Moisture-proof transfer box

Abstract

The utility model belongs to mask plate transfer technical field, specifically disclose a kind of moisture-proof transfer box, including box and box cover, the box cover can be covered on the box, the slot body is formed in the storage groove with the inside of the box in the box inside and be located at its periphery, the slot body between each form the placing space for placing product, the slot body side facing the placing space is all set up with multiple holes;The slot cover that the slot body sequentially corresponds is all set up with the inside of the box cover and be located at its periphery, after the box cover and the box are mutually buckled, the slot cover can be covered on the slot body and close the slot body.The utility model can reduce the influence of mask plate in the process of transfer by environmental temperature and humidity, improve the phenomenon that mask plate surface mildews atomization and long white mold spot.

Description

Technical Field

[0001] This utility model relates to the field of mask plate transfer technology, specifically to a moisture-proof transfer box. Background Technology

[0002] A photomask (also known as a lithography mask) is a coated glass substrate containing a precise electronic circuit image. Micro- and nano-scale circuit patterns are etched onto the photomask substrate using high-precision photolithography. As the reference carrier for photolithographic pattern transfer, the photomask is composed of three layers: glass, chromium, and chromium oxide. It is mainly used in the semiconductor, flat panel display, and circuit board industries. Because it serves as the blueprint for photolithography, any defects or foreign matter on the photomask will be directly transferred to downstream products, creating a 100% defect risk. Therefore, strict control is required at every stage of handling the photomask.

[0003] Masks are affected by environmental humidity during transport. While the production, storage, and use of masks are conducted in an environment with a temperature of 23℃±1℃ and humidity of 50%±5%, the environment encountered during transport from the mask factory to the client's factory cannot maintain constant temperature and humidity. Especially due to regional differences between north and south and seasonal climate variations, masks are exposed to high temperature and humidity during transport. This causes sodium oxide in the glass to react with water in the air to form sodium hydroxide, which further reacts with carbon dioxide to form sodium carbonate, resulting in white mold spots on the mask surface—a phenomenon commonly known in the industry as haze. Simultaneously, temperature and humidity changes promote the migration of sodium ions from the interior of the glass to the surface, forming white, alkali-rich ion clusters, leading to decreased light transmittance and surface haze. This phenomenon significantly reduces the client's yield and efficiency.

[0004] Existing technology also includes a method to protect photomasks and slow down mold growth by placing several packets of desiccant inside the shielding strap of the photomask transport box. However, this method only maintains dryness inside the packaging bag. The photomask is not transported at a constant temperature during transportation. When the temperature changes from high to low, moisture will still be generated inside the transport box. Since there is no humidity control material inside the box, this moisture will remain on the surface of the photomask. Over time, this will lead to mold and fogging, resulting in the customer receiving a new photomask with a fogged and moldy surface, thus affecting the quality of the photomask surface and the customer's efficiency and yield. Utility Model Content

[0005] This utility model provides a moisture-proof transport box, which aims to reduce the impact of ambient temperature and humidity on the mask during transport and improve the phenomenon of mold fogging and white mold spots on the mask surface.

[0006] This utility model is achieved through the following technical solution: a moisture-proof transport box, including a box body and a box lid, the box lid being able to cover the box body, the box body having grooves inside and around its perimeter, the grooves forming storage slots with the inner side of the box body; a placement space for placing products is formed between each of the grooves, and multiple holes are opened on the side of each groove facing the placement space; the box lid has slot covers on its inner side and around its perimeter, corresponding sequentially to the grooves, and after the box lid and the box body are interlocked, the slot covers can cover the grooves and seal them.

[0007] Compared with existing technologies, this solution has the following advantages and beneficial effects:

[0008] In this design, the storage slot formed by the tank and the inner side of the box can be used to store individually packaged desiccants. Since the side of the tank facing the placement space has multiple holes, forming breathable holes, it is easy for the desiccant to absorb moisture from the box. When the product (such as a photomask) is transported, the desiccant in the storage slot inside the box will directly absorb the moisture from the box, keeping the transport box dry. This reduces the impact of temperature and humidity changes on the photomask during transport, thereby reducing the influence of ambient temperature and humidity on the photomask during transport and improving the phenomenon of mold, fogging, and white mold spots on the photomask surface.

[0009] Meanwhile, the slotted covers inside the box lid cooperate with the box body. After the box lid and box body are fastened together, the slotted covers can seal the box body, making the box body an independent space, preventing the dry substances stored in the box from falling out and contaminating or damaging the products (such as photomasks) placed in the storage space.

[0010] Furthermore, the groove includes a vertical plate and two horizontal plates. The two ends of the vertical plate are respectively perpendicularly connected to the two horizontal plates, and one end of each of the two horizontal plates abuts against the inner sidewall of the box. The vertical plate, the two horizontal plates, and the inner sidewall of the box form the storage groove.

[0011] Beneficial effects: In this design, the tank consists of two horizontal plates and a vertical plate. The horizontal plates, vertical plates, and the inner wall of the box enclose each other to form a storage tank for desiccant-like substances. The shape of the tank is easy to process, and the connection between it and the box is also simpler. In practice, it can be integrally formed with the box or fixed with screws.

[0012] Furthermore, the vertical plate and the two horizontal plates form an I-shaped structure.

[0013] Beneficial effects: In this design, the vertical and horizontal plates form an I-beam structure, which allows one side of the trough to form a storage trough for desiccants and similar substances with the box body. The other side of the trough extends towards the product, and the extended end of the trough can easily abut against the outside of the product, thus limiting the product's position. This ensures the product's stability during transportation, making the product more stable and preventing displacement, thereby avoiding damage to the product during transportation.

[0014] Furthermore, support plates are vertically connected to both ends of the groove cover, and the end of the support plate away from the groove cover is connected to the inner wall of the groove cover.

[0015] Beneficial effects: The support plate in this solution improves the installation position of the groove cover, allowing the groove cover to be smoothly placed on top of the groove.

[0016] Furthermore, the width of the support plate is the same as the width of the horizontal plate, and after the box cover and the box body are fastened together, the support plate can overlap with the corresponding horizontal plate.

[0017] Beneficial effects: In this solution, when the box body and the lid are snapped together, the support plate and the horizontal plate overlap each other, making the support plate and the horizontal plate more compatible. This allows the horizontal plate to support the support plate, and at the same time, it allows one side of the support plate and the horizontal plate to be flush with each other, which together limit the outer side of the product, further improving the stability of the product placed behind the box body.

[0018] Furthermore, multiple support rods are vertically connected to the inner bottom wall of the box. These support rods are located between adjacent grooves, and the height of each support rod is less than or equal to the height of the groove. These support rods can support the bottom of the product.

[0019] Beneficial effect: The support rods installed inside the box in this solution can provide support for the corner positions of the product.

[0020] Furthermore, the inner top wall of the box cover is vertically connected to multiple limiting rods, which are located between adjacent slot covers, and these limiting rods can limit the top of the product.

[0021] Beneficial effects: In this solution, after the lid and body are fastened together, the limiting rod can limit the top of the product. Thus, under the dual limiting effect of the limiting rod and the support rod, as well as the limiting effect formed by the extension end of the groove (i.e., the end of the horizontal plate facing the product) and the end of the support plate facing the product, the product can be kept stable and not shifted in the box, further enhancing the stability of the product during transportation and avoiding damage to the product during transportation.

[0022] Furthermore, one end of the lid is rotatably connected to one end of the box body, and the other end of the lid is detachably connected to the box body.

[0023] Beneficial effects: In this design, the lid is rotatably connected to the box body, making it easy to open the lid and ensuring that the lid is always on the box body, facilitating opening and closing. In addition, the other end of the lid is detachably connected to the box body, making it easy to open the lid and take out or put in the product.

[0024] Furthermore, one end of the lid is connected to a lid clip, and one end of the box body is connected to a box body clip. Both the lid clip and the box body clip are L-shaped. After the lid and the box body are fastened together, the box body clip and the lid clip overlap and symmetrically form a T-shaped structure.

[0025] The lid and the body are detachably connected by a snap fastener. The snap fastener has a T-shaped groove that cooperates with the body clip and the lid clip. The T-shaped groove on the snap fastener can be inserted into the T-shaped structure formed by the body clip and the lid clip or pulled out from the body clip and the lid clip.

[0026] Beneficial effects: In this solution, when the lid and body are interlocked, the lid clips and body clips overlap and symmetrically form a T-shaped structure. At this point, inserting the buckle will limit and fix the lid and body clips, making it impossible for the lid and body to separate. This facilitates the stability of the entire transport box during transportation and prevents the product from falling or being damaged if the lid is opened during transportation. When it is necessary to take out or put in the product, the lid can be opened by pulling out the buckle to take out or put in the product.

[0027] Furthermore, the box body clip and the box lid clip have different lengths, and one end of the box body clip is flush with one end of the box lid clip.

[0028] Beneficial effects: In this solution, the box body clips and the box lid clips are of different lengths. This makes the insertion position of the clips less critical. Compared to the previous solution where both clips needed to be perfectly aligned, in this solution, you only need to align one clip first and then slide the clip onto both clips. This solution makes it easier and faster to insert the clips onto both clips. Attached Figure Description

[0029] The accompanying drawings, which are included to provide a further understanding of the embodiments of the present invention and form part of this application, do not constitute a limitation thereof. In the drawings:

[0030] Figure 1 This is a perspective view of the lid of a moisture-proof transport box according to an embodiment of the present invention after it has been opened;

[0031] Figure 2 This is a perspective view of the lid of a moisture-proof transport box according to an embodiment of the present invention after it has been closed.

[0032] Figure 3 This is a perspective view of a moisture-proof transport box embodiment of the present invention, showing the product placed inside after the lid is opened.

[0033] The attached diagram shows the markings and corresponding component names:

[0034] Box body 1, box lid 2, buckle 3, box body retaining strip 4, box lid retaining strip 5, storage slot 6, slot body 7, horizontal plate 701, vertical plate 702, slot cover 8, support plate 9, support rod 10, limit rod 11, mask plate 12. Detailed Implementation

[0035] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of this utility model are only used to explain this utility model and are not intended to limit this utility model.

[0036] As one embodiment of this application, such as Figures 1-2 As shown, this embodiment provides a moisture-proof transport box, including a box body 1 and a box lid 2. The box lid 2 can cover the box body 1. In this embodiment, both the box lid 2 and the box body 1 are rectangular structures. The box body 1 is provided with grooves 7 inside and around it. The grooves 7 and the inner side of the box body 1 form a storage groove 6, which is used to store desiccant-like substances.

[0037] In this embodiment, there are four slots 7, which are located on the four inner side walls of the box body 1 respectively. Each slot 7 forms a placement space for placing products. That is, the products are placed in the placement space enclosed by the four slots 7. Multiple holes are opened on the side of each slot 7 facing the placement space.

[0038] like Figure 1 As shown, there are four slot covers 8 on the inner side of the box cover 2 and around its perimeter, which correspond to the slots 7 in sequence. The four slot covers 8 are located on the four inner side walls of the box cover 2. After the box cover 2 and the box body 1 are fastened together, the four slot covers 8 can cover the four slots 7 respectively and close the slots 7.

[0039] In one embodiment, the trough 7 includes a vertical plate 702 and two horizontal plates 701. The two ends of the vertical plate 702 are respectively perpendicularly connected to the two horizontal plates 701. In this embodiment, the vertical plate 702 and the horizontal plates 701 are integrally formed or fixed by adhesive, screws or other means. One end of each of the two horizontal plates 701 abuts against the inner sidewall of the box 1. The vertical plate 702, the two horizontal plates 701 and the inner sidewall of the box 1 form a storage trough 6. In this embodiment, the vertical plate 702 and the two horizontal plates 701 are interconnected to form an I-shaped structure.

[0040] In this embodiment, the groove 7 is integrally formed with the box 1 or fixed by screws, adhesive, or other means. The groove 7 has an I-shaped structure, with one end extending towards the product, which can limit the product and ensure its stability after installation. In this embodiment, the holes are made on the vertical plate 702 of the groove 7, and multiple holes are distributed on the vertical plate 702 in a rectangular array.

[0041] In one embodiment, such as Figure 1 As shown, support plates 9 are vertically connected to both ends of the slot cover 8. In this embodiment, the end of the slot cover 8 away from the box cover 2 is flush with the support plate 9. In this embodiment, the slot cover 8 and the support plate 9 are integrally formed or glued, screwed or fixed in other ways. The end of the support plate 9 away from the slot cover 8 is connected to the inner wall of the slot cover 8. In this embodiment, the support plate 9 and the slot cover 8 are integrally formed or glued, screwed or fixed in other ways.

[0042] In one embodiment, the width of the support plate 9 is the same as the width of the horizontal plate 701. After the lid 2 and the box body 1 are fastened together, the support plate 9 can overlap with the corresponding horizontal plate 701. This makes the support plate 9 and the side of the horizontal plate 701 (the side facing the product) flush with each other, so as to better limit the product and ensure the stability of the product placed in the box body 1.

[0043] In one embodiment, such as Figure 1 As shown, multiple support rods 10 are vertically connected to the inner bottom wall of the box body 1. In this embodiment, the support rods 10 are integrally formed with the box body 1. In this embodiment, there are four support rods 10, and the four support rods 10 are respectively located between adjacent grooves 7. The height of the support rods 10 is less than or equal to the height of the groove 7. The multiple support rods 10 can support the bottom of the product. Figure 1 As shown, among the four slots 7, there is a gap between two adjacent slots 7 at the corner of the box 1, such as... Figure 3 As shown, the gap facilitates the insertion of the product at its four corners, and the four support rods 10 are respectively installed vertically at the four corners of the box body 1, so that the support rods 10 can support the bottom of the product.

[0044] In one embodiment, multiple limiting rods 11 are vertically connected to the inner top wall of the box cover 2. In this embodiment, there are four limiting rods 11, and all four limiting rods 11 are integrally formed with the box cover 2. The four limiting rods 11 are located between adjacent slot covers 8, and the four limiting rods 11 can limit the top of the product.

[0045] In this embodiment, the four limiting rods 11 are located at the four corner positions of the box cover 2. Among the four slot covers 8, there is a gap between two adjacent slot covers 8 at the corners of the box cover 2, such as... Figure 3 As shown, this gap facilitates insertion at the four corners of the product.

[0046] In this embodiment, the limiting rod 11 and the support rod 10 can support and limit the top and bottom of the product respectively after the lid 2 and the body 1 are fastened together, further ensuring the stability of the product.

[0047] In one embodiment, such as Figure 1 and Figure 2 As shown, one end of the lid 2 is rotatably connected to one end of the box body 1 via a pivot, and the other end of the lid 2 is detachably connected to the box body 1. Specifically, one end of the lid 2 is connected to a lid retaining strip 5, which is integrally formed with the lid 2; one end of the box body 1 is connected to a box body retaining strip 4, which is integrally formed with the box body 1. In this embodiment, there are two lid retaining strips 5 and two box body retaining strips 4. The two lid retaining strips 5 are located on the left and right sides of the lid 2, respectively, and the two box body retaining strips 4 are located on the left and right sides of the box body 1, respectively.

[0048] like Figure 2 As shown, both the lid clip 5 and the body clip 4 are L-shaped. After the lid 2 and the body 1 are fastened together, the body clip 4 and the lid clip 5 overlap and symmetrically form a T-shaped structure. That is, the long side of the lid clip 5 is in contact with the long side of the body clip 4, and the short side of the lid clip 5 is away from the short side of the body clip 4.

[0049] The lid 2 and the body 1 are detachably connected by a buckle 3. The buckle 3 has a T-shaped groove that cooperates with the body clip 4 and the lid clip 5. The T-shaped groove is a through groove structure. The T-shaped groove on the buckle 3 can be inserted into the T-shaped structure formed by the body clip 4 and the lid clip 5 or pulled out from the body clip 4 and the lid clip 5.

[0050] When it is necessary to put or take out the product, the lid 2 can be opened by sliding the buckle 3 off the box body clip 4 and the lid clip 5, so that the product can be put into the box body 1 or taken out of the box body 1.

[0051] After the product is placed inside the box 1, the lid 2 is closed, causing it to snap onto the box 1. At this time, the lid locking strip 5 and the box locking strip 4 overlap. Then, by inserting the buckle 3, the T-slot of the buckle 3 forms a mutual limiting engagement with the lid locking strip 5 and the box locking strip 4, thus connecting the lid 2 and the box 1. The lid 2 cannot be opened at this time, thus ensuring the protection of the product during transportation.

[0052] In one embodiment, the box body clip 4 and the box lid clip 5 have different lengths. In this embodiment, the length of the box body clip 4 is greater than that of the box lid clip 5. One end of the box body clip 4 is flush with one end of the box lid clip 5. When inserting the buckle 3, the buckle 3 is inserted from the end where the box body clip 4 and the box lid clip 5 are not flush. This allows the buckle 3 to quickly align with the box body clip 4. Then, by sliding the buckle 3, the T-shaped groove on the buckle 3 is engaged with the box body clip 4 and the box lid clip 5.

[0053] The specific implementation process is as follows: Open the box cover 2, as follows: Figure 3 As shown, the mask 12 is placed inside the box 1. The four corners of the mask are located at the four corners of the box 1 and at the top of the support rod 10. The support rod 10 is located at the four corners of the mask and serves to support it.

[0054] In actual production, the internal dimensions of the transfer box 1 can be customized according to the size of the product to be transferred, so that the mask 12 and the end of the groove 7 extending towards the mask 12 are fitted with a gap. This can ensure that the mask 12 can be smoothly placed into the placement space formed by the four grooves 7, and can also limit the mask 12 around its perimeter to prevent the mask 12 from being displaced too much and damaged.

[0055] After the mask plate 12 is placed, rotate the lid 2 downwards so that the lid 2 snaps onto the box body 1, as shown. Figure 2 As shown, at this time, the four limiting rods 11 on the box cover 2 limit the top of the mask plate 12. In this way, the limiting rods 11 on the box cover 2 and the support plate 9 on the box body 1 respectively vertically limit the top and bottom of the mask plate 12. Meanwhile, the support plate 9 on the box cover 2 and the groove 7 on the box body 1 facing the mask plate 12 will horizontally limit the mask plate 12 around its perimeter, thereby strengthening the limiting and fixing effect of the mask plate 12 and effectively ensuring the stability and safety of the product during transportation.

[0056] It should be noted that the above description of the disclosed embodiments enables those skilled in the art to implement or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A moisture-proof transport box, comprising a box body and a box lid, wherein the box lid is capable of covering the box body, characterized in that, The box body is provided with grooves inside and around it, and the grooves and the inner side of the box body form storage grooves; the grooves form a placement space for placing products, and the side of the grooves facing the placement space is provided with multiple holes. The inner side of the box lid and its surrounding area are provided with slot covers that correspond sequentially to the groove body. After the box lid and the box body are fastened together, the slot covers can cover the groove body and close the groove body.

2. The moisture-proof transport box according to claim 1, characterized in that, The trough includes a vertical plate and two horizontal plates. The two ends of the vertical plate are perpendicularly connected to the two horizontal plates respectively. One end of each of the two horizontal plates abuts against the inner sidewall of the box. The vertical plate, the two horizontal plates and the inner sidewall of the box form the storage trough.

3. A moisture-proof transport box according to claim 2, characterized in that, The vertical plate and the two horizontal plates form an I-shaped structure.

4. A moisture-proof transport box according to claim 3, characterized in that, The two ends of the groove cover are vertically connected to support plates, and the end of the support plate away from the groove cover is connected to the inner wall of the groove cover.

5. A moisture-proof transport box according to claim 4, characterized in that, The width of the support plate is the same as the width of the horizontal plate, and the support plate can overlap with the corresponding horizontal plate after the box lid and the box body are fastened together.

6. A moisture-proof transport box according to claim 1, characterized in that, Multiple support rods are vertically connected to the bottom wall of the inner side of the box. The multiple support rods are located between adjacent grooves. The height of the support rods is less than or equal to the height of the groove. The multiple support rods can support the bottom of the product.

7. A moisture-proof transport box according to claim 6, characterized in that, Multiple limiting rods are vertically connected to the inner top wall of the box cover. The multiple limiting rods are located between adjacent slot covers, and the multiple limiting rods can limit the top of the product.

8. A moisture-proof transport box according to any one of claims 1-7, characterized in that, One end of the lid is rotatably connected to one end of the box body, and the other end of the lid is detachably connected to the box body.

9. A moisture-proof transport box according to claim 8, characterized in that, One end of the lid is connected to a lid clip, and one end of the box body is connected to a box body clip. Both the lid clip and the box body clip are L-shaped. After the lid and the box body are fastened together, the box body clip and the lid clip overlap and symmetrically form a T-shaped structure. The lid and the body are detachably connected by a snap fastener. The snap fastener has a T-shaped groove that cooperates with the body clip and the lid clip. The T-shaped groove on the snap fastener can be inserted into the T-shaped structure formed by the body clip and the lid clip or pulled out from the body clip and the lid clip.

10. A moisture-proof transport box according to claim 9, characterized in that, The box body clip and the box lid clip have different lengths, and one end of the box body clip is flush with one end of the box lid clip.

Images