A soft fall flipper device for a semiconductor chamber

Abstract

The utility model provides a slow -descending flip cover device for semiconductor chamber, include: support seat, arm, the arm extends along first direction, the arm includes first end and opposite second end with first end portion, first end portion is connected with support seat, is equipped with the installation portion who is connected with the cover close to the first end portion of arm, speed reducer, speed reducer is equipped with input shaft and output shaft, input shaft extends along second direction, output shaft extends along third direction, first direction, second direction and third direction are perpendicular to set respectively, the output shaft of speed reducer is connected with the first end portion of arm, telescopic device, the both ends of telescopic device are connected with support seat and the second end portion of arm respectively, operating device, operating device is connected with the input shaft of speed reducer, is equipped with first damper between operating device and speed reducer input shaft. The utility model can realize the cover slow lifting.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to a slow-closing flip cover device for a semiconductor cavity. Background Technology

[0002] In the semiconductor chip manufacturing process, the chip yield is closely related to the condition of the semiconductor equipment. After a long process in the semiconductor chamber, the relevant chamber and its internal components need to be cleaned and inspected regularly. This requires opening the cover to expose the internal environment of the chamber, and then closing the cover again after maintenance is completed.

[0003] The lid opening action is generally manual. Due to the lid's large size and weight, when it is flipped upwards from the closed position to a certain acute angle of opening, once the operator releases their grip, the lid's own weight generates a large flipping torque, driving it to flip downwards and close completely in a very short time. This sudden closing of the lid not only causes machine vibration, affecting its performance, but also poses a safety hazard if personnel attempt to operate the internal parts. Utility Model Content

[0004] The purpose of this invention is to provide a slow-descent flip cover device for semiconductor chambers. When the cover is opened to a certain angle, even without human control, the cover will not suddenly close due to its own weight, thus achieving a slow descent of the cover and improving operational safety.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a slow-closing flip-top device for a semiconductor cavity, comprising: a support base; an arm extending along a first direction, the arm including a first end and a second end opposite to the first end, the first end being connected to the support base, and a mounting portion for connection to a cover being provided near the first end of the arm; a speed reduction device having an input shaft and an output shaft, the input shaft extending along a second direction, and the output shaft extending along a third direction, the first direction, the second direction, and the third direction being perpendicularly arranged, the output shaft of the speed reduction device being connected to the first end of the arm; a telescopic device, the two ends of which are respectively connected to the support base and the second end of the arm; an operating device connected to the input shaft of the speed reduction device, and a first damper being provided between the operating device and the input shaft of the speed reduction device. The output shaft of the speed reduction device passes through the support base, and a clutch and a second damper are sequentially provided at the end of the output shaft, the clutch being mounted on the support base, the second damper being connected to the shaft portion of the clutch, and the second damper being fixed to a damper mounting base.

[0006] As a further improvement of this utility model, the first damper is any one of a rotary damper, a hydraulic damper, or a pneumatic damper.

[0007] As a further improvement of this utility model, the input shaft of the deceleration device is any one of an elliptical shaft, a rhomboid shaft, a triangular shaft, a square shaft, and a pentagonal shaft, and the first damper is provided with a connecting hole adapted to the input shaft along the second direction.

[0008] As a further improvement of this utility model, the speed reduction device is a planetary speed reducer or a harmonic speed reducer.

[0009] As a further improvement of this utility model, the mounting part of the arm is fixedly connected to the cover by a connecting plate.

[0010] As a further improvement of this utility model, the connecting plate is an arc-shaped plate that will be adapted to the outer diameter of the cover.

[0011] As a further improvement of this utility model, the telescopic device is a gas spring, which extends along a first direction and the projection of the gas spring coincides with the center line of symmetry of the arm.

[0012] As a further improvement of this utility model, the telescopic device consists of two gas springs, which extend along a first direction and are arranged in parallel. The two ends of each gas spring are connected to the support base and the second end of the arm, respectively.

[0013] As a further improvement of this utility model, the support base is provided with a positioning hole, the arm is provided with a limiting hole, and the positioning pin passes through the positioning hole and the limiting hole.

[0014] Compared with the prior art, the present invention has the following advantages:

[0015] 1. This utility model provides a slow-closing flip cover device for a semiconductor cavity. The flip cover device includes an operating device, a deceleration device, and a telescopic device. This utility model provides a first damper on the input shaft of the deceleration device, which can prevent the cover from closing suddenly, whether driving in the forward or reverse direction.

[0016] 2. This utility model has a spare second damper on the output shaft of the deceleration device. When the first damper fails, the clutch located on the output shaft of the deceleration device can be activated to activate the second damper and realize the slow descent of the cover.

[0017] 3. This utility model uses two gas springs as a telescopic device to ensure that the cover is evenly stressed during the opening process. Attached Figure Description

[0018] To more clearly illustrate the technical solution of this utility model, the drawings used in the description will be briefly introduced below. Obviously, the drawings in the following description are one embodiment of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort:

[0019] Figure 1 This is one of the structural schematic diagrams of the slow-closing flip cover device of this utility model;

[0020] Figure 2 This is the second schematic diagram of the structure of the slow-closing flip cover device of this utility model;

[0021] Figure 3 This is a partial explosion diagram of the slow-closing flip cover device of this utility model;

[0022] Figure 4 This is a partial schematic diagram of part A of the present invention;

[0023] Figure 5 This is the third structural schematic diagram of the support base of this utility model. Detailed Implementation

[0024] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, further illustrates the proposed solution of this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0025] The semiconductor chamber includes a chamber wall, a cover, and a flip-top device; the chamber wall forms a cavity 110; the cover is connected to the upper part of the chamber wall to seal the cavity, forming a sealed cavity; the flip-top device is fixed to the chamber wall and connected to the cover, facilitating control of opening or closing the cover. Optionally, the semiconductor vacuum chamber can be a CVD chamber, etching chamber, epitaxial chamber, heat treatment chamber, pretreatment chamber, or transfer chamber, etc.

[0026] Figure 1This invention illustrates a soft-closing flip cover device for a semiconductor chamber, comprising: a support base 105; an arm 107 extending along a first direction passing through the center of a cover 108, the arm including a first end and a second end opposite to the first end, the first end being connected to the support base 105, and a mounting portion 109 for connection to the cover 108 being provided near the first end of the arm; and a speed reduction device 103, comprising an input shaft 1031 and an output shaft 1032, the input shaft 1031 extending along a second direction, and the output shaft 1032 extending along a third direction, the first direction, the second direction, and the third direction being perpendicularly arranged, and the output shaft of the speed reduction device being connected to the first end of the arm.

[0027] The support base is connected to the arm via the output shaft of the reduction gear, which provides power when the cover is opened or closed. The two ends of the telescopic device 106 are connected to the second ends of the support base 105 and the arm 107, respectively. Both the telescopic device 106 and the reduction gear 103 provide power when the cover 108 is opened or closed. The operating device 101 is connected to the input shaft 1031 of the reduction gear 103, and a first damper 102 is provided between the operating device and the input shaft 1031. The operating device can be a handwheel, a servo motor, or a drive motor, etc., and is not limited thereto. The first damper 102 between the operating device and the reduction gear prevents the cover 108 from closing rapidly due to its own weight caused by accidental operation, thus avoiding vibration of the chamber caused by the sudden closing of the cover and improving operational safety.

[0028] The speed reduction device 103 includes a housing, a gear set, an input shaft 1031, and an output shaft. The gear set is located inside the housing, and the input shaft 1032 extends out of the housing. The input shaft 1031 of the speed reduction device can be any one of an elliptical shaft, a rhomboid shaft, a triangular shaft, a square shaft, or a pentagonal shaft. Figure 4 The output shaft is a square shaft, which is only an example and not a limitation. The damper has a connecting hole 1021 in the center and is installed on the input shaft 1031 of the reduction gear. The damper has a connecting hole in the center that is adapted to the input shaft. The output shaft of the reduction gear also extends out of the housing and passes through the support base 105 to connect with the arm 107.

[0029] like Figure 2As shown, the support base 105 includes a bracket and a connecting frame 1051. The bracket includes a first support plate 1052 and a second support plate 1053, which extend along a third direction and are arranged opposite to each other. The arm 107 is located within the space formed by the first support plate 1052, the second support plate 1053, and the connecting frame 1051. The output shaft of the speed reduction device passes through the first support plate 1052 and is connected to the arm 107. The output shaft of the speed reduction device is used to output the force provided by the operating device 101 to the arm 107 and drive the arm to flip the cover 108.

[0030] The connecting frame is fixed to the support, and the width w of the connecting frame is less than the width W of the support. The connecting frame extends beyond the support and has a protrusion for connecting with the telescopic device 106.

[0031] Further improvements to this utility model, such as Figure 5 As shown, the output shaft of the reduction gear further passes through the second support plate 1053, and the end of the output shaft of the reduction gear is connected in series with a clutch 120 and a second damper 121. The clutch is fixed to the surface of the second support plate. The clutch can be a dog clutch, an electromagnetic clutch, etc., and is not limited thereto. The second damper is connected to the shaft portion 1201 of the clutch, and the second damper is fixed to the damper mounting seat 122 through two mounting holes located at the edge. The damper mounting seat is fixed to the upper surface of the chamber 110.

[0032] The first damper is any one of a rotary damper, a hydraulic damper, or a pneumatic damper. The second damper is any one of a rotary damper, a hydraulic damper, or a pneumatic damper. The first damper and the second damper have different torques.

[0033] The speed reduction device 103 is a planetary speed reducer or a harmonic speed reducer.

[0034] The mounting portion 109 of the arm 107 is fixedly connected to the cover 108 via a connecting plate 104. The mounting portion of the arm 107 can be directly fixedly connected to the cover, but since the arm is generally long and thin, the contact area between the mounting portion of the arm and the cover is relatively small. Since the cover itself is heavy, connecting the arm to the cover via a connecting plate can improve the connection strength between the arm and the cover.

[0035] A further improvement to this invention is that the connecting plate is an arc-shaped plate of size 104 that adapts to the outer diameter of the cover. To ensure force balance during the opening and closing of the cover, the center line of symmetry of the arc-shaped plate coincides with the center line of symmetry of the arm. To ensure sufficient connection strength between the arm and the cover, the central angle of the arc-shaped plate is greater than 10°.

[0036] The telescopic device 106 is a gas spring, which extends along a first direction and whose projection coincides with the center line of symmetry of the arm. The gas spring can be an air spring or a nitrogen spring, but is not limited thereto.

[0037] The telescopic device 106 consists of two gas springs, each extending along a first direction and arranged in parallel. The two ends of each gas spring are connected to the support base and the second end of the arm, respectively. The width of the arm is equal to the width of the connecting frame. Therefore, the two gas springs can maintain a parallel state, avoiding the generation of forces in directions other than the first direction during the opening and closing process, thus improving the opening and closing efficiency.

[0038] The support base is provided with a positioning hole 111, which is located on the first support plate and / or the second support plate. The arm is provided with a corresponding limiting hole. When the cover is opened to a certain angle, the positioning pin passes through the positioning hole and the limiting hole to fix the arm in a specific position, thereby fixing the cover in a specific position and preventing the cover from flipping undesirably.

[0039] The method of using the slow-closing flip-top device for a semiconductor cavity provided by this utility model is as follows: When the handwheel 101 is rotated, it drives the input shaft of the planetary reducer 103 to rotate. After being amplified by the internal reduction ratio of the planetary reducer 103, the output shaft of the planetary reducer 103 outputs a large torque to rotate, thereby driving the arm 107, the connecting plate 104, and the cover 108 to rotate along the output axis of the planetary reducer 103. This realizes the opening and closing action of the cover 108. The rotational torque generated by the two gas springs 106 is opposite to the rotational torque generated by the gravity of the cover 108, which makes it easier to open the cover 108.

[0040] When there is no damper 102 between the handwheel 101 and the planetary reducer 103, due to the large size and mass of the cover 108, after the planetary reducer 103 drives the cover 108 to open at a certain acute angle, releasing the handwheel 101 causes the weight of the cover 108 to generate a rotational torque that drives the output shaft of the planetary reducer 103 to rotate rapidly in the opposite direction, causing the transmission chamber cover 108 to close rapidly back to its initial closed state, posing a significant safety hazard. However, when a first damper 102 is added between the handwheel and the planetary reducer, the reverse rotational torque generated by the cover 108 drives the output shaft of the planetary reducer 103 to rotate in the opposite direction, and the input shaft of the planetary reducer 103 also rotates in the opposite direction. The first damper generates a torque opposite to the rotation direction of the planetary reducer input shaft, thus preventing the rotation of the planetary reducer 103 input shaft and preventing the cover 108 from descending rapidly. This allows the cover 108 to descend very slowly or remain temporarily still, improving operational safety.

[0041] Furthermore, a spare second damper is installed at the end of the planetary reducer's output shaft. A clutch is also provided between the second damper and the arm. When the first damper is operating normally, the clutch is disengaged, and the second damper does not function. When the first damper fails, the clutch is engaged, and the second damper is activated.

[0042] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. Additionally, the term "connection" in this document indicates a direct connection between A and B, or an indirect connection between A and B, such as an indirect connection between A and B via C, or even via C and D, or more components. The connection between A and B can be integral or separate, detachable or fixed. The term "optional" in this document indicates that the technical feature can be combined with or not combined with any feature in the document.

[0043] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A soft-close flip cover device for a semiconductor chamber, characterized in that, include: Support base; An arm extending along a first direction, the arm including a first end and a second end opposite to the first end, the first end being connected to a support base, and a mounting portion connected to a cover being provided near the first end of the arm; A speed reduction device is provided with an input shaft and an output shaft. The input shaft extends along a second direction, and the output shaft extends along a third direction. The first direction, the second direction, and the third direction are respectively perpendicular to each other. The output shaft of the speed reduction device is connected to the first end of the arm. A telescopic device, wherein both ends of the telescopic device are respectively connected to a support base and the second end of an arm; An operating device is connected to the input shaft of a speed reduction device, and a first damper is provided between the operating device and the input shaft of the speed reduction device. The output shaft of the speed reduction device passes through the support base, and a clutch and a second damper are sequentially provided at the end of the output shaft. The clutch is installed on the support base, and the second damper is connected to the shaft portion of the clutch and fixed to the damper mounting base.

2. The soft-close flip cover device for a semiconductor chamber according to claim 1, characterized in that, The first damper and / or the second damper are any one of a rotary damper, a hydraulic damper, or a pneumatic damper.

3. A soft-closing flip cover device for a semiconductor chamber according to claim 2, characterized in that, The input shaft of the speed reduction device is any one of an elliptical shaft, a rhomboid shaft, a triangular shaft, a square shaft, or a pentagonal shaft, and the first damper is provided with a connection hole adapted to the input shaft.

4. A soft-closing flip cover device for a semiconductor chamber according to claim 3, characterized in that, The speed reduction device is a planetary speed reducer or a harmonic speed reducer.

5. A soft-closing flip cover device for a semiconductor chamber according to claim 4, characterized in that, The mounting portion of the arm is fixedly connected to the cover via a connecting plate.

6. A soft-closing flip cover device for a semiconductor chamber according to claim 5, characterized in that, The connecting plate is an arc-shaped plate that will fit the outer diameter of the cover.

7. A soft-closing flip cover device for a semiconductor chamber according to claim 1, characterized in that, The telescopic device is a gas spring that extends along a first direction and whose projection coincides with the center line of symmetry of the arm.

8. A soft-closing flip cover device for a semiconductor chamber according to claim 1, characterized in that, The telescopic device consists of two gas springs, which extend along a first direction and are arranged in parallel. The two ends of each gas spring are connected to the support base and the second end of the arm, respectively.

9. A soft-closing flip cover device for a semiconductor chamber according to claim 1, characterized in that, The support base is provided with a positioning hole, the arm is provided with a limiting hole, and the positioning pin passes through the positioning hole and the limiting hole.

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