Ejector pin mechanism and die peeling device

Abstract

This utility model relates to a ejector pin mechanism and a chip stripping device. The ejector pin mechanism includes an ejector pin, a floating seat, and a detection component. The floating seat can translate relative to the ejector pin in a floating plane perpendicular to the ejector pin's axis and can rotate around the ejector pin. During the process of driving the ejector pin mechanism towards the wafer, the floating seat, being located around the ejector pin, provides a certain degree of protection for the ejector pin. Moreover, if there is a risk of collision between the ejector pin and equipment such as the wafer stage, the floating seat can collide with the wafer stage before the ejector pin. Once the floating seat collides, it will translate or rotate relative to the ejector pin due to external force, thereby triggering the connected detection component. Therefore, when the detection component is triggered, the chip stripping device can be stopped in time. In this way, the ejector pin mechanism can be stopped in time when there is a risk of collision, thus preventing the ejector pin from ultimately colliding.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging technology, and in particular to a pin mechanism and a chip stripping device. Background Technology

[0002] In semiconductor manufacturing, wafers typically undergo a dicing process to divide them into multiple individual dies. To facilitate processing and securing, a blue film is usually attached to the back of the wafer. This blue film not only maintains the integrity of the wafer structure during dicing but also prevents the diced dies from scattering. After dicing, a die stripping device can be used to separate the dies one by one from the blue film.

[0003] Traditional chip stripping devices typically include a pin mechanism and a pick-up mechanism. When stripping a bare chip, the chip is first positioned above the pin mechanism, then the pins of the pin mechanism lift the blue film, and finally the pick-up mechanism picks up the chip from above, separating the chip from the blue film. However, in actual operation, there is a risk of hard collisions between the pin mechanism and equipment such as the wafer table during movement. Such collisions may cause the pins to bend, break, or lose precision, thus affecting the chip stripping yield and even damaging the equipment. Utility Model Content

[0004] Therefore, it is necessary to provide a pin mechanism and chip stripping device that can effectively prevent pin collisions in order to address the above problems.

[0005] A ejector mechanism includes an ejector pin, a floating seat, and a detection component; the floating seat is sleeved on the ejector pin and limited along the axial direction of the ejector pin, the floating seat is capable of translating relative to the ejector pin in a floating plane perpendicular to the axial direction of the ejector pin, and is capable of rotating around the ejector pin; the detection component is connected to the floating seat, and the floating seat is capable of triggering the detection component when it is displaced relative to the ejector pin.

[0006] In one embodiment, the floating seat includes an annular base plate and an annular side plate extending along the edge of the annular base plate, the annular base plate being fitted onto the ejector pin.

[0007] In one embodiment, a positioning ring and a reference ring are provided at intervals along the axial direction of the ejector pin, and the floating seat is sleeved on the ejector pin and clamped between the positioning ring and the reference ring.

[0008] In one embodiment, spherical pads are sandwiched between the floating seat and the positioning ring, and between the floating seat and the reference ring.

[0009] In one embodiment, the ejector mechanism further includes a reset member disposed between the ejector and the floating seat and capable of providing a restoring force to the floating seat.

[0010] In one embodiment, the reset member is configured as a tension spring, with its two ends connected to the floating seat and the ejector pin respectively, and a plurality of tension springs are arranged at intervals along the circumference of the ejector pin.

[0011] In one embodiment, the ejector mechanism further includes a limiting member and a guide member cooperating with the limiting member. The limiting member is fixedly installed relative to the ejector, the guide member is fixedly connected to the floating seat, and the limiting member can guide the guide member to move along a preset trajectory.

[0012] In one embodiment, the limiting member is provided with a limiting pin, the guide member is provided with a strip-shaped guide groove, and the limiting pin is slidably inserted into the guide groove.

[0013] In one embodiment, the detection component includes a sensor and a baffle, the baffle being fixedly connected to the floating seat, the sensor being fixedly mounted relative to the pin, and the baffle being disposed within the sensing area of ​​the sensor.

[0014] A chip stripping device includes a pin mechanism as described in any of the preferred embodiments above.

[0015] In the aforementioned ejector mechanism and chip stripping device, during the movement of the ejector mechanism toward the wafer, the floating seat, located around the ejector pin, provides a degree of protection. Furthermore, if there is a risk of collision between the ejector pin and equipment such as the wafer stage, the floating seat will collide with the wafer stage before the ejector pin. Once the floating seat collides, it will be subjected to external force, causing it to translate or rotate relative to the ejector pin, thereby triggering the connected detection component. Therefore, once the detection component is triggered, the chip stripping device can be stopped promptly. This allows for timely prevention of further movement of the ejector mechanism when there is a risk of collision, thus avoiding a final collision by the ejector pin. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the ejector mechanism in one embodiment of the present invention;

[0018] Figure 2 for Figure 1 Exploded view of the ejector mechanism shown;

[0019] Figure 3 for Figure 1 A cross-sectional view of the ejector mechanism shown;

[0020] Figure 4 for Figure 1 The diagram shows the structure of the floating seat in the ejector mechanism. Detailed Implementation

[0021] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0022] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0023] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0024] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0025] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0026] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0027] Please see Figure 1 This utility model provides a pin mechanism 100. Furthermore, this utility model also provides a chip stripping device (not shown). The chip stripping device includes the pin mechanism 100.

[0028] When stripping bare chips, the diced wafer is typically fed above the ejector mechanism 100, with the side of the wafer bearing the blue film facing the ejector mechanism 100. Then, the ejector mechanism 100 lifts the blue film along with the bare chip to be stripped. Furthermore, the aforementioned chip stripping device generally includes a driving mechanism (not shown) and a pick-up mechanism (not shown). The ejector mechanism 100 is mounted on the driving end of the driving mechanism (not shown) and can move relative to the wafer under the drive of the driving mechanism. The pick-up mechanism can pick up the bare chip lifted by the ejector mechanism 100 from above the wafer, thus separating the bare chip from the blue film.

[0029] Please refer to the following: Figure 2In one embodiment of the present invention, the ejector mechanism 100 includes an ejector 110, a floating seat 120, and a detection component 130.

[0030] The ejector pin 110 is elongated and can be formed from metal, possessing high mechanical strength. The ejector pin 110 has a small cross-section, typically capable of lifting a single bare die. A floating seat 120 is fitted onto the ejector pin 110 and positioned along its axial direction. That is, the floating seat 120 cannot move along the axial direction of the ejector pin 110. Specifically, in this embodiment, a positioning ring 140 and a reference ring 150 are spaced apart along the axial direction of the ejector pin 110, and the floating seat 120 is fitted onto the ejector pin 110 and held between the positioning ring 140 and the reference ring 150.

[0031] The positioning ring 140 and the reference ring 150 are both fixedly installed on the ejector pin 110, which can be achieved by means of threaded fastening, snap-fit, etc. The positioning ring 140 and the reference ring 150 cooperate to prevent the floating seat 120 from sliding along the ejector pin 110, thereby limiting the installation of the floating seat 120 along the axial direction of the ejector pin 110.

[0032] The floating seat 120 is arranged around the periphery of the ejector pin 110, and the ejector pin 110 passes through the center of the floating seat 120. The floating seat 120 is made of a material with high rigidity, which can protect the ejector pin 110 to a certain extent. Please refer to the following: Figure 4 Specifically, in this embodiment, the floating seat 120 includes an annular base plate 121 and an annular side plate 122. The annular side plate 122 extends along the edge of the annular base plate 121, and the annular base plate 121 is fitted onto the ejector pin 110. A hollow area 1211 is formed in the middle of the annular side plate 122, through which the ejector pin 110 passes. The annular side plate 122 can surround the ejector pin 110, providing better protection for the ejector pin 110.

[0033] Furthermore, the floating seat 120 can translate relative to the ejector pin 110 within a floating plane and can rotate about the ejector pin 110. In other words, the floating seat 120 has two degrees of freedom relative to the ejector pin 110. The floating plane refers to a virtual plane perpendicular to the axis of the ejector pin 110; that is, the floating seat 120 can translate radially relative to the ejector pin 110. Specifically, the inner diameter of the hollowed-out area 1211 of the annular base plate 121 is larger than the outer diameter of the ejector pin 110. Therefore, after the ejector pin 110 passes through the hollowed-out area 1211, it does not radially restrict the annular base plate 121, allowing the floating seat 120 to achieve translation and rotation.

[0034] Please refer to the following: Figure 3Specifically, in this embodiment, a spherical pad 160 is held between the floating seat 120 and the positioning ring 140, and a spherical pad 160 is also held between the floating seat 120 and the reference ring 150. That is, the two sides of the floating seat 120 are in contact with the positioning ring 140 and the reference ring 150 respectively through the spherical pad 160. The surface of the spherical pad 160 has a smooth arc surface, which can reduce the sliding friction between the floating seat 120 and the positioning ring 140 and between the floating seat 120 and the reference ring 150, thereby ensuring that the floating seat 120 can slide smoothly under the clamping of the positioning ring 140 and the reference ring 150, so as to realize translation within the floating plane.

[0035] Each side of the floating seat 120 is provided with at least three non-collinear spherical pads 160, thereby providing stable support for the floating seat 120. The spherical pads 160 on both sides of the floating seat 120 can be embedded into the floating seat 120 and can move with the floating seat 120 during translation. Moreover, the spherical pads 160 can also be embedded in the positioning ring 140 and the reference ring 150, so they will not move with the floating seat 120 during translation.

[0036] It should be noted that in other embodiments, the spherical pad 160 can also be omitted, and the sliding friction can be reduced by polishing the contact interfaces between the floating seat 120 and the positioning ring 140, and between the floating seat 120 and the reference ring 150 into smooth planes, thus ensuring smooth sliding of the floating seat 120. Furthermore, ball bearings can be provided between the floating seat 120 and the positioning ring 140 and the reference ring 150, which also enables the floating seat 120 to slide smoothly.

[0037] The detection component 130 is used to detect whether the floating seat 120 moves relative to the ejector pin 110. Specifically, the detection component 130 is connected to the floating seat 120, and the floating seat 120 can trigger the detection component 130 when it moves relative to the ejector pin 110. Since the floating seat 120 has two degrees of freedom, it can translate or rotate relative to the ejector pin 110 when subjected to an external force, thereby triggering the detection component 130. Specifically, in this embodiment, the detection component 130 includes a sensor 131 and a baffle 132. The baffle 132 is fixedly connected to the floating seat 120, the sensor 131 is fixedly installed relative to the ejector pin 110, and the baffle 132 is disposed within the sensing area of ​​the sensor 131.

[0038] Specifically, the baffle 132 can be directly or indirectly fixedly connected to the floating seat 120 and can move with the floating seat 120. The sensor 131 can be connected to the ejector pin 110 or the base (not shown) where the ejector pin 110 is located via the mounting plate 133. When the baffle 132 moves within the sensing area, it can trigger the sensor 131. When the floating seat 120 collides with something, it will be subjected to an external force and will translate or rotate relative to the ejector pin 110, thereby causing the baffle 132 to move within the sensing area of ​​the sensor 131, and thus triggering the detection component 130.

[0039] It should be noted that in other embodiments, the detection component 130 may also take other forms. For example, the detection component 130 may be a tension sensor, with the main body of the tension sensor fixed relative to the ejector pin 110, and its measuring end connected to the floating seat 120. In this way, when the floating seat 120 translates or rotates, it can pull the measuring end of the tension sensor, thereby causing a change in the detected tension value.

[0040] During the movement of the ejector pin mechanism 100 toward the wafer, if there is a risk of collision between the ejector pin 110 and equipment such as the wafer stage, the floating seat 120 located on the periphery will collide with the wafer stage before the ejector pin 110. Once the floating seat 120 collides, it will be subjected to external force and will translate or rotate relative to the ejector pin 110, thereby triggering the connected detection component 130. Therefore, when the detection component 130 is triggered, it can promptly prompt the operator to manually or automatically control the chip stripping device to stop via the host computer. In this way, the ejector pin mechanism 100 can be stopped in time when there is a risk of collision, effectively preventing the ejector pin 110 from ultimately colliding.

[0041] Please refer to it again. Figure 2 and Figure 3 In this embodiment, the ejector mechanism 100 further includes a reset member 170, which is disposed between the ejector 110 and the floating seat 120 and can provide a restoring force to the floating seat 120.

[0042] Under the restoring force of the reset member 170, the floating seat 120 can maintain its initial position. Only when the external force overcomes the restoring force of the reset member 170 can the floating seat 120 translate or rotate relative to the ejector pin 110, thereby triggering the detection component 130. When the external force disappears, the floating seat 120 can return to its initial position under the restoring force of the reset member 170.

[0043] Without the reset element 170, the degrees of freedom of the floating seat 120 cannot be restricted. Even without a collision, the floating seat 120 is prone to wobbling relative to the ejector pin 110 due to inertia, which could cause the detection component 130 to be erroneously triggered. Furthermore, without the reset element 170, the floating seat 120 is prone to deviating from its initial position, making it inconvenient to initialize and debug the detection component 130.

[0044] Furthermore, in this embodiment, the reset member 170 is configured as a tension spring, with both ends of the tension spring connected to the floating seat 120 and the ejector pin 110, respectively, and multiple tension springs are spaced apart circumferentially along the ejector pin 110. The structure and installation method of the tension springs are relatively simple, and the multiple tension springs spaced apart circumferentially along the ejector pin 110 can provide a uniform restoring force to the floating seat 120, thereby ensuring that the floating seat 120 is subjected to uniform force during floating. Moreover, by adjusting the tension of each tension spring, the initial position of the floating seat 120 can also be adjusted.

[0045] It should be noted that in other embodiments, the reset member 170 may also be other elastic elements such as torsion springs or elastic ropes, as long as they can provide a restoring force to keep the floating seat 120 in the initial position.

[0046] In addition, in this embodiment, the ejector mechanism 100 also includes a limiting member 180 and a guide member 190 that cooperates with the limiting member 180. The limiting member 180 is fixedly installed relative to the ejector 110, the guide member 190 is fixedly connected to the floating seat 120, and the limiting member 180 can guide the guide member 190 to move along a preset trajectory.

[0047] Normally, the direction of movement of the floating seat 120 after being impacted is random and uncontrollable, making the design of the detection component 130 difficult. However, the limiting member 180, in conjunction with the guide member 190, can restrict the movement direction of the floating seat 120 to a single, predictable direction. Theoretically, the floating seat 120 can generate a component force along that single direction when impacted from any direction. Thus, after each impact, the floating seat 120 can move along a preset trajectory under the guidance of the guide member 190; that is, the movement trajectory of the floating seat 120 during its floating process is controllable, facilitating the design of the detection component 130 and ensuring its successful triggering. More specifically, the baffle 132 is mounted on the guide member 190, so the movement trajectory of the baffle 132 during the floating process of the floating seat 120 is also determined, thereby ensuring successful triggering of the haptic sensor 131.

[0048] In addition, the limiting member 180 and the guide member 190 cooperate to provide guidance during the reset process of the floating seat 120, thereby helping the floating seat 120 to naturally return to its initial position.

[0049] Furthermore, in this embodiment, the limiting member 180 is provided with a limiting pin 181, and the guide member 190 is provided with a strip-shaped guide groove 191, in which the limiting pin 181 is slidably inserted. The limiting pin 181 and the guide groove 191 cooperate to achieve guidance, and the assembly of the limiting pin 181 and the guide groove 191 is simple.

[0050] It should be noted that in other embodiments, the limiting member 180 and the guide member 190 can also be used to achieve limiting and guiding in other ways. For example, the limiting member 180 and the guide member 190 can be respectively set as a guide rail and a slider.

[0051] In the process of moving the ejector mechanism 100 toward the wafer, the floating seat 120, located around the ejector pin 110, provides some protection for the ejector pin 110. Furthermore, if there is a risk of collision between the ejector pin 110 and equipment such as the wafer stage, the floating seat 120 will collide with the wafer stage before the ejector pin 110. Once the floating seat 120 collides with the wafer stage, it will be subjected to external force and shift or rotate relative to the ejector pin 110, thereby triggering the connected detection component 130. Therefore, when the detection component 130 is triggered, the chip stripping device can be stopped in time. This allows for timely prevention of further movement of the ejector mechanism 100 when there is a risk of collision, thus avoiding the ejector pin 110 from ultimately colliding.

[0052] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0053] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A pin mechanism (100), characterized in that, It includes a ejector pin (110), a floating seat (120), and a detection component (130); the floating seat (120) is sleeved on the ejector pin (110) and limited along the axial direction of the ejector pin (110); the floating seat (120) can translate relative to the ejector pin (110) in a floating plane perpendicular to the axial direction of the ejector pin (110) and can rotate around the ejector pin (110); the detection component (130) is connected to the floating seat (120), and the floating seat (120) can trigger the detection component (130) when it is displaced relative to the ejector pin (110).

2. The ejector mechanism (100) according to claim 1, characterized in that, The floating seat (120) includes an annular base plate (121) and an annular side plate (122) extending along the edge of the annular base plate (121), the annular base plate (121) being sleeved on the ejector pin (110).

3. The ejector mechanism (100) according to claim 1, characterized in that, A positioning ring (140) and a reference ring (150) are provided at intervals along the axial direction of the ejector pin (110). The floating seat (120) is sleeved on the ejector pin (110) and clamped between the positioning ring (140) and the reference ring (150).

4. The ejector mechanism (100) according to claim 3, characterized in that, Spherical pads (160) are held between the floating seat (120) and the positioning ring (140) and between the floating seat (120) and the reference ring (150).

5. The ejector mechanism (100) according to claim 1, characterized in that, The ejector mechanism (100) further includes a reset member (170), which is disposed between the ejector (110) and the floating seat (120) and can provide a restoring force to the floating seat (120).

6. The ejector mechanism (100) according to claim 5, characterized in that, The reset member (170) is configured as a tension spring, with its two ends connected to the floating seat (120) and the ejector pin (110) respectively, and a plurality of tension springs are arranged at intervals along the circumference of the ejector pin (110).

7. The ejector mechanism (100) according to claim 1, characterized in that, The ejector mechanism (100) further includes a limiting member (180) and a guide member (190) that cooperates with the limiting member (180). The limiting member (180) is fixedly installed relative to the ejector (110), and the guide member (190) is fixedly connected to the floating seat (120). The limiting member (180) can guide the guide member (190) to move along a preset trajectory.

8. The ejector mechanism (100) according to claim 7, characterized in that, The limiting member (180) is provided with a limiting pin (181), and the guide member (190) is provided with a strip-shaped guide groove (191). The limiting pin (181) is slidably inserted into the guide groove (191).

9. The ejector mechanism (100) according to claim 1, characterized in that, The detection component (130) includes a sensor (131) and a baffle (132). The baffle (132) is fixedly connected to the floating seat (120). The sensor (131) is fixedly installed relative to the pin (110), and the baffle (132) is disposed in the sensing area of ​​the sensor (131).

10. A chip stripping device, characterized in that, Includes the ejector mechanism (100) as described in any one of claims 1 to 9 above.

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