Quick change probe module for a probe card

Abstract

The utility model relates to the technical field of semiconductor test, disclose a quick replacement probe module for probe card, including circuit board and fixed ring, the outside of fixed ring is provided with connecting mechanism, the bottom fixed connection of circuit board has the inclined plate, the outer wall of circuit board is provided with the bolt mechanism, the top of fixed ring is provided with temperature sensing mechanism, the outside of fixed ring is provided with circuit mechanism, the connecting mechanism includes a plurality of T shaped blocks, the outer wall of a plurality of T shaped blocks all fixed connection in the outer wall of fixed ring, the outer wall of a plurality of T shaped blocks all is set up with the circular slot, the outer wall of fixed ring is set up with ring groove no.1. In the utility model, by pushing T shaped block into the installation mouth, complete positioning and preliminary connection, then rotate fixed ring, make T shaped block and the T shaped slot of inclined plate snap together complete connection, through -hole is inserted into the bolt, rotates the rotating ring and makes the clamping block snap together, make the connection more fastening, reduce the positioning error.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor testing technology, and in particular to a quick-change probe module for probe cards. Background Technology

[0002] Probe cards are high-precision interface devices that connect testers and wafers, acting as a bridge in chip testing. The working principle of probe cards is to accurately transmit the electrical signals or currents of the tester to the chip pads, provide real-time feedback of the chip's electrical performance parameters to the tester, and screen out qualified chips and mark defective chips. Therefore, probe cards are key equipment that directly affects chip yield determination and mass production efficiency.

[0003] The core component of a probe card is the probe itself. The probe directly contacts the chip pins to perform electrical performance testing. Prolonged use of the probe leads to wear and tear, and high-frequency testing limits the probe's lifespan. Overall replacement costs are high, and module replacement or repair requires disassembling and reassembling the entire probe card or soldering each pin individually, which is time-consuming and labor-intensive. The existing solution is to integrate the probe into an independent module and use a spring plunger and slot locking method for replacement. However, the spring force of the spring plunger decreases after repeated insertion and removal, causing the probe block to become loose. The connection between the bolt and the threaded hole expands under high temperature, making the probe block difficult to replace, and the screwing operation damages the probe root. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a quick-change probe module for probe cards, which aims to improve the problems of probe damage and positioning in the prior art when changing probes.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a quick-change probe module for a probe card, comprising a circuit board and a fixing ring, wherein a connecting mechanism is provided on the outside of the fixing ring, an inclined plate is fixedly connected to the bottom of the circuit board, a pin mechanism is provided on the outer wall of the circuit board, a temperature sensing mechanism is provided at the top of the fixing ring, and a circuit mechanism is provided on the outside of the fixing ring.

[0006] The connecting mechanism includes multiple T-shaped blocks, the outer walls of which are fixedly connected to the outer wall of a fixing ring. The outer walls of the multiple T-shaped blocks are provided with arc grooves. The outer wall of the fixing ring is provided with an annular groove. A rotating ring is rotatably connected to the inner wall of the annular groove. Multiple locking blocks are fixedly connected to the outer wall of the rotating ring. The outer wall of the inclined plate is provided with multiple mounting openings. The right side of each mounting opening is provided with a T-shaped groove. The outer wall of the inclined plate is provided with multiple through holes. The outer wall of the circuit board is provided with mounting components.

[0007] As a further description of the above technical solution:

[0008] The pin mechanism includes multiple pin blocks, the outer walls of which are slidably connected to the top of the circuit board, the top of which is fixedly connected to a positioning piece, and the top of which is provided with a notch. The outer wall of the circuit board is provided with multiple through holes and positioning grooves, and the outer wall of the fixing ring is provided with a fixing component.

[0009] As a further description of the above technical solution:

[0010] The temperature sensing mechanism includes a thermistor ring, the bottom of which is fixedly connected to the top of a fixed ring, and a circular groove is provided on the bottom of the circuit board.

[0011] As a further description of the above technical solution:

[0012] The circuit mechanism includes multiple probes, the outer walls of which are fixedly connected to the outer wall of a fixed ring. The outer wall of the fixed ring has a second annular groove, and the inner wall of the second annular groove is fixedly connected to a copper sheet.

[0013] As a further description of the above technical solution:

[0014] The mounting assembly includes multiple gaskets, the bottoms of which are fixedly connected to the top of the circuit board, and the outer wall of the circuit board has multiple bolt holes.

[0015] As a further description of the above technical solution:

[0016] The fixing assembly includes multiple fixing plates, the outer walls of which are fixedly connected to the outer wall of the fixing ring, and the outer walls of which are provided with fixing holes.

[0017] As a further description of the above technical solution:

[0018] A partition is fixedly connected to the top of the circuit board, and multiple heat dissipation holes are provided on the outer wall of the inclined plate.

[0019] As a further description of the above technical solution:

[0020] The top of the circuit board is fixedly connected to multiple solder pads, and the outer wall of the solder pads is fixedly connected to multiple solder joints.

[0021] This utility model has the following beneficial effects:

[0022] In this invention, the T-shaped block is pushed into the mounting port to complete the positioning and initial connection. Then, the fixing ring is rotated to make the T-shaped block engage with the T-shaped groove of the inclined plate until it can no longer rotate, thus completing the connection. A pin is inserted into the through hole, and the rotating ring is rotated to make the locking block reach the engagement position to strengthen the connection. The bolt holes and gaskets are connected to the testing machine to reduce vibration, complete quick replacement, make the connection more secure, and reduce positioning errors.

[0023] In this invention, the pin is inserted into the through hole, and the positioning piece engages with the positioning groove to complete the positioning and reinforcement connection, preventing horizontal displacement. The pin passes through through hole one and through hole two, and finally reaches the top of the fixing ring, engaging with the fixing hole. At this time, rotating the rotating ring causes the locking block to engage with the notched groove on the pin, reinforcing the pin connection and making the overall connection more secure. It is also convenient and quick to disassemble and easy to replace. Attached Figure Description

[0024] Figure 1 This is a perspective view of the quick-change probe module for probe cards proposed in this utility model;

[0025] Figure 2 This is a front view of the quick-change probe module for probe cards proposed in this utility model;

[0026] Figure 3 This is an exploded view of the circuit board of the quick-change probe module for the probe card proposed in this utility model.

[0027] Figure 4 This is a schematic diagram of the mounting port for the quick-change probe module of the probe card proposed in this utility model;

[0028] Figure 5 This is a schematic diagram of the inclined plate for the quick-change probe module of the probe card proposed in this utility model;

[0029] Figure 6 This is a schematic diagram of the fixing ring for the quick-change probe module of the probe card proposed in this utility model;

[0030] Figure 7 This is a schematic diagram of the pin block for the quick-change probe module of the probe card proposed in this utility model.

[0031] Legend:

[0032] 1. Circuit board; 2. Connecting mechanism; 201. T-block; 202. Arc groove; 203. Ring groove one; 204. Rotating ring; 205. Locking block; 206. Mounting port; 207. T-groove; 208. Through hole one; 209. Mounting assembly; 2091. Gasket; 2092. Bolt hole; 3. Fixing ring; 4. Pin mechanism; 401. Pin block; 402. Positioning piece; 403. Notched groove; 404. Through hole two; 405. Positioning groove; 406. Fixing assembly; 4061. Fixing plate; 4062. Fixing hole; 5. Inclined plate; 6. Temperature sensing mechanism; 601. Thermistor ring; 602. Circular groove; 7. Circuit mechanism; 701. Probe; 702. Ring groove two; 703. Copper sheet; 8. Partition plate; 9. Heat dissipation hole; 10. Solder pad; 11. Solder joint. Detailed Implementation

[0033] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0034] Reference Figure 4 , Figure 5 and Figure 6 This utility model provides an embodiment of a quick-change probe module for a probe card, including a circuit board 1 and a fixing ring 3. A connecting mechanism 2 is provided on the outside of the fixing ring 3. The connecting mechanism 2 is an important mechanism for realizing replacement and fixation. An inclined plate 5 is fixedly connected to the bottom of the circuit board 1. Numerous connecting metal wires are placed inside the inclined plate 5. A pin mechanism 4 is provided on the outer wall of the circuit board 1. The pin mechanism 4 is used to reinforce the connection. A temperature sensing mechanism 6 is provided at the top of the fixing ring 3. The temperature sensing mechanism 6 is greatly affected by stability. A circuit mechanism 7 is provided on the outside of the fixing ring 3. The circuit mechanism 7 is a basic component for realizing the operation of the probe card.

[0035] The connecting mechanism 2 includes multiple T-blocks 201, the outer walls of which are fixedly connected to the outer wall of the fixing ring 3. The T-blocks 201, via the mounting port 206, are the primary positioning and fixing components. Each T-block 201 has an arc groove 202 on its outer wall, which is in close contact with a portion of the outer wall of the pin block 401 to prevent horizontal displacement and rotation of the T-blocks 201. The fixing ring 3 has an annular groove 203 on its outer wall, providing a support surface for the rotating ring 204. The rotating ring 204 is rotatably connected to the inner wall of the annular groove 203, and is in close contact with the annular groove 203 and can rotate. The outer wall of the rotating ring 204 is fixedly connected with multiple locking blocks 205, which are used to engage with the notched grooves 403 on the pin block 401. The outer wall of the inclined plate 5 is provided with multiple mounting holes 206, which can accommodate the T-shaped block 201 to pass through. Each mounting hole 206 has a T-shaped groove 207 on its right side. The rotating fixed ring 3 makes the T-shaped block 201 engage with the T-shaped groove 207. The outer wall of the inclined plate 5 is provided with multiple through holes 208, which are used for the engagement of the pin block 401. The outer wall of the circuit board 1 is provided with a mounting component 209, which is used to facilitate the connection between the probe card and the test station.

[0036] Mounting assembly 209 includes multiple gaskets 2091, the bottom of which is fixedly connected to the top of circuit board 1. The gaskets 2091 reduce the vibration between the probe card and the test station and avoid affecting the fixed connection. Multiple bolt holes 2092 are provided on the outer wall of circuit board 1. The bolt holes 2092 are used for the threaded connection between the probe card and the test station.

[0037] Specifically, the T-block 201, via the mounting port 206, is the primary positioning and fixing component. The outer wall of the T-block 201 has an arc groove 202, which fits tightly against a portion of the outer wall of the pin block 401 to prevent horizontal displacement and rotation of the T-block 201. The annular groove 203 provides a support surface for the rotating ring 204, which fits tightly against the annular groove 203 and can rotate. The outer wall of the rotating ring 204 has multiple locking blocks 205, which are used to engage with the pin block 401. The notch 403 on 01 engages with the mounting port 206, which allows the T-block 201 to pass through. After entering the mounting port 206, the retaining ring 3 is rotated to engage the T-block 201 with the T-slot 207. The through hole 208 is used for the engagement of the pin 401. The gasket 2091 reduces the vibration between the probe card and the test bench, avoiding affecting the fixed connection. The bolt hole 2092 is used for the threaded connection between the probe card and the test bench, reducing vibration, enabling quick replacement, making the connection more secure, and reducing positioning errors.

[0038] Reference Figure 1 , Figure 3 and Figure 7The pin mechanism 4 includes multiple pin blocks 401, the outer walls of which are slidably connected to the top of the circuit board 1. The main function of the pin blocks 401 is to prevent the fixing ring 3 from shifting or rotating horizontally. Positioning pieces 402 are fixedly connected to the top of each pin block 401. The positioning pieces 402 engage with positioning grooves 405 to determine the orientation of the pin blocks 401, thus providing a positioning function and preventing misalignment. Each pin block 401 has a notch 403 on its top for engaging with the locking mechanism. Block 205 engages to prevent pin 401 from shifting vertically. The outer wall of circuit board 1 has multiple through holes 404, which also engage with pin 401. Pin 401 needs to pass through through hole 208 and through hole 404. The outer wall of circuit board 1 has multiple positioning grooves 405, which engage with positioning piece 402 to provide positioning. The outer wall of fixing ring 3 is provided with fixing component 406, which prevents fixing ring 3 from shifting horizontally.

[0039] The fixing component 406 includes multiple fixing plates 4061. The outer walls of the multiple fixing plates 4061 are fixedly connected to the outer wall of the fixing ring 3. The outer walls of the multiple fixing plates 4061 are provided with fixing holes 4062. The fixing holes 4062 on the fixing plates 4061 provide landing points for the pins 401, which play a positioning role and prevent the fixing ring 3 from shifting horizontally.

[0040] Specifically, the main function of pin 401 is to prevent the fixing ring 3 from shifting or rotating horizontally. Positioning piece 402 engages with positioning groove 405 to determine the direction of pin 401, thus playing a positioning role and preventing misalignment. Cut groove 403 engages with locking piece 205 to prevent pin 401 from shifting vertically. Through hole 2 404 also engages with pin 401. Pin 401 needs to pass through through hole 1 208 and through hole 2 404 to connect circuit board 1 and inclined plate 5. Positioning groove 405 engages with positioning piece 402 to play a positioning role. Fixing hole 4062 on fixing plate 4061 provides a landing point for pin 401, playing a positioning role and preventing the fixing ring 3 from shifting horizontally. It strengthens the pin connection, making the overall connection more secure and easy to disassemble and replace.

[0041] Reference Figure 1 , Figure 2 and Figure 3 The temperature sensing mechanism 6 includes a thermal ring 601, the bottom of which is fixedly connected to the top of the fixing ring 3. A circular groove 602 is provided at the bottom of the circuit board 1. The thermal ring 601 and the circular groove 602 are engaged during installation to play a positioning role. The thermal ring 601 expands when heated, increasing the uniform horizontal pressure, making the connection of the fixing ring 3 tighter. The vertical force provided during disassembly facilitates replacement.

[0042] The circuit mechanism 7 includes multiple probes 701. The outer walls of the multiple probes 701 are fixedly connected to the outer wall of the fixing ring 3. The probes 701 are the most important components. The outer wall of the fixing ring 3 has a second annular groove 702. The inner wall of the second annular groove 702 is fixedly connected to a copper sheet 703. The copper sheet 703 in the second annular groove 702 is in close contact with the connecting metal wire in the inclined plate 5 to complete the functional connection.

[0043] A partition 8 is fixedly connected to the top of the circuit board 1. The partition 8 isolates the test platform from the probe card to prevent it from affecting the operation of the probe card. It is also close to the test platform to provide data information. Multiple heat dissipation holes 9 are opened on the outer wall of the inclined plate 5 to dissipate heat. Multiple solder pads 10 are fixedly connected to the top of the circuit board 1. Multiple solder joints 11 are fixedly connected to the outer wall of the solder pads 10. The numerous solder joints 11 on the solder pads 10 are the basic components in operation.

[0044] Specifically, the thermal ring 601 and the circular groove 602 engage during installation, serving a positioning function. The thermal ring 601 expands when heated, increasing uniform horizontal pressure and making the connection of the fixing ring 3 tighter. Furthermore, the vertical force provided during disassembly facilitates replacement. The probe 701 is the most important component. A copper sheet 703 is fixedly connected to the inner wall of the circular groove 702. The copper sheet 703 in the circular groove 702 is in close contact with the connecting metal wire in the inclined plate 5, completing the functional connection. The partition 8 isolates the test platform from the probe card to prevent interference with the probe card's operation, and it is in close contact with the test platform to provide data information. The heat dissipation holes 9 provide heat dissipation. The numerous solder points 11 on the pads 10 are the basic components in operation, completing the chip testing.

[0045] Working principle: During installation, the T-block 201 is placed through the mounting port 206. The T-block 201 is the main positioning and fixing part. The arc groove 202 is in close contact with part of the outer wall of the pin 401 to prevent horizontal displacement and rotation of the T-block 201. The ring groove 203 provides a support surface for the rotating ring 204. The rotating ring 204 is in close contact with the ring groove 203 and can rotate. The outer wall of the rotating ring 204 has multiple locking blocks 205. The locking blocks 205 are used to engage with the notched groove 403 on the pin 401. The mounting port 206 can accommodate the T-block 201 to pass through. After entering the mounting port 206, the fixing ring 3 is rotated to make the T-block 201 engage with the T-groove 207. The through hole 208 is used for the engagement of the pin 401. After the pin 401 enters, it engages with the through hole 208 and abuts against the arc groove 202 to strengthen the connection and complete the quick replacement, making the connection more secure and reducing positioning errors.

[0046] Furthermore, after rotating the fixing ring 3, the pin block 401 needs to be inserted. The main function of the pin block 401 is to prevent the fixing ring 3 from shifting or rotating horizontally. The positioning piece 402 engages with the positioning groove 405 to determine the direction of the pin block 401, thus playing a positioning role and preventing misfitting. The notch groove 403 is used to engage with the locking piece 205 to prevent the pin block 401 from shifting vertically. The second through hole 404 also engages with the pin block 401. The pin block 401 needs to pass through the first through hole 208 and the second through hole 404 to connect the circuit board 1 and the inclined plate 5. The positioning groove 405 is used to engage with the positioning piece 402, thus playing a positioning role. The fixing hole 4062 on the fixing plate 4061 provides a landing point for the pin block 401, playing a positioning role and preventing the fixing ring 3 from shifting horizontally. The pin connection is reinforced, making the overall connection more secure and easy to disassemble and replace.

[0047] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A quick-change probe module for probe cards, comprising a circuit board (1) and a retaining ring (3), characterized in that: The fixed ring (3) is provided with a connecting mechanism (2) on its outside, the bottom of the circuit board (1) is fixedly connected with an inclined plate (5), the outer wall of the circuit board (1) is provided with a pin mechanism (4), the top of the fixed ring (3) is provided with a temperature sensing mechanism (6), and the outside of the fixed ring (3) is provided with a circuit mechanism (7). The connecting mechanism (2) includes multiple T-shaped blocks (201), the outer walls of the multiple T-shaped blocks (201) are fixedly connected to the outer wall of the fixing ring (3), the outer walls of the multiple T-shaped blocks (201) are provided with arc grooves (202), the outer wall of the fixing ring (3) is provided with a ring groove (203), the inner wall of the ring groove (203) is rotatably connected to a rotating ring (204), the outer wall of the rotating ring (204) is fixedly connected with multiple locking blocks (205), the outer wall of the inclined plate (5) is provided with multiple mounting ports (206), the right side of the multiple mounting ports (206) is provided with T-shaped grooves (207), the outer wall of the inclined plate (5) is provided with multiple through holes (208), and the outer wall of the circuit board (1) is provided with mounting components (209).

2. The quick-change probe module for a probe card according to claim 1, characterized in that: The pin mechanism (4) includes multiple pin blocks (401), the outer walls of the multiple pin blocks (401) are slidably connected to the top of the circuit board (1), the top of the multiple pin blocks (401) is fixedly connected to a positioning piece (402), the top of the multiple pin blocks (401) is provided with a notch (403), the outer wall of the circuit board (1) is provided with multiple through holes (404), the outer wall of the circuit board (1) is provided with multiple positioning grooves (405), and the outer wall of the fixing ring (3) is provided with a fixing component (406).

3. The quick-change probe module for a probe card according to claim 1, characterized in that: The temperature sensing mechanism (6) includes a thermistor ring (601), the bottom of which is fixedly connected to the top of the fixing ring (3), and a circular groove (602) is provided at the bottom of the circuit board (1).

4. The quick-change probe module for a probe card according to claim 1, characterized in that: The circuit mechanism (7) includes multiple probes (701), the outer walls of the multiple probes (701) are fixedly connected to the outer wall of the fixing ring (3), the outer wall of the fixing ring (3) is provided with a second annular groove (702), and the inner wall of the second annular groove (702) is fixedly connected with a copper sheet (703).

5. The quick-change probe module for a probe card according to claim 1, characterized in that: The mounting assembly (209) includes multiple gaskets (2091), the bottoms of which are fixedly connected to the top of the circuit board (1), and the outer wall of the circuit board (1) is provided with multiple bolt holes (2092).

6. The quick-change probe module for a probe card according to claim 2, characterized in that: The fixing component (406) includes multiple fixing plates (4061), the outer walls of the multiple fixing plates (4061) are fixedly connected to the outer wall of the fixing ring (3), and the outer walls of the multiple fixing plates (4061) are provided with fixing holes (4062).

7. The quick-change probe module for a probe card according to claim 1, characterized in that: The top of the circuit board (1) is fixedly connected to a partition (8), and the outer wall of the inclined plate (5) is provided with multiple heat dissipation holes (9).

8. The quick-change probe module for a probe card according to claim 1, characterized in that: The top of the circuit board (1) is fixedly connected to a plurality of solder pads (10), and the outer wall of the solder pads (10) is fixedly connected to a plurality of solder points (11).

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