Exposure apparatus and exposure stage thereof
CN224328323UActive Publication Date: 2026-06-05TONGWEI SOLAR ENERGY (CHENGDU) CO LID
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TONGWEI SOLAR ENERGY (CHENGDU) CO LID
- Filing Date
- 2025-05-16
- Publication Date
- 2026-06-05
AI Technical Summary
Technical Problem
During the cell transfer process, the cells are prone to breakage and scratching expensive photomasks, leading to increased production costs.
Method used
Design an exposure platform with multiple support protrusions arranged on the base. The support protrusions are equipped with adsorption holes, and hollow areas are formed between adjacent protrusions to reduce the vacuum layer and contact area, reduce van der Waals forces, and ensure that the solar cells are easy to separate.
Benefits of technology
It effectively avoids cell fragmentation, protects the photomask, reduces production costs, and extends the lifespan of the exposure platform.
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Smart Images
Figure CN224328323U_ABST
Abstract
The utility model relates to an exposure equipment and exposure platform thereof. The exposure platform comprises a base and a plurality of support bosses arranged on the base. The upper surface of the support boss is a support surface. The support surfaces of the support bosses are located on the same horizontal plane. Adjacent support bosses form a hollow area. The support surfaces of at least some support bosses are provided with suction holes. The plurality of support bosses are arranged on the base. The support surfaces of the support bosses are located on the same horizontal plane to ensure the flatness of the battery piece. The support surfaces of at least some support bosses are provided with suction holes to adsorb and fix the battery piece. Adjacent support bosses form a hollow area to reduce the generation of a vacuum layer between the battery piece and the exposure platform, reduce the contact area between the battery piece and the exposure platform, and reduce the van der Waals force between the battery piece and the exposure platform. The battery piece and the exposure platform are easily separated, the battery piece is not broken when the fork contacts the battery piece, and the mask is not scratched by the fragments.
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