Polishing tool for heating disc

Abstract

This utility model relates to the field of thin film deposition equipment processing technology, and discloses a polishing fixture for a heating plate, comprising: a support platform with a through clearance hole along a first direction, the support platform having a supporting surface; a support frame disposed on the side of the support platform away from the supporting surface, the support frame having an accommodating space extending along the first direction, the clearance hole communicating with the accommodating space; at least two limiting members disposed at intervals along the circumference of the support platform on the supporting surface; wherein, the support platform has a second limiting hole corresponding to the limiting member on the supporting surface, the limiting member and the second limiting hole being inserted into each other, and the end of the limiting member near the supporting surface extending out of the second limiting hole. The support cylinder can pass through the support platform and extend into the accommodating space, and the various limiting members and limiting holes cooperate with each other to stably place the plate above the support platform, thereby facilitating the polishing of the heating plate, improving processing efficiency, and reducing processing difficulty.

Description

Technical Field

[0001] This utility model relates to the field of thin film deposition equipment processing technology, specifically to a polishing fixture for a heating plate. Background Technology

[0002] The heating plate is a core component of thin film deposition equipment. The processing of metal heating plates involves multiple processes, including grinding, drilling, and polishing. Typically, a heating plate consists of a plate body and a support cylinder. During the polishing process, the side of the plate body that faces away from the support cylinder needs to be polished.

[0003] Currently, according to existing heating plate polishing processes, the plate body and support cylinder need to be assembled into a whole before polishing to ensure the overall quality of the heating plate. However, the assembled heating plate has an irregular shape, making it difficult to effectively fix the heating plate during polishing, which leads to problems such as low processing efficiency, high processing difficulty, and inconvenience in operation. Utility Model Content

[0004] This utility model provides a polishing fixture for a heating plate to solve or improve the problems in related technologies where the heating plate cannot be effectively fixed during the polishing process, resulting in low processing efficiency, high processing difficulty, and inconvenient operation.

[0005] This utility model provides a polishing fixture for a heating plate, comprising:

[0006] The support platform has a through clearance hole along a first direction, and the support platform has a support surface;

[0007] A support frame is disposed on the side of the support platform opposite to the supporting surface. The support frame has an accommodating space extending in a first direction, and the clearance hole communicates with the accommodating space; and...

[0008] At least two limiting members are spaced apart on the supporting surface along the circumferential direction of the supporting platform;

[0009] The support platform has a second limiting hole corresponding to the limiting member on the supporting surface. The limiting member is inserted into the second limiting hole, and one end of the limiting member near the supporting surface extends out of the second limiting hole.

[0010] Beneficial Effects: As is understandable, a heating plate generally consists of an interconnected support cylinder and a plate body. When using this polishing fixture, the support cylinder can extend through the support platform into the receiving space. Through the cooperation of various limiting components and the second limiting hole, the plate body can be stably placed above the support platform, facilitating polishing of the heating plate, improving processing efficiency, and reducing processing difficulty. Furthermore, the insertion and engagement of the limiting components and the second limiting hole facilitates assembly and disassembly, making operation convenient and adaptable to the processing of heating plates of different sizes or weights. In some heating plate products, a first limiting hole is provided on the side of the plate body facing the support platform. Thus, when using this fixture, one end of the limiting component engages with the support platform, and the other end engages with the first limiting hole, further stabilizing and limiting the positional accuracy of the heating plate to ensure precision.

[0011] In one optional embodiment, the limiting member includes a main body and a second part connected sequentially along the first direction, with the second part disposed at one end of the main body near the support platform.

[0012] The second part and the main part are stepped to form a second step surface, the second step surface abuts against the support platform, and the second part is inserted into the second limiting hole.

[0013] Beneficial effects: The step-type fit structure between the limiting component and the support platform can significantly improve the installation accuracy of the limiting component and facilitate quick alignment and installation. In addition, the main body protrudes from the support platform, and after assembly with the plate, a gap is formed between the plate and the support platform, which can avoid direct contact between the plate and the support platform, thereby reducing the damage to the heating plate due to pressure.

[0014] In one optional embodiment, the limiting member further includes a first part connected to the main body, the first part being disposed at one end of the main body away from the support platform, and the first part being configured as a threaded post.

[0015] Beneficial effects: When installing the limiting component, first, the limiting component is threaded into the first limiting hole of the heating plate, and then the entire heating plate is placed on the support platform so that the second part is inserted into the second limiting hole, which facilitates quick assembly and disassembly and is convenient to operate.

[0016] In one alternative embodiment, the support frame includes:

[0017] The base is spaced apart on the side of the support platform opposite to the disk body;

[0018] At least two support members are provided on the side of the support platform away from the support surface. The base is spaced apart from the support platform. The base has at least one through-hole along the first direction.

[0019] Beneficial effects: The base is connected to multiple support components to form a stable support system, which significantly improves the structural rigidity. Furthermore, the spaced design of multiple support components reduces material usage, lowers costs, and reduces weight while ensuring overall strength.

[0020] In one alternative embodiment, the support member includes:

[0021] The first support part is connected to the base;

[0022] The second support portion is connected to the support platform, and the second support portion is slidably connected to the first support portion along the first direction;

[0023] A locking mechanism is used to fix the second support portion in a predetermined position relative to the first support portion.

[0024] Beneficial effects: The overall height of the support can be adjusted, thereby changing the distance between the support platform and the base, which can then be adapted to the use requirements of support cylinders of different lengths, improving the applicability and flexibility of the tooling.

[0025] In one optional embodiment, the second support portion is slidably sleeved on the outside of the first support portion; the locking mechanism includes a matching locking hole and a locking member, the second support portion is provided with at least two of the locking holes, each of the locking holes is spaced apart along the first direction, and the locking member is threadedly connected in the locking hole and abuts against the outer wall of the first support portion, so as to fix the second support portion relative to the first support portion when it is in a predetermined position.

[0026] Beneficial effects: A specific structure of a locking mechanism is proposed. After the first support and the second support reach the required relative position, the locking fastener is tightened so that one end of the fastener abuts against the outer wall of the first support. By relying on the locking of multiple fasteners, the first support and the second support can be reliably fixed. This structure has the characteristics of simple design and convenient operation.

[0027] In one alternative embodiment, the locking mechanism further includes a locking nut adapted to the locking member, the locking nut being sleeved on the outside of the locking member and abutting against the outer wall of the second support portion.

[0028] Beneficial effects: Further enhances the reliability of locking devices and improves the connection stability and ease of operation of tooling.

[0029] In an optional implementation, a guide structure is further included, the guide structure comprising:

[0030] The first support portion and the second support portion are provided with the guide protrusion and the guide groove respectively. The guide groove extends along the first direction and the guide protrusion is slidably connected to the guide groove.

[0031] Beneficial effects: It can limit and guide the relative movement of the first support and the second support, ensuring that the movement of the two is more precise and stable.

[0032] In one optional embodiment, the support further includes:

[0033] A first protrusion is disposed at one end of the first support near the base. The base is provided with a first fixing hole that matches the first protrusion. The first protrusion is engaged in the first fixing hole and is bolted to the base.

[0034] Beneficial effects: Improved the connection stability between the first support and the base, and made the assembly process simple and quick.

[0035] In one optional embodiment, the support further includes:

[0036] The second protrusion is located at one end of the second support portion near the support platform. The support platform is provided with a second fixing hole that matches the second protrusion. The second protrusion is engaged in the second fixing hole and is bolted to the support platform.

[0037] Beneficial effects: It achieves a stable connection between the second support and the support platform, simplifies the installation process, and significantly improves the stability of the structure and assembly efficiency. Attached Figure Description

[0038] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0039] Figure 1 This is a schematic diagram of the assembly of the polishing fixture for the heating plate and the heating plate according to an embodiment of the present invention;

[0040] Figure 2 This is a schematic diagram of the structure of the polishing fixture for the heating plate according to an embodiment of the present utility model;

[0041] Figure 3 This is a schematic diagram of the heating plate according to an embodiment of the present invention;

[0042] Figure 4 This is a front structural diagram of the support platform according to an embodiment of the present utility model;

[0043] Figure 5 This is a schematic diagram of the reverse structure of the support platform according to an embodiment of the present utility model;

[0044] Figure 6 This is a schematic diagram of the structure of the limiting member according to an embodiment of the present utility model;

[0045] Figure 7 This is a front structural diagram of the base according to an embodiment of the present utility model;

[0046] Figure 8 This is a schematic diagram of the reverse side structure of the base according to an embodiment of the present utility model;

[0047] Figure 9 This is a partial cross-sectional view of the support member according to an embodiment of the present utility model.

[0048] Explanation of reference numerals in the attached figures:

[0049] 1. Support platform; 101. Clearance hole; 102. Second limiting hole; 103. Second fixing hole; 104. First countersunk hole; 105. Supporting surface; 2. Limiting component; 201. Main body; 202. Second part; 203. First stepped surface; 204. Second stepped surface; 205. First part; 3. Support frame; 30. Accommodation space; 31. Base; 311. First fixing hole; 312. Second countersunk hole; 313. Groove; 314. Connecting hole; 32. Support Support component; 321, First support part; 322, Second support part; 323, Locking mechanism; 3231, Locking hole; 3232, Locking part; 3233, Locking nut; 324, First protrusion; 325, Second protrusion; 326, First mounting hole; 327, Second mounting hole; 4, First direction; 5, Guide structure; 51, Guide protrusion; 52, Guide groove; 6, Heating plate; 601, Plate body; 6011, First limiting hole; 602, Support cylinder. Detailed Implementation

[0050] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0051] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection, a direct connection, or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0052] The following is combined with Figures 1 to 9 This describes a polishing fixture for a heating plate according to an embodiment of the present invention.

[0053] According to an embodiment of this utility model, a polishing fixture for a heating plate is provided, including a support platform 1, at least two limiting members 2, and a support frame 3. Specifically, as Figure 1 and Figure 2 As shown, the support platform 1 has a supporting surface 105. The support platform 1 is used to support the plate body 601 of the heating plate 6, and the plate body 601 is placed above the supporting surface 105. Optionally, the support platform 1 is disc-shaped. Figure 4 As shown, the support platform 1 has a through clearance hole 101 along the first direction 4, and the support cylinder 602 of the heating plate 6 passes through the clearance hole 101. It should be noted that, in this embodiment, the first direction 4 is the height direction of the polishing fixture for the heating plate.

[0054] like Figure 2 As shown, the support frame 3 is located on the side of the support platform 1 away from the supporting surface 105. The support frame 3 has an accommodating space 30 extending along the first direction 4, and the clearance hole 101 is connected to the accommodating space 30. Figure 1 As shown, the support cylinder 602 is located within the accommodating space 30.

[0055] like Figure 2 As shown, each limiting member 2 is spaced apart along the circumferential direction of the support platform 1 on the supporting surface 105. Figure 4 As shown, the support platform 1 has a second limiting hole 102 corresponding to the limiting member 2 on the supporting surface 105. The limiting member 2 is inserted into the second limiting hole 102, and the end of the limiting member 2 near the supporting surface 105 extends out of the second limiting hole 102. Thus, the plate body 601 and the support platform 1 are limited and fixed by the limiting member 2, so as to realize the installation of the heating plate 6.

[0056] Specifically, such as Figure 3As shown, the plate body 601 has a first limiting hole 6011 corresponding to the limiting member 2 on the side facing the support platform 1. Thus, one end of the limiting member 2 is inserted into the first limiting hole 6011, and the other end of the limiting member 2 is inserted into the second limiting hole 102, thereby stably limiting the position of the heating plate 6 and achieving reliable installation of the heating plate 6. It should be noted that the number of limiting members 2 can be determined according to actual usage requirements. For example, in this embodiment, there are three limiting members 2, evenly spaced, with each limiting member 2, the second limiting hole 102, and the first limiting hole 6011 corresponding one-to-one.

[0057] With this configuration, the support platform 1 and the support frame 3 form a clamping fixture for the heating plate 6. The support cylinder 602 can extend through the support platform 1 into the receiving space 30, and through the cooperation of various limiting members 2 and limiting holes, the plate body 601 can be stably placed above the support platform 1, thereby facilitating the polishing of the heating plate 6, improving processing efficiency, and reducing processing difficulty. In addition, the insertion and cooperation of the limiting members 2 and the limiting holes facilitates assembly and disassembly, making operation convenient and adaptable to the processing of heating plates of different sizes or weights.

[0058] Optionally, in some embodiments of this utility model, such as Figure 2 and Figure 6 As shown, the limiting member 2 includes a main body 201 and a second part 202 connected sequentially along the first direction 4. The second part 202 is disposed at the end of the main body 201 near the support platform 1. The second part 202 and the main body 201 are stepped together to form a second stepped surface 204, which abuts against the support platform 1. The second part 202 is also inserted into the second limiting hole 102. This configuration creates a stepped fit between the limiting member 2 and the support platform 1, significantly improving the installation accuracy of the limiting member 2 and facilitating rapid alignment and installation. Furthermore, the main body 201 protrudes from the support platform 1, creating a gap between the plate 601 and the support platform 1 after assembly with the plate body 601, thus preventing direct contact between the plate body 601 and the support platform 1 and reducing damage to the heating plate 6 due to pressure.

[0059] Optionally, in some embodiments of this utility model, such as Figure 2 and Figure 6As shown, the limiting member 2 also includes a first part 205 connected to the main body 201. The first part 205 is located at the end of the main body 201 away from the support platform 1 and is configured as a threaded post. Optionally, the first part 205 and the main body 201 are stepped to form a first stepped surface 203, which abuts against the disc body 601. The first part 205 is threaded into the first limiting hole 6011. With this configuration, when installing the limiting member 2, the limiting member 2 is first threaded into the first limiting hole 6011 of the heating disc 6 via the first part 205, and then the heating disc 6 is placed on the support platform 1 so that the second part 202 is inserted into the second limiting hole 102, facilitating quick assembly and disassembly and convenient operation. It should be noted that the first part 205 can also be configured as a smooth post inserted into the first limiting hole 6011.

[0060] In some alternative embodiments, in order to further reduce the damage of the first part 205 to the disk 601, the material of the first part 205 is selected to be a material with a lower hardness than that of the disk 601, such as engineering plastics, Teflon, etc.

[0061] Optionally, in some embodiments of this utility model, such as Figure 2 As shown, the support frame 3 includes a base 31 and at least two support members 32. The base 31 is spaced apart from the support platform 1, and is located on the side of the support platform 1 facing away from the support surface 105. Optionally, the base 31 is disc-shaped. At least one through-hole 314 is provided on the base 31 along the first direction 4, allowing the polishing equipment's platform to be connected via bolts. Optionally, as... Figure 8 As shown, the base 31 has a groove 313 on the side surface opposite to the support platform 1, and the stage is embedded in the groove 313. In this way, the entire fixture can rotate together with the stage, which facilitates the polishing of the heating plate 6.

[0062] Each support member 32 is disposed between the support platform 1 and the base 31, and the support members 32 are spaced apart circumferentially along the support platform 1, forming an accommodating space 30. It should be noted that the number of support members 32 can be determined according to actual design requirements. For example, in this embodiment, there are three support members 32, and each support member 32 is evenly distributed circumferentially around the support cylinder 602.

[0063] With this configuration, the base 31 is connected to multiple support members 32 to form a stable support system, which significantly improves the structural rigidity. Furthermore, the spaced design of multiple support members 32 reduces material usage, lowers costs, and reduces weight while ensuring overall strength.

[0064] Optionally, in some embodiments of this utility model, such as Figure 1As shown, the support member 32 includes a first support portion 321, a second support portion 322, and a locking mechanism 323. The first support portion 321 is connected to the base 31, and the second support portion 322 is connected to the support platform 1. The second support portion 322 and the first support portion 321 are slidably connected along a first direction 4, and the locking mechanism 323 is used to fix the second support portion 322 relative to the first support portion 321 in a predetermined position.

[0065] With this configuration, the overall height of the support member 32 can be adjusted by sliding the second support part 322 relative to the first support part 321, and then fixed by the locking mechanism 323. This allows the distance between the support platform 1 and the base 31 to be changed, thereby adapting to the usage requirements of support cylinders 602 of different lengths and improving the applicability and flexibility of the tooling.

[0066] Optionally, in some embodiments of this utility model, such as Figure 1 As shown, the second support portion 322 is slidably sleeved onto the outside of the first support portion 321. The locking mechanism 323 includes a matching locking hole 3231 and a locking element 3232, as shown... Figure 9 As shown, the second support portion 322 is provided with at least two locking holes 3231, and each locking hole 3231 is spaced apart along the first direction 4. The locking fastener 3232 is threaded into the locking hole 3231 and abuts against the outer wall of the first support portion 321 to fix the second support portion 322 relative to the first support portion 321 in a predetermined position.

[0067] This configuration provides a specific structure for the locking mechanism 323. After the first support portion 321 and the second support portion 322 reach the desired relative position, the locking fastener 3232 is tightened, causing one end of the locking fastener 3232 to abut against the outer wall of the first support portion 321. The locking of multiple locking fasteners 3232 facilitates reliable fixation of the first support portion 321 and the second support portion 322. This structure is characterized by its simple design and convenient operation. Of course, in other embodiments, the locking mechanism 323 may include, but is not limited to, the aforementioned locking hole 3231 and locking fastener 3232 cooperating with each other, and may also employ a snap-fit ​​structure, quick-release clamp, etc.

[0068] Optionally, in some embodiments of this utility model, such as Figure 9 As shown, the locking mechanism 323 also includes a locking nut 3233 adapted to the locking member 3232. The locking nut 3233 is sleeved on the outside of the locking member 3232 and abuts against the outer wall of the second support portion 322. With this configuration, the locking member 3232 is screwed into the locking hole 3231 until it abuts against the outer wall of the first support portion 321, and then locked using the locking nut 3233, thereby further enhancing the reliability of the locking member 3232 and improving the connection stability and ease of operation of the tooling.

[0069] Optionally, in some embodiments of this utility model, the polishing fixture for the heating plate further includes a guide structure 5, which includes a matching guide protrusion 51 and a guide groove 52. One of the first support portion 321 and the second support portion 322 is provided with the guide protrusion 51, and the other is provided with the guide groove 52. That is, the first support portion 321 is provided with the guide protrusion 51, and the second support portion 322 is correspondingly provided with the guide groove 52; or, the second support portion 322 is provided with the guide protrusion 51, and the first support portion 321 is correspondingly provided with the guide groove 52. The guide groove 52 extends along the first direction 4, and the guide protrusion 51 is slidably connected to the guide groove 52.

[0070] Specifically, in this embodiment, such as Figure 9 As shown, the outer wall of the first support portion 321 is provided with a guide groove 52, and the inner wall of the second support portion 322 is provided with a corresponding guide protrusion 51. When the second support portion 322 slides relative to the first support portion 321, the guide protrusion 51 slides along the guide groove 52. With this configuration, the structure can limit and guide the relative movement of the first support portion 321 and the second support portion 322, ensuring that the movement of both is more precise and stable.

[0071] Optionally, in some embodiments of this utility model, such as Figure 9 As shown, the support member 32 also includes a first protrusion 324, which is disposed at one end of the first support member 321 near the base 31. Figure 7 As shown, the base 31 is provided with a first fixing hole 311 that is adapted to the first protrusion 324. The first protrusion 324 is engaged in the first fixing hole 311 and the first protrusion 324 is bolted to the base 31.

[0072] Specifically, such as Figure 9 As shown, the first protrusion 324 is provided with a first mounting hole 326, which is a threaded hole. Figure 8 As shown, a second countersunk hole 312 is provided on the side of the base 31 away from the support platform 1, and the second countersunk hole 312 communicates with the first fixing hole 311. Thus, during assembly, the first protrusion 324 is engaged in the first fixing hole 311, and then a bolt is screwed through the second countersunk hole 312 into the first mounting hole 326, thereby connecting the first support part 321 and the base 31. Furthermore, the countersunk hole design prevents the bolt head from protruding from the surface of the base 31, keeping the surface of the base 31 flat and smooth.

[0073] With this configuration, the first protrusion 324 is engaged in the first fixing hole 311 and connected by bolts, thereby improving the connection stability between the first support 321 and the base 31, and making the assembly process simple and quick.

[0074] Optionally, in some embodiments of this utility model, such as Figure 9 As shown, the support member 32 also includes a second protrusion 325, which is disposed at one end of the second support member 322 near the support platform 1. Figure 5 As shown, the support platform 1 is provided with a second fixing hole 103 that is adapted to the second protrusion 325. The second protrusion 325 is engaged in the second fixing hole 103, and the second fixing hole 103 is bolted to the support platform 1.

[0075] Specifically, such as Figure 9 As shown, the second protrusion 325 is provided with a second mounting hole 327, which is a threaded hole. Figure 4 As shown, a first countersunk hole 104 is provided on the side of the support platform 1 away from the base 31, and the first countersunk hole 104 communicates with the second fixing hole 103. Thus, during installation, the second protrusion 325 is engaged in the second fixing hole 103, and then a bolt is screwed through the first countersunk hole 104 into the second mounting hole 327 to fix the second support part 322 and the support platform 1, ensuring the stability of the connection. Simultaneously, the countersunk hole design ensures that the bolt head is recessed into the surface of the support platform 1, guaranteeing a flat surface and preventing scratches to the surface of the heating plate 6.

[0076] With this configuration, the second protrusion 325 is engaged in the second fixing hole 103 and connected by bolts, thus achieving a stable connection between the second support 322 and the support platform 1, simplifying the installation process and significantly improving the stability and assembly efficiency of the structure.

[0077] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A polishing fixture for a heating plate, characterized in that, include: The support platform (1) has a through clearance hole (101) along the first direction (4), and the support platform (1) has a support surface (105). A support frame (3) is disposed on the side of the support platform (1) away from the supporting surface (105). The support frame (3) has an accommodating space (30) extending along the first direction (4). The clearance hole (101) communicates with the accommodating space (30). At least two limiting members (2) are arranged at circumferential intervals on the supporting surface (105) along the support platform (1); The support platform (1) has a second limiting hole (102) on the support surface (105) corresponding to the limiting member (2). The limiting member (2) is inserted into the second limiting hole (102), and one end of the limiting member (2) near the support surface (105) extends out of the second limiting hole (102).

2. The polishing fixture for the heating plate according to claim 1, characterized in that, The limiting member (2) includes a main body (201) and a second part (202) connected sequentially along the first direction (4), and the second part (202) is disposed at one end of the main body (201) near the support platform (1); The second part (202) and the main body part (201) are stepped to form a second step surface (204), the second step surface (204) abuts against the support platform (1), and the second part (202) is inserted into the second limiting hole (102).

3. The polishing fixture for the heating plate according to claim 2, characterized in that, The limiting member (2) further includes a first part (205) connected to the main body (201). The first part (205) is disposed at one end of the main body (201) away from the support platform (1). The first part (205) is configured as a threaded post.

4. The polishing fixture for the heating plate according to claim 1, characterized in that, The support frame (3) includes: A base (31) is disposed on the side of the support platform (1) away from the support surface (105). The base (31) and the support platform (1) are spaced apart. At least one through connection hole (314) is provided on the base (31) along the first direction (4). At least two support members (32) are disposed between the support platform (1) and the base (31), and each of the support members (32) is arranged at intervals along the circumference of the support platform (1), and the plurality of support members (32) enclose the accommodating space (30).

5. The polishing fixture for the heating plate according to claim 4, characterized in that, The support member (32) includes: The first support part (321) is connected to the base (31); The second support part (322) is connected to the support platform (1), and the second support part (322) and the first support part (321) are slidably connected along the first direction (4); The locking mechanism (323) is used to fix the second support (322) relative to the first support (321) in a predetermined position.

6. The polishing fixture for the heating plate according to claim 5, characterized in that, The second support part (322) is slidably sleeved on the outside of the first support part (321); The locking mechanism (323) includes a matching locking hole (3231) and a locking member (3232). The second support part (322) is provided with at least two of the locking holes (3231). Each of the locking holes (3231) is spaced apart along the first direction (4). The locking member (3232) is threaded into the locking hole (3231) and abuts against the outer wall of the first support part (321) to fix the second support part (322) relative to the first support part (321) in a predetermined position.

7. The polishing fixture for the heating plate according to claim 6, characterized in that, The locking mechanism (323) further includes a locking nut (3233) adapted to the locking member (3232), the locking nut (3233) being sleeved on the outside of the locking member (3232) and abutting against the outer wall of the second support part (322).

8. The polishing fixture for the heating plate according to claim 5, characterized in that, It also includes a guide structure (5), which includes: The first support portion (321) and the second support portion (322) are provided with the guide protrusion (51) and the other is provided with the guide groove (52). The guide groove (52) extends along the first direction (4) and the guide protrusion (51) and the guide groove (52) are slidably connected.

9. The polishing fixture for the heating plate according to claim 5, characterized in that, The support member (32) further includes a first protrusion (324) disposed at one end of the first support member (321) near the base (31). The base (31) is provided with a first fixing hole (311) that is adapted to the first protrusion (324). The first protrusion (324) is engaged in the first fixing hole (311) and the first protrusion (324) is bolted to the base (31).

10. The polishing fixture for the heating plate according to claim 5, characterized in that, The support member (32) includes a second protrusion (325) disposed at one end of the second support part (322) near the support platform (1). The support platform (1) is provided with a second fixing hole (103) adapted to the second protrusion (325). The second protrusion (325) is engaged in the second fixing hole (103) and bolted to the support platform (1).

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