install and disassemble.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] An embodiment of this utility model provides a single crystal furnace heater, which includes:

[0007] A heating body and at least two support feet, the support feet being connected to the heating body by threaded fasteners;

[0008] The heating body is annular and has an outer end and an inner end. In the radial direction from the outer end to the inner end, the distance from the outer end to the central axis is greater than the distance from the inner end to the central axis, so that the cross-section of the heating body has a tapered structure. The heating body gradually tilts towards the side where the support foot is located from the outer end to the inner end, so that the axial cross-section of the heating body is inclined.

[0009] In an alternative embodiment, the large end face of the threaded fastener is close to the heating body.

[0010] In an optional embodiment, the threaded fastener is a carbon carbon screw.

[0011] In an optional embodiment, the heating body has grooves.

[0012] In an optional embodiment, the groove includes a first groove and a second groove, the first groove extending from the outer edge toward the inner end of the heating body, and the second groove extending from the inner edge toward the outer end; the first groove and the second groove are spaced apart.

[0013] In an optional implementation, the first trench and the second trench have the same extension length.

[0014] In an optional embodiment, there are multiple first grooves and multiple second grooves, with the multiple first grooves evenly spaced along the circumference of the heating body and the multiple second grooves evenly spaced along the circumference of the heating body.

[0015] In an optional implementation, the plurality of first trenches and the plurality of second trenches are arranged in an alternating pattern.

[0016] In an optional embodiment, each of the support feet includes a first support plate, a support column, and a second support plate. One end of the support column is perpendicularly connected to the first support plate, and the other end of the support column is angularly connected to the second support plate. The second support plate is in close contact with the heating body.

[0017] In an optional embodiment, the second support plate has a plurality of mounting holes arranged in an array, and threaded fasteners pass through the mounting holes to connect the second support plate and the heating body.

[0018] The beneficial effects of the single crystal furnace heater of this utility model embodiment include, for example:

[0019] This single-crystal furnace heater includes a heating body and at least two supporting feet, which are connected to the heating body via threaded fasteners. These fasteners serve both a fixing function and provide some heat conduction, increasing the heat exchange area. The heating body conducts heat not only through the supporting feet but also through the threaded fasteners. Furthermore, the connection between the heating body and the supporting feet via threaded fasteners ensures connection strength and facilitates installation and disassembly. The heating body is annular, with an outer end and an inner end. In the radial direction from the outer end to the inner end, the distance from the outer end to the central axis is greater than the distance from the inner end to the central axis, resulting in a tapered cross-section of the heating body. The heating body gradually tilts towards the side where the supporting feet are located from the outer end to the inner end, resulting in an inclined axial cross-section. This design allows the heating body to form a gradient thermal field in the radial direction, better meeting the temperature distribution requirements during single-crystal growth, resulting in a higher center temperature and a lower edge temperature, thus improving material processing efficiency. The inclined arrangement also improves the uniformity of the crystal's axial temperature. The tapered design reduces the cantilever effect at the inner end of the heating body, minimizing thermal stress deformation at high temperatures. The inclined design and tapered structure reduce heat radiation loss, concentrate heat towards the center, and reduce energy consumption. Attached Figure Description

[0020] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of a single crystal furnace heater provided in an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram from a first-view perspective of the heating body provided in an embodiment of this utility model;

[0023] Figure 3 This is a schematic diagram from a second perspective of the heating body provided in an embodiment of the present invention;

[0024] Figure 4 This is a schematic diagram of the support foot provided in an embodiment of the present invention.

[0025] Icons: 1000 - Single crystal furnace heater; 100 - Heating body; 110 - Outer end; 120 - Inner end; 130 - Groove; 131 - First groove; 132 - Second groove; 200 - Support foot; 210 - First support plate; 220 - Support column; 230 - Second support plate; 231 - Mounting hole; 300 - Threaded fastener; 400 - Central axis. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0028] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0029] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0030] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0031] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0032] A single crystal furnace is a device that melts polycrystalline silicon in an inert gas environment (primarily argon) using a heater to grow dislocation-free single crystals via the Czochralski method. In single crystal silicon growth equipment, the furnace heater is a key component, its performance directly affecting the quality and efficiency of crystal growth. However, current single crystal furnace heaters suffer from poor temperature uniformity, failing to meet the temperature distribution requirements of the single crystal production process, and are also inconvenient to disassemble and install. Uneven temperature gradient distribution limits crystal growth speed and quality, leads to energy loss due to inefficient heat utilization, and further impacts the melting efficiency of solid silicon.

[0033] Based on this, please refer to Figures 1 to 4 The single crystal furnace heater 1000 provided in the embodiments of this utility model can effectively improve the aforementioned technical problems. This single crystal furnace heater 1000 can change the distribution of the heating zone of the heating body 100, making the heat more concentrated and directed to the central position, reducing energy consumption and improving material processing efficiency. Furthermore, it is also easy to install and disassemble.

[0034] In this embodiment, the single crystal furnace heater 1000 is located at the bottom of the crucible to heat the crucible.

[0035] Figure 1 This is a schematic diagram of the single crystal furnace heater 1000 provided in an embodiment of the present invention; Figure 2 This is a schematic diagram from a first-view perspective of the heating body 100 provided in an embodiment of the present invention; Figure 3 This is a schematic diagram from a second perspective of the heating body 100 provided in an embodiment of this utility model. Please refer to... Figure 1 and combined Figure 2 and Figure 3In this embodiment, the single-crystal furnace heater 1000 includes a heating body 100 and at least two support legs 200. The support legs 200 are connected to the heating body 100 via threaded fasteners 300. The threaded fasteners 300 serve both a fixing function and a certain degree of heat conduction, increasing the heat exchange area. The heating body 100 can conduct heat not only through the support legs 200 but also through the threaded fasteners 300. Furthermore, the connection between the heating body 100 and the support legs 200 via the threaded fasteners 300 ensures connection strength and facilitates installation and disassembly. The heat conduction of the support legs 200 directly dissipates some heat, preventing localized overheating, while the threaded fasteners 300 also conduct heat, expanding the heat exchange area, accelerating the even distribution of heat, and reducing thermal hysteresis. Through the combined heat conduction of the support legs 200 and the threaded fasteners 300, the thermal coupling efficiency between the heating body 100 and the surrounding structure is optimized, improving the temperature stability of the single-crystal growth interface. Furthermore, compared to welding or riveting, threaded fasteners can withstand high-frequency thermal cycling stress, avoiding connection failure caused by high-temperature creep. Threaded connections also allow for quick disassembly and assembly of the heating body 100 or support legs 200, facilitating the replacement of damaged parts and reducing maintenance costs.

[0036] Furthermore, the heating body 100 is annular, having an outer end 110 and an inner end 120. In the radial direction from the outer end 110 to the inner end 120, the distance from the outer end 110 to the central axis 400 is greater than the distance from the inner end 120 to the central axis 400, resulting in a tapered cross-section of the heating body 100. The heating body 100 gradually tilts towards the side where the support foot 200 is located from the outer end 110 to the inner end 120, resulting in an inclined axial cross-section. That is, the diameter of the outer end 110 of the heating body 100 is greater than the diameter of the inner end 120, resembling a bowl-shaped structure, with a lower center and higher edges.

[0037] This design allows the heating element 100 to form a radially gradient thermal field, which better meets the temperature distribution requirements during single crystal growth, resulting in a higher center temperature and a lower edge temperature, thus improving material processing efficiency. The tilted arrangement also improves the uniformity of axial temperature in the crystal. The tapered design reduces the cantilever effect at the inner end 120 of the heating element 100, minimizing thermal stress deformation at high temperatures. The tilted arrangement and tapered structure reduce heat radiation loss, concentrating heat towards the center and reducing energy consumption.

[0038] The angle of inclination of the connecting plane between the outer end 110 and the inner end 120 relative to the central axis 400 is generally 10° to 30°, consistent with the slope of the crucible bottom, so that the heating element fits tightly against the crucible bottom. Of course, the inclination angle can also be designed to other angles according to the actual situation, and is not limited here.

[0039] Furthermore, in this embodiment, the large end face of the threaded fastener 300 is close to the heating body 100. The larger contact area between the large end face of the threaded fastener 300 (such as a bolt head or nut) and the heating body 100 significantly increases the cross-sectional area of ​​the heat conduction path, accelerating the transfer of heat from the heating body 100 to the support foot 200 and reducing local thermal resistance. The large end face's close contact with the heating body 100 allows for more even heat distribution, avoiding hotspot concentration caused by a small contact area, thereby improving the thermal stability of the single crystal growth process. Moreover, the large end face provides a wider support surface, reducing stress concentration at the thread root and preventing thread stripping or breakage due to thermal expansion differences at high temperatures. The tight fit between the large end face and the heating body 100 increases friction, reducing the risk of thread loosening caused by vibration or thermal cycling during single crystal furnace operation.

[0040] Specifically, the threaded fastener 300 in this embodiment is a carbon-carbon screw. A "carbon-carbon screw" refers to a screw made of carbon fiber reinforced carbon-based composite material, which has excellent high-temperature resistance and can work stably in an inert environment (such as a vacuum or argon gas) above 2000℃. It has a low coefficient of thermal expansion and minimal thermal deformation, preventing fastening failure due to temperature changes. It also has a high strength-to-weight ratio, is chemically inert, and corrosion-resistant. Carbon-carbon screws also have good thermal conductivity, which can evenly conduct some heat and reduce the risk of localized overheating. Of course, in addition to screws, bolts or other threaded fasteners 300 can also be used; this is not limited here. The threaded fastener 300 can also be made of other materials, such as thermally conductive materials like molybdenum, high-temperature resistant materials, and corrosion-resistant materials; this is not limited here either.

[0041] To further optimize the temperature field distribution of the heating element, please refer to [link / reference]. Figure 3 and Figure 4In this embodiment, the heating body 100 has grooves 130. Specifically, the grooves 130 in this embodiment include a first groove 131 and a second groove 132. The first groove 131 extends from the edge of the outer end 110 toward the inner end 120 of the heating body 100, and the second groove 132 extends from the edge of the inner end 120 toward the outer end 110; the first groove 131 and the second groove 132 are spaced apart. The first groove 131 reduces the heat conduction from the outer end 110 to the inner end 120, compensating for heat loss in the central region; the second groove 132 promotes the outward diffusion of heat from the inner end 120, preventing overheating in the center and forming a dynamic thermal balance. The spaced arrangement of the bidirectional grooves 130 breaks the radial thermal resistance of traditional annular heaters, achieving a more uniform axial / radial temperature gradient, adapting to the requirements of the solid-liquid interface in single crystal growth. The groove structure 130 increases the surface area of ​​the heating body 100, improving thermal radiation and convection efficiency, thereby reducing energy consumption at the same power. The design of the groove 130 allows for precise control of heat flow, reducing ineffective heat loss. Of course, depending on specific heating requirements, only the first groove 131 or only the second groove 132 may be provided; this is not limited here.

[0042] Furthermore, in this embodiment, there are multiple first grooves 131 and multiple second grooves 132. The multiple first grooves 131 are evenly spaced along the circumference of the heating body 100, and the multiple second grooves 132 are also evenly spaced along the circumference of the heating body 100. The evenly distributed multiple first and second grooves 132 form a bidirectional cross-heat conduction network on the heating body 100, achieving three-dimensional heat flow control in both the radial and circumferential directions. Specifically, in this embodiment, the multiple first grooves 131 and multiple second grooves 132 are arranged in an alternating pattern. This alternating arrangement can improve the structural strength and bending resistance of the heating body 100, and also make the heat distribution more uniform. Furthermore, the number of first grooves 131 and the number of second grooves 132 can be the same or different, and the arrangement of the first grooves 131 and the second grooves 132 can also be adjusted according to actual heating requirements, which is not limited here. By adjusting the ratio and arrangement order of the grooves 130, the heat flow requirements during the growth of different crystals such as silicon and silicon carbide can be flexibly adapted.

[0043] Please continue reading. Figure 2 and Figure 3In this embodiment, the first trench 131 and the second trench 132 have the same extension length. The equal length of the first trench 131 and the second trench 132 ensures a symmetrical heat conduction path from the outer end 110 to the inner end 120 and from the inner end 120 to the outer end 110, avoiding a tilted temperature gradient caused by unidirectional heat flow dominance. During single crystal growth, symmetrical heat flow can maintain an axisymmetric temperature distribution at the solid-liquid interface, reducing crystal dislocations or twin defects. The equal-length trenches 130 ensure a consistent radial structural stiffness distribution of the heating body 100, preventing localized weak zones caused by differences in trench length. When the heating body 100 expands / contracts at high temperatures, the symmetrical trench layout can evenly distribute deformation stress, extending service life. Of course, the extension lengths of the first trench 131 and the second trench 132 can also be adjusted according to specific heating requirements, and are not limited here.

[0044] Figure 4 This is a schematic diagram of the support foot 200 provided in an embodiment of this utility model. Please refer to... Figure 4 Each support foot 200 includes a first support plate 210, a support column 220, and a second support plate 230. One end of the support column 220 is perpendicularly connected to the first support plate 210, and the other end is angledly connected to the second support plate 230. The second support plate 230 is in close contact with the heating body 100. The inclined second support plate 230 can fit better with the heating body 100, increasing the heat conduction area and absorbing the radial thermal expansion of the heating body 100. Of course, the support foot 200 can also be designed in other structural forms, which are not limited here. In this embodiment, there are two support feet 200, which are symmetrically arranged. In addition, the number of support feet 200 can also be three, four, five, or more, and the multiple support feet 200 are evenly distributed around the circumference. The number of support feet 200 is not limited.

[0045] Please continue reading. Figure 4 In this embodiment, the second support plate has multiple mounting holes 231 arranged in an array. Threaded fasteners 300 pass through the mounting holes 231 to connect the second support plate 230 and the heating body 100. The arrayed mounting holes 231 form distributed heat conduction nodes, which can improve the uniformity of heat flux density. The multiple mounting holes 231 can also share the mechanical load, improving the reliability of the connection. Specifically, in this embodiment, the number of mounting holes 231 is four. Of course, the number of mounting holes 231 can also be one, two, three, etc., and is not limited here.

[0046] In summary, the single-crystal furnace heater 1000 includes a heating body 100 and at least two support legs 200. The support legs 200 are connected to the heating body 100 via threaded fasteners 300. The connection between the heating body 100 and the support legs 200 via threaded fasteners 300 ensures connection strength and facilitates installation and disassembly. Furthermore, the heating body 100 is annular, having an outer end 110 and an inner end 120. In the radial direction from the outer end 110 to the inner end 120, the distance from the outer end 110 to the central axis 400 is greater than the distance from the inner end 120 to the central axis 400, resulting in a gradually narrowing cross-section of the heating body 100. The heating body 100 gradually tilts towards the side where the support legs 200 are located from the outer end 110 to the inner end 120, resulting in an inclined axial cross-section of the heating body 100. The threaded fasteners 300 serve both a fixing function and provide a certain degree of heat conduction, increasing the heat exchange area. The heating body 100 can conduct heat not only through the support feet 200 but also through the threaded fasteners 300. Furthermore, this design allows the heating body 100 to form a radially gradient thermal field, better meeting the temperature distribution requirements during single crystal growth, resulting in a higher center temperature and a lower edge temperature, thus improving material processing efficiency. The tilted arrangement also improves the uniformity of axial temperature in the crystal. The tapered design reduces the cantilever effect at the inner end 120 of the heating body 100, minimizing thermal stress deformation at high temperatures. The tilted arrangement and tapered structure reduce heat radiation loss, concentrating heat towards the center and reducing energy consumption.

[0047] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A single-crystal furnace heater, characterized in that, include: A heating body (100) and at least two support feet (200), the support feet (200) being connected to the heating body (100) by threaded fasteners (300); The heating body (100) is annular and has an outer end (110) and an inner end (120). In the radial direction from the outer end (110) to the inner end (120), the distance from the outer end (110) to the central axis (400) is greater than the distance from the inner end (120) to the central axis (400), so that the cross-section of the heating body (100) is tapered. The heating body (100) gradually tilts towards the side where the support foot (200) is located from the outer end (110) to the inner end (120), so that the axial cross-section of the heating body (100) is inclined.

2. The single crystal furnace heater according to claim 1, characterized in that, The large end face of the threaded fastener (300) is close to the heating body (100).

3. The single crystal furnace heater according to claim 1, characterized in that, The threaded fastener (300) is a carbon screw.

4. The single crystal furnace heater according to claim 1, characterized in that, The heating body (100) has grooves (130).

5. The single crystal furnace heater according to claim 4, characterized in that, The groove (130) includes a first groove (131) and a second groove (132). The first groove (131) extends from the edge of the outer end (110) toward the inner end (120) of the heating body (100), and the second groove (132) extends from the edge of the inner end (120) toward the outer end (110). The first groove (131) and the second groove (132) are spaced apart.

6. The single crystal furnace heater according to claim 5, characterized in that, The first groove (131) and the second groove (132) have the same extension length.

7. The single crystal furnace heater according to claim 5, characterized in that, The number of the first groove (131) and the second groove (132) are both multiple. The multiple first grooves (131) are evenly spaced along the circumference of the heating body (100), and the multiple second grooves (132) are evenly spaced along the circumference of the heating body (100).

8. The single crystal furnace heater according to claim 7, characterized in that, The plurality of first grooves (131) and the plurality of second grooves (132) are arranged alternately.

9. The single crystal furnace heater according to claim 1, characterized in that, Each of the support feet (200) includes a first support plate (210), a support column (220), and a second support plate (230). One end of the support column (220) is perpendicularly connected to the first support plate (210), and the other end of the support column (220) is angularly connected to the second support plate (230). The second support plate (230) is in close contact with the heating body (100).

10. The single crystal furnace heater according to claim 9, characterized in that, The second support plate (230) has a plurality of mounting holes (231) arranged in an array, and the threaded fasteners (300) pass through the mounting holes (231) to connect the second support plate (230) and the heating body (100).

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