Polishing machine and double-sided polishing apparatus
By introducing a cleaning mechanism into the polishing machine, the root of the sun gear and the gear ring is automatically cleaned, solving the meshing problem caused by polishing fluid crystallization or scaling, and ensuring the normal operation of the polishing machine.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 苏州博宏源设备股份有限公司
- Filing Date
- 2025-07-23
- Publication Date
- 2026-06-12
Smart Images
Figure CN224347616U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of polishing equipment technology, and in particular to a polishing machine and a double-sided polishing device. Background Technology
[0002] Polishing machines are widely used for double-sided polishing of silicon wafers, glass, sapphire, crystal, and semiconductor materials such as silicon carbide and gallium arsenide. The lower platen mechanism of the polishing machine includes a sun gear and a gear ring. A planetary gear (i.e., a carrier) for carrying the workpiece is mounted between the sun gear and the gear ring and is held by the upper platen of the upper platen mechanism and the lower platen of the lower platen mechanism. When the sun gear and gear ring rotate, the planetary gear drives the workpiece to move relative to the upper and lower plates, thus allowing the polishing pads on the upper and lower plates to polish the workpiece on both sides.
[0003] In related technologies, the polishing fluid used in polishing machines may crystallize or scale, which makes the roots of the sun gear and the gear ring prone to crystallization or scaling after long-term use. This affects the normal meshing of the planetary gear with the sun gear and the gear ring, leading to problems such as the planetary gear getting stuck in rotation or being unable to be assembled between the sun gear and the gear ring. Utility Model Content
[0004] The purpose of this invention is to provide a polishing machine and a double-sided polishing device to automatically clean the crystals or scale of polishing fluid at the root of the sun gear and the gear ring, thereby avoiding problems such as the planetary gear getting stuck or unable to be assembled between the sun gear and the gear ring.
[0005] To achieve this objective, the technical solution adopted by this utility model is as follows:
[0006] A polishing machine includes a lower plate mechanism, an upper plate mechanism, and a cleaning mechanism. The lower plate mechanism includes a rotatable lower plate, a sun gear, a gear ring, and planetary gears. The lower plate, the sun gear, and the gear ring are coaxially arranged. Multiple planetary gears are movably arranged on the lower plate, and each planetary gear simultaneously meshes with the sun gear and the gear ring. Each planetary gear has a receiving groove for accommodating products. The upper plate mechanism includes a rotatable upper plate, which is movably arranged above the lower plate along the height direction and has a polishing position and a clearance position. The clearance position is located above the polishing position.
[0007] The cleaning mechanism includes a cleaning frame, a water pipe, and at least two nozzles. The water pipe is disposed on the cleaning frame and communicates with the at least two nozzles to supply water to the nozzles. The cleaning frame is movably disposed on the lower plate mechanism and is configured to move to the outside of the upper plate and the lower plate when the upper plate is in the polishing position, and to move between the upper plate and the lower plate when the upper plate is in the avoidance position, so that the at least two nozzles spray water toward the teeth of the sun gear and the gear ring, respectively.
[0008] As an optional solution, the cleaning mechanism further includes a rotary drive component, which is mounted on the lower plate mechanism and is throttle-connected to the cleaning frame to drive the cleaning frame to move to the outside of or between the upper plate and the lower plate.
[0009] As an optional solution, the cleaning rack includes:
[0010] An arm plate, the output end of the rotary drive component is connected to one end of the arm plate; the water pipe is disposed on the arm plate;
[0011] A connecting plate is provided at one end of the arm plate. Brushes are movably provided at both ends of the connecting plate along its length. The brushes move up and down relative to the connecting plate along the height direction and have a first position and a second position. When the brushes are in the first position, the two brushes respectively abut against the teeth of the corresponding sun gear and the teeth of the gear ring. When the brushes are in the second position, the two brushes respectively disengage from the teeth of the corresponding sun gear and the teeth of the gear ring.
[0012] As an optional solution, the cleaning mechanism further includes a lifting drive component. The lifting drive component is provided at both ends of the connecting plate along its length. The lifting drive component is connected to the brush in a one-to-one transmission connection to drive the brush to switch between the first position and the second position.
[0013] As an optional solution, the output end of the lifting drive component is provided with an end plate, which is connected to the brush by screws; or, the end plate is magnetically connected to the brush; or, the end plate is adhesively connected to the brush.
[0014] Alternatively, each of the brushes may have a nozzle disposed adjacent to one side.
[0015] As an optional feature, the water pipe is equipped with a pressure regulating valve, which is configured to regulate the water pressure inside the water pipe.
[0016] As an optional solution, the upper plate mechanism further includes a base and a first driving member. The base is disposed above the lower plate mechanism, and the first driving member is movably disposed on the base and drivenly connected to the upper plate to drive the upper plate to rotate axially.
[0017] As an optional solution, the upper plate mechanism further includes a second driving member, which is disposed on the base and is connected to the first driving member for transmission, so as to drive the upper plate to move up and down in the height direction through the first driving member, so that the upper plate switches between the polishing position and the avoidance position.
[0018] The double-sided polishing equipment includes an automatic loading and unloading mechanism and the aforementioned polishing machine. The automatic loading and unloading mechanism is used to load and unload materials into the receiving groove of the planetary wheel.
[0019] The beneficial effects of this utility model are as follows:
[0020] The polishing machine proposed in this utility model adds a cleaning mechanism. After the upper plate is raised from the polishing position to the avoidance position along the height direction, the cleaning frame moves between the upper and lower plates, so that at least two nozzles spray water towards the teeth of the sun gear and the gear ring respectively, so as to automatically clean the crystals or scale of the polishing liquid on the teeth of the sun gear and the gear ring, thereby improving the cleanliness of the teeth of the sun gear and the gear ring, avoiding the problem of the planetary gear getting stuck or unable to be assembled between the sun gear and the gear ring, and ensuring the normal polishing operation of the polishing machine.
[0021] The double-sided polishing equipment proposed in this utility model includes the aforementioned polishing machine. The cleaning mechanism automatically cleans the crystals or scale on the teeth of the sun gear and the gear ring, improving the cleanliness of the teeth of the sun gear and the gear ring. This avoids problems such as the planetary gear getting stuck or unable to be assembled between the sun gear and the gear ring, ensuring the normal polishing operation of the double-sided polishing equipment. Attached Figure Description
[0022] Figure 1 This is a schematic diagram of the structure of the double-sided polishing equipment provided in an embodiment of the present invention;
[0023] Figure 2 This is a partial structural schematic diagram of the double-sided polishing equipment provided in an embodiment of the present invention;
[0024] Figure 3 This is a first structural schematic diagram of the lower plate mechanism provided in an embodiment of the present invention;
[0025] Figure 4 This is a schematic diagram of the second structure of the lower plate mechanism provided in an embodiment of the present invention;
[0026] Figure 5 This is a schematic diagram of the upper plate mechanism provided in an embodiment of the present invention;
[0027] Figure 6 This is a schematic diagram of the cleaning mechanism provided in an embodiment of the present invention.
[0028] The component names and labels in the diagram are as follows:
[0029] 100. Lower plate mechanism; 1. Lower plate; 2. Sun gear; 3. Gear ring; 4. Planetary gear; 41. Receiving slot; 5. Third drive component; 6. First drive gear; 7. First drive gear; 8. Fourth drive component; 9. Second drive gear; 10. Second drive gear; 11. Braking mechanism; 111. Braking drive component; 112. Brake lever; 12. Electrical cabinet; 13. Laser sensor;
[0030] 200. Upper plate mechanism; 20. Upper plate; 21. Base; 22. Clearance drive component; 23. Frame; 24. First drive component; 25. Second drive component; 26. Displacement sensor; 27. Lead screw; 28. Slide rail; 29. Liquid receiving tray;
[0031] 300. Cleaning mechanism; 31. Cleaning rack; 311. Arm plate; 312. Connecting plate; 32. Water pipe; 33. Nozzle; 34. Brush; 35. Rotary drive component; 36. Lifting drive component; 361. End plate. Detailed Implementation
[0032] To make the technical problem solved by this utility model, the technical solution adopted, and the technical effect achieved clearer, the technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely for explaining this utility model and not for limiting it. Furthermore, it should be noted that, for ease of description, only the parts related to this utility model are shown in the accompanying drawings, not all of them.
[0033] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0035] In the description of this embodiment, the terms "upper," "lower," "right," and "left," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.
[0036] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.
[0037] like Figure 1 and Figure 2 As shown in the figure, this embodiment proposes a double-sided polishing device, which includes an automatic loading and unloading mechanism (not shown in the figure) and a polishing machine. The automatic loading and unloading mechanism is used to load and unload materials into the receiving groove 41 of the planetary wheel 4.
[0038] Specifically, the polishing machine includes a lower plate mechanism 100 and an upper plate mechanism 200. The lower plate mechanism 100 includes a rotatable lower plate 1, a sun gear 2, a gear ring 3, and planetary gears 4. The lower plate 1, sun gear 2, and gear ring 3 are coaxially arranged. Multiple planetary gears 4 are movably arranged on the lower plate 1, and each planetary gear 4 simultaneously meshes with the sun gear 2 and gear ring 3. The planetary gears 4 have a receiving groove 41 for accommodating the product. The upper plate mechanism 200 includes a base 21 and an upper plate assembly. The base 21 is located above the lower plate mechanism 100. The upper plate assembly includes a rotatable upper plate 20. The upper plate 20 is movably arranged above the lower plate 1 along the height direction (vertical direction in the figure) and has a polishing position and an avoidance position. The avoidance position is located above the polishing position. During the polishing process, the product to be polished is located in the receiving groove 41 of the planetary gear 4, and the size of the receiving groove 41 is adapted to the product. The upper plate 20 and lower plate 1 are positioned directly opposite each other along their height, with the upper plate 20 located directly above the lower plate 1, and the planetary wheel 4 positioned between the upper plate 20 and the lower plate 1. During polishing and grinding, the upper plate 20, lower plate 1, sun wheel 2, and gear ring 3 rotate at adjustable speeds, causing the planetary wheel 4 to rotate around its own axis under the drive of the sun wheel 2 and gear ring 3. This ensures that the polishing pads of the upper plate 20 and lower plate 1 evenly grind the product within the planetary wheel 4, achieving uniform polishing of the product. The aforementioned automatic loading and unloading mechanism is a robotic arm or similar device. Since the process of achieving automatic loading and unloading using robotic arms and devices is existing technology, the mechanism and loading / unloading operation of the robotic arm or device will not be described in detail here.
[0039] like Figure 1As shown, the upper plate mechanism 200 is installed directly above the lower plate mechanism 100. The lower plate mechanism 100 is equipped with a column and an electrical cabinet 12, which together support the base 21 of the upper plate mechanism 200, thereby achieving a compact installation of the polishing machine and making full use of the installation space. Figure 2 As shown, a laser sensor 13 is installed on the rear side of the electrical cabinet 12 to detect the rotational position of the gear ring 3.
[0040] like Figure 3 As shown, the lower plate mechanism 100 also includes a third driving member 5, a first driving gear 6, and a first driving gear 7. The output end of the third driving member 5 is connected to the first driving gear 6, the first driving gear 6 meshes with the first driving gear 7, and the first driving gear 7 is connected to the sun gear 2 to drive the sun gear 2 to rotate axially. The lower plate mechanism 100 also includes a fourth driving member 8, a second driving gear 9, and a second driving gear 10. The output end of the fourth driving member 8 is connected to the second driving gear 9, the second driving gear 9 meshes with the second driving gear 10, and the second driving gear 10 is connected to the gear ring 3 to drive the gear ring 3 to rotate axially. The lower plate mechanism 100 also includes a fifth driving member, which is connected to the lower plate 1 to drive the lower plate 1 to rotate axially. The lower plate mechanism 100 drives the sun gear 2 and the gear ring 3 to rotate axially (i.e., rotate around their respective axes) through gear meshing. Since the transmission ratio of the gear transmission is constant, the accuracy of power transmission of the third driving member 5 and the fourth driving member 8 is ensured. Meanwhile, the gear meshing transmission method not only runs smoothly, which helps to reduce the vibration and noise of the polishing machine, but also the gear meshing structure is relatively small, making the structure of the lower plate mechanism 100 more compact.
[0041] In this embodiment, both the third driving component 5 and the fourth driving component 8 are servo motors. Servo motors have advantages such as high control precision and stable output, ensuring the rotational accuracy of the sun gear 2 and the gear ring 3. The fifth driving component can also be a servo motor to ensure the rotational accuracy of the lower plate 1.
[0042] In an optional embodiment, the lower plate mechanism 100 further includes two braking mechanisms 11, one of which engages with the first drive gear 7 to limit its axial rotation. The other braking mechanism 11 engages with the second drive gear 10 to limit its axial rotation, and the meshing clearance between the planetary gear 4 and the sun gear 2 and the meshing clearance between the planetary gear 4 and the gear ring 3 are located on the same side. By setting two braking mechanisms 11, braking functions are added to the first drive gear 7 and the second drive gear 10 respectively. When the sun gear 2 and the ring gear 3 stop rotating, the two braking mechanisms 11 push the meshing gap between the planetary gear 4 and the sun gear 2 and the meshing gap between the planetary gear 4 and the ring gear 3 to the same side. This ensures that the meshing gaps between the ring gear 3 and the sun gear 2 and the planetary gear 4 are always on the same side, ensuring that the meshing gaps are not random. This improves the positioning accuracy of the planetary gear 4 on the lower plate 1, so that the robot or robotic arm can accurately place the product in the receiving slot 41 of the planetary gear 4 or take the product out of the receiving slot 41, thereby improving the accuracy and reliability of automatic loading and unloading.
[0043] like Figure 4 As shown, the braking mechanism 11 includes a braking drive component 111 and a brake lever 112. The braking drive component 111 is connected to the brake lever 112 to drive the brake lever 112 to press against or disengage from the tooth surface of the corresponding sun gear 2 or gear ring 3. The braking drive component 111 is a cylinder. The cylinder has a simple structure, is easy to install and maintain, and responds quickly, enabling it to quickly push out the brake lever 112, thereby quickly stopping the rotation of the sun gear 2 and gear ring 3. When loading or unloading is required on the planetary wheel 4, the third drive component 5 and the fourth drive component 8 stop. The two cylinders respectively drive the corresponding brake lever 112 to extend and press against the tooth surface of the sun gear 2 and the tooth surface of the gear ring 3, thereby completely stopping the rotation of the sun gear 2 and gear ring 3. Under the push of the two brake levers 112, the meshing gap between the gear ring 3 and the sun gear 2 and the planetary wheel 4 is always on the same side, thereby accurately positioning the planetary wheel 4 in the lower plate 1.
[0044] like Figure 1 and Figure 5As shown, the upper plate mechanism 200 of this embodiment also includes a clearance drive 22. The upper plate assembly is horizontally slidably disposed on the base 21 and has a clearance position and a loading / unloading position. The clearance drive 22 is drively connected to the upper plate assembly to drive the upper plate assembly to switch between the clearance position and the loading / unloading position. When the upper plate assembly is in the clearance position, the upper plate 20 and the lower plate 1 are directly opposite each other along the height direction. When the upper plate assembly is in the loading / unloading position, at least one planetary wheel 4 is located outside the projection area of the upper plate 20 on the lower plate 1 along the height direction, so that loading / unloading can be performed into the receiving groove 41 of the planetary wheel 4 by an automatic loading mechanism. The clearance drive 22 drives the upper plate assembly to slide horizontally from the clearance position to the loading / unloading position on the base 21, so that at least one planetary wheel 4 is located outside the projection area of the upper plate 20 in the height direction of the lower plate 1. This prevents the upper plate 20 from completely obscuring the planetary wheels 4 in the height direction, ensuring that at least one planetary wheel 4 is exposed. This allows the automatic loading / unloading mechanism to place the product to be polished into the receiving slot 41 of the exposed planetary wheel 4 or remove the product from the receiving slot 41 of the exposed planetary wheel 4. The rotation of the lower plate 1 drives multiple planetary wheels 4 to be exposed one by one on the upper plate 20, thereby realizing the automatic loading / unloading operation of the product on multiple planetary wheels 4. In the above-mentioned automatic loading / unloading process, the upper plate 20 completely clears the space above the planetary wheels 4 located outside the projection area of the upper plate 20 in the lower plate 1, ensuring that the automatic loading / unloading mechanism has sufficient movement space, realizing the smooth operation of the loading / unloading process, shortening the loading / unloading time, and improving polishing efficiency. At the same time, it avoids collision and interference between the upper plate 20 and the automatic loading / unloading mechanism, improving the safety of the polishing process. In addition, the polishing liquid on the upper plate 20 will not drip onto the vision system or other detection elements of the automatic loading and unloading mechanism, ensuring the reliability of the automatic loading and unloading mechanism.
[0045] like Figure 5 As shown, the upper plate assembly also includes a base 23 and a first drive member 24. The base 23 is positioned above the lower plate mechanism 100, and the first drive member 24 is movably mounted on the base 23 and driven by the upper plate 20 to drive the upper plate 20 to rotate axially. Specifically, the base 23 is slidably mounted on the base 21. A clearance drive member 22 is driven by the base 23 to drive the base 23 to slide to a clearance position or a loading / unloading position. The first drive member 24 is a motor. When loading / unloading is required, the clearance drive member 22 drives the base 23 to slide horizontally from front to back in the front-to-back direction to the loading / unloading position. At this time, the upper space of a planetary wheel 4 is exposed, giving the automatic loading / unloading mechanism sufficient space to place the product into the accommodating slot 41 of the exposed planetary wheel 4 or to remove the polished product from the accommodating slot 41 of the exposed planetary wheel 4. After loading / unloading is completed, the clearance drive member 22 drives the base 23 to slide horizontally from back to front to the clearance position.
[0046] In an optional embodiment, the upper assembly further includes a lead screw 27 and a slide rail 28, with the output end of the clearance drive 22 being driven by the lead screw 27. The base 23 is threadedly connected to the lead screw 27. The slide rail 28 is disposed on the base 21 along the axial direction (front-back direction in the figure) of the lead screw 27, and the base 23 is slidably engaged with the slide rail 28. Through the threaded connection between the base 23 and the lead screw 27, and the slidable engagement between the base 23 and the slide rail 28, the base 23 can slide horizontally back and forth along the slide rail 28 under the drive of the lead screw 27. This guides and limits the sliding of the base 23 on the base 21 via the slide rail 28, improving the sliding accuracy and stability of the base 23.
[0047] In this embodiment, the slide rails 28 extend in the front-to-back direction and are provided in two directions in the left-to-right direction. The seat 23 is slidably engaged with both slide rails 28 to prevent the seat 23 from shifting position during sliding, thereby further improving the sliding accuracy and stability of the seat 23.
[0048] like Figure 5 As shown, the upper plate assembly also includes a second drive member 25, which is disposed on the base 23 and is connected to the first drive member 24 for transmission. The second drive member 25 drives the upper plate 20 to move vertically along the height direction via the first drive member 24, allowing the upper plate 20 to switch between a polishing position and a clearance position, with the clearance position located above the polishing position. The second drive member 25 can be a cylinder. When loading or unloading is required, the second drive member 25 drives the first drive member 24 and the upper plate 20 to rise vertically from the polishing position to the clearance position. Then, the clearance drive member 22 drives the base 23 to slide horizontally from front to back to the loading / unloading position. By first raising the upper plate 20 and then moving it from front to back to the loading / unloading position, the upper plate 20 is separated from the lower plate mechanism 100 by a large distance before sliding horizontally to the loading / unloading position, avoiding interference between the upper plate 20 and the lower plate mechanism 100 and improving the safety of the loading / unloading process. After loading and unloading are completed, the clearance drive 22 drives the seat 23 to slide horizontally from back to front to the clearance position. The second drive 25 drives the first drive 24 and the upper plate 20 to descend from the clearance position to the polishing position along the height direction. At this time, the upper plate 20 is set opposite to the lower plate 1 and the planetary wheel 4 is sandwiched in the middle to achieve double-sided polishing of the product.
[0049] like Figure 5 As shown, the upper plate assembly also includes a displacement sensor 26, which is configured to detect the vertical position of the upper plate 20 along the height direction. Specifically, the polishing machine also includes a control module, and the displacement sensor 26 is electrically connected to the control module to transmit the detected vertical position of the upper plate 20 to the control module. The control module controls the second drive unit 25 to drive the upper plate 20 to switch between a polishing position and an avoidance position. Since the control module is prior art, its structure and operation will not be described in detail.
[0050] like Figure 1 As shown, the upper plate assembly also includes a liquid receiving tray 29 disposed on the lower plate mechanism 100, with one end of the liquid receiving tray 29 extending below the upper plate 20 located at the loading / unloading position. By extending the liquid receiving tray 29 directly below the loading / unloading position, all polishing liquid dripping from the upper plate 20 after it moves to the loading / unloading position falls into the liquid receiving tray 29, ensuring a clean environment around the polishing machine. The liquid receiving tray 29 includes a mounting part and a tray body for containing polishing liquid. The mounting part is installed on the lower plate mechanism 100, and the tray body is detachably disposed on the mounting part. The liquid receiving tray 29 adopts a separate assembly method (such as plug-in or screw connection), allowing the tray body to be removed from the mounting part for easy cleaning of polishing shavings and other debris from the liquid receiving tray 29.
[0051] It should be noted that since the products to be polished are mostly thin sheet structures, a small amount of the polished product will adhere to the upper plate 20. Therefore, a water polishing process is added after the polishing process, that is, water is used to replace the polishing liquid and continue to rinse the upper plate 20 to reduce the adhesion between the product and the upper plate 20. The control module controls the second driving component 25 to raise the upper plate 20 a small distance, so that the upper plate 20 leaves the polishing position, but it is also necessary to ensure that the product adhering to the upper plate 20 does not leave the receiving groove 41 corresponding to the planetary wheel 4. At this time, the first driving component 24 drives the upper plate 20 to rotate axially, while the planetary wheel 4 remains stationary. The product and the upper plate 20 move relative to each other, further reducing the adhesion between them, so that the product separates from the upper plate 20 more quickly.
[0052] The polishing fluid used in existing polishing machines exhibits crystallization or scaling, which causes the roots of the sun gear and gear ring to easily accumulate crystals or scale after long-term use. This affects the normal meshing of the planetary gear with the sun gear and gear ring, leading to problems such as the planetary gear becoming stuck or unable to be assembled between the sun gear and gear ring.
[0053] To solve the above problems, such as Figure 1 and Figure 6As shown, the polishing machine also includes a cleaning mechanism 300, which includes a cleaning frame 31, a water pipe 32, and at least two nozzles 33. The water pipe 32 is disposed on the cleaning frame 31 and communicates with the at least two nozzles 33 to supply water to the nozzles 33. The cleaning frame 31 is movably disposed on the lower plate mechanism 100. The cleaning frame 31 is configured to move to the outside of the upper plate 20 and the lower plate 1 when the upper plate 20 is in the polishing position, and to move between the upper plate 20 and the lower plate 1 when the upper plate 20 is in the clearance position, so that the at least two nozzles 33 spray water toward the teeth of the sun gear 2 and the gear ring 3, respectively. By adding a cleaning mechanism 300, the upper plate 20 is raised from the polishing position to the clearance position along the height direction. Then, the cleaning frame 31 moves between the upper plate 20 and the lower plate 1, so that at least two nozzles 33 spray water towards the teeth of the sun gear 2 and the gear ring 3 respectively, so as to automatically clean the crystals or scale of the polishing liquid on the teeth of the sun gear 2 and the gear ring 3, improve the cleanliness of the teeth of the sun gear 2 and the gear ring 3, avoid the problem of the planetary wheel 4 being stuck in rotation or unable to be assembled between the sun gear 2 and the gear ring 3, and ensure the normal polishing operation of the polishing machine.
[0054] When the upper plate 20 is in the polishing position, it is close to the lower plate 1 to perform double-sided grinding of the product inside the planetary wheel 4. When the planetary wheel 4 needs to be loaded or unloaded, the upper plate 20 is raised to a clearance position to increase the space between the upper plate 20 and the lower plate 1 in the height direction. Before the automatic loading and unloading mechanism is activated, the cleaning mechanism 300 moves from the outside of the upper plate 20 and the lower plate 1 to between the upper plate 20 and the lower plate 1, so that at least two nozzles 33 spray water towards the teeth of the sun wheel 2 and the gear ring 3, thereby automatically cleaning the crystals or scale of the polishing fluid on the teeth of the sun wheel 2 and the gear ring 3. It should be noted that during the cleaning process, the sun wheel 2 and the gear ring 3 maintain axial rotation so that the water jets sprayed by the nozzles 33 can clean each tooth of the sun wheel 2 and the gear ring 3. After cleaning, the automatic loading and unloading mechanism loads or unloads the product into the receiving groove 41 of the planetary wheel 4.
[0055] like Figure 1 and Figure 6 As shown, the cleaning mechanism 300 also includes a rotary drive 35, which is mounted on the lower plate mechanism 100 and connected to the cleaning frame 31 for transmission, so as to drive the cleaning frame 31 to move to the outside of the upper plate 20 and the lower plate 1 or between the two. The rotary drive 35 is a motor, which has high control precision and is easy to install and maintain. Under the drive of the rotary drive 35, the cleaning frame 31 can swing horizontally, thereby moving the nozzle 33 from the outside of the upper plate 20 and the lower plate 1 to between the upper plate 20 and the lower plate 1. After cleaning, the rotary drive 35 drives the cleaning frame 31 to swing horizontally again, so as to move the nozzle 33 from between the upper plate 20 and the lower plate 1 to the outside of the upper plate 20 and the lower plate 1.
[0056] In this embodiment, the cleaning frame 31 includes an arm plate 311 and a connecting plate 312. The output end of the rotary drive 35 is connected to one end of the arm plate 311. A water pipe 32 is disposed on the arm plate 311. The other end of the arm plate 311 is provided with a connecting plate 312. Brushes 34 are movably disposed at both ends of the connecting plate 312 in the length direction. The brushes 34 move up and down relative to the connecting plate 312 in the height direction and have a first position and a second position. When the brushes 34 are in the first position, the two brushes 34 respectively abut against the teeth of the corresponding sun gear 2 and the teeth of the gear ring 3; when the brushes 34 are in the second position, the two brushes 34 disengage from the teeth of the corresponding sun gear 2 and the teeth of the gear ring 3. By setting two brushes 34 to abut against the teeth of the sun gear 2 and the gear ring 3 respectively, the polishing liquid crystals or scale are quickly brushed away from the teeth of the sun gear 2 and the gear ring 3 under the action of the brushes 34, realizing the coordinated cleaning of the nozzle 33 and the brushes 34, and further improving the cleaning effect.
[0057] It should be noted that the second position is located above the first position. When the cleaning frame 31 swings horizontally between the upper plate 20 and the lower plate 1, the brush 34 is in the second position. At this time, the brush 34 is higher than the teeth of the sun gear 2 and the gear ring 3, avoiding interference and collision between the brush 34 and the sun gear 2 or the gear ring 3 when the cleaning frame 31 swings, thus ensuring the stability and reliability of the swing process of the cleaning frame 31. Then, the brush 34 descends to the first position, at which point the two brushes 34 respectively abut against the teeth of the sun gear 2 and the gear ring 3, thereby brushing away the crystals or scale of polishing fluid on the teeth of the sun gear 2 and the gear ring 3.
[0058] like Figure 6 As shown, the cleaning mechanism 300 also includes a lifting drive component 36. Lifting drive components 36 are provided at both ends of the connecting plate 312 along its length. Each lifting drive component 36 is connected to a brush 34 in a one-to-one transmission manner to drive the brush 34 to switch between a first position and a second position. In this embodiment, the lifting drive component 36 can be a cylinder. Cylinders have a simple structure, small size, and are easy to install. Driving the brush 34 to move up and down along the height direction using a cylinder improves the stability and accuracy of the brush 34's lifting and moving motion.
[0059] In an optional embodiment, the output end of the lifting drive 36 is provided with an end plate 361, which is connected to the brush 34 by screws. The connection between the end plate 361 and the brush 34 by screws not only improves the assembly strength of the end plate 361 and the brush 34, but also allows for the detachable assembly of the brush 34 on the end plate 361, facilitating brush 34 replacement and ensuring the cleaning effect of the cleaning mechanism 300. In other embodiments, the end plate 361 can also be magnetically connected to the brush 34. By installing mutually attracting magnetic components (such as magnets with opposite magnetic properties) on both the end plate 361 and the brush 34, quick assembly and disassembly of the end plate 361 and the brush 34 can also be achieved. Alternatively, the end plate 361 can also be adhesively connected to the brush 34 by applying an adhesive to either the end plate 361 or the brush 34 to reliably bond and fix them together.
[0060] like Figure 6 As shown, each brush 34 has a nozzle 33 adjacent to one side. In this embodiment, there are two brushes 34 and two nozzles 33, and the brushes 34 and nozzles 33 are arranged adjacent to each other. When the nozzles 33 spray water to clean the corresponding teeth of the sun gear 2 or the gear ring 3, the brushes 34 at the nozzles 33 simultaneously brush the teeth of the sun gear 2 or the gear ring 3. That is, while rinsing with water, the brushes 34 also remove the crystals or scale of the polishing liquid, ensuring the cleaning effect of the cleaning mechanism 300.
[0061] In this embodiment, the water pipe 32 is equipped with a pressure regulating valve, which is configured to regulate the water pressure inside the water pipe 32. By controlling the water pressure inside the water pipe 32 through the pressure regulating valve, the water pressure at each nozzle 33 can be flexibly adjusted according to the cleaning requirements of the teeth of the sun gear 2 and the teeth of the gear ring 3, thereby improving the cleaning effect of the nozzles 33.
[0062] The above embodiments merely illustrate the basic principles and characteristics of this utility model. This utility model is not limited to the above embodiments. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.
Claims
1. A polishing machine, characterized in that, The system includes a lower plate mechanism (100), an upper plate mechanism (200), and a cleaning mechanism (300). The lower plate mechanism (100) includes a rotatable lower plate (1), a sun gear (2), a gear ring (3), and planetary gears (4). The lower plate (1), the sun gear (2), and the gear ring (3) are coaxially arranged. Multiple planetary gears (4) are movably arranged on the lower plate (1), and each planetary gear (4) simultaneously meshes with the sun gear (2) and the gear ring (3). Each planetary gear (4) has a receiving groove (41) for accommodating products. The upper plate mechanism (200) includes a rotatable upper plate (20). The upper plate (20) is movably arranged above the lower plate (1) along the height direction and has a polishing position and a clearance position. The clearance position is located above the polishing position. The cleaning mechanism (300) includes a cleaning frame (31), a water pipe (32), and at least two nozzles (33). The water pipe (32) is disposed on the cleaning frame (31) and communicates with at least two of the nozzles (33) to supply water to the nozzles (33). The cleaning frame (31) is movably disposed on the lower plate mechanism (100). The cleaning frame (31) is configured to move to the outside of the upper plate (20) and the lower plate (1) when the upper plate (20) is in the polishing position, and to move between the upper plate (20) and the lower plate (1) when the upper plate (20) is in the avoidance position, so that at least two of the nozzles (33) spray water toward the sun gear (2) and the teeth of the gear ring (3), respectively.
2. The polishing machine according to claim 1, characterized in that, The cleaning mechanism (300) further includes a rotary drive (35), which is mounted on the lower plate mechanism (100) and is connected to the cleaning rack (31) in a transmission manner to drive the cleaning rack (31) to move to the outside of the upper plate (20) and the lower plate (1) or between the two.
3. The polishing machine according to claim 2, characterized in that, The cleaning rack (31) includes: Arm plate (311), the output end of the rotary drive (35) is connected to one end of the arm plate (311); the water pipe (32) is disposed on the arm plate (311); A connecting plate (312) is provided at the other end of the arm plate (311). Brushes (34) are movably provided at both ends of the connecting plate (312) along its length. The brushes (34) move up and down relative to the connecting plate (312) along the height direction and have a first position and a second position. When the brushes (34) are in the first position, the two brushes (34) respectively abut against the teeth of the corresponding sun gear (2) and the teeth of the gear ring (3). When the brushes (34) are in the second position, the two brushes (34) respectively disengage from the teeth of the corresponding sun gear (2) and the teeth of the gear ring (3).
4. The polishing machine according to claim 3, characterized in that, The cleaning mechanism (300) further includes a lifting drive (36). The lifting drive (36) is provided at both ends of the connecting plate (312) in the length direction. The lifting drive (36) is connected to the brush (34) in a one-to-one transmission connection to drive the brush (34) to switch between the first position and the second position.
5. The polishing machine according to claim 4, characterized in that, The output end of the lifting drive (36) is provided with an end plate (361), which is connected to the brush (34) by screws; or, the end plate (361) is magnetically connected to the brush (34); or, the end plate (361) is adhesively connected to the brush (34).
6. The polishing machine according to claim 3, characterized in that, Each of the brushes (34) has a nozzle (33) disposed adjacent to one side.
7. The polishing machine according to any one of claims 1 to 6, characterized in that, The water pipe (32) is equipped with a pressure regulating valve, which is configured to regulate the water pressure inside the water pipe (32).
8. The polishing machine according to any one of claims 1 to 6, characterized in that, The upper plate mechanism (200) further includes a base (23) and a first drive member (24). The base (23) is disposed above the lower plate mechanism (100). The first drive member (24) is movably disposed on the base (23) and is connected to the upper plate (20) in a transmission manner to drive the upper plate (20) to rotate axially.
9. The polishing machine according to claim 8, characterized in that, The upper plate mechanism (200) further includes a second drive member (25), which is disposed on the base (23) and is connected to the first drive member (24) for transmission, so as to drive the upper plate (20) to move up and down in the height direction through the first drive member (24), so that the upper plate (20) switches between the polishing position and the avoidance position.
10. A double-sided polishing equipment, characterized in that, The polishing machine includes an automatic loading and unloading mechanism and any one of claims 1 to 9, wherein the automatic loading and unloading mechanism is used to load and unload materials into the receiving groove (41) of the planetary wheel (4).