A laser on-line monitoring dynamic cleaning device

Abstract

The utility model provides a kind of laser on-line monitoring dynamic cleaning device, comprising: thickness detection component;Laser cleaning component, laser cleaning component includes several laser units;Each laser unit includes the laser along the laser beam output direction setting, first reflector, diaphragm, second reflector, beam expander, laser beam shaper, dynamic galvanometer, field lens;Wherein, dynamic galvanometer includes several multi-faceted prisms connected with driving element, to dynamically adjust the angle of laser beam incident field lens;The utility model can adapt to different pollution degree and surface shape, ensure that cleaning quality consistency, by being provided with dynamic galvanometer and carrying out dynamic cleaning, can ensure that laser focal point is always accurate and accurate to adhere graphite boat curved surface, cleaning efficiency is high and clean, can avoid overburning or residual caused by uneven energy.

Description

Technical Field

[0001] This utility model relates to the field of laser processing technology, and in particular to a laser online monitoring dynamic cleaning device. Background Technology

[0002] Most crystalline silicon solar cells use the direct PECVD process, also known as the tubular PE process, which requires a metal boat or graphite boat as the carrier for the silicon wafer. With repeated use, silicon nitride dust accumulates in the gaps between the points and on the boat walls, severely affecting the uniformity of the coating. After the molding process, contaminants or residues, primarily composed of silicon nitride, are often left on the surface of the graphite boat. With continued use, these residues can corrode various types of graphite boats. Therefore, after a certain number of uses, the surface silicon carbide needs to be removed from the boat.

[0003] Traditional graphite boat cleaning involves 6 hours of hydrofluoric acid pickling, followed by 6 hours of water rinsing, and finally 10 hours of drying. The drawbacks are that the water rinsing time is too long and incomplete, significantly reducing the lifespan of the graphite boat and increasing production costs. Metal boats, on the other hand, react chemically in acidic conditions and can only be cleaned manually by grinding or sandblasting. Manual grinding is inefficient and lacks precision, while sandblasting, although fast, causes severe wear and damage to the boat hull. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide a laser online monitoring dynamic cleaning device that can adapt to different levels of contamination and surface shapes, ensuring consistent cleaning quality. By using a dynamic galvanometer for dynamic cleaning, it ensures that the laser focus is always precisely aligned with the curved surface of the graphite boat, resulting in high cleaning efficiency and thorough cleaning, while avoiding overheating or residue caused by uneven energy distribution.

[0005] The embodiments of this utility model are achieved through the following technical solutions:

[0006] A laser-based online monitoring dynamic cleaning device includes:

[0007] A thickness detection component, comprising several detection units for real-time detection of the thickness of a graphite boat;

[0008] A laser cleaning assembly includes several laser units; each laser unit includes a laser, a first reflector, an aperture, a second reflector, a beam expander, a laser beam shaper, a dynamic galvanometer, and a field mirror arranged along the laser beam output direction.

[0009] The dynamic galvanometer includes several multifaceted prisms connected to driving components to dynamically adjust the angle at which the laser beam is incident on the field mirror.

[0010] The detection unit is electrically connected to several of the laser units.

[0011] According to a preferred embodiment, the dynamic galvanometer includes an X-axis multifaceted prism connected to an X-axis motor, a Y-axis multifaceted prism connected to a Y-axis motor, and a Z-axis multifaceted prism connected to a Z-axis motor, so as to dynamically adjust the angle at which the laser beam is incident on the galvanometer.

[0012] According to a preferred embodiment, the power output end of the X-axis motor is connected to the X-axis multifaceted prism, and the X-axis multifaceted prism rotates with the power output end of the X-axis motor as the axis of rotation.

[0013] The power output end of the Y-axis motor is connected to the Y-axis multifaceted prism, and the Y-axis multifaceted prism rotates around the power output end of the Y-axis motor.

[0014] The power output end of the Z-axis motor is connected to the Z-axis multifaceted prism, and the Z-axis multifaceted prism rotates around the power output end of the Z-axis motor.

[0015] According to a preferred embodiment, the detection unit is a film thickness detector.

[0016] According to a preferred embodiment, the laser cleaning assembly includes five laser units arranged side by side.

[0017] According to a preferred embodiment, each of the laser units is provided with a dust cover and an air knife.

[0018] A cleaning method for a laser-monitored dynamic cleaning device includes the following steps:

[0019] Step S10: Select a suitable laser model and parameters, and adjust them according to the material and degree of contamination of the graphite boat;

[0020] Step S20: The laser beam output by the laser unit is used to scan the surface of the graphite boat. The laser energy is adjusted to effectively remove surface contaminants without affecting the nature of the graphite boat substrate. The scanning speed and related parameters are controlled to ensure the uniformity and efficiency of cleaning, and the graphite boat is cleaned.

[0021] Step S30: After the cleaning process is completed, rinse the surface of the graphite boat with clean water to remove residual contaminants and debris generated by laser ablation.

[0022] Step S40: Drying process is performed;

[0023] Step S50: Perform quality inspection on the cleaned graphite boat to ensure that the cleaned graphite boat meets relevant standards and usage requirements.

[0024] According to a preferred embodiment, the quality inspection process includes surface cleanliness inspection, dimensional accuracy inspection, and physical property inspection.

[0025] According to a preferred embodiment, the frequency range of the laser beam is 1000-8000 kHz.

[0026] According to a preferred embodiment, the energy adjustment range of the laser beam is below 2.5 mJ.

[0027] The technical solution of this utility model embodiment has at least the following advantages and beneficial effects:

[0028] This invention cleans graphite boats by dynamically adjusting the laser beam emission angle using a dynamic galvanometer. It can adapt to different levels of contamination and surface shapes, ensuring consistent cleaning quality. The dynamic galvanometer ensures that the laser focus is always precisely aligned with the curved surface of the graphite boat, resulting in high cleaning efficiency and thorough cleaning. It also avoids overheating or residue caused by uneven energy distribution, effectively protecting the graphite boat. Attached Figure Description

[0029] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 A schematic diagram of the structure of a laser online monitoring dynamic cleaning device provided in an embodiment of this utility model;

[0031] Figure 2 A schematic diagram of the structure of the dynamic galvanometer provided for an embodiment of the utility model;

[0032] Figure 3 A top view of the laser cleaning assembly provided in an embodiment of the utility model;

[0033] Figure 4 A partial three-dimensional structural diagram of the laser cleaning assembly provided in an embodiment of the utility model.

[0034] Icons: 1. Detection unit; 2. Laser; 3. First reflecting mirror; 4. Aperture; 5. Second reflecting mirror; 6. Beam expander; 7. Laser beam shaper; 8. Field mirror; 9. Dynamic galvanometer; 91. X-axis motor; 92. X-axis multifaceted prism; 93. Y-axis motor; 94. Y-axis multifaceted prism; 95. Z-axis motor; 96. Z-axis multifaceted prism; 10. Dust collector; 11. Air knife; 12. Cell processing surface; 13. Laser beam. Detailed Implementation

[0035] To better understand and implement this invention, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings.

[0036] In the description of this utility model, it should be noted that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0037] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0038] Example

[0039] Please refer to Figures 1 to 4 A laser online monitoring dynamic cleaning device includes: a thickness detection component, which includes several detection units 1 for real-time detection of the thickness of a graphite boat; a laser cleaning component, which includes several laser units; each laser unit includes a laser 2, a first reflector 3, an aperture 4, a second reflector 5, a beam expander 6, a laser beam shaper 7, a dynamic galvanometer 9, and a field mirror 8 arranged along the output direction of the laser beam 13; wherein the dynamic galvanometer 9 includes several multifaceted prisms connected to driving components to dynamically adjust the angle at which the laser beam 13 is incident on the field mirror 8; the detection units 1 are electrically connected to the several laser units.

[0040] Preferably, the dynamic galvanometer 9 includes an X-axis multifaceted prism 92 connected to an X-axis motor 91, a Y-axis multifaceted prism 94 connected to a Y-axis motor 93, and a Z-axis multifaceted prism 96 connected to a Z-axis motor 95, so as to dynamically adjust the angle of the incident field mirror 8 of the laser beam 13.

[0041] Preferably, the power output end of the X-axis motor 91 is connected to the X-axis multifaceted prism 92, and the X-axis multifaceted prism 92 rotates with the power output end of the X-axis motor 91 as the axis of rotation.

[0042] The power output end of the Y-axis motor 93 is connected to the Y-axis multifaceted prism 94, and the Y-axis multifaceted prism 94 rotates with the power output end of the Y-axis motor 93 as the axis.

[0043] The power output end of the Z-axis motor 95 is connected to the Z-axis multifaceted prism 96, and the Z-axis multifaceted prism 96 rotates around the power output end of the Z-axis motor 95.

[0044] Preferably, the detection unit 1 is a film thickness detector.

[0045] Preferably, the laser cleaning assembly includes five laser units arranged side by side.

[0046] Preferably, each laser unit is provided with a dust cover 10 and an air knife 11.

[0047] A cleaning method for a laser-monitored dynamic cleaning device includes the following steps:

[0048] Step S10: Select a suitable laser 2 model and parameters, and adjust them according to the material and degree of contamination of the graphite boat;

[0049] Step S20: The laser beam 13 output by the laser unit is used to scan the surface of the graphite boat. The laser energy is adjusted to effectively remove surface contaminants without affecting the nature of the graphite boat substrate. The scanning speed and related parameters are controlled to ensure the uniformity and efficiency of cleaning, and the graphite boat is cleaned.

[0050] Step S30: After the cleaning process is completed, rinse the surface of the graphite boat with clean water to remove residual contaminants and debris generated by laser ablation.

[0051] Step S40: Drying treatment; natural air drying or drying at a temperature below 50 degrees Celsius can be used to avoid excessively high temperatures affecting the physical properties of the graphite boat.

[0052] Step S50: Perform quality inspection on the cleaned graphite boat to ensure that the cleaned graphite boat meets relevant standards and usage requirements.

[0053] Preferably, the quality inspection process includes surface cleanliness inspection, dimensional accuracy inspection, and physical performance inspection.

[0054] Preferably, the frequency range of the laser beam 13 is 1000-8000 kHz.

[0055] Preferably, the energy adjustment range of the laser beam 13 is below 2.5 mJ.

[0056] The working principle of this utility model:

[0057] This invention uses a dynamic galvanometer 9 to dynamically adjust the emission angle of the laser beam 13 to clean a graphite boat. It can adapt to different levels of contamination and surface shapes, ensuring consistent cleaning quality. Dynamic cleaning via the dynamic galvanometer 9 ensures that the laser focus is always precisely aligned with the curved surface of the graphite boat, resulting in high cleaning efficiency and thorough cleaning. It also avoids overheating or residue caused by uneven energy distribution, effectively protecting the graphite boat.

[0058] In this embodiment, after the laser beam 13 is output from the laser 2, it passes sequentially through the first reflecting mirror 3, the aperture 4, the second reflecting mirror 5, the beam expander 6, the laser beam shaper 7, the dynamic galvanometer 9, and the field mirror 8. In the dynamic galvanometer 9, the power output end of the X-axis motor 91 can be connected to the facet of the X-axis multifaceted prism 92, the power output end of the Y-axis motor 93 can be connected to the facet of the Y-axis multifaceted prism 94, and the power output end of the Z-axis motor 95 can be connected to the facet of the Z-axis multifaceted prism 96, thereby adjusting the output speed and path of the laser beam 13. The X-axis multifaceted prism 92, the Y-axis multifaceted prism 94, and the Z-axis multifaceted prism 96 can be selected from a combination of hexahedral prisms, octahedral prisms, and sixteen-sided prisms, depending on the actual situation; for example, the X-axis multifaceted prism 92 and the Y-axis multifaceted prism 94 are hexahedral prisms, and the Z-axis multifaceted prism 96 is an octahedral prism. The X-axis polyhedron 92, Y-axis polyhedron 94, and Z-axis polyhedron 96 can all be octagonal prisms.

[0059] Based on the actual needs of the graphite boat, five laser units can be set up side by side, and the five laser units clean the graphite boat synchronously. Each dust hood 10 is independently connected to the dust collector, and each laser position is independently equipped with a dust hood 10 and an air knife 11. There are five dust hoods 10 corresponding to the five lasers. Each dust hood 10 is equipped with a customized high-volume ion air knife 11 on the opposite side of the dust suction port to assist in dust removal, effectively removing plasma and silicon nitride fumes generated by laser processing, and assisting in optimizing the laser process.

[0060] In this embodiment, five detection units 1 are used, with one detection unit 1 corresponding to each laser unit. Detection unit 1 can be a film thickness gauge, which detects the thickness of the silicon nitride film online and calls up the corresponding laser cleaning pattern. Dynamic cleaning is completed by focusing through a dynamic galvanometer 9 in conjunction with the film thickness gauge. Detection unit 1 can scan the surface of the graphite boat in real time, identifying the surface morphology and residual state of silicon nitride, its distribution, and complex geometric structures. It dynamically adjusts laser parameters (such as energy, focus position, power, frequency, and scanning path) to ensure that the cleaning range accurately covers the target area, ensuring cleaning uniformity and consistency, and avoiding damage to the substrate. Over-cleaning or under-cleaning is avoided; the film thickness gauge provides real-time feedback, and the laser cleaning component can accurately determine the cleaning endpoint, reducing substrate damage caused by over-cleaning or process failure caused by insufficient cleaning.

[0061] In this embodiment, the cleaning component is equipped with a dynamic galvanometer 9, which can automatically generate a high-speed scanning path through the laser 2 in conjunction with the dynamic galvanometer 9, adapting to the porous, multi-layered, and irregularly shaped structures of the graphite boat. The dynamic galvanometer 9 can dynamically adjust the laser incident angle, solving the shadow occlusion problem under traditional fixed optical paths (such as vertical hole wall cleaning). In this embodiment, the field lens 8 is model F535. Using this focal length, the laser beam 13 will deflect at a speed of 120m / s, and the cleaning process effect can achieve an accuracy of 0.05μm. In this embodiment, the film thickness detector and the laser cleaning component are dynamically focused synchronously controlled to ensure that the laser focus is always accurately aligned with the curved surface of the graphite boat (including deep holes and narrow slits), avoiding overheating or residue caused by uneven energy. Micron-level positioning accuracy is achieved, with a positioning accuracy within ±5μm, which can accurately clean micron-level contaminants (such as nanoparticles attached to graphite pores). In addition, the dynamic galvanometer 9 can adjust the beam overlap rate to achieve uniform energy distribution and avoid local overheating damage to the graphite substrate.

[0062] High-frequency, high-energy pulsed laser cleaning can be selected, such as a high-energy laser beam with an output energy of 1mJ (and not limited to 1mJ, high-energy laser beams above 2.5mJ can be selected). Combined with a high-frequency pulsed laser 2 (such as 4000kHz), pulse superposition rapidly removes contaminants, and deep cleaning can be completed in a single scan. The main solution uses infrared pulsed lasers (using infrared laser 2). The laser solution can process rectangular or stripe spots, and can also be customized according to application needs. The smallest spot size ranges from 15*15um to 2000*200mm. The main solution uses red laser 2 (using infrared laser 2). A green laser 2 can also be selected, with a wavelength range of 700-1080nm. It is also compatible with ultraviolet and green laser 2. The equipment is compatible with pulsed lasers or continuous lasers, and also with laser beam splitters. Laser 2 has power feedback functionality and can be used for graphite boat cleaning processes from PERC, TOPCON, HJT, and XBC. This embodiment features low latency and high synchronization, stable mechanical inertia, and with a constant rotation speed, the scanning path and timing are highly predictable, making it easy to synchronize with external signals and suitable for applications requiring high timing accuracy. It also boasts wide spectral compatibility, employing a dynamic galvanometer 9 to rapidly deflect the laser beam 13, significantly shortening the cleaning path travel time. Compared to ordinary galvanometer systems, this embodiment offers improved cleaning efficiency. The primary cleaning area in this embodiment is the silicon nitride film layer on the graphite boat surface, but it is not limited to the silicon nitride film layer. For example... Figure 2As shown, the output path of the cleaning laser beam 13 first passes through the X-axis multifaceted prism 92 on the X-axis motor 91, then through the Y-axis multifaceted prism 94 on the Y-axis motor 93, and the Z-axis multifaceted prism 96 on the Z-axis motor 95. The arrow above the X-axis motor 91 points in the direction of its power output rotation, and the arrow to the left of the Y-axis motor 93 points in the direction of its power output rotation. The power output of the Z-axis motor 95 is vertically positioned to drive the Z-axis multifaceted prism 96 to rotate around the vertical power output of the Z-axis motor 95. Furthermore, the laser beam wavelength can also be selected from the 266-540nm range.

[0063] The technical means disclosed in this utility model are not limited to those disclosed in the above embodiments, but also include technical solutions composed of any combination of the above technical features. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of this utility model, and these improvements and modifications are also considered within the scope of protection of this utility model.

Claims

1. A laser-based online monitoring dynamic cleaning device, characterized in that, include: A thickness detection component, comprising several detection units for real-time detection of the thickness of a graphite boat; A laser cleaning assembly includes several laser units; each laser unit includes a laser, a first reflector, an aperture, a second reflector, a beam expander, a laser beam shaper, a dynamic galvanometer, and a field mirror arranged along the laser beam output direction. The dynamic galvanometer includes several multifaceted prisms connected to driving components to dynamically adjust the angle at which the laser beam is incident on the field mirror. The detection unit is electrically connected to several of the laser units.

2. The laser online monitoring dynamic cleaning device according to claim 1, characterized in that, The dynamic galvanometer includes an X-axis multifaceted prism connected to an X-axis motor, a Y-axis multifaceted prism connected to a Y-axis motor, and a Z-axis multifaceted prism connected to a Z-axis motor, to dynamically adjust the angle at which the laser beam is incident on the field mirror.

3. The laser online monitoring dynamic cleaning device according to claim 2, characterized in that, The power output end of the X-axis motor is connected to the X-axis multifaceted prism, and the X-axis multifaceted prism rotates around the power output end of the X-axis motor. The power output end of the Y-axis motor is connected to the Y-axis multifaceted prism, and the Y-axis multifaceted prism rotates with the power output end of the Y-axis motor as the axis of rotation. The power output end of the Z-axis motor is connected to the Z-axis multifaceted prism, and the Z-axis multifaceted prism rotates around the power output end of the Z-axis motor.

4. The laser online monitoring dynamic cleaning device according to claim 1, characterized in that, The detection unit is a film thickness detector.

5. The laser online monitoring dynamic cleaning device according to claim 1, characterized in that, The laser cleaning assembly includes five laser units arranged side by side.

6. The laser online monitoring dynamic cleaning device according to claim 5, characterized in that, Each of the laser units is equipped with a dust cover and an air knife.

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